JPH0419478Y2 - - Google Patents

Description

[Detailed explanation of the idea] [Industrial application field] The present invention relates to an oil rotary vacuum pump.

[Conventional technology]

In an oil rotary vacuum pump, the entire pump is smeared with oil, and lubrication and airtightness are maintained by the oil film that forms when oil gradually enters the inside of the container, and exhaust is performed by the rotation of the rotor.

The internal structure of a typical oil rotary vacuum pump is as shown in FIG. That is, in Fig. 2, 1 is the motor, 2 is the pump unit,
It mainly consists of cylinders, rotors, vanes, etc. The rotor and vanes in the pump unit 2 are rotated by the motor 1,
Gas sucked in through an intake port 3 connected to a vacuum chamber is discharged through an exhaust port 4. Oil is contained in a pump case 8 that also serves as an oil tank, and is sucked up by an oil pump 5, passes through an oil circulation pipe 6, and is sent to an oil distribution valve 9.
Oil is supplied from the oil distribution valve 9 to the inside of the pump unit 2 and to the exhaust valve, oil seal, etc. on the pump unit 2. Only a portion of the oil is distributed and used, and the remaining surplus oil 12 is returned to the pump case 8 as it is. The surplus oil varies depending on the model, but is, for example, about 25 to 40% of the total.
Further, the oil sent into the pump unit 2 is also returned into the pump case 8 together with the exhaust gas. The oil repeats this cycle.

The oil is observed from the outside by an oil level gauge 7 made of a transparent material such as glass or plastic, and the remaining amount of oil, dirt, degree of deterioration, etc. are determined.

[The problem that the idea aims to solve]

When CVD, etching, etc. are performed in a vacuum chamber (not shown) connected to an oil rotary vacuum pump, a large amount of powder is generated. In such a case, there is a problem in that the powder discharged from the vacuum chamber enters the vacuum pump and adheres to the inner surface of the oil level gauge, making it impossible to observe the state of the oil. In some cases, problems may occur if the oil rotary vacuum pump continues to be operated without realizing that there is a lack of oil. There are sensors that use floats to check the oil level, but this increases costs.

The present invention has been made in view of the above points, and it is an object of the present invention to provide an oil level gauge that can be easily attached to a conventional oil rotary vacuum pump at low cost.

[Means to solve the problem]

The above object, according to the present invention, includes a casing;
In an oil rotary vacuum pump comprising an oil pump and an oil level gauge fixed to the wall of the casing and made of a transparent material, the oil pump circulates oil. This is achieved by an oil rotary vacuum pump characterized in that the oil is discharged to the inner surface of the oil level gauge through a shower pipe.

[Effect]

By providing an oil level gauge configured as above, it constantly washes away deposits and maintains transparency, allowing you to closely observe the oil condition inside the pump, and replenish or replace the oil at the appropriate time. can.

〔Example〕

An embodiment of the present invention will be described with reference to FIG. 1.A shower pipe 10 is provided branching off from the oil distribution valve 9 of the conventional oil rotary vacuum pump shown in FIG. Set the oil level gauge 7 so that the oil hits the center of the upper part of the inner surface. The amount of oil sucked up by the oil pump 5 is quite large, and about 60 to 75% of it is supplied from the oil distribution valve 9 into the pump unit 2, so the oil flows out from the tip of the shower pipe 10 quite vigorously. It flows out. The oil that hits the upper center of the inner surface of the oil level gauge 7 flows down from there while spreading out in a fan shape, thereby removing powder and the like adhering to the inner surface of the oil level gauge 7 as if being washed away.
Therefore, the oil level 1 from the outside of the oil level gauge 7
1 can be clearly seen and the amount of remaining oil, dirt, and degree of deterioration can be observed, so oil can be replenished or replaced at an appropriate time.

When the force of the oil flowing out from the shower pipe 10 is not very strong, the diameter of the tip of the shower pipe 10 may be narrowed to apply pressure to the oil so that the oil hits the shower pipe.

The embodiments of the present invention have been described above, but of course the present invention is not limited thereto, and various modifications can be made based on the technical idea of the present invention.

For example, in the embodiment, the shower pipe 10 is branched from the oil distribution valve 9, but the oil pump 5
It is possible to branch from anywhere immediately after .

The material of the oil level gauge 7 may be any material that allows the oil surface 11 to be seen from the outside, and may be transparent plastic or the like.

If the oil level gauge 7 is a communicating pipe, the tip of the shower pipe 10 is inserted into the communicating pipe and the oil is set to flow onto the inner wall of the communicating pipe.

As an application of the present invention, a shower pipe can be provided so that oil hits each part inside the pump case 8, and it can be used to remove powder etc. accumulated inside the pump case.

[Effect of idea]

Since the present invention is configured as described above, it produces the effects described below.

In other words, the excess oil from the distribution valve, which was not used in conventional oil rotary vacuum pumps, can be effectively used by simply attaching a shower pipe, which removes powder etc. that adheres to the inner surface of the oil level gauge and reduces the oil level. The amount of oil remaining, dirt, and degree of deterioration can be observed, allowing you to replenish or replace the oil at an appropriate time. Therefore, there is no need for a sensor to check the amount of remaining oil.

In addition, since the oil is constantly flowing inside the oil level gauge, it is possible to prevent powder from adhering to the gauge, and the gauge is not directly exposed to reactive gases such as hydrofluoric acid, so the gauge is safe. Corrosion can also be prevented.

Furthermore, it is possible to cool the oil by applying the oil to the inner wall surface of the gauge or the like.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the present invention, and FIG. 2 is a sectional view showing the internal structure of a conventional oil rotary vacuum pump. In the figure, 5... oil pump, 7...
Oil level gauge, 9...Oil distribution valve, 10
...Shower pipe, 11...Oil surface.

Claims (1)

[Claims for Utility Model Registration] (1) An oil rotary vacuum comprising a casing, an oil pump, and an oil level gauge fixed to the wall of the casing and made of a transparent material, and the oil pump circulates oil. An oil rotary vacuum pump, characterized in that a part of the oil sucked up by the oil pump flows out to the inner surface of the oil level gauge through a shower pipe. (2) The oil rotary vacuum pump according to claim 1, wherein the shower pipe is connected to an oil distribution valve connected to a discharge port of the oil pump.