JPH041942A - Reflected light measuring element - Google Patents
Reflected light measuring elementInfo
- Publication number
- JPH041942A JPH041942A JP10251090A JP10251090A JPH041942A JP H041942 A JPH041942 A JP H041942A JP 10251090 A JP10251090 A JP 10251090A JP 10251090 A JP10251090 A JP 10251090A JP H041942 A JPH041942 A JP H041942A
- Authority
- JP
- Japan
- Prior art keywords
- light
- reflected light
- reflected
- emitting element
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 abstract description 12
- 230000003287 optical effect Effects 0.000 abstract description 11
- 239000004065 semiconductor Substances 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 238000012544 monitoring process Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000003760 hair shine Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Optical Head (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、反射光測定用素子に関する。より詳細には、
光ディスク等に光をあて、反射光を測定する反射光測定
用素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an element for measuring reflected light. More specifically,
The present invention relates to a reflected light measurement element that shines light onto an optical disc or the like and measures reflected light.
従来の技術
第５図に、反射光測定に使用される従来の装置の一例を
示す。第５図の装置は、特公平１−５８４５３号公報に
開示されている装置であり、光源５１と、光源５１の発
する光の状態を調整し、試料台５６上の試料５５に誘導
するコンデンサレンズ５２、絞り５３、ハーフミラ−５
７およびレンズ５４と、試料５５からの反射光を光検知
器６１に誘導するハーフミラ−５８と、光検知器６１に
接続されたパワーメータ６２とを具備する。ハーフミラ
−５８を透過した光は、撮像管５９に入射し、ブラウン
管６０て画像として表示される。BACKGROUND OF THE INVENTION FIG. 5 shows an example of a conventional device used for measuring reflected light. The device shown in FIG. 5 is the device disclosed in Japanese Patent Publication No. 1-58453, and includes a light source 51 and a condenser lens that adjusts the state of the light emitted by the light source 51 and guides it to the sample 55 on the sample stage 56. 52, aperture 53, half mirror 5
7 and a lens 54, a half mirror 58 that guides reflected light from the sample 55 to a photodetector 61, and a power meter 62 connected to the photodetector 61. The light transmitted through the half mirror 58 enters an image pickup tube 59 and is displayed as an image on a cathode ray tube 60.
上記の装置では、光源５１の発する光をコンデンサレン
ズ５２、絞り５３、ハーフミラ−５７およびレンズ５４
を使用して試料５５に適当な光を当てる。ブラウン管６
０で試料５５の測定部位を確認しながら、試料台５６を
操作し、反射光の測定を行う。In the above device, the light emitted from the light source 51 is transmitted through the condenser lens 52, the aperture 53, the half mirror 57 and the lens 54.
The sample 55 is illuminated with appropriate light. Braun tube 6
While confirming the measurement site of the sample 55 at 0, the sample stage 56 is operated to measure the reflected light.
発明が解決しようとする課題
上記従来の装置では、光源と光検知器が離れて配置され
ていた。そのため、光源から発した光を、試料表面の測
定部位で適性に反射させ、光検知器まで誘導するのに、
精密な光軸調整が必要であった。例えば、上記の装置で
は、ハーフミラ−を用いて、光軸を精密に調整する必要
があった。また、光学系のＳ品点数が多５）だと１小型
化、モジュール化が困難であった。Problems to be Solved by the Invention In the conventional device described above, the light source and the photodetector are placed apart. Therefore, in order to properly reflect the light emitted from the light source at the measurement site on the sample surface and guide it to the photodetector,
Precise optical axis adjustment was required. For example, in the above device, it was necessary to precisely adjust the optical axis using a half mirror. Furthermore, if the number of S-type optical systems is large5), it is difficult to downsize and modularize the optical system.
そこで、本発明の目的は、上記従来技術の問題点を解決
して、反射光測定装置を小型化できる反射光測定用素子
を提供することにある。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a reflected light measuring element that solves the problems of the prior art described above and can reduce the size of a reflected light measuring device.
課頌を解決するための手段
本発明に従うと、対象物に対して光を照射する発光素子
と該対象物かろの反射光を測定する受光素子とが、単一
の筺体内に近接して配置されていることを特徴とする反
射光測定用素子が提供される。Means for Solving the Issues According to the present invention, a light emitting element that irradiates light onto an object and a light receiving element that measures light reflected from the object are arranged close to each other in a single housing. Provided is a reflected light measuring element characterized in that:
作用
本発明の反射光測定用素子は、光源の発光素子と測定用
受光素子とが、単一の筺体内に近接して配置されている
ところにその主要な特徴がある。Function: The main feature of the reflected light measuring element of the present invention is that the light emitting element of the light source and the measuring light receiving element are arranged close to each other in a single housing.
本発明の反射光測定用素子は、光源の発光素子と測定用
受光素子とが近接しているので、光源の照射光の光軸を
調整すると、自動的に測定用受光素子に反射光が入射す
るよう光軸が調整される。In the reflected light measuring element of the present invention, the light emitting element of the light source and the measuring light receiving element are close to each other, so when the optical axis of the irradiated light from the light source is adjusted, the reflected light automatically enters the measuring light receiving element. The optical axis is adjusted so that
出力モニタ用受光素子を同一の筺体内に具備する従来の
発光素子を使用して、本発明の反射光測定用素子の動作
の確認を行った。第３図に、使用した装置を示す。第３
図の装置では、電源９および電流計ｌＯが接続された従
来の発光素子１８が具備する８カモニタ用受光素子と、
電流計１７が接続された受光素子１６とで発光素子１８
が発する光の反射光の測定を同時に行う。発光素子１８
が発する光は、ハーフミラ−１５により、図面下方へ屈
折され、レンズ１１で集光されて試料１２の表面に達し
、試料１２の表面で反射されて、ハーフミラ−１５で反
射光測定用素子１および受光素子１６に振り分けられる
。The operation of the reflected light measuring element of the present invention was confirmed using a conventional light emitting element that includes a light receiving element for output monitoring in the same housing. Figure 3 shows the equipment used. Third
In the device shown in the figure, a conventional light emitting element 18 to which a power source 9 and an ammeter 1O are connected includes eight monitor light receiving elements,
The light receiving element 16 connected to the ammeter 17 and the light emitting element 18
At the same time, the reflected light of the light emitted by the sensor is measured. Light emitting element 18
The light emitted is refracted downward in the drawing by the half mirror 15, condensed by the lens 11, reaches the surface of the sample 12, reflected by the surface of the sample 12, and reflected by the half mirror 15. The light is distributed to the light receiving element 16.
試料１２は、試料台１３に搭載され、マイクロコンピュ
ータ１４は、電源９および試料台１３を制御し、電流計
１０および１７の測定値を記録する。The sample 12 is mounted on a sample stage 13, and the microcomputer 14 controls the power supply 9 and the sample stage 13, and records the measured values of the ammeters 10 and 17.
第３図の装置を使用して、表面の一部がクロム蒸着され
ているガラス板の表面の反射光を測定した。試料台１３
にガラス板を搭載して、ガラス板を微速で移動させ、表
面のクロムが蒸着されていない部分からクロム蒸着され
ている部分へかけて、連続的に反射光を測定したつ第４
図に測定結果を示す。発光素子１８に内蔵された受光素
子を使用した測定でも、従来のものと同様、グラフはガ
ラス面からクロム蒸着面の境界線を境に鋭く立ち上がっ
ている。発光素子１８に内蔵された受光素子は、上述の
ように、本来発光素子１８の出力モニタ用であり、反射
光測定用ではない。本発明の反射光測定用素子では、測
定専用の受光素子を具備するので、より容易に反射光を
測定することが可能である。Using the apparatus shown in FIG. 3, the reflected light from the surface of a glass plate on which a portion of the surface was deposited with chromium was measured. Sample stand 13
A glass plate was mounted on the glass plate, the glass plate was moved at a very slow speed, and the reflected light was continuously measured from the part of the surface where chromium was not deposited to the part where chromium was deposited.
The measurement results are shown in the figure. Even in measurements using the light-receiving element built into the light-emitting element 18, the graph rises sharply at the boundary line from the glass surface to the chromium-deposited surface, similar to the conventional one. As described above, the light receiving element built into the light emitting element 18 is originally used for monitoring the output of the light emitting element 18, and is not used for measuring reflected light. Since the reflected light measuring element of the present invention includes a light receiving element exclusively for measurement, it is possible to more easily measure reflected light.
尚、第４図のグラフにおいて、発光素子１８に内蔵され
た受光素子による測定結果が、Ａ→ＢおよびＣ−Ｄにか
けて下降するのは、光源の発光素子を定電流制御したた
めであり、定電流制御では発光素子の光出力が、時間と
ともに減少するからである。In addition, in the graph of FIG. 4, the reason why the measurement result by the light receiving element built into the light emitting element 18 decreases from A to B and CD is because the light emitting element of the light source is controlled with a constant current. This is because in the control, the light output of the light emitting element decreases over time.
本発明の反射光測定用素子では、反射光が光源の発光素
子に入射せず、測定用受光素子に効率よく入射する構成
となっていることが好ましい。また、本発明の反射光測
定用素子は、測定用受光素子に加えて、発光素子の出力
モニタ用の受光素子を備えることも好ましい。The reflected light measuring element of the present invention is preferably configured such that the reflected light does not enter the light emitting element of the light source, but efficiently enters the measuring light receiving element. Moreover, it is also preferable that the reflected light measuring element of the present invention includes a light receiving element for monitoring the output of the light emitting element in addition to the measuring light receiving element.
以下、本発明を実施例により、さらに詳しく説明するが
、以下の開示は本発明の単なる実施例に過ぎず、本発明
の技術的範囲をなんら制限するものではない。EXAMPLES Hereinafter, the present invention will be explained in more detail with reference to Examples, but the following disclosure is merely an example of the present invention and does not limit the technical scope of the present invention in any way.
実施例
第１図（ａ）に、本発明の反射光測定用素子の一例の概
念図を示す。第１図（ａ）の反射光測定用素子は、窓８
を備える気密な半導体パッケージ７内に光源の発光素子
２および測定用受光素子３を具備する。Embodiment FIG. 1(a) shows a conceptual diagram of an example of a reflected light measuring element of the present invention. The element for measuring reflected light in FIG. 1(a) is the window 8
A light emitting element 2 of a light source and a light receiving element 3 for measurement are provided in an airtight semiconductor package 7 having a light source.
発光素子２は、気密を保ったまま半導体パッケージ７を
貫通しているアノード電極４およびコモンカソード電極
５に接続されている。一方、受光素子３は、同様に気密
を保って半導体パッケージ７を貫通しているアノード電
極６およびコモンカソード電極５に接続されている。ア
ノード電極４およびコモンカソード電極５の間には電源
９が接続され、アノード電極６およびコモンカソード電
極５の間には電流計１０が接続されている。The light emitting element 2 is connected to an anode electrode 4 and a common cathode electrode 5 that penetrate the semiconductor package 7 while maintaining airtightness. On the other hand, the light-receiving element 3 is connected to an anode electrode 6 and a common cathode electrode 5, which penetrate through the semiconductor package 7 while maintaining airtightness. A power source 9 is connected between the anode electrode 4 and the common cathode electrode 5, and an ammeter 10 is connected between the anode electrode 6 and the common cathode electrode 5.
発光素子２と受光素子３とは、半導体パッケージ７の中
心線を間にはさんで発光面および受光面が互いに内側に
傾斜して配置されており、発光素子２の発する光がレン
ズ１１で集光されて、試料１２表面で反射して、窓８か
ら受光素子３の受光面に入射するようになっている。The light-emitting element 2 and the light-receiving element 3 are arranged with the center line of the semiconductor package 7 in between, with the light-emitting surface and the light-receiving surface tilting inward to each other. The light is emitted, is reflected on the surface of the sample 12, and enters the light-receiving surface of the light-receiving element 3 through the window 8.
第１図ら）に、本発明の反射光測定用素子のより具体的
な構成例を示す。第１図（ｂ）の反射光測定用素子は、
窓８を備える気密な半導体パッケージ７内に光源の発光
素子２、測定用受光素子３１およびモニタ用受光素子３
２を具備する。発光素子２と受光素子３１とは、半導体
パッケージ７の中心線を間にはさんで発光面および受光
面が互いに内側に傾斜して配置されている。これにより
、発光素子２の発する光が試料に反射して戻ってきた時
に、窓８から受光素子３１の受光面に効率よく入射する
ようになっている。一方、受光素子３２は、発光素子２
の後側に配置され、発光素子２の出力をモニタする。発
光素子２、受光素子３１および３２は、遮光隔壁２１〜
２３により、不用な光が入射しないよう隔てられている
。また、図示されていないが、発光素子２、受光素子３
１および３２は、気密を保って半導体パッケージ７を貫
通している電極５に接続されている。FIG. 1 et al.) show a more specific structural example of the reflected light measuring element of the present invention. The reflected light measuring element in FIG. 1(b) is
A light emitting element 2 of a light source, a measuring light receiving element 31 and a monitoring light receiving element 3 are placed in an airtight semiconductor package 7 having a window 8.
2. The light-emitting element 2 and the light-receiving element 31 are arranged with the center line of the semiconductor package 7 in between, such that the light-emitting surface and the light-receiving surface are inclined inward to each other. Thereby, when the light emitted by the light-emitting element 2 is reflected by the sample and returns, it is efficiently incident on the light-receiving surface of the light-receiving element 31 through the window 8. On the other hand, the light receiving element 32 is similar to the light emitting element 2.
It monitors the output of the light emitting element 2. The light emitting element 2 and the light receiving elements 31 and 32 are connected to the light shielding partition walls 21 to 32.
23 to prevent unnecessary light from entering. Also, although not shown, a light emitting element 2, a light receiving element 3
1 and 32 are connected to the electrode 5 which penetrates the semiconductor package 7 in an airtight manner.
第２図に、本発明の反射光測定用素子を使用した反射光
測定装置の概略図を示す。第２閏の反射光測定装置は、
電源９および電流計１０が接続された本発明の反射光測
定用素子１と、反射光測定用素子１が発する光を試料１
２表面に集光するレンズ１１と、試料１２を搭載し、試
料１２を微小な距離で移動させることが可能な試料台１
３と、電源９および試料台１３を制御し、電流計１０の
測定値を記録するマイクロコンピュータ１４を具備する
。FIG. 2 shows a schematic diagram of a reflected light measuring device using the reflected light measuring element of the present invention. The second leap reflected light measuring device is
The reflected light measuring element 1 of the present invention, to which a power source 9 and an ammeter 10 are connected, and the light emitted by the reflected light measuring element 1 are connected to a sample 1.
2. A sample stage 1 that is equipped with a lens 11 that focuses light on two surfaces and a sample 12 and that can move the sample 12 over a small distance.
3, and a microcomputer 14 that controls the power source 9 and sample stage 13 and records the measured values of the ammeter 10.
発明の詳細
な説明したように、本発明の反射光測定用素子は、同一
の筺体内に照射用発光素子と測定用受光素子とが近接し
て配置されている。従って、単一の素子で光照射と反射
光受光を実現でき、光軸合せが容易になるとともに、系
を小型化することが可能になる。As described in detail, the reflected light measuring element of the present invention has a light emitting element for irradiation and a light receiving element for measurement disposed close to each other in the same housing. Therefore, light irradiation and reflected light reception can be realized with a single element, optical axis alignment becomes easy, and the system can be miniaturized.
第１図（ａ）およびら）は、それぞれ本発明の反射光測
定用素子の概念図であり、
第２図は、本発明の反射光測定用素子を使用した反射光
測定装置の概略図であり、
第３図は、本発明の反射光測定装置の有効性を確認する
ために使用した装置の概略図であり、第４図は、第３図
の装置による測定結果を示すグラフであり、
第５図は、従来の反射光測定装置の概略図である。
〔主な参照番号〕
ｌ・・・反射光測定用素子、
２・・・発光素子、 ３・・・受光素子、４．６・・・
アノード電極、
５ ・
７ ・
８ ・
ｌＯ・
１２・
１４・
・コモンカソード
・半導体パッケージ、
・窓、 ９・・・電源、
・電流計、 １１・・・レンズ、
・試料、 １３・・・試料台、
・マイクロコンピュータ
特許出願人 住友電気工業株式会社FIGS. 1(a) and 1) are conceptual diagrams of the reflected light measuring element of the present invention, and FIG. 2 is a schematic diagram of a reflected light measuring device using the reflected light measuring element of the present invention. 3 is a schematic diagram of the device used to confirm the effectiveness of the reflected light measuring device of the present invention, and FIG. 4 is a graph showing the measurement results by the device of FIG. 3, FIG. 5 is a schematic diagram of a conventional reflected light measuring device. [Main reference numbers] l... Element for measuring reflected light, 2... Light emitting element, 3... Light receiving element, 4.6...
Anode electrode, 5, 7, 8, 1O, 12, 14, ・Common cathode/semiconductor package, ・Window, 9...Power source, ・Ammeter, 11...Lens, ・Sample, 13...Sample stage・Microcomputer patent applicant Sumitomo Electric Industries, Ltd.
Claims (1)
の反射光を測定する受光素子とが、単一の筺体内に近接
して配置されていることを特徴とする反射光測定用素子
。A device for measuring reflected light, characterized in that a light-emitting element that irradiates light to an object and a light-receiving element that measures light reflected from the object are arranged in close proximity within a single housing. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10251090A JPH041942A (en) | 1990-04-18 | 1990-04-18 | Reflected light measuring element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10251090A JPH041942A (en) | 1990-04-18 | 1990-04-18 | Reflected light measuring element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH041942A true JPH041942A (en) | 1992-01-07 |
Family
ID=14329383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10251090A Pending JPH041942A (en) | 1990-04-18 | 1990-04-18 | Reflected light measuring element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH041942A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07110981A (en) * | 1993-07-08 | 1995-04-25 | Tandberg Data Storage As | Magnetic tape recorder |
| JPH07130044A (en) * | 1993-07-08 | 1995-05-19 | Tandberg Data Storage As | Support mechanism of tape driving motor of magnetic tape recorder |
| WO2014156697A1 (en) * | 2013-03-25 | 2014-10-02 | 日立建機株式会社 | Engine speed controller of work machine |
-
1990
- 1990-04-18 JP JP10251090A patent/JPH041942A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07110981A (en) * | 1993-07-08 | 1995-04-25 | Tandberg Data Storage As | Magnetic tape recorder |
| JPH07130044A (en) * | 1993-07-08 | 1995-05-19 | Tandberg Data Storage As | Support mechanism of tape driving motor of magnetic tape recorder |
| WO2014156697A1 (en) * | 2013-03-25 | 2014-10-02 | 日立建機株式会社 | Engine speed controller of work machine |
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