JPH04219903A - Sheet-like laminated coil - Google Patents

Abstract

PURPOSE:To obtain a sheet-like laminated coil which is compact, has a high magnetic flux density, and can be manufactured at a high productivity. CONSTITUTION:An insulating substrate which cannot be etched and a coil conductor which is formed by etching a metallic conductor plate stuck to the surface of the insulating substrate are prepared and this sheet-like laminated coil is produced by piling up a large number of the coil conductor with the substrate in between.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet-like coil, and more particularly to a sheet-like coil used in devices requiring high magnetic flux density, such as superconducting devices.

0002

2. Description of the Related Art A sheet-like coil is made by forming a conductor pattern of a predetermined shape on an insulating substrate, and there is a conventional coil for small motors disclosed in Japanese Utility Model Publication No. 63-22646. This coil for a small motor is made by forming a rectangular coil conductor on an insulating sheet with a thickness of about 10 μm to 1 mm, a width of about several 100 μm, and a groove interval of about several tens of μm, and a predetermined ampere turn (current By obtaining the product of (the product of

0003

[Problems to be Solved by the Invention] However, the above-mentioned sheet-like coil is manufactured by forming a conductor layer on an insulating sheet by vapor phase, liquid phase, etc. vapor deposition, and then etching this to form a coil conductor. Because of this, the cross-sectional area of the coil conductor is limited and large current cannot flow, making it difficult for linear motors,
It could not be applied to superconducting devices such as MRI devices. Furthermore, since the production rate is affected by the vapor deposition rate, there is also the disadvantage that high productivity cannot be obtained.

0004

[Object of the Invention] The present invention has been made in view of the above points, and an object thereof is to provide a sheet-like laminated coil that is compact, yet can obtain high magnetic flux density, and can be manufactured with high productivity. do.

[0005]

[Means for Solving the Problems] In order to achieve the above object, the present invention comprises stacking a predetermined number of coil conductors formed by etching metal conductor plates via an insulating substrate made of a material that cannot be etched. .

[0006]

[Operation] The magnetic flux formed by the coil is the product of the current flowing through the coil (amperes) and the number of turns (turns) in the coil.
That is, it is proportional to ampere-turns. The superconducting coil is
In the superconducting state, a state of zero resistance is achieved, so the cross-sectional area of the coil conductor can be small. However, in consideration of the transition from the superconducting state to the normal conducting state, it is necessary to A coil conductor with .

Under these circumstances, since the present invention is constructed as described above, it is possible to easily adjust (increase) the cross-sectional area of the coil conductor and the number of turns of the coil, which are factors that determine the magnetic flux density. That is, since a metal conductor plate whose thickness can be arbitrarily set is used as the coil conductor, the cross-sectional area of the coil conductor can be arbitrarily determined by the width of the coil conductor. Furthermore, since the coil conductor is formed by etching, the cross-sectional area of the coil conductor can be easily adjusted by changing the width of the etched portion, in other words, the groove spacing of the coil conductor. According to the current etching technology, the above-mentioned groove spacing can be reduced to about several μm, so a coil conductor having a desired cross-sectional area can be obtained. Furthermore, since a predetermined number of coil conductors are laminated via an insulating substrate, the number of turns of the coil can be easily increased without increasing the area of the entire coil.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 shows the surface condition of the sheet-like laminated coil 10 according to the example, and FIG.
A cross section in the −Y direction is shown, and FIG. 3 shows four conductor patterns 12, 14,
6 and 18 are shown.

The sheet-like laminated coil 10 includes three insulating substrates 20, 22, 24 and four spiral conductor patterns 1.
2, 14, 16, and 18, and the upper and lower conductor patterns are electrically connected by a conductor material 26.

[0010] The conductor patterns 12, 14, 16, 18 are
A copper plate 28 having a thickness of 1.2 mm is bonded to the surface of the insulating substrates 20, 22, and 24, and a spiral pattern groove 30 is punched out on the copper plate 28 by etching. Of the four conductor patterns, conductor pattern 1
Patterns 2 and 16 are formed in a right-handed manner, and patterns 14 and 18 are formed in a left-handed manner. The thickness of the copper plate 28 (conductor pattern) is not limited to 1.2 mm as described above, but the thickness of the insulating substrate 20
, 22, 24, and approximately 1.0 mm to 3.0 mm is appropriate. This is because if the width is 1.0 mm or less, the width of the coil conductor will inevitably become larger in order to obtain a large current capacity, and the sheet-like laminated coil 10 itself will become larger. This is because it is difficult to obtain a coil conductor with high dimensional accuracy using etching technology. In addition to copper, the material of the conductor plate is aluminum,
For superconducting devices, niobium-titanium alloy, niobium-3,
Tin, vanadium 3, gallium, etc. may also be used. In addition, when using vanadium-3-gallium, copper is added as a catalyst. The spacing between the pattern grooves 30 (the width of the conductor pattern) is set in the longitudinal direction to enable application to various devices such as linear motors and MRI devices due to the difference in magnetic flux density in the X-axis and Y-axis directions. It is coarse and dense in the vertical direction.

Connection terminals 12a, 12b, 14a, 14b,
16a, 16b, 18a, 18b are respectively formed,
These terminals connect the conductors 12, 14, 16, 18 in series. That is, as shown in FIG. 3, the positive electrode of a power source (not shown) is connected to the input terminal 12a of the conductive pattern 12, and the output terminal 12
b and the input terminal 14a of the conductor pattern 14, and the output terminal 14b of the conductor pattern 14 and the input terminal 1 of the conductor pattern 16.
6a, the output terminal 16b of the conductor pattern 16 is connected to the input terminal 18a of the conductor pattern 18, and the output terminal 18b of the conductor pattern 18 is connected to the negative electrode of the power source, respectively. Note that the present invention provides conductor patterns 12, 14, 16, 1 as described above.
8 are not limited to the configuration in which they are connected in series, but may be connected in parallel as shown in FIG. By connecting them in parallel, the number of coil turns is reduced, but the current capacity can be increased accordingly. In addition, the conductor patterns 12, 1
The shapes of 4, 16, and 18 are not limited to spiral shapes, but can be changed to various shapes such as rectangular shapes depending on the usage situation.

The insulating substrates 20, 22, and 24 are made of flexible glass epoxy resin and have a thickness of 0.4 mm and a thickness of 120 mm.
It is formed into a rectangular plate shape of 0 mm x 700 mm. As the insulating substrate, in addition to glass epoxy resin, other materials can be used as long as they are insulating, flexible, and non-etchable. In addition, the insulating substrates 20, 22
, 24 is not limited to the above size. Conductor patterns 12, 14, 16, 1 on insulating substrates 20, 22, 24
Through holes for filling conductor material 26 are formed at locations (three locations) corresponding to connection terminals 8.

Sheet-like laminated coil 1 configured as described above
0, conductive material 26 is pre-filled in the through hole.
A thermosetting adhesive (insulating adhesive) is applied to the entire surface of the insulating substrate 20 filled with the insulating substrate 20 (excluding the through-hole portion), and the copper plate 28 is placed thereon and bonded by heating. Next, a resist (not shown) is applied to the surface of the copper plate 28, and a spiral coil pattern is exposed. Then, by forming pattern grooves 30 by etching, a single-layer sheet coil (
12, 20). Next, a copper plate 28 is adhered to the back surface of the insulating substrate 20 of the single-layer sheet coil (12, 20) configured as described above, and a conductive pattern 14 is formed by etching in the same manner as described above. After bonding the insulating substrate 22 whose through holes are filled with the insulating material 26 in advance to the back surface of the conductive pattern 14, the conductive patterns 12, 14, 14 are bonded by repeating the same process as above.
, 18 and insulating substrates 20, 22, and 24 are alternately stacked.

FIG. 5 shows how the sheet-like laminated coil according to the present invention is used in a linear motor car 50. In the figure, 60 is a superconducting laminated coil, 62 is a persistent current switch, 64 is a power lead that supplies power to the superconducting coil 60, 66 is a refrigerator, 68 is a helium tank, and 70 is a superconducting coil 60. It is liquid helium that cools it. In the linear motor car 50 having such a configuration, by supplying voltage to the superconducting coil 60 cooled by the helium 70, a strong magnetic field is generated, which levitates and propels the car body (not shown).

The sheet-like laminated coil according to the present invention can be applied to various devices other than the above-mentioned linear motor car, such as medical pi-meson irradiation equipment and NMR-CT (MRI). In other words, in a medical pion irradiation device, the distance is 120° from the pion generation target.
The pion beam emitted at an angle of is bent horizontally by the first superconducting laminated coil, and then bent at right angles by the next superconducting laminated coil to guide the pion beam to the affected area of the patient. In addition, in an MRI device, by passing a current through superconducting laminated coils placed around the patient, a strong magnetic field is applied to the atomic nucleus with a magnetic moment, causing the nucleus to resonate, and the amount of energy released and the relaxation time are By measuring, an internal image of the patient is obtained.

In addition, in the present invention, in addition to the thickness of the conductor plate, the shape of the conductor pattern, and the material of the conductor plate as described above, the number of turns of the conductor pattern, the number of laminated sheets, and the shape of the insulating substrate are determined according to the usage conditions. Needless to say, the size, thickness, etc. can be changed. In this way, by making various design changes, the range of application of the sheet-like laminated coil is expanded.

[0017]

As explained above, the sheet-like laminated coil according to the present invention is a coil formed by etching an insulating substrate made of a material that cannot be etched and a metal conductor plate bonded to the surface of the insulating substrate. Since a predetermined number of coil conductors are laminated via an insulating substrate, a high magnetic flux density can be obtained despite being compact, and productivity is improved.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing the configuration of a sheet-like laminated coil according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along the Y-Y direction in FIG. 1;

[Figure 3] Connection state of conductor patterns according to the example (series)
FIG.

[Figure 4] Connection state of conductor patterns according to the example (parallel)
FIG.

FIG. 5 is a perspective view showing how the sheet-like laminated coil according to the present invention is used.

[Explanation of symbols]

10 Sheet-like laminated coils 12, 14, 16, 18 Conductor patterns 20, 2
2, 24 Insulating substrate 26 Conductor material 28 Copper plate 30 Pattern groove 50 Linear motor car 60 Superconducting coil

Claims (1)

[Claims] 1. An insulating substrate made of a material that cannot be etched, and a coil conductor formed by etching a metal conductor plate bonded to the surface of the insulating substrate, wherein a predetermined number of coil conductors are connected through the insulating substrate. A sheet-like laminated coil characterized by being laminated.