JPH0421041Y2 - - Google Patents

Info

Publication number
JPH0421041Y2
JPH0421041Y2 JP1987019275U JP1927587U JPH0421041Y2 JP H0421041 Y2 JPH0421041 Y2 JP H0421041Y2 JP 1987019275 U JP1987019275 U JP 1987019275U JP 1927587 U JP1927587 U JP 1927587U JP H0421041 Y2 JPH0421041 Y2 JP H0421041Y2
Authority
JP
Japan
Prior art keywords
objective lens
inspected
sheet
microscope
sheet gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987019275U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63126801U (forum.php
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987019275U priority Critical patent/JPH0421041Y2/ja
Publication of JPS63126801U publication Critical patent/JPS63126801U/ja
Application granted granted Critical
Publication of JPH0421041Y2 publication Critical patent/JPH0421041Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Instruments Using Mechanical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP1987019275U 1987-02-12 1987-02-12 Expired JPH0421041Y2 (forum.php)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987019275U JPH0421041Y2 (forum.php) 1987-02-12 1987-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987019275U JPH0421041Y2 (forum.php) 1987-02-12 1987-02-12

Publications (2)

Publication Number Publication Date
JPS63126801U JPS63126801U (forum.php) 1988-08-18
JPH0421041Y2 true JPH0421041Y2 (forum.php) 1992-05-14

Family

ID=30813732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987019275U Expired JPH0421041Y2 (forum.php) 1987-02-12 1987-02-12

Country Status (1)

Country Link
JP (1) JPH0421041Y2 (forum.php)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4078864A (en) * 1976-07-08 1978-03-14 United Technologies Corporation Method and apparatus for viewing and measuring damage in an inaccessible area

Also Published As

Publication number Publication date
JPS63126801U (forum.php) 1988-08-18

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