JPH0423141U - - Google Patents
Info
- Publication number
- JPH0423141U JPH0423141U JP6467990U JP6467990U JPH0423141U JP H0423141 U JPH0423141 U JP H0423141U JP 6467990 U JP6467990 U JP 6467990U JP 6467990 U JP6467990 U JP 6467990U JP H0423141 U JPH0423141 U JP H0423141U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- heat treatment
- processing container
- contact
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6467990U JPH0423141U (fi) | 1990-06-18 | 1990-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6467990U JPH0423141U (fi) | 1990-06-18 | 1990-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0423141U true JPH0423141U (fi) | 1992-02-26 |
Family
ID=31595840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6467990U Pending JPH0423141U (fi) | 1990-06-18 | 1990-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0423141U (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101365048B1 (ko) * | 2011-11-21 | 2014-02-21 | 주식회사 테라세미콘 | 보트 이송 시스템 |
-
1990
- 1990-06-18 JP JP6467990U patent/JPH0423141U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101365048B1 (ko) * | 2011-11-21 | 2014-02-21 | 주식회사 테라세미콘 | 보트 이송 시스템 |