JPH0420230U - - Google Patents
Info
- Publication number
- JPH0420230U JPH0420230U JP6158390U JP6158390U JPH0420230U JP H0420230 U JPH0420230 U JP H0420230U JP 6158390 U JP6158390 U JP 6158390U JP 6158390 U JP6158390 U JP 6158390U JP H0420230 U JPH0420230 U JP H0420230U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- heaters
- terminals
- shared
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990061583U JP2519157Y2 (ja) | 1990-06-11 | 1990-06-11 | 半導体製造装置に於ける加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990061583U JP2519157Y2 (ja) | 1990-06-11 | 1990-06-11 | 半導体製造装置に於ける加熱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0420230U true JPH0420230U (US06650917-20031118-M00005.png) | 1992-02-20 |
| JP2519157Y2 JP2519157Y2 (ja) | 1996-12-04 |
Family
ID=31589959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990061583U Expired - Lifetime JP2519157Y2 (ja) | 1990-06-11 | 1990-06-11 | 半導体製造装置に於ける加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2519157Y2 (US06650917-20031118-M00005.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2017115758A1 (ja) * | 2015-12-28 | 2017-12-28 | 日本碍子株式会社 | 円板状ヒータ及びヒータ冷却板アセンブリ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4928691A (US06650917-20031118-M00005.png) * | 1972-07-14 | 1974-03-14 | ||
| JPS5143720U (US06650917-20031118-M00005.png) * | 1974-09-28 | 1976-03-31 |
-
1990
- 1990-06-11 JP JP1990061583U patent/JP2519157Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4928691A (US06650917-20031118-M00005.png) * | 1972-07-14 | 1974-03-14 | ||
| JPS5143720U (US06650917-20031118-M00005.png) * | 1974-09-28 | 1976-03-31 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2017115758A1 (ja) * | 2015-12-28 | 2017-12-28 | 日本碍子株式会社 | 円板状ヒータ及びヒータ冷却板アセンブリ |
| US10256105B2 (en) | 2015-12-28 | 2019-04-09 | Ngk Insulators, Ltd. | Disc-shaped heater and heater-cooling-plate assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2519157Y2 (ja) | 1996-12-04 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |