JPH0420241U - - Google Patents

Info

Publication number
JPH0420241U
JPH0420241U JP6039690U JP6039690U JPH0420241U JP H0420241 U JPH0420241 U JP H0420241U JP 6039690 U JP6039690 U JP 6039690U JP 6039690 U JP6039690 U JP 6039690U JP H0420241 U JPH0420241 U JP H0420241U
Authority
JP
Japan
Prior art keywords
wafer
view
plan
wafer carrier
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6039690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6039690U priority Critical patent/JPH0420241U/ja
Publication of JPH0420241U publication Critical patent/JPH0420241U/ja
Pending legal-status Critical Current

Links

JP6039690U 1990-06-07 1990-06-07 Pending JPH0420241U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6039690U JPH0420241U (enrdf_load_stackoverflow) 1990-06-07 1990-06-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6039690U JPH0420241U (enrdf_load_stackoverflow) 1990-06-07 1990-06-07

Publications (1)

Publication Number Publication Date
JPH0420241U true JPH0420241U (enrdf_load_stackoverflow) 1992-02-20

Family

ID=31587727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6039690U Pending JPH0420241U (enrdf_load_stackoverflow) 1990-06-07 1990-06-07

Country Status (1)

Country Link
JP (1) JPH0420241U (enrdf_load_stackoverflow)

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