JPH04195050A - Photosensitive resin composition and photosensitive film using same - Google Patents
Photosensitive resin composition and photosensitive film using sameInfo
- Publication number
- JPH04195050A JPH04195050A JP32584690A JP32584690A JPH04195050A JP H04195050 A JPH04195050 A JP H04195050A JP 32584690 A JP32584690 A JP 32584690A JP 32584690 A JP32584690 A JP 32584690A JP H04195050 A JPH04195050 A JP H04195050A
- Authority
- JP
- Japan
- Prior art keywords
- film
- resin composition
- photosensitive resin
- photosensitive
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims description 23
- 229920000642 polymer Polymers 0.000 claims abstract description 6
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 4
- 229930195734 saturated hydrocarbon Natural products 0.000 claims abstract description 4
- 125000001183 hydrocarbyl group Chemical group 0.000 claims abstract 2
- 125000004432 carbon atom Chemical group C* 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 2
- 238000007747 plating Methods 0.000 abstract description 31
- -1 vinyl compound Chemical class 0.000 abstract description 19
- 229920002554 vinyl polymer Polymers 0.000 abstract description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 8
- 238000001035 drying Methods 0.000 abstract description 8
- 229910052802 copper Inorganic materials 0.000 abstract description 7
- 239000010949 copper Substances 0.000 abstract description 7
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 abstract description 4
- 239000012965 benzophenone Substances 0.000 abstract description 4
- 239000003999 initiator Substances 0.000 abstract description 4
- 239000000203 mixture Substances 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 230000001681 protective effect Effects 0.000 abstract description 3
- LTHJXDSHSVNJKG-UHFFFAOYSA-N 2-[2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOCCOC(=O)C(C)=C LTHJXDSHSVNJKG-UHFFFAOYSA-N 0.000 abstract description 2
- 239000003795 chemical substances by application Substances 0.000 abstract description 2
- 239000000945 filler Substances 0.000 abstract description 2
- 239000003112 inhibitor Substances 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 239000000049 pigment Substances 0.000 abstract description 2
- 239000004014 plasticizer Substances 0.000 abstract description 2
- 229920000728 polyester Polymers 0.000 abstract description 2
- 229920002126 Acrylic acid copolymer Polymers 0.000 abstract 1
- ATMLPEJAVWINOF-UHFFFAOYSA-N acrylic acid acrylic acid Chemical compound OC(=O)C=C.OC(=O)C=C ATMLPEJAVWINOF-UHFFFAOYSA-N 0.000 abstract 1
- 229920006267 polyester film Polymers 0.000 abstract 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 12
- 239000000243 solution Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 7
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 229910000365 copper sulfate Inorganic materials 0.000 description 4
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 2
- 239000000539 dimer Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 235000019382 gum benzoic Nutrition 0.000 description 2
- 150000002430 hydrocarbons Chemical group 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- MJYFYGVCLHNRKB-UHFFFAOYSA-N 1,1,2-trifluoroethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(F)(F)CF MJYFYGVCLHNRKB-UHFFFAOYSA-N 0.000 description 1
- LMGYOBQJBQAZKC-UHFFFAOYSA-N 1-(2-ethylphenyl)-2-hydroxy-2-phenylethanone Chemical compound CCC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 LMGYOBQJBQAZKC-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- MDKSQNHUHMMKPP-UHFFFAOYSA-N 2,5-bis(4-methoxyphenyl)-4-phenyl-1h-imidazole Chemical class C1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC(OC)=CC=2)N1 MDKSQNHUHMMKPP-UHFFFAOYSA-N 0.000 description 1
- RXAYEPUDXSKVHS-UHFFFAOYSA-N 2-(2-chlorophenyl)-4,5-bis(3-methoxyphenyl)-1h-imidazole Chemical class COC1=CC=CC(C2=C(NC(=N2)C=2C(=CC=CC=2)Cl)C=2C=C(OC)C=CC=2)=C1 RXAYEPUDXSKVHS-UHFFFAOYSA-N 0.000 description 1
- UIHRWPYOTGCOJP-UHFFFAOYSA-N 2-(2-fluorophenyl)-4,5-diphenyl-1h-imidazole Chemical class FC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 UIHRWPYOTGCOJP-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- XIOGJAPOAUEYJO-UHFFFAOYSA-N 2-(2-methoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class COC1=CC=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 XIOGJAPOAUEYJO-UHFFFAOYSA-N 0.000 description 1
- RDPPKNJLJJVJTA-UHFFFAOYSA-N 2-(2-methylprop-2-enoylperoxy)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOOC(=O)C(C)=C RDPPKNJLJJVJTA-UHFFFAOYSA-N 0.000 description 1
- SNFCQJAJPFWBDJ-UHFFFAOYSA-N 2-(4-methoxyphenyl)-4,5-diphenyl-1h-imidazole Chemical class C1=CC(OC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 SNFCQJAJPFWBDJ-UHFFFAOYSA-N 0.000 description 1
- GZYZPHPDKCTFFH-UHFFFAOYSA-N 2-(4-methylsulfanylphenyl)-4,5-diphenyl-1h-imidazole Chemical class C1=CC(SC)=CC=C1C1=NC(C=2C=CC=CC=2)=C(C=2C=CC=CC=2)N1 GZYZPHPDKCTFFH-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- RLOIVWPKZYTEIK-UHFFFAOYSA-N 2-[2-[2-[2-[2-[4-[2-[4-[2-[2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethoxy]ethoxy]phenyl]propan-2-yl]phenoxy]ethoxy]ethoxy]ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C(=O)(C=C)OCCOCCOCCOCCOCCOC1=CC=C(C(C)(C)C2=CC=C(OCCOCCOCCOCCOCCOC(=O)C=C)C=C2)C=C1 RLOIVWPKZYTEIK-UHFFFAOYSA-N 0.000 description 1
- RILZRCJGXSFXNE-UHFFFAOYSA-N 2-[4-(trifluoromethoxy)phenyl]ethanol Chemical compound OCCC1=CC=C(OC(F)(F)F)C=C1 RILZRCJGXSFXNE-UHFFFAOYSA-N 0.000 description 1
- KMNCBSZOIQAUFX-UHFFFAOYSA-N 2-ethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)C(=O)C1=CC=CC=C1 KMNCBSZOIQAUFX-UHFFFAOYSA-N 0.000 description 1
- SJEBAWHUJDUKQK-UHFFFAOYSA-N 2-ethylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC=C3C(=O)C2=C1 SJEBAWHUJDUKQK-UHFFFAOYSA-N 0.000 description 1
- 239000004808 2-ethylhexylester Substances 0.000 description 1
- VZMLJEYQUZKERO-UHFFFAOYSA-N 2-hydroxy-1-(2-methylphenyl)-2-phenylethanone Chemical compound CC1=CC=CC=C1C(=O)C(O)C1=CC=CC=C1 VZMLJEYQUZKERO-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- AXYQEGMSGMXGGK-UHFFFAOYSA-N 2-phenoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(=O)C(C=1C=CC=CC=1)OC1=CC=CC=C1 AXYQEGMSGMXGGK-UHFFFAOYSA-N 0.000 description 1
- YFKMFQHIZCWXJD-UHFFFAOYSA-N 3-acridin-9-ylprop-2-enoic acid Chemical compound C1=CC=C2C(C=CC(=O)O)=C(C=CC=C3)C3=NC2=C1 YFKMFQHIZCWXJD-UHFFFAOYSA-N 0.000 description 1
- CPHGOBGXZQKCKI-UHFFFAOYSA-N 4,5-diphenyl-1h-imidazole Chemical class N1C=NC(C=2C=CC=CC=2)=C1C1=CC=CC=C1 CPHGOBGXZQKCKI-UHFFFAOYSA-N 0.000 description 1
- YYVYAPXYZVYDHN-UHFFFAOYSA-N 9,10-phenanthroquinone Chemical compound C1=CC=C2C(=O)C(=O)C3=CC=CC=C3C2=C1 YYVYAPXYZVYDHN-UHFFFAOYSA-N 0.000 description 1
- MTRFEWTWIPAXLG-UHFFFAOYSA-N 9-phenylacridine Chemical compound C1=CC=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 MTRFEWTWIPAXLG-UHFFFAOYSA-N 0.000 description 1
- JQPNFFYPPWWWCH-UHFFFAOYSA-N 9-pyridin-2-ylacridine Chemical compound N1=CC=CC=C1C1=C(C=CC=C2)C2=NC2=CC=CC=C12 JQPNFFYPPWWWCH-UHFFFAOYSA-N 0.000 description 1
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- 101100372602 Arabidopsis thaliana VDAC3 gene Proteins 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- CULWTPQTPMEUMN-UHFFFAOYSA-J [Ni](Cl)Cl.S(=O)(=O)([O-])[O-].[Ni+2] Chemical compound [Ni](Cl)Cl.S(=O)(=O)([O-])[O-].[Ni+2] CULWTPQTPMEUMN-UHFFFAOYSA-J 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000001251 acridines Chemical class 0.000 description 1
- BAPJBEWLBFYGME-UHFFFAOYSA-N acrylic acid methyl ester Natural products COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000001204 arachidyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000008365 aromatic ketones Chemical class 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- PEVJCYPAFCUXEZ-UHFFFAOYSA-J dicopper;phosphonato phosphate Chemical compound [Cu+2].[Cu+2].[O-]P([O-])(=O)OP([O-])([O-])=O PEVJCYPAFCUXEZ-UHFFFAOYSA-J 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 1
- 229940107698 malachite green Drugs 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229940086559 methyl benzoin Drugs 0.000 description 1
- OMNKZBIFPJNNIO-UHFFFAOYSA-N n-(2-methyl-4-oxopentan-2-yl)prop-2-enamide Chemical compound CC(=O)CC(C)(C)NC(=O)C=C OMNKZBIFPJNNIO-UHFFFAOYSA-N 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- CXVGEDCSTKKODG-UHFFFAOYSA-N sulisobenzone Chemical compound C1=C(S(O)(=O)=O)C(OC)=CC(O)=C1C(=O)C1=CC=CC=C1 CXVGEDCSTKKODG-UHFFFAOYSA-N 0.000 description 1
- 229960000368 sulisobenzone Drugs 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、感光性樹脂組成物及びこれを用いた感光性フ
ィルムに関し、さらに詳しくは耐めっき性及び柔軟性に
優れた感光性樹脂組成物及び感光性フィルムに関する。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a photosensitive resin composition and a photosensitive film using the same, and more specifically to a photosensitive resin composition with excellent plating resistance and flexibility. and relates to photosensitive films.
従来、プリント回路板の製造分野において、エツチング
、めっき等に用いられるレジスト材料としては、感光性
樹脂組成物及びそれを用いて得られる感光性フィルムが
広(用いられている。プリント回路板は、感光性フィル
ムを銅基板上にラミネートして、パターン露光した後、
未露光部を現像液で除去し、エツチング又はめっき処理
を施して、パターンを形成させた後、硬化部分を基板上
から剥離除去する方法によって製造されている。Conventionally, in the field of manufacturing printed circuit boards, photosensitive resin compositions and photosensitive films obtained using the same have been widely used as resist materials used for etching, plating, etc. After laminating a photosensitive film on a copper substrate and exposing it to pattern light,
It is manufactured by removing the unexposed areas with a developer, performing etching or plating to form a pattern, and then peeling off the cured areas from the substrate.
現在、印刷配線板のパターン細線化に伴ってめっき処理
する方法(以下、めっき法と略称する)が主流となりつ
つある。めっき法に用いられる感光性フィルムには、め
っき薬品に対する耐性が要求されるが、従来の技術では
耐性を増すごとに硬化した膜が硬くてもろくなり、修正
作業、搬送作業などにおいて、硬化膜の一部が剥がれた
り、欠けたりする不良を生じていた。Currently, as patterns of printed wiring boards become thinner, plating methods (hereinafter abbreviated as plating methods) are becoming mainstream. Photosensitive films used in plating methods are required to have resistance to plating chemicals, but with conventional technology, as the resistance increases, the cured film becomes harder and more brittle. Some defects occurred such as peeling or chipping.
本発明は、前記の従来技術の問題点を解決し、耐めっき
性及び硬化膜の柔軟性が優れた感光性樹脂組成物及びこ
れを用いた感光性フィルムを提供するものである。The present invention solves the problems of the prior art described above and provides a photosensitive resin composition with excellent plating resistance and flexibility of a cured film, and a photosensitive film using the same.
本発明は、(A)カルボキシル基含有フィルム性付与ポ
リマー、
(B)光重合開始剤又は光重合開始剤系及び(C)−船
蔵(I)
〔式中R1は水素又はメチル基を表し、R2は炭素原子
数4以上の飽和炭化水素鎖を表し、nは2〜5の整数を
表し、mは1〜14の整数を表す〕で表されるビニル化
合物
を含有してなることを特徴とする感光性樹脂組成物並び
に支持フィルム上に前記感光性樹脂組成物の層を積層し
てなる感光性フィルムに関する。The present invention provides (A) a carboxyl group-containing film-like property-imparting polymer, (B) a photopolymerization initiator or a photopolymerization initiator system, and (C) - Funazura (I) [wherein R1 represents hydrogen or a methyl group, R2 represents a saturated hydrocarbon chain having 4 or more carbon atoms, n represents an integer of 2 to 5, and m represents an integer of 1 to 14. The present invention relates to a photosensitive resin composition and a photosensitive film formed by laminating a layer of the photosensitive resin composition on a support film.
次に、本発明に用いられる各成分について説明する。Next, each component used in the present invention will be explained.
本発明に用いられるカルボキシル基含有フィルム性付与
ポリマー〔成分(A)〕としては、例えば、(メタ)ア
クリル酸(メタアクリル酸又はアクリル酸を意味する、
以下同じ)アルキルエステルと(メタ)アクリル酸との
共重合体、(メタ)アクリル酸アルキルエステルと(メ
タ)アクリル酸とこれらと共重合し得るビニルモノマー
との共重合体などが挙げられる。(メタ)アクリル酸ア
ルキルエステルとしては、例えば、(メタ)アクリル酸
メチルエステル、(メタ)アクリル酸エチルエステル、
(メタ)アクリル酸ブチルエステル、(メタ)アクリル
酸2−エチルヘキシルエステル等が挙げられる。また、
(メタ)アクリル酸アルキルエステルや(メタ)アクリ
ル酸と共重合し得るビニルモノマーとしては、例えば、
(メタ)アクリル酸テトラヒドロフルフリルエステル、
(メタ)アクリル酸ジメチルアミノエチルエステル、(
メタ)アクリル酸ジエチルアミノエチルエステル、(メ
タ)アクリル酸グリシジルエステル、2゜2.2−1リ
フルオロエチル(メタ)アクリレート、2. 2. 8
. 3−テトラフルオロプロピル(メタ)アクリレート
、アクリルアミド、ジアセトンアクリルアミド、スチレ
ン、ビニルトルエン等が挙げられる。Examples of the carboxyl group-containing film properties imparting polymer [component (A)] used in the present invention include (meth)acrylic acid (meaning methacrylic acid or acrylic acid),
Copolymers of alkyl esters and (meth)acrylic acid (same hereinafter), copolymers of alkyl (meth)acrylic esters, (meth)acrylic acid, and vinyl monomers copolymerizable with these, and the like. Examples of the (meth)acrylic acid alkyl ester include (meth)acrylic acid methyl ester, (meth)acrylic acid ethyl ester,
(meth)acrylic acid butyl ester, (meth)acrylic acid 2-ethylhexyl ester, etc. are mentioned. Also,
Examples of vinyl monomers that can be copolymerized with (meth)acrylic acid alkyl esters and (meth)acrylic acid include:
(meth)acrylic acid tetrahydrofurfuryl ester,
(meth)acrylic acid dimethylaminoethyl ester, (
Meth)acrylic acid diethylaminoethyl ester, (meth)acrylic acid glycidyl ester, 2゜2.2-1 trifluoroethyl (meth)acrylate, 2. 2. 8
.. Examples include 3-tetrafluoropropyl (meth)acrylate, acrylamide, diacetone acrylamide, styrene, vinyltoluene, and the like.
本発明に用いられる光重合開始剤又は光重合開始剤系〔
成分(B)〕としては、例えば、ベンゾフェノン、N、
N’−テトラメチル−4,4°−ジアミノベンゾフェ
ノン(ミヒラーケトン)、N。Photoinitiator or photoinitiator system used in the present invention [
Component (B)] includes, for example, benzophenone, N,
N'-tetramethyl-4,4°-diaminobenzophenone (Michler's ketone), N.
No−テトラエチル−4,4′−ジアミノベンゾフェノ
ン、4−メトキシ−4°−ジメチルアミノベンゾフェノ
ン、2−エチルアントラキノン、フェナントレンキノン
等の芳香族ケトン、ベンゾインメチルエーテル、ベンゾ
インエチルエーテル、ベンゾインフェニルエーテル等の
ベンゾインエーテル、メチルベンゾイン、エチルベンゾ
イン等のベンゾイン、β−(アクリジン−9−イル)ア
クリル酸のジエステル化合物、9−フェニルアクリジン
、9−ピリジルアクリジン等のアクリジン化合物、2−
(o−クロロフェニル)−4,5−ジフェとルイミダゾ
ールニ量体、2−(o−クロロフェニル)−4,5−ジ
(m−メトキシフェニル)イミダゾールニ量体、2−(
o−フルオロフェニル)−4,5−ジフェニルイミダゾ
ールニ量体、2−(o−メトキシフェニル)−4,5−
ジフェニルイミダゾールニ量体、2−(p−メトキシフ
ェニル)−4,5−ジフェニルイミダゾールニ量体、2
,4−ジ(p−メトキシフェニル)5−フェニルイミダ
ゾールニ量体、2−(2,4−ジメトキシフェニル)−
4,5−ジフェニルイミダゾールニ量体、2−(p−メ
チルメルカプトフェニル)−4,5−ジフェニルイミダ
ゾールニ量体等の2.4.5−)リアリールイミダゾー
ルニ量体なとが挙げられる。Aromatic ketones such as No-tetraethyl-4,4'-diaminobenzophenone, 4-methoxy-4°-dimethylaminobenzophenone, 2-ethylanthraquinone, and phenanthrenequinone; benzoins such as benzoin methyl ether, benzoin ethyl ether, and benzoin phenyl ether; Ethers, benzoins such as methylbenzoin and ethylbenzoin, diester compounds of β-(acridin-9-yl)acrylic acid, acridine compounds such as 9-phenylacridine and 9-pyridyl acridine, 2-
(o-chlorophenyl)-4,5-diphe and limidazole dimer, 2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl)imidazole dimer, 2-(
o-fluorophenyl)-4,5-diphenylimidazole dimer, 2-(o-methoxyphenyl)-4,5-
Diphenylimidazole dimer, 2-(p-methoxyphenyl)-4,5-diphenylimidazole dimer, 2
, 4-di(p-methoxyphenyl)5-phenylimidazole dimer, 2-(2,4-dimethoxyphenyl)-
2.4.5-) Realarylimidazole dimers such as 4,5-diphenylimidazole dimer and 2-(p-methylmercaptophenyl)-4,5-diphenylimidazole dimer.
成分(A)の配合量は、成分(A)と成分(C)の総量
100重量部に対して10〜80重量部か好ましく、3
0〜70重量部がより好ましい。この配合量が少ないと
、膜の強度が低下する傾向があり、多すぎると、感度が
低下する傾向がある。The blending amount of component (A) is preferably 10 to 80 parts by weight based on 100 parts by weight of the total amount of component (A) and component (C), and 3
More preferably 0 to 70 parts by weight. If the amount is too small, the strength of the film tends to decrease, and if it is too large, the sensitivity tends to decrease.
また、成分(A)のシロキサン系ポリマーの重量平均分
子量は、塗膜性、膜強度及び現像性の点から10,00
0〜200,000の範囲が好ましい。In addition, the weight average molecular weight of the siloxane-based polymer of component (A) is 10,000 from the viewpoint of coating properties, film strength, and developability.
A range of 0 to 200,000 is preferred.
成分(B)の配合量は、成分(A)と成分(C)の総量
100重量部に対して0.03〜20重量部が好ましく
、0.05〜10重量部がより好ましい。The blending amount of component (B) is preferably 0.03 to 20 parts by weight, more preferably 0.05 to 10 parts by weight, based on 100 parts by weight of the total amount of component (A) and component (C).
この配合量が少なすぎると、充分な感度が得られず、多
すぎると、露光の際に組成物の表面での光吸収が増加し
て内部の光硬化が不充分となることがある。If this amount is too small, sufficient sensitivity may not be obtained, and if it is too large, light absorption at the surface of the composition may increase during exposure, resulting in insufficient photocuring of the interior.
本発明に用いられる一般式(1)で表されるビニル化合
物〔成分(C)〕の、一般般式1)におけるR2の飽和
炭化水素鎖の炭素原子数は4以上である。3以下では、
揮発性が高く、不都合である。炭素原子数の上限は、通
常、20、好ましくは12である。R2としては、ブチ
ル基、sec −ブチル基、tert−ブチル基、ヘキ
シル基、オクチル基、2−エチルヘキシル基、デシル基
、ドデシル基、エイコシル基等が挙げられる。In the vinyl compound represented by the general formula (1) [component (C)] used in the present invention, the number of carbon atoms in the saturated hydrocarbon chain of R2 in the general formula 1) is 4 or more. Below 3,
It is highly volatile and inconvenient. The upper limit of the number of carbon atoms is usually 20, preferably 12. Examples of R2 include a butyl group, a sec-butyl group, a tert-butyl group, a hexyl group, an octyl group, a 2-ethylhexyl group, a decyl group, a dodecyl group, and an eicosyl group.
一般式(J)におけるnは2〜5であるか、n=1では
化合物の入手が困難であり、nか6以上では現像性が劣
る。mは1〜14であるが、mが15以上では、取り扱
いが困難で、また、耐めっき性が劣る。In general formula (J), n is 2 to 5, or if n=1, it is difficult to obtain the compound, and if n is 6 or more, developability is poor. m is 1 to 14, but when m is 15 or more, handling is difficult and plating resistance is poor.
本発明に用いられる成分(C)の化合物としては、2−
エチルへキシルカルピトールアクリレート(一般式(1
)でR工=HSR2=2−エチルヘキシル基、n=2、
m=2〜4、東亜合成化学工業社製、商品名アロニック
スM−120)、ブチルカルピトールアクリレート(一
般式(1)でR1=H,R2=ブチル基、n=2、m−
2〜4)等がある。The compound (C) used in the present invention includes 2-
Ethylhexylcarpitol acrylate (general formula (1)
), R = HSR2 = 2-ethylhexyl group, n = 2,
m = 2 to 4, manufactured by Toagosei Kagaku Kogyo Co., Ltd., trade name Aronix M-120), butyl carpitol acrylate (R1 = H, R2 = butyl group, n = 2, m-
2 to 4), etc.
成分(C)の配合量は、成分(A)と成分(C)の総量
100重量部に対して1〜40重量部が好ましく、5〜
20重量部がより好ましい。1重量部未満では、剥離性
、耐めっき性等が劣ることがあり、40重量部を超える
と、樹脂が柔らかくなりすぎ、保存安定性に問題を生じ
る。The blending amount of component (C) is preferably 1 to 40 parts by weight, and 5 to 40 parts by weight, based on 100 parts by weight of the total amount of component (A) and component (C).
20 parts by weight is more preferred. If it is less than 1 part by weight, peelability, plating resistance, etc. may be poor, and if it exceeds 40 parts by weight, the resin will become too soft, causing problems in storage stability.
本発明の感光性樹脂組成物は、必要に応じて、テトラエ
チレングリコールジメタクリレート等の(C)成分以外
のビニル化合物、可塑剤、熱重合禁止剤、染料、顔料、
充填剤、密着性付与剤等を配合することができる。The photosensitive resin composition of the present invention may optionally contain a vinyl compound other than component (C) such as tetraethylene glycol dimethacrylate, a plasticizer, a thermal polymerization inhibitor, a dye, a pigment,
Fillers, adhesion agents, etc. can be blended.
本発明の感光性樹脂組成物は、金属面、例えば銅、ニッ
ケル、クロム、好ましくは銅の上に、液状レジストとし
て塗布し、乾燥して用いるか、又は感光性フィルムとし
て用いられる。感光性樹脂組成物層の厚みは用途により
異なるが、乾燥後の厚みで10〜100μm程度である
。液状レジストとした場合は、保護フィルムとしてポリ
エチレン、ポリプロピレン等の不活性なポリオレフィン
フィルムが用いられる。感光性フィルムは、ポリエステ
ル等の支持フィルム上に感光性樹脂組成物を塗布し、乾
燥後、必要に応じてポリエチレン等の保護フィルムを積
層して得られる。感光性樹脂組成物は、必要に応じて他
の溶剤と混合して溶液として塗布してもよい。The photosensitive resin composition of the present invention is applied as a liquid resist onto a metal surface, such as copper, nickel, or chromium, preferably copper, and used after drying, or used as a photosensitive film. The thickness of the photosensitive resin composition layer varies depending on the application, but the thickness after drying is about 10 to 100 μm. When a liquid resist is used, an inert polyolefin film such as polyethylene or polypropylene is used as a protective film. The photosensitive film is obtained by coating a photosensitive resin composition on a support film such as polyester, and after drying, laminating a protective film such as polyethylene as necessary. The photosensitive resin composition may be mixed with other solvents and applied as a solution, if necessary.
前記の感光性樹脂組成物層は、アートワークと呼ばれる
ネガ又はポジマスクパターンを通して活性光線が照射さ
れた後、現像液で現像され、レジストパターンとされる
。この際用いられる活性光線としては、例えば、カーボ
ンアーク灯、超高圧水銀灯、高圧水銀灯、キセノンラン
プ等の紫外線を有効に放射するものが用いられる。The photosensitive resin composition layer is irradiated with actinic light through a negative or positive mask pattern called artwork, and then developed with a developer to form a resist pattern. As the active light rays used in this case, for example, those that effectively emit ultraviolet rays, such as carbon arc lamps, ultra-high pressure mercury lamps, high pressure mercury lamps, and xenon lamps, are used.
現像液としては、安全かつ安定であり、操作性が良好な
ものが用いられ、本発明におけるようなアルカリ現像型
のフォトレジストでは炭酸ナトリウムの希薄溶液などが
用いられる。現像の方法には、デイツプ方式、パドル方
式、スプレ一方式等があり、高圧スプレ一方式が解像度
向上のためには最も適している。As the developer, one that is safe, stable, and has good operability is used, and in the case of an alkaline development type photoresist as in the present invention, a dilute solution of sodium carbonate or the like is used. Development methods include a dip method, a paddle method, a spray method, etc., and a high-pressure spray method is most suitable for improving resolution.
現像後に行われる電気めっきには、硫酸銅めっき、ピロ
リン酸銅めっき等の銅めっき、ハイスローはんだめっき
等のはんだめっき、ワット浴(硫酸ニッケルー塩化ニッ
ケル)めっき、スルファミン酸ニッケルめっき等のニッ
ケルめっき、ハード金めっき、ソフト金めっき等の金め
つきなどがある。Electroplating performed after development includes copper plating such as copper sulfate plating and copper pyrophosphate plating, solder plating such as high-slow solder plating, nickel plating such as Watt bath (nickel sulfate-nickel chloride) plating, and nickel sulfamate plating. There are gold platings such as gold plating and soft gold plating.
次に、本発明を実施例により詳しく説明するが、本発明
はこれらによって制限されるものではない。Next, the present invention will be explained in detail with reference to Examples, but the present invention is not limited thereto.
実施例1
メタクリル酸/メタクリル酸メチル/メタクリル酸ブチ
ル/アクリル酸2−エチルヘキシル共重合体(重量比2
515015/2 o、平均重量分子量8万)の40重
量%メチルセロソルブ/トルエン(重量比6/4)溶液
150g(固型分60g)、ビス−4−(N、N−ジエ
チルアミノ)ベンゾフェノン0.1g、ベンジルジメチ
ルケタール(チバガイギー社製、商品名イルガキュアー
651)5g、ベンゾフェノン4g、トリブロモメチル
フェニルスルホン1g10イコクリスタルバイオレツト
1g1マラカイトグリーン0.05g1メチル工チルケ
トン15g、)ルエン10g1メタノール3g及びビス
フェノールAポリオキシエチレンジメタクリレート(新
中村化学工業社、商品名BPE−10)20gを配合し
て、成分(A)と(B)を含む溶液を得た。この溶液に
第1表に示すように、2−エチルへキシルカルピトール
アクリレート(東亜合成化学工業社、商品名M−120
)20gを溶解させて感光性樹脂組成物溶液を得た。Example 1 Methacrylic acid/methyl methacrylate/butyl methacrylate/2-ethylhexyl acrylate copolymer (weight ratio 2
515015/2 o, average weight molecular weight 80,000), 150 g of 40 wt% methyl cellosolve/toluene (weight ratio 6/4) solution (solid content 60 g), 0.1 g of bis-4-(N,N-diethylamino)benzophenone , benzyl dimethyl ketal (manufactured by Ciba Geigy, trade name Irgacure 651) 5 g, benzophenone 4 g, tribromomethyl phenyl sulfone 1 g 10 icocrystal violet 1 g 1 malachite green 0.05 g 1 methyl engineered methyl ketone 15 g, ) toluene 10 g 1 methanol 3 g and bisphenol A poly 20 g of oxyethylene dimethacrylate (Shin Nakamura Chemical Industries, Ltd., trade name BPE-10) was blended to obtain a solution containing components (A) and (B). As shown in Table 1, 2-ethylhexylcarpitol acrylate (Toagosei Kagaku Kogyo Co., Ltd., trade name M-120) was added to this solution.
) was dissolved to obtain a photosensitive resin composition solution.
次いで、この感光性樹脂組成物溶液を25μm厚のポリ
エチレンテレフタレートフィルム上に均一に塗布し、1
00℃の熱風対流式乾燥機で約10分間乾燥して感光性
フィルムを得た。なお、感光性樹脂組成物層の乾燥後の
膜厚は50μmであった。Next, this photosensitive resin composition solution was uniformly applied onto a 25 μm thick polyethylene terephthalate film, and 1
A photosensitive film was obtained by drying for about 10 minutes in a hot air convection dryer at 00°C. Note that the film thickness of the photosensitive resin composition layer after drying was 50 μm.
一方、銅箔(厚さ35μm)を両面に積層したガラスエ
ポキシ材である銅張り積層板(日立化成工業社製、商品
名MCL−E−61)の銅表面を#800相当のブラシ
を持つ研磨機(三啓社製)を用いて研磨し、水洗して空
気流で乾燥し、得られる銅張り積層板を80℃に加温し
、その銅面上に前記感光性樹脂組成物層を120°Cに
加熱しながら積層した。On the other hand, the copper surface of a copper-clad laminate (manufactured by Hitachi Chemical Co., Ltd., trade name MCL-E-61), which is a glass epoxy material with copper foil (thickness 35 μm) laminated on both sides, was polished with a brush equivalent to #800. The copper-clad laminate obtained by polishing with a machine (manufactured by Sankeisha), washing with water, and drying with air flow was heated to 80°C, and the photosensitive resin composition layer was applied on the copper surface for 120°C. The layers were laminated while heating to °C.
次いで、このようにして得られた基板に、ネガフィルム
を使用し、8kWの高圧水銀灯(オーク製作所社製、H
MW−201B)で60mJ/cdの露光を行った。そ
の際感度を評価できるように、光透過量が段階的に少な
(なるように作られたネガフィルム(光学密度0.05
を1段目とし、1段ごとに光学密度0.15ずつ増加す
るステップタブレット)を用いた。Next, a negative film was applied to the substrate thus obtained, and an 8 kW high-pressure mercury lamp (manufactured by Oak Seisakusho Co., Ltd., H
MW-201B) was used for exposure at 60 mJ/cd. At that time, in order to evaluate the sensitivity, the negative film (optical density 0.05
was used as the first stage, and a step tablet in which the optical density increased by 0.15 with each stage was used.
次いで、ポリエチレンテレフタレートフィルムを除去し
、30℃で1%炭酸ナトリウム水溶液をスプレーするこ
とにより未露光部を除去した。その際、未露光部が除去
される時間を測定し、その値を現像時間として第1表に
示した。The polyethylene terephthalate film was then removed, and the unexposed areas were removed by spraying a 1% aqueous sodium carbonate solution at 30°C. At that time, the time taken for the unexposed areas to be removed was measured, and the values are shown in Table 1 as the development time.
さらに、銅張り積層板上に形成された光硬化膜のステッ
プタブレットの段数を測定することにより、感光性樹脂
組成物の感度を評価した。その結果を第1表に示す。感
度は、ステップタブレットの段数で示され、このステッ
プタブレットの段数が高いほど、感度が高いことを示し
ている。Furthermore, the sensitivity of the photosensitive resin composition was evaluated by measuring the number of step tablets of the photocured film formed on the copper-clad laminate. The results are shown in Table 1. Sensitivity is indicated by the number of steps on the step tablet, and the higher the number of steps on the step tablet, the higher the sensitivity.
次いで、現像処理したものを脱脂後、流水水洗を1分間
行い、次いで過酸化水素/硫酸、10/20溶量%水溶
液中に2分間浸漬した。さらに、流水水洗を1分間行っ
た後、10%硫酸水溶液浴に1分間浸漬し、再び流水水
洗を1分間行った。Next, the developed product was degreased, washed with running water for 1 minute, and then immersed in a hydrogen peroxide/sulfuric acid, 10/20 vol. % aqueous solution for 2 minutes. Furthermore, after washing with running water for 1 minute, it was immersed in a 10% sulfuric acid aqueous solution bath for 1 minute, and washing with running water was performed again for 1 minute.
次いで、硫酸銅めっき浴〔硫酸銅75g/]、硫酸19
0 g/I!、塩素イオン75 ppm、カバーグリー
ムPCM(メルチツク社製、商品名>5ml/l〕に入
れ、硫酸銅めっきを25℃、3A/dm2で40分間行
った。硫酸銅めっき終了後直ちに水洗し、続いて、10
%ホウフッ化水素酸水溶液浴に1分間浸漬し、続いて半
田めっき浴〔45%ホウフッ化錫64mj#、45%ホ
ウフッ化鉛22−/I!、42%ホウフッ化水素酸20
0m1/l、プルティンLAコンダクティビティソルト
(メルテックス社商品名)20g#、プルティンLAス
ターター(メルテックス社商品名)40mj/Iりに入
れ、25℃、2A/dm2で20分間行った。Next, copper sulfate plating bath [copper sulfate 75g/], sulfuric acid 19
0 g/I! Copper sulfate plating was performed at 25°C and 3A/dm2 for 40 minutes at 25°C and 3A/dm2 for 40 minutes. 10
% borofluoric acid aqueous solution bath for 1 minute, followed by solder plating bath [45% tin borofluoride 64mj#, 45% lead borofluoride 22-/I! , 42% fluoroboric acid 20
0ml/l, Plutin LA Conductivity Salt (trade name, Meltex), 20g #, Pultin LA Starter (tradename, Meltex) 40mj/I, and the mixture was heated at 25°C and 2A/dm2 for 20 minutes.
半田めっき終了後、水洗を行い、乾燥した。After completing solder plating, it was washed with water and dried.
耐めっき性を調べるため、乾燥後直ちにセロテープを貼
り、これを垂直方向に引き剥がし、レジストの剥がれの
有無を調べた(テープテスト)。To examine plating resistance, sellotape was applied immediately after drying, and this was peeled off in the vertical direction to check for peeling of the resist (tape test).
この後、上方から光学顕微鏡で半田めっきのもぐりの有
無を観察した。半田めっきのもぐりを生じた場合は、透
明なレジストを介してその下部に観察される。その結果
を第1表に示した。After that, the presence or absence of any cracks in the solder plating was observed from above using an optical microscope. If solder plating cracks, it can be observed underneath through the transparent resist. The results are shown in Table 1.
また、これとは別にフレキシブル基板(MCL−I−6
7、日立化成工業社製)に感光性フィルムを積層し、前
記と同様に60mJ/carの露光を行った。露光後、
JIS K5400に従い、クロスカット試験をした。In addition, a flexible circuit board (MCL-I-6
7, manufactured by Hitachi Chemical Co., Ltd.) was laminated with a photosensitive film, and exposed to light at 60 mJ/car in the same manner as above. After exposure,
A cross-cut test was conducted according to JIS K5400.
その後、直径6肥の鉄棒を用いてマンドレル試験をし、
クロスカット試験をした部分の観察をした。レジストが
脆い場合、マンドレル試験によりレジストが剥がれ落ち
、クロスカット試験結果は低下する。その結果を第1表
に示した。After that, a mandrel test was performed using an iron rod with a diameter of 6 yen,
The area where the cross-cut test was performed was observed. If the resist is brittle, the resist will peel off during the mandrel test and the crosscut test results will deteriorate. The results are shown in Table 1.
第1表の結果から実施例1の感光性樹脂組成物は感度が
良好であり、耐めっき性も良好であり、マンドレル試験
後のクロスカット性低下がないことから柔軟な硬化膜を
生じたことが示される。From the results in Table 1, the photosensitive resin composition of Example 1 had good sensitivity, good plating resistance, and produced a flexible cured film because there was no decrease in cross-cutting properties after the mandrel test. is shown.
実施例2及び比較例1〜2
実施例1と同様にして得た成分(A)と(B)を含む溶
液に対して第1表に示したように本発明における成分(
C)のビニル化合物及び該ビニル化合物に該当しない化
合物を加えて、各々の感光性樹脂組成物溶液を得、これ
らについて実施例1と同様に評価した結果を第1表に示
した。Example 2 and Comparative Examples 1 to 2 The components (A) and (B) in the present invention were added as shown in Table 1 to a solution containing components (A) and (B) obtained in the same manner as in Example 1.
The vinyl compound of C) and a compound not corresponding to the vinyl compound were added to obtain each photosensitive resin composition solution, and these were evaluated in the same manner as in Example 1. The results are shown in Table 1.
(以下余白)
〔発明の効果〕
本発明の感光性樹脂組成物及びこれを用いた感光性フィ
ルムによって、耐めっき性及び柔軟性に優れた感光層を
得ることができる。(The following is a blank space) [Effects of the Invention] The photosensitive resin composition of the present invention and the photosensitive film using the same can provide a photosensitive layer with excellent plating resistance and flexibility.
−・ヨ:・T-・Yo:・T
Claims (2)
、 (B)光重合開始剤又は光重合開始剤系及び(C)一般
式(I) ▲数式、化学式、表等があります▼(I) 〔式中R_1は水素又はメチル基を表し、R_2は炭素
原子数4以上の飽和炭化水素鎖を表し、nは2〜5の整
数を表し、mは1〜14の整数を表す〕で表されるビニ
ル化合物 を含有してなることを特徴とする感光性樹脂組成物。1. (A) Carboxyl group-containing film properties-imparting polymer, (B) Photoinitiator or photoinitiator system, and (C) General formula (I) ▲There are mathematical formulas, chemical formulas, tables, etc.▼(I) [R_1 in the formula represents hydrogen or a methyl group, R_2 represents a saturated hydrocarbon chain having 4 or more carbon atoms, n represents an integer of 2 to 5, and m represents an integer of 1 to 14]. A photosensitive resin composition characterized by containing:
の層を積層してなる感光性フィルム。2. A photosensitive film comprising a layer of the photosensitive resin composition according to claim 1 laminated on a support film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32584690A JPH04195050A (en) | 1990-11-28 | 1990-11-28 | Photosensitive resin composition and photosensitive film using same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32584690A JPH04195050A (en) | 1990-11-28 | 1990-11-28 | Photosensitive resin composition and photosensitive film using same |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04195050A true JPH04195050A (en) | 1992-07-15 |
Family
ID=18181274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32584690A Pending JPH04195050A (en) | 1990-11-28 | 1990-11-28 | Photosensitive resin composition and photosensitive film using same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04195050A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006129469A1 (en) * | 2005-05-30 | 2006-12-07 | Hitachi Chemical Company, Ltd. | Photosensitive resin composition, photosensitive element employing the same, method of forming resist pattern, and process for producing printed wiring board |
US8007983B2 (en) | 2006-03-31 | 2011-08-30 | Hitachi Chemical Company, Ltd. | Photosensitive resin composition, photosensitive element using same, method for forming resist pattern, and method for producing printed wiring board |
US8101339B2 (en) | 2005-10-25 | 2012-01-24 | Hitachi Chemical Company, Ltd. | Photosensitive resin composition, photosensitive element comprising the same, method of forming resist pattern, and process for producing printed wiring board |
-
1990
- 1990-11-28 JP JP32584690A patent/JPH04195050A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006129469A1 (en) * | 2005-05-30 | 2006-12-07 | Hitachi Chemical Company, Ltd. | Photosensitive resin composition, photosensitive element employing the same, method of forming resist pattern, and process for producing printed wiring board |
JPWO2006129469A1 (en) * | 2005-05-30 | 2008-12-25 | 日立化成工業株式会社 | Photosensitive resin composition, photosensitive element using the same, resist pattern forming method, and printed wiring board manufacturing method |
KR100935780B1 (en) * | 2005-05-30 | 2010-01-06 | 히다치 가세고교 가부시끼가이샤 | Photosensitive resin composition, photosensitive element employing the same, method of forming resist pattern, and process for producing printed wiring board |
JP4586067B2 (en) * | 2005-05-30 | 2010-11-24 | 日立化成工業株式会社 | Photosensitive resin composition, photosensitive element using the same, resist pattern forming method, and printed wiring board manufacturing method |
US8101339B2 (en) | 2005-10-25 | 2012-01-24 | Hitachi Chemical Company, Ltd. | Photosensitive resin composition, photosensitive element comprising the same, method of forming resist pattern, and process for producing printed wiring board |
US8007983B2 (en) | 2006-03-31 | 2011-08-30 | Hitachi Chemical Company, Ltd. | Photosensitive resin composition, photosensitive element using same, method for forming resist pattern, and method for producing printed wiring board |
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