JPH04201357A - Thick film type thermal head and its manufacture - Google Patents

Thick film type thermal head and its manufacture

Info

Publication number
JPH04201357A
JPH04201357A JP32982790A JP32982790A JPH04201357A JP H04201357 A JPH04201357 A JP H04201357A JP 32982790 A JP32982790 A JP 32982790A JP 32982790 A JP32982790 A JP 32982790A JP H04201357 A JPH04201357 A JP H04201357A
Authority
JP
Japan
Prior art keywords
layer
printing
wear
thermal head
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32982790A
Other languages
Japanese (ja)
Inventor
Kazuhiro Suzuki
一広 鈴木
Seiya Omori
誠也 大森
Kazuyoshi Ito
和善 伊藤
Tomoo Baba
智夫 馬場
Yoshinori Saeki
佐伯 義則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP32982790A priority Critical patent/JPH04201357A/en
Publication of JPH04201357A publication Critical patent/JPH04201357A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To improve the continuity of printing dots by a method wherein a smoothing layer is provided on the top of a wear-resistant layer, and the printing surface is pressed by a flat and continuous surface. CONSTITUTION:On the top of a wear-resistant layer 5, a smoothing layer 6 is continuously provided, groove-shaped recessed parts 7 are filled, and the top surface forms a continuous flat surface in a range which includes a plurality of heating resistor couples 4. When voltage is selectively applied from an individual electrode, a resistor 4 is heated, and printing is performed on a printing surface which is pressed by the upper surface of the layer 6, and since the layer 6 has a flat upper surface, heat is conducted to the whole surface of the pressing surface, and the continuity of printing dots in the major scanning direction becomes better. For the manufacture of the layer 6, a photosensitive resist 8 is formed on the layer 5, and openings 9 are provided by performing exposure and development. In the openings 9, a paste of lead glass is filled and dried. After drying, wrapping is performed, and after calcining the resist 8 by burn off, it is polished, and the upper surface is finished into a flat surface with high precision.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、感熱発色記録装置あるいは熱転写記録装置に
広(用いられ、発熱抵抗体が印刷・焼成することによっ
て形成される厚膜型サーマルヘッドに係り、特に印字ド
ツトの連続性がよく、印字におけるエネルギー効率にす
ぐれた厚膜型サーマルヘッド及びその製造方法に関する
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention is widely used in thermal color recording devices or thermal transfer recording devices. In particular, the present invention relates to a thick film thermal head that has good continuity of printed dots and excellent energy efficiency in printing, and a method for manufacturing the same.

(従来の技術) 感熱発色記録装置や熱転写記録装置等の記録部に用いら
れる厚膜型サーマルヘッドとして、例えば第3図に示す
ものが従来より知られている。
(Prior Art) As a thick film type thermal head used in a recording section of a thermosensitive color recording device, a thermal transfer recording device, etc., for example, the one shown in FIG. 3 is conventionally known.

第3図は、従来の厚膜型サーマルヘッドの構造を示す概
略図であり、(a)は平面図、(b)図、(c)図はそ
れぞれ(a)図中に示すC−C線、D−D線における断
面図である。
FIG. 3 is a schematic diagram showing the structure of a conventional thick-film thermal head, in which (a) is a plan view, (b), and (c) are lines C-C shown in (a). , is a sectional view taken along line DD.

絶縁基板11上に共通電極12と個別電極13とが形成
され、共通電極12の平行に張出した部分と、主走査方
向に並列した複数の個別電極13とが副走査方向で対向
している。これらの先端どうしは、互いに独立し主走査
方向に並列した発熱抵抗体14によって接続されている
。この発熱抵抗体14はスクリーン印刷され、焼成され
ることによって形成されたガラスの耐摩耗層15によっ
て覆われている。
A common electrode 12 and individual electrodes 13 are formed on an insulating substrate 11, and a parallel projecting portion of the common electrode 12 and a plurality of individual electrodes 13 arranged in parallel in the main scanning direction face each other in the sub-scanning direction. These tips are connected by heating resistors 14 that are independent of each other and arranged in parallel in the main scanning direction. This heating resistor 14 is covered with a glass wear-resistant layer 15 formed by screen printing and firing.

このようなサーマルヘッドにおいて、前記複数の個別電
極13から選択的に電圧を印加すると発熱抵抗体14が
発熱して印字するようになっている。
In such a thermal head, when a voltage is selectively applied from the plurality of individual electrodes 13, the heating resistor 14 generates heat and prints.

このとき厚膜型サーマルヘッドは発熱抵抗体14の厚さ
が大きく、発熱抵抗体部分が凸状となってこの凸状部分
の上面のみが印字面に押圧される。このため押圧力が太
き(なって印字におけるエネルギーの効率がよくなると
いう利点を有している。
At this time, in the thick-film type thermal head, the heating resistor 14 has a large thickness, and the heating resistor portion has a convex shape, and only the upper surface of this convex portion is pressed against the printing surface. For this reason, it has the advantage that the pressing force is large (and the energy efficiency in printing is improved).

(発明が解決しようとする課題) しかしながら、発熱抵抗体材料のペーストを印刷し、焼
成して形成された発熱抵抗体14は、約5μmから30
μm程度の厚さを有しており、耐摩耗層15を施した後
も、独立した発熱抵抗体14の間に溝上の凹部17を有
している。このため印字面に接触する耐摩耗層15の上
面が主走査方向に連続しておらず、熱の伝導が遮断され
て主走査方向の印字ドツトのつながりが悪くなる。これ
は全面を黒く印字するいわゆるベタ黒の場合に顕著とな
り、画質が悪くなるという問題点がある。
(Problem to be Solved by the Invention) However, the heating resistor 14 formed by printing and firing a paste of heating resistor material has a diameter of about 5 μm to 30 μm.
It has a thickness of about .mu.m, and even after the wear-resistant layer 15 is applied, it still has groove-like recesses 17 between the independent heating resistors 14. For this reason, the upper surface of the wear-resistant layer 15 in contact with the printing surface is not continuous in the main scanning direction, and heat conduction is interrupted, resulting in poor connection of printed dots in the main scanning direction. This becomes noticeable in the case of so-called solid black printing, in which the entire surface is printed in black, and there is a problem that the image quality deteriorates.

発熱抵抗体部分を層厚の大きい耐摩耗層で覆い、互いに
独立した発熱抵抗体間の溝状凹部を埋めることもできる
が、このような耐摩耗層を施すとと印字面との接触面積
が大きくなり、押圧力が大きいという厚膜型サーマルヘ
ッドの長所を生かすことができない。
It is also possible to cover the heating resistor portion with a thick wear-resistant layer and fill in the groove-like recesses between the independent heat-generating resistors, but when such a wear-resistant layer is applied, the contact area between the heat generating resistor and the printed surface is reduced. It is not possible to take advantage of the advantages of the thick-film thermal head, which is large and has a large pressing force.

また、印刷・焼成により形成された発熱抵抗体上に耐摩
耗層をスクリーン印刷をした場合、印刷むらが発生し、
2mmから4mm程度の間隔で耐摩耗層厚のうねりが生
じる。このような耐摩耗層厚の不均等によって記録紙へ
の押圧力に差が生じ、印字の濃度にむらが生じて画質が
悪くなるという問題点もある。
In addition, when a wear-resistant layer is screen printed on a heating resistor formed by printing and firing, printing unevenness occurs.
The wear-resistant layer thickness undulates at intervals of about 2 mm to 4 mm. Such unevenness in the thickness of the abrasion-resistant layer causes a difference in the pressing force against the recording paper, causing unevenness in print density and deteriorating image quality.

本発明は上記のような問題点に鑑みてなされたものであ
り、印字ドツトの連続性がよ(、記録紙への押圧力が均
等となって重両質が得られるとともに印字におけるエネ
ルギー効率のよい厚膜型サーマルヘッド及びその製造方
法を提供することを目的とする。
The present invention has been made in view of the above-mentioned problems, and it improves the continuity of printed dots (and makes the pressing force on the recording paper even, resulting in heavy and double-sided printing), as well as improving the energy efficiency of printing. An object of the present invention is to provide a good thick film type thermal head and a method for manufacturing the same.

(課題を解決するための手段) 上記目的を達成するために、本発明は、絶縁基板上の副
走査方向で共通電極と複数の個別電極とが対向し、これ
らがそれぞれ独立した発熱抵抗体で接続されている厚膜
型サーマルヘッドにおいて、発熱抵抗体を覆う耐摩耗層
と、その上に積層され、主走査方向に配列された複数の
発熱抵抗体を含み、これとほぼ同じかわずかに広い範囲
を連続的に覆い、上面が平坦な平滑化層とを有するもの
とする。
(Means for Solving the Problems) In order to achieve the above object, the present invention has a common electrode and a plurality of individual electrodes facing each other in the sub-scanning direction on an insulating substrate, each of which is formed by an independent heating resistor. The connected thick-film thermal head includes a wear-resistant layer that covers the heat-generating resistor, and multiple heat-generating resistors laminated on top of the wear-resistant layer and arranged in the main scanning direction. It shall have a smoothing layer that continuously covers the area and has a flat upper surface.

上記厚膜型サーマルヘッドの製造方法は、絶縁基板上に
共通電極と個別電極とを形成し、これらを接続する発熱
抵抗体を形成し、前記発熱抵抗体を覆う耐摩耗層を、印
刷し焼成することにより形成し、主走査方向に並列する
複数の発熱抵抗体を含み、これとほぼ同じかわずかに大
きい範囲の開口部を有するレジストを形成し、平滑化層
を形成する材料のペーストを印刷により前記レジストの
開口部に埋め込み、平滑化層を焼成するとともにレジス
トをバーンオフする工程を含む厚膜型サーマルヘッドの
製造方法とする。
The method for manufacturing the thick-film thermal head described above includes forming a common electrode and individual electrodes on an insulating substrate, forming a heating resistor to connect these, and printing and baking a wear-resistant layer covering the heating resistor. A resist is formed by forming a resist that includes multiple heating resistors arranged in parallel in the main scanning direction and has an opening that is approximately the same or slightly larger than the resist, and then prints a paste of the material that forms the smoothing layer. The method for manufacturing a thick-film thermal head includes the steps of embedding in the opening of the resist, firing the smoothing layer, and burning off the resist.

(作用) 請求項第1項記載の厚膜型サーマルヘッドでは、発熱抵
抗体を覆う耐摩耗層の上層にさらに平滑化層が設けられ
ており、この平滑化層が、耐摩耗層を施した後にも発熱
抵抗体間に生じている溝状凹部を埋め、複数の発熱抵抗
体を含む範囲で達続して平坦な上面を有しているので、
複数のド・ントについて連続した面で印字面を押圧する
とともに、押圧面全面に熱が伝導され得ることになる。
(Function) In the thick film type thermal head according to claim 1, a smoothing layer is further provided on the wear-resistant layer covering the heating resistor, and this smoothing layer is a layer on which the wear-resistant layer is applied. Afterwards, the groove-like recesses formed between the heating resistors are filled, and the area including the plurality of heating resistors is extended to have a flat upper surface.
The printed surface is pressed by a continuous surface of a plurality of dots, and heat can be conducted to the entire surface of the pressed surface.

これにより、主走査方向の印字ドツトのつながりがよく
なり、ベタ黒を印字したとき等の画質が向上する。
This improves the connection of printed dots in the main scanning direction and improves the image quality when solid black is printed.

また平滑化層の上面が平坦に仕上げられているので、印
字面に均等な圧力で押圧され、印字ド・ントに濃度の差
が生じず高画質が得られる。
Furthermore, since the top surface of the smoothing layer is finished flat, it is pressed against the printing surface with uniform pressure, and high image quality can be obtained without causing a difference in density in the printing.

さらに、平滑化層が、複数の発熱抵抗体を含みこれとほ
ぼ同じかわずかに広い範囲に限定して設けられているの
で、この範囲が凸状となり、凸状部分の上面は発熱抵抗
体の面積よりやや広いだけで、この部分のみが印字面に
押圧されるので、押圧力が高く、エネルギー効率が良い
Furthermore, since the smoothing layer is provided in an area that is approximately the same or slightly wider than the plurality of heating resistors, this area has a convex shape, and the upper surface of the convex portion is the same as that of the heating resistors. Although it is slightly wider than the area, only this part is pressed against the printing surface, so the pressing force is high and energy efficiency is good.

請求項第2項に記載の厚膜型サーマルヘッドの製造方法
は、電極及び発熱抵抗体を形成し、耐摩耗層を施した後
、レジストを用い、その開口部に焼成して平滑化層とな
るペーストを埋込んで平滑化層を形成するものであり、
レジストには正確に開口部を設けることができるので、
正確な位置に平滑化層を形成することができる。またレ
ジストの開口部にペーストを埋込み、乾燥後焼成前に平
滑化層の厚さが均等となるように余分のペーストを除去
し、上面をラッピングすることもできる。     ′
このため、平滑化層によって発熱抵抗体間に生じでいる
溝状の凸部を埋めるとともに、スクリーン印刷による耐
摩耗層厚の不均等を解消して上面を精度の高い平面状に
仕上げることが可能となる。
The method for manufacturing a thick-film thermal head according to claim 2 includes forming electrodes and a heating resistor, applying a wear-resistant layer, and then using a resist and baking the opening to form a smoothing layer. A smoothing layer is formed by embedding the paste.
Since openings can be precisely created in the resist,
A smoothing layer can be formed at a precise location. Alternatively, paste may be embedded in the openings of the resist, and after drying and before baking, excess paste may be removed so that the smoothing layer has an even thickness, and the upper surface may be lapped. ′
Therefore, the smoothing layer fills in the groove-like protrusions that occur between the heating resistors, and it also eliminates the uneven thickness of the wear-resistant layer caused by screen printing, making it possible to finish the top surface into a highly accurate flat surface. becomes.

(実施例) 以下本発明の実施例について図面を用いて説明する。(Example) Embodiments of the present invention will be described below with reference to the drawings.

第1図は本発明の一実施例である厚膜サーマルヘッドを
示す平面図及び断面図であり、(a)図は平面図、(b
)図は(a)図中に示すA−A線での断面図、(C)図
は(a)図中に示すB−B線での断面図である。
FIG. 1 is a plan view and a cross-sectional view showing a thick film thermal head which is an embodiment of the present invention, (a) is a plan view, (b)
) The figure (a) is a cross-sectional view taken along the line A-A shown in the figure, and the figure (C) is a cross-sectional view taken along the line B-B shown in the figure (a).

この厚膜型サーマルヘッドは、グレーズアルミナ基板l
上にAuの薄膜による共通電極2と個別電極3とが形成
されている。共通電極2は配線部2aから副走査方向に
張出した複数の張出し部2bを有し、個別電極3が副走
査方向においてこれらと対向するように配置されている
This thick film type thermal head uses a glazed alumina substrate.
A common electrode 2 and individual electrodes 3 made of a thin film of Au are formed thereon. The common electrode 2 has a plurality of overhanging parts 2b extending from the wiring part 2a in the sub-scanning direction, and the individual electrodes 3 are arranged to face these in the sub-scanning direction.

上記共通電極2の張出し部2bと個別電極3との対向部
には各々に独立した発熱抵抗体4が着膜されており、こ
れらによって接続されている。
Independent heat generating resistors 4 are deposited on the opposing portions of the protruding portion 2b of the common electrode 2 and the individual electrodes 3, and are connected to each other by these.

主走査方向に並列した複数の発熱抵抗体4は、ガラス質
からなる耐摩耗層5によって覆われている。この耐摩耗
層5は、発熱抵抗体4が約5μmから30μm程度の厚
さを有するのに対し、通常3μm〜8μm程度と薄(、
発熱抵抗体4を覆うように着膜すると、その上面は発熱
抵抗体部分が凸状となり、隣接する発熱抵抗体の間に溝
状の凹部7が生じている。
A plurality of heating resistors 4 arranged in parallel in the main scanning direction are covered with a wear-resistant layer 5 made of glass. This wear-resistant layer 5 is usually thin (about 3 μm to 8 μm), whereas the heating resistor 4 has a thickness of about 5 μm to 30 μm.
When the film is deposited to cover the heating resistor 4, the upper surface of the heating resistor portion becomes convex, and groove-like recesses 7 are formed between adjacent heating resistors.

耐摩耗層5の上部には、複数の発熱抵抗体を含む範囲と
ほぼ同じか又はわずかに大きい範囲に平滑化層6が連続
的に設けられており、この平滑化層6は前記した溝状の
凹部7を埋め、耐摩耗層上面の凹凸を解消して複数の発
熱抵抗体4を含む範囲で上面が連続的な平面を形成して
いる。
On the top of the wear-resistant layer 5, a smoothing layer 6 is continuously provided in an area that is approximately the same as or slightly larger than the area including the plurality of heating resistors, and this smoothing layer 6 has the above-mentioned groove shape. The concave portion 7 is filled in, and the unevenness on the upper surface of the wear-resistant layer is eliminated, so that the upper surface forms a continuous flat surface in the range including the plurality of heating resistors 4.

この平滑化層6の材料は低温焼成で形成されるガラスで
あるのが望ましく例えばpbを約70%から80%程度
含む鉛ガラス等を使用することができる。また、上記材
料に限らず隣接する発熱抵抗体間の溝状凹部7を埋める
ことができ、上面を平滑に仕上げることができる材料で
あれば、平滑化層の材料として使用することができ、耐
摩耗層5に使用するガラスと同じものでもよい。
The material of this smoothing layer 6 is preferably glass formed by low-temperature firing, and for example, lead glass containing about 70% to 80% PB can be used. In addition, not only the above-mentioned materials, but any material that can fill the groove-like recesses 7 between adjacent heating resistors and finish the upper surface smoothly can be used as the material for the smoothing layer, and is durable. The same glass as that used for the wear layer 5 may be used.

上記のような厚膜型サーマルヘッドにおいて、個別電極
3から電圧を選択的に印加すると、電圧の印加された発
熱抵抗体4が発熱し、平滑化層6上面によって押圧され
る印字面で印字が行なわれる。このとき、平滑化層6は
複数の発熱抵抗体4を含む範囲で連続して平坦な上面を
有しているので、複数のドツトについて連続した面で印
字面を押圧するとともに、押圧面全面に熱が伝導され得
ることになり、主走査方向の印字ドツトのつながりがよ
(なる。
In the thick-film thermal head as described above, when a voltage is selectively applied from the individual electrodes 3, the heating resistor 4 to which the voltage is applied generates heat, and the printing surface pressed by the upper surface of the smoothing layer 6 prints. It is done. At this time, since the smoothing layer 6 has a flat upper surface that is continuous in the range that includes the plurality of heating resistors 4, the printing surface is pressed with a continuous surface for the plurality of dots, and the entire surface of the pressing surface is pressed. Heat can be conducted, and the connection between printed dots in the main scanning direction is improved.

また平滑化層6の上面が平坦に仕上げられているので、
印字面に均等な圧力で押圧され、印字ドットに濃度の差
が生じず高画質が得られる。
Also, since the top surface of the smoothing layer 6 is finished flat,
The printing surface is pressed with even pressure, resulting in high image quality with no difference in density between printed dots.

さらに、平滑化層6の上面のみが印字面に押圧されるの
で、押圧力が高く、エネルギー効率が良い。
Furthermore, since only the upper surface of the smoothing layer 6 is pressed against the printing surface, the pressing force is high and energy efficiency is good.

平滑化層6に鉛ガラスなどの軟質の摩耗しやすい材料を
使用したものでは、継続して使用すると平滑化層上面が
印字面と繰り返し接触し、摩耗することが考えられる。
If the smoothing layer 6 is made of a soft and easily abrasive material such as lead glass, the upper surface of the smoothing layer may repeatedly come into contact with the printed surface and wear out if used continuously.

しかし、平滑化層6の下層には摩耗しに(い材料からな
る耐摩耗層5があり、平滑化層6が摩耗して耐摩耗層5
の一部が露出しても、発熱抵抗体4間の溝状凹部7や、
上面の耐摩耗層5の凹部には平滑化層6が埋められた状
態として残り、複数の発熱抵抗体4を含む範囲の上面が
連続した平面に保たれる。
However, under the smoothing layer 6 there is a wear-resistant layer 5 made of a material that does not wear easily.
Even if a part of the heating resistor 4 is exposed, the groove-shaped recess 7 between the heating resistors 4
The smoothing layer 6 remains buried in the recessed portion of the wear-resistant layer 5 on the upper surface, and the upper surface in the area including the plurality of heat generating resistors 4 is maintained in a continuous plane.

次に上記の厚膜型サーマルヘッドの製造方法について説
明する。
Next, a method for manufacturing the above-mentioned thick film type thermal head will be explained.

第2図は、請求項第2項に記載した厚膜型サーマルヘッ
ドの製造方法の一実施例を示す説明図である。
FIG. 2 is an explanatory diagram showing an embodiment of the method for manufacturing a thick film type thermal head according to claim 2.

まず、第2図(a)(b)に示すように絶縁基板である
グレーズアルミナ基板1上にAuを着膜し、フォトリソ
エツチングにより共通電極2と個別電極3とを形成する
。この共通電極2の張出し部と個別電極3とが対向する
部分に、主走査方向に互いに独立した複数の発熱抵抗体
4を形成し、これらを覆う耐摩耗層5をスクリーン印刷
により形成する。
First, as shown in FIGS. 2(a) and 2(b), an Au film is deposited on a glazed alumina substrate 1, which is an insulating substrate, and a common electrode 2 and individual electrodes 3 are formed by photolithography. A plurality of heating resistors 4 which are independent of each other in the main scanning direction are formed in the portion where the overhanging portion of the common electrode 2 and the individual electrodes 3 face each other, and a wear-resistant layer 5 covering them is formed by screen printing.

次に、第2図(c)(d)に示すように、耐摩耗層5の
上に10μmから30μm程度の厚さの感光性レジスト
8をスピンコードなどによす形成し、露光・現像するこ
とにより、主走査方向に並列した複数の発熱抵抗体を含
みこれらとほぼ同じかわずかに広い範囲に正確な開口部
9を設ける。
Next, as shown in FIGS. 2(c) and 2(d), a photosensitive resist 8 having a thickness of about 10 μm to 30 μm is formed on the wear-resistant layer 5 using a spin cord or the like, and is exposed and developed. As a result, an accurate opening 9 is provided in an area that includes a plurality of heat generating resistors arranged in parallel in the main scanning direction and is approximately the same or slightly wider than the heat generating resistors.

この開口部9に鉛ガラスのペーストをスクリーン印刷に
より埋め込み乾燥させる。乾燥後レジスト上の着膜部分
を除去し、開口部に埋込んだ部分の上面がレジスト上面
と同一平面を形成するようにラッピングシートにてラッ
ピングする(第2図、(e)(f))。
A lead glass paste is filled into the opening 9 by screen printing and dried. After drying, remove the deposited film on the resist and wrap it with a wrapping sheet so that the upper surface of the part embedded in the opening forms the same plane as the upper surface of the resist (Figure 2, (e) and (f)). .

その後これを焼成するとともにレジスト8をバーンオフ
して第2図(g)(h)に示すような平滑化層6を形成
する。焼成後さらに平滑化層6の上面をラッピングシー
トで研磨し、上面を精度の高い平面状に仕上げる。
Thereafter, this is baked and the resist 8 is burnt off to form a smoothing layer 6 as shown in FIGS. 2(g) and 2(h). After firing, the upper surface of the smoothing layer 6 is further polished with a lapping sheet to finish the upper surface into a highly accurate planar shape.

上記のような製造方法では、耐摩耗層5の上に平滑化層
6を形成するのに、感光性レジスト8を用い露光・現像
により開口部9を形成して、これに鉛ガラスのペースト
を埋め込むこととしており、平滑化層を約30μm以下
の範囲で任意の厚さとし、限定した範囲に正確に平滑化
層6が形成される。また、鉛ガラスのペーストを埋込み
、乾燥後ラッピングによって上面を平坦にすることがで
き、スクリーン印刷・焼成によって形成された耐摩耗層
5の層厚の不均等を解消して、上面を精度の高い平面に
仕上げることができる。
In the above manufacturing method, to form the smoothing layer 6 on the wear-resistant layer 5, a photosensitive resist 8 is used to form openings 9 by exposure and development, and a lead glass paste is applied to the openings 9. The smoothing layer 6 is formed to have an arbitrary thickness within a range of about 30 μm or less, and the smoothing layer 6 is formed accurately in a limited area. In addition, the top surface can be flattened by embedding lead glass paste and lapping after drying, eliminating uneven layer thickness of the wear-resistant layer 5 formed by screen printing and baking, and making the top surface highly accurate. It can be finished flat.

また平滑化層6の材料として鉛ガラスを用いることによ
って、耐摩耗層5に用いるガラスよりも低温で焼成をす
ることができ、焼成時耐摩耗層を溶融させる等の影響を
与えることな(平滑化層6を形成できる。
Furthermore, by using lead glass as the material for the smoothing layer 6, it can be fired at a lower temperature than the glass used for the wear-resistant layer 5, and the wear-resistant layer is not melted during firing. The chemical layer 6 can be formed.

さらに鉛ガラスは焼成後も耐摩耗層5に用いるガラスよ
りも軟質であり、ラッピングシートで研磨して上面の平
滑度を向上させることができる。
Furthermore, lead glass is softer than the glass used for the wear-resistant layer 5 even after firing, and can be polished with a lapping sheet to improve the smoothness of the top surface.

(発明の効果) 以上説明したように本発明の厚膜型サーマルへラドによ
れば、平滑化層が複数の発熱抵抗体を含む範囲で、連続
して平坦な上面を有しているので、主走査方向の印字ド
ツトのつながりが良好となる。また、上面が平坦に仕上
げられているので印字ドツトの濃度のむらがなくなる。
(Effects of the Invention) As explained above, according to the thick-film thermal helad of the present invention, since the smoothing layer has a continuous flat top surface within the range including the plurality of heating resistors, The connection of printed dots in the main scanning direction is improved. Furthermore, since the top surface is finished flat, there is no uneven density of printed dots.

さらに、平滑化層が発熱抵抗体を含みこれとほぼ同じか
わずかに広い範囲にのみ設けられているので印字面への
押圧力が上昇し、エネルギー効率が向上する。
Furthermore, since the smoothing layer includes the heating resistor and is provided only in an area that is approximately the same or slightly wider than the heating resistor, the pressing force against the printing surface is increased and energy efficiency is improved.

よって、高画質で、エネルギー効率の良い厚膜型サーマ
ルヘッドを得ることができる。
Therefore, a thick film thermal head with high image quality and good energy efficiency can be obtained.

また、請求項第2項記載の厚膜型サーマルヘッドの製造
方法によれば、平滑化層を、レジストの     ′開
口部にペーストを埋め込み焼成して形成するので、複数
の発熱抵抗体を含む限定された範囲に正確に平滑化層を
形成でき、厚さの不均等を生じることなく平坦な上面を
容易に形成することができる。
Furthermore, according to the method for manufacturing a thick-film thermal head according to claim 2, the smoothing layer is formed by embedding and baking a paste in the openings of the resist. The smoothing layer can be formed accurately in the defined area, and a flat upper surface can be easily formed without uneven thickness.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、請求項第1項に記載する発明の一実施例であ
る厚膜型サーマルヘッドを示す概略構造図、 第2図は、請求項第2項に記載する発明の一実施例であ
る厚膜型サーマルヘッドの製造方法を示す説明図、 第3図は、従来の厚膜型サーマルヘッドを示す概略構造
図である。 ■・・・・絶縁基板 2・・・・共通電極 3・・・・個別電極 4・・・・発熱抵抗体 5・・・・耐摩耗層 6・・・・平滑化層 8・・・・レジスト 第1図
FIG. 1 is a schematic structural diagram showing a thick film type thermal head which is an embodiment of the invention as set forth in claim 1, and FIG. 2 is a schematic structural diagram showing an embodiment of the invention as set forth in claim 2. An explanatory diagram showing a method of manufacturing a certain thick film type thermal head. FIG. 3 is a schematic structural diagram showing a conventional thick film type thermal head. ■...Insulating substrate 2...Common electrode 3...Individual electrode 4...Heating resistor 5...Wear-resistant layer 6...Smoothing layer 8... Resist figure 1

Claims (2)

【特許請求の範囲】[Claims] (1)絶縁基板上の副走査方向で共通電極と複数の個別
電極とが対向し、前記共通電極と前記複数の個別電極と
が、それぞれ独立し主走査方向に並列された複数の発熱
抵抗体で接続されている厚膜型サーマルヘッドにおいて
、 前記発熱抵抗体を覆う耐摩耗層と、 その上に積層され、複数の発熱抵抗体を含み、こりとほ
ぼ同じかわずかに広い範囲を連続的に覆い、上面が平坦
な平滑化層とを有することを特徴とする厚膜型サーマル
ヘッド
(1) A plurality of heating resistors in which a common electrode and a plurality of individual electrodes face each other in the sub-scanning direction on an insulating substrate, and the common electrode and the plurality of individual electrodes are arranged independently in parallel in the main-scanning direction. In a thick-film thermal head connected by A thick film type thermal head characterized by having a covering and a smoothing layer with a flat upper surface.
(2)絶縁基板上に共通電極と個別電極とを形成し、こ
れらを接続する発熱抵抗体を形成し、前記発熱抵抗体を
覆う耐摩耗層を、印刷し焼成することにより形成し、主
走査方向に並列する複数の発熱抵抗体を含み、これとほ
ぼ同じかわずかに大きい範囲の開口部を有するレジスト
を形成し、平滑化層を形成する材料のペーストを印刷に
より前記レジストの開口部に埋め込み、平滑化層を焼成
するとともにレジストをバーンオフする工程を含むこと
を特徴とする厚膜型サーマルヘッドの製造方法
(2) A common electrode and individual electrodes are formed on an insulating substrate, a heating resistor is formed to connect these, a wear-resistant layer covering the heating resistor is formed by printing and baking, and main scanning is performed. A resist is formed that includes a plurality of heating resistors arranged in parallel in the direction, and has an opening that is approximately the same or slightly larger than the resist, and a paste of a material that forms a smoothing layer is embedded in the opening of the resist by printing. A method for manufacturing a thick-film thermal head, comprising the steps of firing a smoothing layer and burning off a resist.
JP32982790A 1990-11-30 1990-11-30 Thick film type thermal head and its manufacture Pending JPH04201357A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32982790A JPH04201357A (en) 1990-11-30 1990-11-30 Thick film type thermal head and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32982790A JPH04201357A (en) 1990-11-30 1990-11-30 Thick film type thermal head and its manufacture

Publications (1)

Publication Number Publication Date
JPH04201357A true JPH04201357A (en) 1992-07-22

Family

ID=18225676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32982790A Pending JPH04201357A (en) 1990-11-30 1990-11-30 Thick film type thermal head and its manufacture

Country Status (1)

Country Link
JP (1) JPH04201357A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013199060A (en) * 2012-03-26 2013-10-03 Toshiba Hokuto Electronics Corp Thermal print head and method for manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013199060A (en) * 2012-03-26 2013-10-03 Toshiba Hokuto Electronics Corp Thermal print head and method for manufacturing the same

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