JPH04193420A - Ultrasonic machining method - Google Patents

Abstract

PURPOSE:To enable ultra-precise mirror surface finishing while removing electrolytic generated film on the projecting part of work surface without mechanical force by supplying electrolytic liquid mixed with soft spherical bodies of high polymer series material between the tool of an ultrasonic machine and the work surface at a prescribed flow speed to grind generated film. CONSTITUTION:In a space for electrolytic reaction liquid between the work surface 2 of a work piece A and the tool B fitted to the oscillating horn 3 of an ultrasonic machine provided in a fixed distance between electrodes, electrolytic liquid D mixed with soft spherical bodies C is poured at a prescribed flow speed and current is supplied to the electrolytic reaction liquid space to perform electrolytic machining for removing material of the surface 2 of the work piece A by electrolytic action. Simultaneously, rotation of the body C passing through the electrolytic reaction territory while rotating by the flow of the liquid D is promoted by ultrasonic vertical oscillation of the tool B making a line square with the flow to be high speed rotation. Next, grinding action against film 4 generated on the surface 2 is given to the body C to remove it by vertical oscillation of the tool B, and mirror face finishing is performed while adsorbing remnants to the body C, and exhausting from the reaction territory.

Description

Detailed Description of the Invention <Industrial Application Field> The present invention is directed to a boride cermet material characterized by a mixture of a hard layer and a relatively soft metal bonding layer, or a Ni12,5-C
The present invention relates to an ultrasonic processing method used for mirror finishing (polishing) the surface of a workpiece made of r20.5 rolled material or the like.

<Conventional technical background and its problems> Generally, in this type of ultrasonic machining, there is a metal B4C or CB between the tool attached to the vibration horn of the ultrasonic machine and the workpiece.
Hard abrasive grains (free abrasive grains) made of N, etc. are present (interposed), and the hard abrasive grains are activated to impact the workpiece by ultrasonic vibration of the tool using a vibrating horn, and the impact force causes the machined surface of the workpiece to be This is a method of grinding and polishing while causing fine brittle fracture.

However, this ultrasonic processing method is only a mechanical polishing method in which material is mechanically removed by directly applying mechanical force (processing stress) to the workpiece, and the finishing accuracy of the processed surface depends on the machining technology. You can only hope for accuracy in the range, which also has its limits.

Therefore, in order to improve machining accuracy, an electrolytic solution that mixes the hard abrasive grains is placed between the tool and the workpiece, and the workpiece is electrically heated while passing a current between the tool and the workpiece. An ultrasonic electrolytic composite processing method that combines electrolytic processing (chemical polishing) to process
(See Publication No. 82821).

However, this latter ultrasonic machining method has a lower finishing accuracy on the machined surface compared to the former ultrasonic machining method, which only involves machining, due to material removal from the machined surface of the workpiece by electrolytic machining, which is performed in parallel. However, the process is mainly based on ultrasonic machining (mechanical polishing) in which the impact of hard abrasive grains on the workpiece due to the ultrasonic vibration of the tool, in other words, applying mechanical force directly to the workpiece. Since this is a method, it cannot be expected to completely eliminate the stress and strain that occurs during ultrasonic processing, and the current state of the art is that it has not been perfected in terms of achieving ultra-precise mirror finish processing accuracy.

In addition, electrolytic processing is the main method, and the electrolytically generated film (passivated oxide film) generated on the processed surface of the workpiece due to the progress of this electrolytic action (chemical material removal action) is removed by the polishing action of abrasive grains. A machining method is also known in which the machined surface is polished to a mirror finish while being scraped (Japanese Patent Laid-Open No. 53-1
(See Publication No. 395).

That is, in this conventional machining method, electrodes and puffs that press and slide abrasive grains onto the machining surface are alternately provided on a sliding tool that is installed parallel to and opposite the machining surface of the workpiece, and there is a gap between the tool and the machining surface. By performing electrolytic processing by flowing an electrolytic solution containing irregularly shaped hard abrasive grains, and by repeatedly removing the electrolytically produced film generated on the processed surface by scraping it off by the polishing action of the puff and abrasive grains. This is a processing method that accelerates processing and preferentially performs electrolytic processing on convex portions of the processed surface to give the processed surface a mirror finish.

However, the abrasive action of hard abrasive particles suspended in an electrolytic solution and placed between the machined surface and the tool for the purpose of polishing and removing the electrolytically generated film on the machined surface that occurs due to electrolytic machining is applied to the machined surface. In addition, there is the problem that stress distortion such as scratches caused by hard abrasive grains remains on the machined surface. This is because the electrolytically produced film is removed from the machined surface while pressing hard abrasive grains onto the machined surface using a tool, so it is difficult to control the pressure of the tool with respect to the thickness of the electrolytically produced film, and the abrasive grains are irregularly shaped and may be covered. This is because it is made of a hard material that applies mechanical force (processing stress) to the workpiece.

Therefore, in recent years, with the progress of technological development, it has become necessary to process workpieces with ultra-precise mirror finishing on the machined surface. Ultra-precise mirror finishing of the cavity surface is directly related to the quality of the surface of the molded product, and is important for molding products with good casting surface and high precision (dimensions, etc.). Polishing processing) was not possible.

<Problem to be solved by the invention> The present invention has been made in view of such conventional circumstances, and the technical problem to be solved is to remove material from the surface of a workpiece using an electrolytic solution. Effectively removes the electrolytically generated film (passivated oxide film) on the surface of the workpiece that occurs due to the progress of electrolytic processing, and in particular effectively and preferentially removes the electrolytically generated film that occurs on the convex portions of the processed surface. To provide an ultrasonic machining method capable of carrying out ultra-precise mirror finish processing while maintaining a constant electrolytic action (chemical material removal action) on the machined surface while removing it without applying mechanical force (processing stress) to the machined surface. There is a particular thing.

<Means for achieving the object> The technical means taken by the present invention to achieve the above object is to set the specific gravity so that the particles float when immersed in the electrolytic solution, and have a particle size of approximately 0.5 to 2.5μ. A soft spherical body made of a polymeric material with different molecular densities between the inner core and outer layer is mixed into the electrolyte, and the distance between the machining surface and the workpiece is set at a constant distance. An electrolytic solution that mixes soft spheres is supplied at a predetermined flow rate between the electrolytic reaction zone between the tool of an ultrasonic processing machine installed with The rotation of the soft true sphere, which rotates and moves along with the flow of electrolyte, is facilitated by the ultrasonic vibration of the tool perpendicular to the flow direction, and the ultrasonic vibration of the tool While the true sphere is brought close to the electrolytically generated film generated on the processing surface of the workpiece, a polishing action is applied to the generated film, and the film is removed by microscopic elastic fracture, while the film residue is generated on the surface of the soft true sphere. It is characterized in that processing is carried out while adsorbing and capturing ions by the ion adsorption effect of the functional jinbei and discharging them from between the electrolytic reaction zones.

In addition, with a specific gravity setting that allows it to float when immersed in an electrolytic solution, and with a particle size of about 0.5 to 2.5μ, it is made of a polymer material with a different molecular density between the inner core and outer layer. A soft true sphere formed into a perfect spherical shape and the electrolytic solution are placed between the electrolytic reaction zone between the tool of an ultrasonic processing machine installed with a certain distance between the machining surface and the machining surface of the workpiece. While supplying the electrolytic solution to each side and at a predetermined flow rate, the soft true sphere is mixed with the electrolytic solution, and a current is passed between the electrolytic reaction zones and carried along with the flow of the electrolytic solution. The rotation of the soft true sphere that moves while rotating is promoted by the ultrasonic vibration of the tool perpendicular to the flow direction, and the soft true sphere is generated on the processing surface of the workpiece by the ultrasonic vibration of the tool. While starting to approach the electrolytically generated film, it applies an abrasive action to the formed film and removes it by microscopic elastic fracture, while adsorbing and capturing the film residue by the ion adsorption action of the functional jinbei generated on the surface of the soft true sphere. It is characterized by processing while discharging from between the electrolytic reaction zones.

<Function> According to the above-mentioned technical means of the first claim of the present invention, the tool of the ultrasonic processing machine is installed facing the processing surface of the workpiece with a constant inter-mole distance. Processing is performed by electrolytic action that generates a processed surface by passing an electric current between the electrolytic reaction areas while supplying an electrolytic solution containing soft true spheres at a predetermined flow rate between the electrolytic reaction area and the processed surface. . Then, the soft sphere, which floats while immersed in the electrolytic solution and moves between electrolytic reaction zones while rotating along with the flow of the electrolytic solution, is exposed to the superposition of the tool perpendicular to the flow direction of the electrolytic solution. While giving a high-speed rotation effect by sonic vibration and by causing the soft spherical body to approach the machining surface side by means of the ultrasonic vibration, an electrolytically generated film, especially consisting of irregularities, is generated on the machining surface due to the progress of electrolytic machining. A polishing action is applied to the electrolytically generated film generated on the convex portions of the machined surface, and the formed film is removed by microscopic elastic fractures. Specifically, by bringing the electrolytically produced film close to the soft true sphere while rotating at high speed, the produced film is removed by microscopic elastic fractures caused by the fluid lubrication phenomenon that occurs between the produced film and the true sphere, and the resulting film is removed. While the film residue is adsorbed and captured around the soft sphere, it is discharged from between the electrolytic reaction zones by the flow of the electrolytic solution. Thereby,
The electrolytically generated film is destroyed and removed without applying mechanical force (processing stress) to the processed surface of the workpiece, preventing the electrolytic action from being inhibited by the formed film, and maintaining and promoting the electrolytic action while improving the surface of the workpiece. Perform mirror finish processing.

Further, according to the technical means described in the second claim, there is a gap between the electrolytic reaction zone between the ultrasonic vibrating tool and the machining surface, which are installed facing the machining surface of the workpiece with a certain distance between the poles. The soft true sphere and the electrolytic solution are supplied separately, and the electrolytic solution is supplied at a predetermined flow rate while being mixed, and the workpiece is mirror-finished by the same effect as described in the first claim. Let's do it.

<Example> Hereinafter, an example of the present invention will be described based on the drawings. FIG. 1 is an explanatory diagram showing an example according to the first claim.

The workpiece A is made of, for example, MoB-Ni-Mo-based boride cermet material or Ni 12.5-Cr20.5 rolled material, and is placed on the table 1 of the ultrasonic processing machine shown in FIG. Between the electrolytic reaction area between the processing surface 2 of the workpiece A and the tool B attached to the vibration horn 3 of the ultrasonic processing machine installed with a certain distance between the poles, an electrolytic solution containing soft pearl C is mixed. Electrolytic processing is performed in which a liquid is poured and supplied at a predetermined flow rate, and a current is passed between the electrolytic reaction zones to remove material on the processing surface 2 of the workpiece A by the electrolytic action. The rotation of the soft true sphere C, which passes between the electrolytic reaction zones while rotating along with the flow, is facilitated by ultrasonic vibrations, so-called vertical amplitudes, of the tool B perpendicular to the flow direction, giving a high-speed rotation effect. In addition, the soft true sphere C is brought closer to the electrolytically produced film 4 generated on the machining surface 2 due to the progress of electrolytic machining by the vertical vibration of the tool B, and a polishing action is applied to the produced film 4 to form extremely small particles. The mirror finishing process (polishing process) of the machined surface 2 is carried out while removing the film 4 under elastic fracture, adsorbing and trapping the film 4 residue around the soft true sphere C, and discharging it from between the electrolytic reaction zones.

The soft spherical body C is made of a polymeric material and is formed into a spherical shape with a specific gravity set so that it floats when immersed in an electrolytic solution. When the workpiece is a compound cermet material, polyamide MXD6 (metal xylylene diamine MXDA + siapic acid) is used, and when the workpiece is a Ni12.5-Cr20.5 rolled material, an acrylic resin or nylon is used to Inner core C and surface layer C with different densities
2 to a particle size of about 0.5 to 2.5 μm (see FIG. 5). In this example, the molecular density of the inner core part C□ is lower than that of the surface part C2, and the density difference is 70,000~
90,000 lower, and it is designed to activate the functional groups.

Therefore, on the surface of the soft true sphere C, there is an inner core part C7 and a surface part C7.
An ion adsorption effect (cathode charge effect and functional groups) occurs due to the difference in molecular density between the workpiece A and the electrolytically generated film 4 generated due to the electrolytic action on the machined surface 2 of the workpiece A, which is activated and approached by ultrasonic vibration. While destroying and removing the film 4, the remaining film 4 is adsorbed and captured on the surface (see Fig. 4).

Moreover, as shown in FIG. 6, the surface of the soft true sphere C consisting of the inner core part C1 and the surface part C2 is coated with Mo-Ni-Co, Nd-
The surface material C3 made of Fe-B, Nd, Ti, etc. is coated by spackling or EB evaporation, and its specific gravity is set according to the concentration of the electrolytic solution used, and it is dispersed and floated while immersed in the electrolytic solution. The specific gravity is set such that the surface material C3 coats the soft spherical body C to provide a repulsive force upon collision with the tool B.

In addition, the surface material C3 is difficult to set specific gravity conditions for electrolyte liquid compared to acrylic resin, and it is preferable to coat the surface of a soft true sphere made of nylon with small repulsive force, and the soft true sphere C coated with the surface material C8 is also Particle size 0.5
The size is approximately 2.5μ.

In using this soft true sphere C, the processed surface 2
At the initial stage of machining, when the surface is highly uneven, particles with a grain size of approximately 2.5 μ are used, and as the machining surface 2 becomes flat as the machining time progresses, the grain size is reduced, and for final finishing, grains with a grain size of approximately 05 μ are used. It is preferable to use

For example, when the workpiece is a MoB-Ni-Mo boride cermet material, the electrolytic solution mixed with the soft true spheres C is 60% perchloric acid, 60% HCL, O4 blending ratio 1, and 100% methanol. CH.

OH blending ratio 10 + Butyl cellosolve CK3 (CH2')
2 CH20CH2CH20H ETHYLENE GLYCOL MONOBUTYL
ETIIER, mixture ratio 6, workpiece A is Ni
In the case of 12.5-Cr20.5 rolled material, H2O(
pure water) 11 to Na2S20312g+SC(NH
2) A combination of 22g+CuNO31g is used depending on the material of workpiece A, and the electrolyte storage tank (shown in the figure) is used to supply the electrolytic reaction area between the tool B and the processing surface 2 of workpiece A. As shown in the figure, an electrolytic solution supply port 5 connected via a supply pump via a pipe is installed in the middle of the electrolyte, and the electrolyte is poured and supplied from the supply port 5 at a predetermined flow rate.

By the way, the ultrasonic processing machine used in this example has a high frequency frequency of, for example, 15 to 30±5 KH! A piezo vibrator 6 made of a zirconia sintered body, which can be adjusted in the amplitude range of 15±21 μ in the case of 15 ± 21 μ and in the range of 24 ± 2 μ in the case of low-frequency vibrations, for example, 2 to 15 ± 18 KH2, is incorporated in conjunction with the oscillation device 7, and a wide range of vibration can be achieved. The processing surface 2 of the workpiece A is set using the ultrasonic generation region of
In this way, an electrolytically generated film 4 is obtained. The current flow between the electrolytic reaction zones of the processing surface 2 and the tool B is applied to the workpiece A.
The table 1 on which the tool B is placed and the electrolytic current generator 8
Connect and incorporate the table 1 side as the anode (+), tool B
Current is applied using the side as the cathode (-).

Next, to explain the operation of the ultrasonic machining method of this embodiment (hereinafter referred to as the present method), a workpiece A that has been roughly machined by electrical discharge machining or the like is placed on the table 1 of the ultrasonic machining machine. ,
The tool B of the ultrasonic processing machine is installed with a certain distance between the machining surface 2 of the rough machined workpiece A and the tool B
An electrolytic solution containing the soft true spheres C is supplied between the electrolytic reaction zone and the processed surface 2 at a predetermined flow rate, and an electrolytic current generator 8 applies current between the electrolytic reaction zone. At the same time, the vibration horn 3 causes the tool B to vibrate ultrasonically.

Thus, the material on the machined surface 2 of the roughly machined workpiece A is removed by the generated electrolytic action and electrolytic processing is performed, and the material moves between electrolytic reaction zones while rotating along with the flow of the electrolytic solution. The rotation of the soft true sphere C is promoted by the flow of the electrolytic solution and the vertical amplitude of the tool B, giving it a high-speed rotating action, and the soft sphere C is pushed down by the vertical vibration and rotates against the machined surface 2 due to the progress of electrolytic machining. The electrolytically generated film 4 is started and approached. At this time, the soft true sphere C is the electrolytically generated film 4
While rotating at high speed, the robot moves close to the distance of about 10 to 30 people (see Figure 3). Then, a fluid lubrication phenomenon (hydrodynamic pressure acting on the electrolytically produced film) occurs between the soft true sphere C and the electrolytically produced film 4, and the electrolytically produced film is damaged by minute elastic fractures caused by this fluid lubrication phenomenon. 4. In particular, the electrolytically produced film 4 on the convex portions of the machined surface 2 consisting of irregularities is preferentially removed by ultra-fine elastic fractures. Here, the reason why the electrolytic product film 4 on the convex portion is preferentially removed is that the specific gravity of the spherical soft abrasive grains C is set to a condition that allows it to float while immersed in the electrolytic solution, and the reason why the electrolytic product film 4 on the convex portion is preferentially removed is that This is achieved by the fact that the amplitude can be variably adjusted in a wide range of ultrasonic generation ranges, and the removed electrolytic product film 4 remains due to the ion adsorption effect (cathode charge and The electrolytic solution is adsorbed and captured around the soft spherical body C by the sensual jinbei and is discharged from between the electrolytic reaction zone between the tool B and the machining surface 2 by the flow of the electrolytic solution that is continuously supplied (see FIG. 4).

Example 1 In this example, processing was performed based on the above effects and the following processing conditions.

a2 Material of workpiece: Mo B-N i -Mo-based material, processing area (electrolytic polishing area)・20a+fC1 electrolytic voltage=56■ d, electrolytic current: 2[IA e, electrolyte flow rate: 500 ml/min 17℃f,
Assuming that the ultrasonic frequency (maximum value) is 21.5KH2g, the distance between poles is 50μ h, and the electrolyte/soft sphere mixing ratio is 17%, it is clear from Table 1 that the processing time is 0.1μ/4 in 30 seconds.
Mirror finish processing characteristics with a high surface accuracy of mm were obtained.

As shown in Table 1, the machining characteristics of the MoB-Ni-Mo material change as the mixing ratio of the soft spheres C, the vibration frequency and amplitude of the tool B, and the machining of the workpiece A change as the machining time progresses. The experiment was carried out by changing the distance between the poles with respect to the surface 2.

Example 2 Processing was carried out in the same manner as in Example 1 based on the following processing conditions.

a. Material of workpiece: Ni 12.5-Cr20.
5. Rolled material, processing area (electrolytic polishing area): 20cnfC0 electrolytic voltage: 4. gV d, electrolytic current: I, 7A e, electrolyte flow rate: 500 m1/min 20°C f, ultrasonic frequency (maximum value) 2 (lKHxg, distance between poles: 20
μ h, electrolyte/soft true sphere mixing ratio = 2% Then, as is clear from Appendix Table 2, the temperature decreases to 0 after 30 seconds of processing time.
．． A mirror finish processing characteristic with a surface accuracy of 0.3μ/4k was obtained.

As shown in Table 2, the machining characteristics of the N i 12.5-Cr20.5 rolled material change as the frequency and amplitude of the tool B and the machining surface 2 of the workpiece A change with the passage of machining time. This shows the case where the distance between poles was changed.

Next, in order to clarify the superior processing technology of this method, we will discuss Ni12,5-C obtained under the processing conditions of the example.
r 20.5 rolled material and this Ni12.5-Cr
Conventional method using 20.5 rolled material (Unexamined Japanese Patent Publication No. 52-13
Comparing the surface precision with the rolled material obtained by the processing technology of Publication No. 95), the conventional method has a smooth finish, P
EAK To VALLEY 1,250 people is limited to the mirror finish processing characteristics, whereas this method is as shown in Appendix Table 3.
As is clear from the profile figure (finished surface contour), a smooth finish and a high precision mirror finish processing characteristic of PEAK TO VALLEY 364 can be obtained.

As is clear from the surface metallographic diagrams of the machined surfaces of the Ni12.5-Cr20.5 rolled material of the present method shown in Figure 7 and the conventional method shown in Figure 8, this method has no stress strain due to processing. It can be seen that in contrast to the conventional construction method, stress and distortion (scratches, etc.) due to processing were not removed and remained.

Therefore, according to this method, the condition is set to be similar to that of floating while immersed in the electrolytic solution, and the electrolytic solution moves between electrolytic reaction zones while rotating along with the flow of the electrolytic solution supplied at a predetermined flow rate. The rotation of the soft true sphere C is facilitated by the vertical amplitude of the tool B to give a high-speed rotation action, and the vertical amplitude of the tool B can be variably adjusted in a wide range of ultrasonic generation ranges. C is started and brought close to the electrolytically generated film 4 generated on the processing surface 2 of the workpiece due to the progress of the electrolytic action while rotating at high speed to a gap region of about 10 to 30 mm, thereby forming a soft true sphere. A fluid lubrication phenomenon is generated between C and the electrolytically generated film 4, and the formed film 4 is removed in a non-contact manner by microscopic elastic fracture, and the electrolytic action carried out through the electrolytically formed film 4 is removed. Since it is possible to carry out mirror finish processing while preventing the degradation caused by the produced film 4 and keeping the electrolytic action constant and promoting it, it is possible to perform electrolytic processing mainly without applying mechanical force (processing stress) to the processing surface 2. It is possible to perform ultra-precise mirror finishing of the processing surface 2 of the workpiece A with high efficiency.

FIG. 9 shows an embodiment according to the second claim, and since the basic structure of this embodiment is the same as the detailed description of the embodiment according to the first claim described above, the explanation will be omitted, and the same components will be explained. If so, use the same code. In the figure, 9 is an electrolytic solution supply port that supplies an electrolytic solution between the electrolytic reaction zones of the tool B and the machining surface 2 of the workpiece A, and 10 is an electrolytic solution supply port that supplies a soft true sphere C between the electrolytic reaction zones. This is a true sphere supply port for mixing the true sphere C into the electrolyte solution.

As described above, the electrolyte supply port 9 is connected to the electrolyte storage tank via a supply pump, and the spherical supply port 10 is connected to the spherical storage hopper (not shown). It is installed via a piping connection via any transfer supply means, such as a transfer fan.

Therefore, according to the present method according to the second claim, tool B
An electrolytic solution is poured and supplied at a predetermined flow rate from the electrolytic solution supply port 9 between the electrolytic reaction zone of the workpiece A and the processing surface 2 of the workpiece A, and at the same time, the soft spherical body C is supplied from the spherical supply port 10. is mixed while supplying the workpiece A, mirror finishing processing is performed mainly by electrolytic processing of the processing surface 2 of the workpiece A, and the tool B
While promoting the rotation of the soft true sphere C, and while bringing the true sphere C closer to the electrolytically generated film 4 that is generated on the processing surface 2 of the workpiece due to the progress of electrolytic action, the formed film 4 is The electrolytically generated film 4 is removed by ultra-fine elastic fractures, and the removed film 4 residue is adsorbed and captured around the soft sphere C, while being discharged from between the electrolytic reaction zones by the flow of the electrolytic solution continuously supplied. This makes it possible to perform mirror finishing while keeping the electrolytic action constant and promoting it by preventing the inhibition and decline of the electrolytic action.

By configuring that the electrolytic solution and the soft true spheres C are supplied between the electrolytic reaction zones of the tool B and the machining surface 2 of the workpiece A through separate supply mechanisms and supply routes, for example, At the beginning of machining when the machining surface 2 has severe irregularities, soft true spheres C with a large particle size are supplied to improve machining efficiency, and as the machining time progresses, the machining surface 2 becomes flat and the grain size becomes small. The supply pattern for supplying the soft true spheres C can be implemented simply and quickly, and the mixing ratio of the soft true spheres C to the electrolyte solution can be adjusted as desired.

In the embodiment described above, the electrolytic solution supply port 9 and the true sphere supply port 10 were each independently installed, but both supply ports 9. As an electrolyte and true sphere supply port that integrates IO and branches into a unique supply route,
It is also possible to supply the electrolytic liquid and the soft true spheres C between the electrolytic reaction zone of the tool B and the machining surface 2 of the workpiece A while mixing them in the supply port.

<Effects of the Invention> Since the ultrasonic machining method of the present invention is configured in a diagonal manner, it exhibits the following effects.

■ Particle size of approximately 0.5 to 2.5μ, made of a polymeric material with a specific gravity that allows it to float when immersed in an electrolytic solution, and with different molecular densities between the inner core and outer layer. A soft true sphere is mixed into an electrolytic solution, and the electrolytic solution is set at a predetermined flow rate between the electrolytic reaction zone between the tool of an ultrasonic processing machine and the processing surface of the workpiece, which are opposed to each other with a certain distance between the poles. The ultrasonic vibration of the tool promotes the rotation of the soft true sphere that moves between the electrolytic reaction zones while rotating along with the flow of the electrolytic solution, giving it a high-speed rotating action. In addition, since the workpiece is machined while being brought close to the electrolytically generated film generated on the processing surface of the workpiece, the electrolytic reaction occurs due to the progress of the electrolytic action generated by passing an electric current between the electrolytic reaction zones. A non-contact method that removes the electrolytically generated film that occurs on the processing surface of the workpiece by microscopic elastic fractures caused by the fluid lubrication phenomenon that occurs between the formed film and a soft spherical object that approaches while rotating at high speed with a tool. In addition to being able to control the momentum of the soft sphere by changing the amplitude of ultrasonic vibration, it is also possible to control the electrolytic reaction, that is, to improve the sagging of the electrolytic reaction. I can do it.

Therefore, according to this method, it is possible to effectively and preferentially remove the electrolytically generated film that occurs due to the progress of electrolytic action, especially on the convex parts of the machined surface, and to apply mechanical force (processing stress) to the machined surface. Since the process can be carried out while the electrolytic action is constant and promoted, it is possible to perform ultra-precise mirror finishing that cannot be obtained with conventional methods.

■ The soft true sphere is made of an inner core and a surface layer with different molecular densities, specifically, as described in detail in the example, made of a polymeric material with a lower molecular density in the inner core than in the surface layer. Therefore, an ion adsorption effect occurs on the surface, which adsorbs and captures the electrolytically generated film residue removed from the processed surface of the workpiece by microscopic elastic fracture, and the electrolytic reaction occurs due to the continuous flow of electrolyte. Film residue discharged from between areas (
This serves as a carrier for the removed residue) and can further purify the electrolytic solution between the electrolytic reaction zones.

■ The soft true sphere and the electrolytic solution are supplied separately between the electrolytic reaction zone of the tool of the ultrasonic processing machine and the surface of the workpiece to be mixed and processed to process the workpiece. , Not only can the same effects as described in ■ and ■ above be obtained, but also the machining efficiency is improved by supplying soft true spheres with a large particle size during the initial stage of machining when the machining surface is extremely uneven.
Easily and quickly implement a supply pattern that supplies soft true spheres whose particle size becomes smaller as the machined surface becomes flattened over the course of machining time. In other words, a unique supply route and mechanism is used to supply soft true spheres and electrolyte. Since the configuration is such that the soft sphere and the electrolyte are mixed in advance and are supplied together, the implementation and control can be performed more easily and quickly than in a configuration or mechanism that supplies the soft true sphere and the electrolyte together in a mixed state.

[Brief explanation of the drawing]

FIG. 1 is an explanatory view showing an embodiment of the ultrasonic machining method according to the first claim of the present invention, FIG. 2 is a partially enlarged view showing the electrolytic reaction zone between the tool and the machining surface of the workpiece, and FIG. 4 and 4 are enlarged views showing the removed state of the produced film by the soft true sphere, FIGS. 5 and 6 are cross-sectional views showing the soft true sphere, and FIG. 7 is the Ni12. The surface metallographic structure of the machined surface of 5-Cr20.5 rolled material, Figure 8 shows the Ni
A surface metallographic diagram of the processed surface of the 12.5-Cr2O,5 rolled material, FIG. 9 is an explanatory view showing an embodiment of the ultrasonic processing method according to the second claim. In the figure, A: Workpiece B: Tool C: Soft true sphere C1: Inner core C2: Surface layer D = Electrolyte

Claims (2)

[Claims] (1) A polymeric material with a specific gravity setting that allows it to float when immersed in an electrolytic solution, and with a particle size of approximately 0.5 to 2.5μ and a different molecular density between the inner core and outer layer. A soft spherical body formed into a perfect spherical shape is mixed into an electrolytic solution, and the electrolytic reaction zone between the tool of an ultrasonic processing machine installed with a certain distance between the machining surface of the workpiece and the machining surface. An electrolytic solution in which the soft true spheres are mixed is supplied at a predetermined flow rate, and a current is passed between the electrolytic reaction zones, and the soft true spheres rotate and move along with the flow of the electrolytic solution. While the rotation is promoted by ultrasonic vibration of the tool perpendicular to the flow direction, and the ultrasonic vibration of the tool causes the soft true sphere to approach the electrolytically generated film generated on the machined surface of the workpiece, The process is characterized by applying a polishing action to the film, removing it by microscopic elastic fracture, adsorbing and capturing the film residue by the ion adsorption action generated on the surface of the soft true sphere, and discharging it from between the electrolytic reaction zones. Ultrasonic processing method. (2) A polymeric material with a specific gravity setting that allows it to float when immersed in an electrolytic solution, and with a particle size of about 0.5 to 2.5μ and a different molecular density between the inner core and outer layer. A soft true sphere formed into a perfect spherical shape and the electrolytic solution are placed between the electrolytic reaction zone between the tool of an ultrasonic processing machine and the machined surface, which is installed with a certain distance between the machining surface and the workpiece surface. The soft spheres are mixed with the electrolyte while supplying the electrolyte at a predetermined flow rate, and a current is passed between the electrolytic reaction zones while riding the flow of the electrolyte. The rotation of the soft true sphere that moves while rotating is promoted by the ultrasonic vibration of the tool perpendicular to the flow direction, and the soft true sphere is generated on the processing surface of the workpiece by the ultrasonic vibration of the tool. While starting to approach the electrolytically generated film, it is applied an abrasive action to the formed film to be removed by microscopic elastic fracture, and the remaining film is adsorbed and captured by the ion adsorption action generated on the surface of the soft true sphere, while the electrolytic reaction area An ultrasonic processing method characterized by processing while discharging from the gap.