JPH0418431U - - Google Patents
Info
- Publication number
- JPH0418431U JPH0418431U JP5965190U JP5965190U JPH0418431U JP H0418431 U JPH0418431 U JP H0418431U JP 5965190 U JP5965190 U JP 5965190U JP 5965190 U JP5965190 U JP 5965190U JP H0418431 U JPH0418431 U JP H0418431U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- frame body
- holder
- retaining
- substrate holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 210000000078 claw Anatomy 0.000 claims description 5
- 238000005452 bending Methods 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 239000007791 liquid phase Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5965190U JPH0418431U (uk) | 1990-06-07 | 1990-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5965190U JPH0418431U (uk) | 1990-06-07 | 1990-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418431U true JPH0418431U (uk) | 1992-02-17 |
Family
ID=31586337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5965190U Pending JPH0418431U (uk) | 1990-06-07 | 1990-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418431U (uk) |
-
1990
- 1990-06-07 JP JP5965190U patent/JPH0418431U/ja active Pending
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