JPH0418449U - - Google Patents

Info

Publication number
JPH0418449U
JPH0418449U JP5803690U JP5803690U JPH0418449U JP H0418449 U JPH0418449 U JP H0418449U JP 5803690 U JP5803690 U JP 5803690U JP 5803690 U JP5803690 U JP 5803690U JP H0418449 U JPH0418449 U JP H0418449U
Authority
JP
Japan
Prior art keywords
basket
basket body
wafer
identification mark
claws
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5803690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5803690U priority Critical patent/JPH0418449U/ja
Publication of JPH0418449U publication Critical patent/JPH0418449U/ja
Pending legal-status Critical Current

Links

JP5803690U 1990-06-01 1990-06-01 Pending JPH0418449U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5803690U JPH0418449U (enrdf_load_stackoverflow) 1990-06-01 1990-06-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5803690U JPH0418449U (enrdf_load_stackoverflow) 1990-06-01 1990-06-01

Publications (1)

Publication Number Publication Date
JPH0418449U true JPH0418449U (enrdf_load_stackoverflow) 1992-02-17

Family

ID=31583282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5803690U Pending JPH0418449U (enrdf_load_stackoverflow) 1990-06-01 1990-06-01

Country Status (1)

Country Link
JP (1) JPH0418449U (enrdf_load_stackoverflow)

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