JPH0418449U - - Google Patents
Info
- Publication number
- JPH0418449U JPH0418449U JP5803690U JP5803690U JPH0418449U JP H0418449 U JPH0418449 U JP H0418449U JP 5803690 U JP5803690 U JP 5803690U JP 5803690 U JP5803690 U JP 5803690U JP H0418449 U JPH0418449 U JP H0418449U
- Authority
- JP
- Japan
- Prior art keywords
- basket
- basket body
- wafer
- identification mark
- claws
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5803690U JPH0418449U (enExample) | 1990-06-01 | 1990-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5803690U JPH0418449U (enExample) | 1990-06-01 | 1990-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418449U true JPH0418449U (enExample) | 1992-02-17 |
Family
ID=31583282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5803690U Pending JPH0418449U (enExample) | 1990-06-01 | 1990-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418449U (enExample) |
-
1990
- 1990-06-01 JP JP5803690U patent/JPH0418449U/ja active Pending