JPH0421939U - - Google Patents
Info
- Publication number
- JPH0421939U JPH0421939U JP6288590U JP6288590U JPH0421939U JP H0421939 U JPH0421939 U JP H0421939U JP 6288590 U JP6288590 U JP 6288590U JP 6288590 U JP6288590 U JP 6288590U JP H0421939 U JPH0421939 U JP H0421939U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- diaphragm
- center
- pressure side
- side chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000009530 blood pressure measurement Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990062885U JPH081468Y2 (ja) | 1990-06-14 | 1990-06-14 | 差圧測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990062885U JPH081468Y2 (ja) | 1990-06-14 | 1990-06-14 | 差圧測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0421939U true JPH0421939U (de) | 1992-02-24 |
| JPH081468Y2 JPH081468Y2 (ja) | 1996-01-17 |
Family
ID=31592440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990062885U Expired - Lifetime JPH081468Y2 (ja) | 1990-06-14 | 1990-06-14 | 差圧測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH081468Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020016507A (ja) * | 2018-07-24 | 2020-01-30 | アズビル株式会社 | 圧力センサチップ |
-
1990
- 1990-06-14 JP JP1990062885U patent/JPH081468Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020016507A (ja) * | 2018-07-24 | 2020-01-30 | アズビル株式会社 | 圧力センサチップ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH081468Y2 (ja) | 1996-01-17 |