JPH0420229U - - Google Patents
Info
- Publication number
- JPH0420229U JPH0420229U JP6205190U JP6205190U JPH0420229U JP H0420229 U JPH0420229 U JP H0420229U JP 6205190 U JP6205190 U JP 6205190U JP 6205190 U JP6205190 U JP 6205190U JP H0420229 U JPH0420229 U JP H0420229U
- Authority
- JP
- Japan
- Prior art keywords
- lid
- cleaning device
- processing tank
- tank
- blocking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6205190U JPH0420229U (de) | 1990-06-12 | 1990-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6205190U JPH0420229U (de) | 1990-06-12 | 1990-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0420229U true JPH0420229U (de) | 1992-02-20 |
Family
ID=31590851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6205190U Pending JPH0420229U (de) | 1990-06-12 | 1990-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0420229U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100344092B1 (ko) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | 반도체 장비의 덮개 구조 |
-
1990
- 1990-06-12 JP JP6205190U patent/JPH0420229U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100344092B1 (ko) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | 반도체 장비의 덮개 구조 |