JPH0418468U - - Google Patents
Info
- Publication number
- JPH0418468U JPH0418468U JP6009690U JP6009690U JPH0418468U JP H0418468 U JPH0418468 U JP H0418468U JP 6009690 U JP6009690 U JP 6009690U JP 6009690 U JP6009690 U JP 6009690U JP H0418468 U JPH0418468 U JP H0418468U
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- wave device
- pattern
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Wire Bonding (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
第１図は本考案の一実施例を示す弾性表面波素
子の平面図、第２図は基準座標認識パターンの拡
大平面図、第３図および第４図は、それぞれ他の
実施例による基準座標認識パターンの平面図、第
５図ないし第７図は、従来の基準座標認識パター
ンの平面図である。
１……圧電性基板、２……櫛形電極、３……ボ
ンデイングパツド、４……シールド電極、Ｂ１，
Ｂ２，Ｂ３……基準座標認識パターン、Ａ１，Ａ
２，Ａ３……従来の基準座標認識パターン。
FIG. 1 is a plan view of a surface acoustic wave element showing one embodiment of the present invention, FIG. 2 is an enlarged plan view of a reference coordinate recognition pattern, and FIGS. 3 and 4 are reference coordinates according to other embodiments. 5 to 7 are plan views of conventional reference coordinate recognition patterns. DESCRIPTION OF SYMBOLS 1... Piezoelectric substrate, 2... Comb-shaped electrode, 3... Bonding pad, 4... Shield electrode, B 1 ,
B 2 , B 3 ...Reference coordinate recognition pattern, A 1 , A
2 , A3 ...Conventional reference coordinate recognition pattern.
Claims (1)
組み合わせた基準座標認識用パターンが設けられ
ていることを特徴とする弾性表面波素子。 A surface acoustic wave device characterized in that a pattern for recognizing reference coordinates, which is a combination of a plurality of minute patterns, is provided on a surface of the surface acoustic wave device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6009690U JPH0418468U (en) | 1990-06-06 | 1990-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6009690U JPH0418468U (en) | 1990-06-06 | 1990-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418468U true JPH0418468U (en) | 1992-02-17 |
Family
ID=31587159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6009690U Pending JPH0418468U (en) | 1990-06-06 | 1990-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418468U (en) |
-
1990
- 1990-06-06 JP JP6009690U patent/JPH0418468U/ja active Pending
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