JPH0420241U - - Google Patents
Info
- Publication number
- JPH0420241U JPH0420241U JP6039690U JP6039690U JPH0420241U JP H0420241 U JPH0420241 U JP H0420241U JP 6039690 U JP6039690 U JP 6039690U JP 6039690 U JP6039690 U JP 6039690U JP H0420241 U JPH0420241 U JP H0420241U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- view
- plan
- wafer carrier
- lid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 description 9
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6039690U JPH0420241U (enExample) | 1990-06-07 | 1990-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6039690U JPH0420241U (enExample) | 1990-06-07 | 1990-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0420241U true JPH0420241U (enExample) | 1992-02-20 |
Family
ID=31587727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6039690U Pending JPH0420241U (enExample) | 1990-06-07 | 1990-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0420241U (enExample) |
-
1990
- 1990-06-07 JP JP6039690U patent/JPH0420241U/ja active Pending