JPH0421558U - - Google Patents

Info

Publication number
JPH0421558U
JPH0421558U JP6130190U JP6130190U JPH0421558U JP H0421558 U JPH0421558 U JP H0421558U JP 6130190 U JP6130190 U JP 6130190U JP 6130190 U JP6130190 U JP 6130190U JP H0421558 U JPH0421558 U JP H0421558U
Authority
JP
Japan
Prior art keywords
support member
shaft
shell
shell portion
rotary support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6130190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6130190U priority Critical patent/JPH0421558U/ja
Publication of JPH0421558U publication Critical patent/JPH0421558U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
  • Physical Vapour Deposition (AREA)
JP6130190U 1990-06-12 1990-06-12 Pending JPH0421558U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6130190U JPH0421558U (enExample) 1990-06-12 1990-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6130190U JPH0421558U (enExample) 1990-06-12 1990-06-12

Publications (1)

Publication Number Publication Date
JPH0421558U true JPH0421558U (enExample) 1992-02-24

Family

ID=31589431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6130190U Pending JPH0421558U (enExample) 1990-06-12 1990-06-12

Country Status (1)

Country Link
JP (1) JPH0421558U (enExample)

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