JPH04206669A - Laminated piezoelectric element and manufacture thereof - Google Patents
Laminated piezoelectric element and manufacture thereofInfo
- Publication number
- JPH04206669A JPH04206669A JP2334087A JP33408790A JPH04206669A JP H04206669 A JPH04206669 A JP H04206669A JP 2334087 A JP2334087 A JP 2334087A JP 33408790 A JP33408790 A JP 33408790A JP H04206669 A JPH04206669 A JP H04206669A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrode
- plate
- plates
- laminated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000000034 method Methods 0.000 claims description 12
- 238000003475 lamination Methods 0.000 claims 1
- 239000000919 ceramic Substances 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 8
- 230000005684 electric field Effects 0.000 abstract description 7
- 238000010030 laminating Methods 0.000 abstract description 5
- 230000006378 damage Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 11
- 239000007772 electrode material Substances 0.000 description 7
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 230000007774 longterm Effects 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 230000000295 complement effect Effects 0.000 description 5
- 238000005245 sintering Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
本発明は電歪効果を利用した素子に係るものであり、詳
しくは圧電セラミックス等の圧電体薄板と電極板とを積
層してなる積層型圧電素子ならびにその製造方法に関す
る。The present invention relates to an element that utilizes an electrostrictive effect, and more particularly to a laminated piezoelectric element formed by laminating piezoelectric thin plates such as piezoelectric ceramics and electrode plates, and a method for manufacturing the same.
従来から、エレクトロメカニカル部品の駆動源として積
層型圧電アクチュエーターが知られている。
この圧電アクチュエーターとして用いる、電歪縦効果を
利用した素子の一種に、圧電セラミックスのグリーンン
ートや圧電セラミックス板等電歪材料になる圧電板の表
面に金属電極面を形成して多数枚積層した後、焼結ある
いは接着して一体化したものがある。このような圧電板
と電極板とを順次積層した積層型圧電素子をアクチュエ
ーターとして駆動するには、各圧電体の間に介在する電
極板が一層おきに電気的に接続されている必要がある。
各電極層を接続するための素子の構成として、例えば、
第４図に示すように、圧電素子４の断層面において、電
極板４２の一端を圧電板４１に比べて僅かに短く形成し
たものがある。すなわち、方形平板状または円形平板状
の圧電体の薄板表面に形成する電極板を、薄板表面の一
辺側たけは作成せずに、また逆に、他方の一辺側は積層
しｆ二ときに素子の側面に電極板の縁が露出するように
電極板の表面積を薄板のそれよりも小さく設けている。
そして、電極板４２の縁か一層おきに露出するように交
互に積層し、素子側面に露出し１こ電極板を利用して一
層おきに外部電極４４ａ、４−４ｂで並列に接続したも
のである。
また、素子の歪み特性上の改善から、第５図に示すよう
に、圧電素子５か、圧電板の表面全面に電極板を形成し
、圧電板５１．！：電極板５２か交互に積み重なるよう
に順次積層したものか知られている。この場合、電極板
の縁が素子の両側面で各層とも露出しているので、この
電極板５２の縁を一層おきに、両側面交互に絶縁物質５
３を塗布し、その上に外部電極５４ａ、５４．ｂを形成
した素子構成になっている（特公昭６３−１７３５４号
）。2. Description of the Related Art Laminated piezoelectric actuators have been known as drive sources for electromechanical components. A type of element that utilizes the electrostrictive longitudinal effect used as this piezoelectric actuator is a piezoelectric ceramic green plate or a piezoelectric ceramic plate, which is made by forming a metal electrode surface on the surface of the piezoelectric plate, which is an electrostrictive material, and laminating a large number of them. , some are integrated by sintering or gluing. In order to drive such a laminated piezoelectric element in which piezoelectric plates and electrode plates are sequentially laminated as an actuator, the electrode plates interposed between the piezoelectric bodies must be electrically connected every other layer. For example, the structure of the element for connecting each electrode layer is as follows:
As shown in FIG. 4, one end of the electrode plate 42 is formed slightly shorter than the piezoelectric plate 41 on the cross-sectional plane of the piezoelectric element 4. That is, an electrode plate is formed on the surface of a thin plate of a rectangular or circular piezoelectric material without forming an electrode plate on one side of the thin plate surface, and conversely, by laminating the electrode plate on the other side. The surface area of the electrode plate is smaller than that of the thin plate so that the edge of the electrode plate is exposed on the side surface of the electrode plate. Then, the edges of the electrode plates 42 are stacked alternately so that every other layer is exposed, and every other layer is connected in parallel with external electrodes 44a and 4-4b using one electrode plate exposed on the side of the element. be. Furthermore, in order to improve the strain characteristics of the element, as shown in FIG. 5, an electrode plate is formed on the entire surface of the piezoelectric element 5 or the piezoelectric plate 51. ! : It is known that the electrode plates 52 are sequentially laminated so as to be alternately stacked. In this case, since the edges of the electrode plate 52 are exposed in each layer on both sides of the element, the edges of the electrode plate 52 are alternately coated with insulating material on both sides.
3, and external electrodes 54a, 54. (Japanese Patent Publication No. Sho 63-17354).
【発明か解決しようとする課題】
これら従来の積層型圧電素子にあって、第４図に示した
ような、電極板を素子の両側面で一層おきに交互に露出
させＩこ、すなわち、圧電板の表面より電極板を素子の
一側面側でその縁を若干短く形成しにちのにおいては、
外部電極の構成か極ｙ）で簡単で、電極板を容易に、−
層おきに交互に接続できるという利点かあった。しかし
ながら、このような圧電素子をアクチュエーターとして
駆動さ什た場合、両性部電極付近の素子内部に圧電的に
伸縮しないような不変位部分か存在することとなり、こ
の不変位部分が歪みの発生を抑制すると同時に、応力の
発生から素子が破壊される原因となっていた。
そこ、で、第５図に示したような、圧電板の表面全面に
電極板を形成し、積層した素子の外部で交互に電気的に
接続する構造であれば、前述のような素子内部の不変位
部分の存在もなくなる。従って、歪みの発生が抑制され
ることがなく応力の集中を防ぐことができるので、変位
量等の電気機械変換効率のよい素子を構成することがで
きるのである。
反面、このような圧電板の表面全面に電極板を形成した
素子には以下のような問題点があった。
通常、圧電素子を製造するには、概略、セラミックス粉
体を主成分とするスリップを成膜機て成膜後、スリップ
中の溶媒を乾燥してグリーンノートをつくり、このグリ
ーンノートに電極面をスクリーン印刷して電極板を作成
する。そして、多数枚を積層圧着して成形したものを焼
結して素子を得る。このとき、グリーンノートに印刷さ
れる電極面には、銀、パラジウム、白金などのペースト
状インクを電極材料として用い、−枚の電極板として作
成するが、セラミックスとの密着が悪いために、電極材
料にあらかじめセラミックスとなじみのよい物質を混入
させるなどして、電極材料とセラミックスとの密着強度
の向上を計ることもあった。
しかしながら、電極材料に上記のような不純物を多く混
入させると電極板での内部抵抗の増加を招く一方、電極
材料の純度を上げると、圧電板の表面全面に電極板を設
けているので、密着強度が低く、長時間もしくは長期の
繰り返し印加や高電圧印加によって電極板と圧電板との
剥離か生しろという問題点を有していた３、
そこで本発明は上記問題点に鑑みてなされたらので、そ
の目的とするところは、圧電体内部に不変位部分かなく
、従って応力集中による素子の破壊も発生けず、しかも
、長時間の印加や長期の繰り返し印加、または、高電圧
印加による電極板と圧電板との剥離が生じることのない
、改良された積層型圧電素子およびその製法を提供すこ
とにある。[Problems to be Solved by the Invention] In these conventional multilayer piezoelectric elements, as shown in FIG. 4, electrode plates are exposed alternately every other layer on both sides of the element. When the edge of the electrode plate is made slightly shorter on one side of the element than the surface of the plate,
The configuration of the external electrode is simple and the electrode plate can be easily assembled.
It had the advantage of being able to connect alternately every other layer. However, when such a piezoelectric element is driven as an actuator, there is an undisplaced part inside the element near the bisexual electrodes that does not expand or contract piezoelectrically, and this undisplaced part suppresses the occurrence of distortion. At the same time, the generation of stress caused the element to break. Therefore, if the structure is such that electrode plates are formed on the entire surface of the piezoelectric plate and electrically connected alternately on the outside of the stacked elements, as shown in Fig. 5, the inside of the element as described above can be The existence of the invariant part also disappears. Therefore, since the generation of strain is not suppressed and stress concentration can be prevented, it is possible to construct an element with high efficiency in electromechanical conversion of displacement and the like. On the other hand, such an element in which an electrode plate is formed on the entire surface of a piezoelectric plate has the following problems. Normally, to manufacture a piezoelectric element, a film is formed using a film forming machine using a slip mainly composed of ceramic powder, the solvent in the slip is dried to create a green note, and the electrode surface is attached to this green note. Create an electrode plate by screen printing. Then, a large number of sheets are laminated and pressed together and molded, which is then sintered to obtain an element. At this time, paste ink of silver, palladium, platinum, etc. is used as the electrode material for the electrode surface printed on the Green Note, and it is made into one electrode plate, but due to poor adhesion to the ceramic, the electrode In some cases, attempts were made to improve the adhesion strength between electrode materials and ceramics by mixing substances that were compatible with ceramics in advance. However, if a large amount of impurities such as those mentioned above are mixed into the electrode material, it will increase the internal resistance of the electrode plate. However, if the purity of the electrode material is increased, since the electrode plate is provided on the entire surface of the piezoelectric plate, it will be difficult to make a close contact. The strength was low, and there was a problem that the electrode plate and the piezoelectric plate could peel or break due to long-term or long-term repeated application or high voltage application3.The present invention was therefore made in view of the above-mentioned problems. The purpose of this is that there is no undisplaced part inside the piezoelectric body, so there is no destruction of the element due to stress concentration, and it is also possible to avoid contact with the electrode plate due to long-term application, long-term repeated application, or high voltage application. An object of the present invention is to provide an improved laminated piezoelectric element that does not cause peeling from a piezoelectric plate, and a method for manufacturing the same.
上記課題を解決するために、本発明では、圧電板と電極
板とが交互に積層されてなる積層型圧電素子において、
上記電極板は、圧電板上の半面を覆うとともに、積層方
向に互いに隣接する圧電板上において相互に反対側に配
置されていることを特徴としている。
そして、前記積層型圧電素子の製造方法にあっては、圧
電板上の半面に電極板を形成する工程と、積層方向に互
いに隣接する圧電板上の電極板を圧電板上において相互
に反対側に配置して順次積層する工程とを含むことを特
徴としている。In order to solve the above problems, the present invention provides a laminated piezoelectric element in which piezoelectric plates and electrode plates are alternately laminated.
The electrode plates are characterized in that they cover half the surface of the piezoelectric plates and are disposed on opposite sides of the piezoelectric plates adjacent to each other in the stacking direction. The method for manufacturing a laminated piezoelectric element includes a step of forming an electrode plate on one half of the piezoelectric plate, and forming electrode plates on piezoelectric plates adjacent to each other in the stacking direction on opposite sides of the piezoelectric plate. The method is characterized in that it includes a step of arranging and sequentially stacking.
圧電板上に形成される電極板は、所定の電極パターンを
有しており薄板の表面全面を覆うことなく、電極の存在
部分と不存在部分とがある。電極の不存在部分ては圧電
板の表面か露出するので、その露出部分が、その圧電板
の上面に積層される他の圧電板の下面に圧着されて、上
下の圧電板が一体的に結合する。
また、積層する厚さ方向で隣接する電極板は、それら電
極板の平面的なパターンが相互に補完的になっている。
すなわち、圧電板の表面において、その電極板の存在部
分に対しては、最も近接する同一パターンの電極板が対
応して電界をつくる。
電極の不存在部分ては、他の圧電板間での存在部分が、
その不存在部分を補完して、存在部分間で相互に対応し
て電界をつくる。従って、圧電体はどの部位においても
同等の電界にあり、圧電体内部に不変位部分の存在しな
い圧電板と電極板との積層構造となる。The electrode plate formed on the piezoelectric plate has a predetermined electrode pattern, does not cover the entire surface of the thin plate, and has a portion where the electrode is present and a portion where the electrode is not present. Since the surface of the piezoelectric plate is exposed in the area where no electrode is present, the exposed area is crimped to the bottom surface of another piezoelectric plate laminated on the top surface of the piezoelectric plate, and the upper and lower piezoelectric plates are integrally connected. do. Moreover, the planar patterns of the electrode plates adjacent in the stacked thickness direction are complementary to each other. That is, on the surface of the piezoelectric plate, for a portion where that electrode plate is present, the nearest electrode plate with the same pattern creates an electric field. The part where no electrode is present is the part where there is no electrode between other piezoelectric plates.
The absent parts are complemented and an electric field is created between the existing parts in mutual correspondence. Therefore, the piezoelectric body has the same electric field at all locations, and has a laminated structure of piezoelectric plates and electrode plates in which no undisplaced portion exists inside the piezoelectric body.
本発明の積層型圧ｉ素子の製造方法、ならびに、それに
よって得られる積層型圧電素子の実施例について、第１
図ないし第２図を参照して説明する。
本発明の圧電素子ｌは、圧電板ｍｌと電極板１２が交互
に、多層に積層された状態に形成されている。図面では
誇張して示されているが、圧電板１１は、薄板もしくは
薄膜に形成された方形状、ま１こは、図示しないか円形
状の圧電体で、該圧電板１１の表面に電極板１２が設け
られて多数枚積層されたものである。
まず、圧電板（セラミックス層）１１は、Ｐｂ（Ｍ ｇ
ｌ／：ｌＮ ｂ ｖｔ’Ｊ＞０３を主成分とするセラ
ミックス粉体に溶媒、分散剤、バインダ、可塑剤とを混
合したスリップ（泥漿）を積層コンデンサの製造に用い
る成膜機により薄膜状に形成する。そして、この薄膜中
の溶媒を蒸発乾燥させてグリーンシートを得る。得られ
たグリーンシートは、所定形状（本実施例では方形状）
に成型されたものを圧電板ＩＩとして用いる。次に、こ
の圧電板１１の表面に電極板１２を設ける。電極板１２
は、電極材料として銀、パラジウム、白金などのペース
ト状インクか用いられ、スクリーン印刷機により印刷作
成する。
本発明では、電極板１２を形成するにあｆこって、圧電
板１１の表面に、所定のパターンの電極板１２を設ける
。そして、他の圧電板１１の表面には、先に設けた電極
板１２を補完するパターンの電極板１２を設ける。すな
わち、画電極の平面的なパターンが、電極の存在部分と
不在部分とで相互に表裏に対応するように構成する。
まＴこ、本実施例では、第２図に示すように、電極板１
２を圧電板１１の表面の正確に半面に形成している。こ
れは、圧電板Ｉｆを積層するときに圧電板の積層方向を
交互に反転させることで、−種のパターンについてのみ
電極板１２を形成すればよいためである。
次に、圧電板１１の表面に電極板１２を形成した後、こ
の圧電板夏１を用途に応じて所定枚数だけ多数枚積層す
る。このときに、積層する圧電板ＩＩごとに電極板１２
を交互に逆側に配置するように積層してゆく。すなわち
、積層体の各半分の領域では、圧電板１１を２層挟んで
電極板ｊ２ａ。
１２ａを設けたようになる。そして、圧電板１１の積層
体の側面断層では、ある対向する二側面（第１図（ｂ）
では正面）で、圧電板１１の各層ごとに互い違いに左右
に振り分けられて電極板１２ａ、Ｉ２ｂの縁が露出する
状態となる。
このように、電極板１２を設けて圧電板１１を所定の方
向に多数枚積層した後、熱プレスにより圧着する。その
後、この積層体を所望の寸法に切断し、焼結する。焼結
にあたっては、バインダ類の除去のための予焼に次いで
、本焼結を行う。
続いて、得られた積層体の外側面に外部電極１４ ａ
、 ｌ ４’ｂを設ける。外部電極１４ａ、１４ｂは
、該積層体の側面断層で各圧電板ｌｌともすべての電極
板１２の縁が露出し−ている゛前述したこ側面に設ける
。そして、互いに上下で隣接する二層の圧電板ＩＩの電
極板１２ａと＋２ｂを一対として、かつ、一対おきに接
続するものとし、さらに、二側面で一対ごとに交互に接
続するように外部電極を設ける。電極板＋２ａ、１２ｂ
とこのような接続を可能にする外部電極１４ａ、１４ｂ
の構造としては、まず、上下で隣接する二層の圧電板１
１．１１の電極板１２ａ、１２ｂを一対として、一対お
きにその電極板の縁に絶縁帯１３ａ、・・・。
（１３、ｂ 、・・・、）を作成する。そして、絶縁帯
１３ａ（１３ｂ）は、第１ （ａ）図に示されるように
、電極板１２２Ｌ、１２ｂの一対ごとに両側面で交互の
配置とする。続いて、絶縁帯１３の上から両側面各々、
積層方向に外部電極１４ａ、１４ｂを作成する。また、
絶縁帯１３の絶縁材料や外部電極１４ａ、１４ｂの導電
材料の塗布にあったでは、電極板Ｉ２と同様に、スクリ
ーン印刷等により容易に行うことができる。
素子の分極処理は、上記一対の電極板１２ａ。
１２ａに対して積層方向で一対ごとに交互に極性か異な
るように、外部電極１４ａ、１４ｂに各々異なる極性の
電圧を印加すればよい。
このようにして、製造される本発明の圧電素子ｌは、そ
の電極板１２が、厚さ方向に互いに隣接する電極板１２
ａ、１２ｂの圧電板の半面に設（したパターンか相互に
補完するものとなっている。
次に、以上のように構成される圧電素子ｌの作用につい
て説明すると、圧電板ｌｌ上に形成される電極板１２は
、圧電板１１表面の半面に存在するパターンを有してい
る。そして、他の半面の電極の不存在部分には圧電板Ｉ
Ｉの表面が露出するので、この露出部分か、その圧電板
１１の上面に積層される他の圧電板１１の下面に圧着さ
れて、上下の圧電板１１．１１が一体的に結合する。す
なわち、焼成された圧電素子１は、上下の圧電板１１．
１１が互いに、電極板１２によって分断され、ることな
く、連成されたものとなる。
また、厚さ方向で隣接する電極板１２ａ、１２ｂは、そ
れらの平面的な電極パターンが相互に補完的に形成され
ている。電極板！２ａは最も近接する、１層おいた、す
なわち、２枚の圧電板１１を挟んで、同一方向に配置し
た上下の電極板１２ａ、１２ａと対応して電界をつくる
。そして、電極板１２ａの電極の存在しない部分では、
上下に隣接する圧電板１．１．ｌｌの電極板＋２ｂ、［
２ｂが補完して、該電極板１２ｂ、１２ｂの間で電界を
つくるので、各圧電板１１のどの部位においても同等の
電界となり、圧電体内部に不変位部分の存在しないもの
となる。
以上は本発明のグリーンソート法による実施例であるが
、次に、圧着接合法による実施例を第３図により説明す
る。
まず、焼結された圧電材または電歪材のブロックを研磨
して圧電板１１を形成する。そして、この圧電板１１の
表面の半面に、ガラスフリットを添加した銀、パラジウ
ム、白金などからなるベースト状の電極材をスクリーン
印刷等により印刷して電極板１２を作成する。次いで、
圧電板ｌｌの残りの半面に、圧電材の焼成温度で熱処理
された圧電電歪材粉末とガラスフリットの入ったペース
トを塗布して圧電電歪材層Ｌ５を形成する。そして、表
面に電極板１２と圧電電歪材層１５とをもうけた複数の
圧電板１１を、上述の実施例と同様に、電極板１２を交
互に逆側に配置すべく所定枚数積層し、熱プレスにより
圧着接合して積層体を得ろ。
尚、本発明の実施例では、電極板か圧電板表面の半面を
電極とするものであるが、二層もしくは多層の間でその
平面的なパターンが相互に補完的である電極板であれば
よく、また、実施例中の素子の製造方法においても、所
謂グリーンレート法によるものであるか、本発明の特徴
から、他の接着法を用いるものとしてもよい。
また、上述した圧電板は履歴性のある電歪材を用いても
、履歴性のない圧電材を用いてもよい。
【効果］
本発明は、以上水したように構成されるので、以下に記
載する効果を奏する。
■本発明の積層型圧電素子をアクチュエーターとして駆
動させた場合、素子内部に圧電的に伸縮しないような不
変位部分か存在することがなく、−様な電歪効果が得ら
れ、応力集中による素子の破壊がない。
■まｆ二、隣接する圧電板どうしか一体的に結合する部
分を有ずろので、電極板の密着強度の問題による、長時
間の印加や長期の繰り返し印加、まｆ月よ、高電圧印加
におＩＪる電極板と圧電板との剥離の発生がない。
■電極板と圧電板の熱膨張係数の差による、高・低温時
または焼結後の冷却時の応力集中もこの構造では分散さ
れ、ヒートノヨックによる電極板と圧電板との剥離の発
生かない。The first embodiment of the method for manufacturing a laminated piezoelectric element of the present invention and the laminated piezoelectric element obtained thereby
This will be explained with reference to FIGS. The piezoelectric element 1 of the present invention is formed in a state in which piezoelectric plates ml and electrode plates 12 are alternately laminated in multiple layers. Although it is exaggerated in the drawing, the piezoelectric plate 11 is a rectangular piezoelectric body formed of a thin plate or thin film, and the square is a circular piezoelectric body (not shown), and an electrode plate is provided on the surface of the piezoelectric plate 11. 12, and a large number of them are stacked. First, the piezoelectric plate (ceramic layer) 11 is made of Pb (M g
A slip (slurry) made by mixing a solvent, a dispersant, a binder, and a plasticizer with ceramic powder whose main component is l/: lN b vt'J>03 is formed into a thin film using a film forming machine used for manufacturing multilayer capacitors. Form. Then, the solvent in this thin film is evaporated and dried to obtain a green sheet. The obtained green sheet has a predetermined shape (rectangular shape in this example)
The piezoelectric plate II is used as the piezoelectric plate II. Next, an electrode plate 12 is provided on the surface of this piezoelectric plate 11. Electrode plate 12
Paste ink such as silver, palladium, or platinum is used as the electrode material, and the electrode material is printed using a screen printer. In the present invention, before forming the electrode plate 12, the electrode plate 12 in a predetermined pattern is provided on the surface of the piezoelectric plate 11. Then, on the surface of the other piezoelectric plate 11, an electrode plate 12 having a pattern that complements the previously provided electrode plate 12 is provided. That is, the planar pattern of the picture electrodes is configured such that the areas where the electrodes are present and the areas where the electrodes are absent correspond to each other on the front and back sides. In this embodiment, as shown in FIG.
2 is formed on exactly half of the surface of the piezoelectric plate 11. This is because when stacking the piezoelectric plates If, the stacking direction of the piezoelectric plates is alternately reversed, so that the electrode plate 12 only needs to be formed for the negative pattern. Next, after forming the electrode plate 12 on the surface of the piezoelectric plate 11, a predetermined number of piezoelectric plates 1 are laminated according to the intended use. At this time, for each piezoelectric plate II to be laminated, an electrode plate 12
Stack them alternately so that they are placed on opposite sides. That is, in each half region of the laminate, two layers of piezoelectric plates 11 are sandwiched between electrode plates j2a. 12a. Then, in the side section of the stacked body of the piezoelectric plates 11, two opposing sides (FIG. 1(b)
In the front view), each layer of the piezoelectric plate 11 is alternately distributed left and right, so that the edges of the electrode plates 12a and I2b are exposed. In this way, after providing the electrode plate 12 and laminating a large number of piezoelectric plates 11 in a predetermined direction, the piezoelectric plates 11 are bonded together using a hot press. Thereafter, this laminate is cut into desired dimensions and sintered. In sintering, pre-firing is performed to remove binders, and then main sintering is performed. Subsequently, an external electrode 14 a is formed on the outer surface of the obtained laminate.
, l 4'b is provided. The external electrodes 14a, 14b are provided on the above-mentioned side surface where the edges of all the electrode plates 12 of each piezoelectric plate 11 are exposed in the side section of the laminate. Then, the electrode plates 12a and +2b of the two layers of piezoelectric plates II that are vertically adjacent to each other are connected as a pair, and every other pair is connected, and external electrodes are connected alternately for each pair on the two sides. establish. Electrode plate +2a, 12b
and external electrodes 14a, 14b that enable such a connection.
As for the structure of
1.11 electrode plates 12a, 12b are made into a pair, and insulating bands 13a, . . . are placed on the edges of every other pair of electrode plates. (13,b,...,) is created. The insulating bands 13a (13b) are arranged alternately on both sides of each pair of electrode plates 122L and 12b, as shown in FIG. 1(a). Next, from above the insulating band 13 on both sides,
External electrodes 14a and 14b are created in the stacking direction. Also,
The application of the insulating material for the insulating band 13 and the conductive material for the external electrodes 14a and 14b can be easily carried out by screen printing or the like, similarly to the electrode plate I2. The polarization process of the element is performed using the pair of electrode plates 12a. Voltages with different polarities may be applied to the external electrodes 14a and 14b so that the polarities are alternately different for each pair in the stacking direction with respect to the external electrodes 12a. The piezoelectric element l of the present invention manufactured in this way has electrode plates 12 adjacent to each other in the thickness direction.
The patterns provided on the half surfaces of the piezoelectric plates a and 12b are complementary to each other. The electrode plate 12 has a pattern that is present on one half of the surface of the piezoelectric plate 11.The piezoelectric plate I is placed on the other half of the surface where no electrode is present.
Since the surface of I is exposed, this exposed portion is crimped to the lower surface of another piezoelectric plate 11 laminated on the upper surface of the piezoelectric plate 11, and the upper and lower piezoelectric plates 11.11 are integrally connected. That is, the fired piezoelectric element 1 is attached to the upper and lower piezoelectric plates 11.
11 are connected to each other without being separated by the electrode plate 12. Further, the electrode plates 12a and 12b adjacent in the thickness direction have planar electrode patterns formed to complement each other. Electrode plate! 2a creates an electric field in correspondence with the upper and lower electrode plates 12a, 12a arranged one layer apart, that is, arranged in the same direction with the two piezoelectric plates 11 in between. Then, in the part of the electrode plate 12a where no electrode exists,
Vertically adjacent piezoelectric plates 1.1. ll electrode plate + 2b, [
2b complement each other to create an electric field between the electrode plates 12b, 12b, so the electric field is the same in any part of each piezoelectric plate 11, and there is no undisplaced part inside the piezoelectric body. The above is an example using the green sort method of the present invention, and next, an example using the pressure bonding method will be explained with reference to FIG. First, a piezoelectric plate 11 is formed by polishing a block of sintered piezoelectric material or electrostrictive material. Then, on half of the surface of this piezoelectric plate 11, a base-shaped electrode material made of silver, palladium, platinum, etc. added with glass frit is printed by screen printing or the like to create an electrode plate 12. Then,
The remaining half of the piezoelectric plate 11 is coated with a paste containing piezoelectric material powder heat-treated at the firing temperature of the piezoelectric material and glass frit to form a piezoelectric material layer L5. Then, a predetermined number of piezoelectric plates 11 having electrode plates 12 and piezoelectric-electrostrictive material layers 15 on their surfaces are laminated in a manner that the electrode plates 12 are alternately arranged on opposite sides, in the same manner as in the above-described embodiment. Obtain a laminate by pressure bonding using a hot press. In the embodiments of the present invention, half of the surface of the electrode plate or piezoelectric plate is used as an electrode, but any electrode plate whose two-layer or multi-layer planar pattern is complementary to each other may be used. Furthermore, in the method for manufacturing the device in the embodiment, the so-called green rate method may be used, or other bonding methods may be used in view of the characteristics of the present invention. Furthermore, the piezoelectric plate described above may be made of an electrostrictive material with hysteresis or may be made of a piezoelectric material without hysteresis. [Effects] Since the present invention is configured as described above, it produces the effects described below. ■When the laminated piezoelectric element of the present invention is driven as an actuator, there is no undisplaced part that does not expand or contract piezoelectrically inside the element, and a --like electrostrictive effect is obtained, causing stress concentration in the element. There is no destruction of ■Secondly, since there is a part where adjacent piezoelectric plates are integrally connected, problems with the adhesion strength of the electrode plates may result in long-term application, long-term repeated application, and high voltage application. There is no occurrence of separation between the electrode plate and the piezoelectric plate. ■With this structure, stress concentration due to the difference in thermal expansion coefficient between the electrode plate and the piezoelectric plate at high and low temperatures or during cooling after sintering is dispersed, and peeling between the electrode plate and the piezoelectric plate due to heat absorption does not occur.
第１図ないし第２図は本発明の実施例を示す図面で、第
１図（ａ）および（ｂ）は積層型圧電素子の側面図、第
２図は電極板の構成を示す斜視図、第３図は他の製造方
法における電極板の構成を示す斜視図、第４図および第
５図は従来の積層型圧電素子の側面図である。
１１・・・・・圧電板、
１２（＋２ａ、１２ｂ）−−電極板、
１３ （１３ａ、１３ｂ）−−絶縁帯、１４、ａ、１４
ｂ 外部電極、
１５ 圧電電歪材層。1 and 2 are drawings showing embodiments of the present invention, in which FIGS. 1(a) and 2(b) are side views of a laminated piezoelectric element, and FIG. 2 is a perspective view showing the structure of an electrode plate. FIG. 3 is a perspective view showing the structure of an electrode plate in another manufacturing method, and FIGS. 4 and 5 are side views of a conventional laminated piezoelectric element. 11...Piezoelectric plate, 12 (+2a, 12b)--electrode plate, 13 (13a, 13b)--insulating band, 14, a, 14
b external electrode, 15 piezoelectrostrictive material layer.
Claims (2)
圧電素子において、 上記電極板は、圧電板上の半面を覆うとともに、積層方
向に互いに隣接する圧電板上において相互に反対側に配
置されていることを特徴とする積層型圧電素子。(1) In a laminated piezoelectric element in which piezoelectric plates and electrode plates are alternately laminated, the electrode plates cover half the surface of the piezoelectric plate and are located on opposite sides of the piezoelectric plates adjacent to each other in the lamination direction. A laminated piezoelectric element characterized by being arranged in.
方向に互いに隣接する圧電板上の電極板を圧電板上にお
いて相互に反対側に配置して順次積層する工程とを含む
ことを特徴とする請求項１記載の積層型圧電素子の製造
方法。(2) It includes the step of forming an electrode plate on one half of the piezoelectric plate, and the step of sequentially stacking the electrode plates on the piezoelectric plates adjacent to each other in the stacking direction by arranging them on opposite sides of the piezoelectric plate. The method for manufacturing a laminated piezoelectric element according to claim 1, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33408790A JP2726751B2 (en) | 1990-11-30 | 1990-11-30 | Multilayer piezoelectric element and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33408790A JP2726751B2 (en) | 1990-11-30 | 1990-11-30 | Multilayer piezoelectric element and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04206669A true JPH04206669A (en) | 1992-07-28 |
| JP2726751B2 JP2726751B2 (en) | 1998-03-11 |
Family
ID=18273382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33408790A Expired - Fee Related JP2726751B2 (en) | 1990-11-30 | 1990-11-30 | Multilayer piezoelectric element and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2726751B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006216620A (en) * | 2005-02-01 | 2006-08-17 | Nec Tokin Corp | Laminated piezoelectric actuator |
-
1990
- 1990-11-30 JP JP33408790A patent/JP2726751B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006216620A (en) * | 2005-02-01 | 2006-08-17 | Nec Tokin Corp | Laminated piezoelectric actuator |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2726751B2 (en) | 1998-03-11 |
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