JPH0418448U - - Google Patents
Info
- Publication number
- JPH0418448U JPH0418448U JP5802090U JP5802090U JPH0418448U JP H0418448 U JPH0418448 U JP H0418448U JP 5802090 U JP5802090 U JP 5802090U JP 5802090 U JP5802090 U JP 5802090U JP H0418448 U JPH0418448 U JP H0418448U
- Authority
- JP
- Japan
- Prior art keywords
- housing body
- wafer
- carrier
- top plate
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5802090U JPH0418448U (enExample) | 1990-06-01 | 1990-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5802090U JPH0418448U (enExample) | 1990-06-01 | 1990-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418448U true JPH0418448U (enExample) | 1992-02-17 |
Family
ID=31583253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5802090U Pending JPH0418448U (enExample) | 1990-06-01 | 1990-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418448U (enExample) |
-
1990
- 1990-06-01 JP JP5802090U patent/JPH0418448U/ja active Pending