JPH04183551A - Work inverting device - Google Patents

Abstract

PURPOSE:To efficiency turn over each work face of plural works, by having an inverting arm to which each 1st work receiving jig and each 2nd work receiving jig are fixed. CONSTITUTION:A lower side receiving part 413 and an upper side receiving part 414 are provided on both faces of the arm part 4202 of an inverting arm 420. The lower side receiving part 413 keeps each top board receiving jigs 4501-4504 in the delivery state of each to boards 101, 102 with alst auto hand, by keeping the arm 4202 of the inverting arm 420 horizontally with a pedestal 410, with the lower side receiving part 413 abutting on a 1st abutting pin 412 in the case of the positive rotation state of the inverting arm 420. Also, the upper side receiving part 414 keeps each top board receiving jigs 4501-4504 in the delivery state of the top boards 101, 102 with a pitch/inclination converter, by keeping the arm 4202 of the inverting arm 420 horizontally with the pedestal 410, with its abutment on a 2nd abutting pin 415 in the case of the inverting state of the receiving arm 420.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to a workpiece reversing device, and in particular to a workpiece conveying device that conveys the top plate of a recording head for an inkjet recording device between a tray and a laser processing machine. The present invention relates to a workpiece reversing device that is optimal for use in

[Prior Art] FIG. 11 is a schematic configuration diagram showing an example of the configuration of a recording head of an inkjet recording device (bubble jet recording device).

The recording head 1101 has a liquid chamber 1130 in which ink supplied from the outside is stored, and a plurality of nozzles 1133 arranged in a row. An electrothermal transducer 132 is provided for generating thermal energy for forming ink droplets to be ejected from the ink droplets.

This print head 1101 is particularly employed in bubble jet printing apparatuses among inkjet printing apparatuses. Typical configurations and principles of bubble jet recording devices are described in, for example, U.S. Pat. No. 4,723,129 and U.S. Pat. No. 4,740,796.
The method is disclosed in the specification of the above patent, and is applicable to both the so-called on-demand type and continuous type.

For example, to explain a bubble jet recording apparatus using an on-demand type as an example, an electrothermal converter 1132 is disposed corresponding to a sheet holding liquid (ink) and a liquid path (nozzle 1133), Conversion body 1132
Thermal energy corresponding to the drive signal is generated to cause film boiling on the heat-active surface of the recording head 1101, and as a result, bubbles corresponding one-to-one to the drive signal are formed in the liquid (ink). The growth and contraction of the bubble causes the liquid (ink) to be ejected from the ejection port 1131 in the form of droplets. The driving signal applied here is preferably a pulse signal as disclosed in, for example, US Pat. No. 4,463,359 and US Pat. No. 4,345,262. Further, regarding the temperature increase rate of the heat-active surface of the recording head 1101, the conditions disclosed in, for example, US Pat. No. 4,313,124 may be adopted.

In addition to the configuration of the recording head 1101 shown in FIG. 11, the configuration of the recording head used in the bubble jet recording apparatus is disclosed in, for example, U.S. Pat. No. 4,558,333 and U.S. Pat. No. 4,459,600. There is,
The structure may be one in which the heat acting part is arranged in a bending region, or, for example, a common slit for a plurality of electrothermal transducers may be arranged as described in Japanese Patent Laid-Open No. 59-123670. It may be configured as a discharge part of an electrothermal converter.
The configuration described in Japanese Patent No. 1 may be adopted in which the openings for absorbing pressure waves of thermal energy correspond to the discharge portion.

Note that the recording head described above has a length that can accommodate a predetermined width (the maximum width of the recording medium that can be recorded by the recording device) by combining a plurality of recording heads, but one recording head can accommodate the predetermined width. It may be configured to have a length corresponding to.

Further, the above-mentioned recording head may be of a replaceable chip type that is installed in the main body of the apparatus to perform electrical connection (for an electrothermal converter) and supply of ink. A cartridge type as shown in FIG. 12 may be used.

FIG. 12 is a diagram showing an example of the components of a recording head when mounted on a base member of an ink cartridge for an inkjet recording apparatus.

The recording head 1101 includes a heater plate 1002 on which an electrothermal transducer 1132 and wiring such as Ar1 for supplying power to the electrothermal transducer 1132 are formed on a silicon substrate by film-forming technology, a nozzle 1133, and a liquid chamber 1130. Top plate 101G formed by technology and heater plate 100
A liquid chamber 113 formed by joining 2 and the top plate 1010
0 as a component.

Here, as shown in FIG. 13, the top plate 1010 has a plurality of nozzles 1133+ to 11334 and a liquid chamber 1130.
The top member 1011 in which is formed and each nozzle 1133+~
A plate member 1012 is provided integrally with the top member 1011 on the front surface of the 11334t111, and a liquid chamber 11 is provided integrally with the top member 1011 on the opposite side of the plate member 1012.
30 and the ink tank 1004, and a plurality of ejection ports 1131 shown in FIG. Groove 1013+
~10134 (only four are shown). In addition, the width of the top plate 101o actually used is 7~
8+nm, and 60 to 80 slots with an outer diameter of 20 to 40 μm are formed at intervals of 60 to 80 μm.

Top plate 1'olOG: 1m multiple slots 1013+ ~1
0134, the top plate 1011 is moved from a tray containing a large number of unprocessed top plates 1010 to a laser processing machine.
A workpiece conveyance device is required to convey the workpiece, but it is conceivable to use a conventional workpiece conveyance device that grasps and conveys the workpiece by auto-hunt as such a workpiece conveyance device.

[Problem to be solved by the invention]

However, if the conventional work transfer device is used as is, the following problems arise due to the unique structure of the top plate 1010 shown in FIG. 12.

(b) In order to improve the throughput, store as many top plates 101O as possible in the tray, and use a laser processing machine to cut through each slot +013+~1 of multiple top plates 101O at once.
013. If you try to open the space between each top plate 1010 when stored in the tray and the space between each top plate 1010 when installed in the laser processing machine, the auto hand will have -degrees. It is necessary to provide a plurality of workpiece gripping mechanisms for gripping a plurality of workpieces 1010 and a pitch variable mechanism for changing the interval (pitch) of each worktop 1 (1100) gripped during transport.

(b) Processing with a laser processing machine is 60~
80 slots with an outer diameter of 20-40μm and 60-80μm
Since micromachining precision is required to form the parts at intervals, there is a risk of foreign matter getting into the machined surface of the top plate 1010 (the surface opposite to the protrusion member 1015 of the top member 1011) or damage to the machined surface. If this occurs, the number of defective products with a top plate of 1Ω10 will increase and the yield will be poor, so it is desirable to store the top plate 1010 in the tray with the processed side facing down.
When installing the top plate 1010 in a laser processing machine, the processing surface of the top plate 1010 is directed upward for reasons described later. Therefore, while the top plate 101 was being transported to Auto Hunt,
It becomes necessary to provide a reversing mechanism for turning the machined surface of 0 downward.

(c) Each slot 1013+ in the top plate 1010 with a laser processing machine
When drilling ~10134, each slot t013+~101
34 is opened so as to be located at the center of the openings of the nozzles 1131+ to 11314. Therefore, as shown in FIG. 14(A), when the top plate 1010 is installed in the workstation 1200 of the laser processing machine, the processing surface of the top plate 1010 needs to face upward, and the top plate 10
When the processed surface of 1O is set parallel to the optical axis of the laser beam,
Since a hole is also made on the surface of the top member 1011 opposite to the plate-like member 1012, as shown in FIG. It is necessary to give the angle of Therefore, it is necessary to provide the automatic hand with a tilt conversion mechanism that tilts the processing surface of the top plate 101O by a predetermined angle during transportation.

(d) In order to improve the throughput, when trying to convey the unprocessed and processed top plates 101O in parallel, Because it is necessary to put the tray in the state it was in when it was stored,
Another automatic hand having the plurality of workpiece gripping mechanisms, the variable pitch mechanism, the reversing mechanism, and the tilt converting mechanism must be provided.

An object of the present invention is to focus on the above-mentioned problems (b) and (d), and to provide a tray containing a large number of unprocessed workpieces with each processing surface facing downward, and a tray containing a large number of unprocessed workpieces with each processing surface facing upward. A workpiece reversing device is provided that can efficiently reverse each machined surface of a plurality of workpieces when the workpieces are transported one by one between a processing machine that processes multiple workpieces at the same time. It is about providing.

[Means for Solving the Problems] The workpiece reversing device of the present invention includes a first workpiece receiving jig group that simultaneously receives and suction-holds a plurality of unprocessed workpieces, and a first workpiece holding jig group that simultaneously receives and holds a plurality of unprocessed workpieces. a second workpiece receiving jig group that receives and suction-holds the workpieces; and a reversing arm in which each of the first workpiece receiving jig and each of the second workpiece receiving jig is fixed at a first pitch interval. and a driving means for causing the reversing arm to be in a normal rotation state or a reverse rotation state.

C Effect j In the workpiece reversing device of the present invention, the reversing arm rotates normally when a plurality of unprocessed workpieces are conveyed at the first pitch interval with each machined surface facing downward. Sometimes, the workpieces are simultaneously received and suction-held by the first workpiece receiving jig group in the above state. After that, the reversing arm is rotated 180' by the driving means to be in an inverted state, so that each of the processed surfaces faces upward, and then the workpiece is conveyed to the processing machine through the next process.

Further, when the reversing arm is in the reversing state, a plurality of processed workpieces, which are transported one by one with each machining surface facing upward, are transferred to the second workpiece receiving jig group while the reversing arm is in the reversing state. are simultaneously received and held by suction. Thereafter, the reversing arm is rotated by 80 degrees by the driving means to be in an inverted state, so that each of the processed surfaces faces downward, and is then conveyed to a tray through the next process.

Therefore, when the reversing arm is in an inverted state, the plurality of unprocessed workpieces are delivered to the next process device, and the plurality of processed workpieces are received from the next process device. can be done at the same time.

(Hereinafter, blank spaces) [Example] Next, an example of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing a schematic configuration of a workpiece conveyance device that conveys a top plate of a recording head for an inkjet recording device between a tray and a laser processing machine, and is equipped with an embodiment of a workpiece reversing device of the present invention. FIG. 2 is a schematic plan view of the workpiece conveyance device shown in FIG. 1.

This workpiece conveyance device includes a tray 300 in which a large number of top plates are stored (FIG. 1 shows a state in which only two top plates 10+ and +02 are stored); Belt conveyor 1 loaded and sent from the top right
40, two stopper bins 1501 and 150□, which are provided above the belt conveyor 140 and are advanced and withdrawn by a drive device (not shown), which stops the tray 300 at the pickup position, and each top plate 101 after processing. .10
A tray rack 190 for collecting trays 300 containing □ (see FIG. 2), a first transfer robot 100, and a reversing device 4 which is an embodiment of the work reversing device of the present invention.
00, a pitch/inclination conversion device 500, a second transfer robot 700 (see FIG. 2), a laser processing machine 600, and a controller 800.

Each component of this workpiece conveyance device will be explained in detail below.

(a) Each top plate 10. ．． Top plate 1, which is a 10° workpiece (L is polysulfone or polyether sulfone, which has excellent ink resistance.

It is composed of a translucent resin such as polyphenylene oxide or polypropylene, and the top member 1 shown in Figure 3 (81)
2. When the plate-like member 14+ is formed in advance by molding, the protruding member 15□, the ink supply hole 131, and the nozzle (not shown) are also formed at the same time. The same applies to the top plate 10□.

(B) Tray 300 As shown in FIG. 3(A), the tray 300 includes five vertical frames 3101 to 3105 and five horizontal frames 3201 to 3205.
It is divided into 36 storage blocks 330 by . In addition, as shown in the same figure (B), each storage block 3
30, in order to store the top plate 101 with the processed surface of the top plate 101 (the surface opposite to the protrusion member 15 of the top member 12. 1
A groove 340 into which the plate member 14° of No. 01 can be inserted. and a holding shaft 3501 into which the ink supply hole 13□ of the top plate 10+ is fitted during storage.
It is provided integrally with the main body of 00. Therefore, in the previous process, each top plate 10+, 10a is
After being stored inside, each top plate 10+, 10□ is in a state in which each processed surface is facing downward and horizontal, and the directions are aligned.

Note that the horizontal spacing between the storage blocks 330 of the tray 300 (the spacing between the vertical frames 310, -310. Place each top plate lO□
, 10□ is attached, and the first pitch interval P1 is smaller than the second pitch interval P2 (see FIG. 6).

(C) First transfer robot +00 The first transfer robot 100 processes two pieces from the tray 300 at the first pitch interval P1 with each processing surface facing downward and horizontally. Front top plate 101.
10 □ at the same time, and from the reversing device 400 (described later), the two processed surfaces are placed at the first pitch interval P1 with each processed surface facing downward and horizontally. After receiving the plates 101 and 102 at the same time, they are conveyed to a tray 300 and stored therein.

As shown in FIG. 1, the first transfer robot +00 is movably supported by a first X-axis arm +10 fixed to a base (not shown) and a first X-axis arm 110 (not shown). a first Y-axis arm 120 that is reciprocated in the illustrated X-axis direction by a first X-axis drive means;
A first z-axis arm 130 is movably supported at 0 and reciprocated in the illustrated Y-axis direction by a first Y-axis driving means (not shown), and is attached to the first (7) Z-axis 7-arm 130. and the first auto hunt 200.

Here, the first automatic hand 200 is capable of suction-holding two top plates 10+ and 10□ at the same time. That is, as shown in FIG. 4(B), the suction holding section of the first autohand 200 is made up of one main body block 210.
and two fingers 213, . 213□ and the moving block 2 to which each finger 2131.213□ is attached.
12. ．． 212□ and each moving block 2121.212
2 sliding shafts 2 each having two lower ends fixed to each other.
11+ to 2114 (the two sliding shafts 2112 and 2114, not shown, are provided on the back side of the sliding shaft 211+ and the sliding shaft 2113, respectively). In addition, at the tips of the two fingers 2131 and 2132, there are 2
When holding the top plates 10+ and 10□ at the same time, each top plate 10. ．． 102 ink supply holes +3+, 13. Finger insertion portions 2141, 214□ are provided to be inserted into.

Note that the interval between the fingers 2131 and the fingers 2132 is a first pitch interval P1, which is the same as the lateral interval between the storage blocks 330 of the tray 300.

Further, as shown in FIG. 4(C), the main body block 210
A space is provided inside the space, and each sliding shaft 211. ~21
Spring 215I to 2154 are provided, each of which has a spring 215I through 2154 that constantly urges the sliding shafts 2111 to 2114 downward in the drawing (two springs 215.
2154 is provided on the finger 213□ side).

The main body block 210 also includes sliding shafts 2111 to 2.
114 are inserted, and four through holes are bored at the top and bottom in the figure, and each sliding shaft 2111 to 2114 is connected to a second bearing 2161 to 216g (
Four bearings 216 (not shown). 2168 are slidably supported by a finger 213□ (provided on the finger 213□ side).

Furthermore, a stopper 217. 2174 (two unillustrated stoppers 2173 and 217. are provided on the sliding shaft 2113 and the sliding shaft 2114, respectively), and each spring 215. ~Each sliding shaft 21II by 2I54~
211, the amount of movement downward in the drawing is regulated. Furthermore, each finger 213 . ．． A suction tube 219+ communicates the tip of the 2+3□ with a vacuum generation source (not shown).

2192 (Suction tube 219 on finger 213□ side
□ is not shown) is the main body block 210. Each moving block 212, . 2+2. and each finger 213. ．． 21
It is provided to penetrate the inside of 3□.

As shown in FIG. 4(D), fingers 213. The top plate 10. A hole is provided in which the protruding member 51 of the top plate 101 is fitted when the top plate 101 is held by suction. In addition, the suction tube 2191 is connected to the top plate 10. suction surface (top member 12
．． The fingers 213 . After branching inside, top plate 1
Finger 213 in contact with the 0+ suction surface. It is opened at the distal end surface. The same applies to the finger 213□ and the suction tube 219□.

Further, as shown in FIG. 4(A), the first autohand 200 is attached to the first biaxial arm 130 (
(see Figure 1), it is movable in the X-axis and Y-axis directions shown in Figure 1.
The suction holding part of the auto hand 200 is the cylinder 230
It is movable in the Z-axis direction shown in FIG. That is, the center portion of the upper surface of the main body block 210 is supported by the rod 231 of the cylinder 230 held by the cylinder holding member 232, and the main body block 210
Each vertically moving member 22L attached to both upper sides of the
22111□ is the holding member 2411 and the holding member 2
Two first bearings 2421 are provided inside each bearing 412.
By being supported by two sliding guide shafts 24L and 240□, which are respectively supported by ~2424,
The suction holding section of the first autohand 200 is attached to the cylinder 2
30, it is movable in the Z-axis direction shown in FIG.

The cylinder holding member 232 has its both sides fixed to the two holding members 241+ and 2412, respectively, and the cylinder holding member 2 of the holding member 2412
The side surface opposite to 32 is fixed to a mounting member 250.

(d) Reversing device 400 The reversing device 400 is operated from the first transfer robot 100 to each top plate before processing at the first pitch interval P1 with each processing surface facing downward and horizontal. 101.1
After receiving 0□ at the same time, each person's board 10+, 102
is inverted so that each processing surface faces upward, and a pitch/inclination converting device 500 (described later)
, 10□ at the same time, each top plate 101 . 102 are received at the same time, the respective plates 101.10a are inverted so that each processing surface faces downward.

As shown in FIGS. 5fA) and 5(B), this reversing device 400 includes two vertical support members 4111,
41h are provided on the top surface of the base 410 to face each other, and a first abutment bin 412 is provided between the vertical support member 4111 and the vertical support member 411□ on the top surface of the base 410. , a second abutment bin 415 (see t-in FIG. 10B) is provided on the upper surface of the base 410 at the rear of the first abutment bin 412 as shown in fA1 of the same figure. Further, the rotating shaft 431 is connected to each vertical support member 411+, 411z.
It is rotatably supported by an internal bearing (not shown), and a pulley 430 is fixed to the tip of the rotating shaft 431 on the vertical support member 4111 side. Vertical support member 41
1. The rotating shaft 431 between the and the vertical support member 411□ is
Fixed part 420 of reversing arm 420 having an L-shape
It is fixed at 1.

A lower receiving portion 413 and an upper receiving portion 414 are provided on both sides of the arm portion 420 □ of the reversing arm 420 . Here, the lower receiving part 413 is connected to the first abutment bin 41 when the reversing arm 420 is in the forward rotation state shown by the solid line in FIG. 5(B).
2 and keep the arm portion 420□ of the reversing arm 420 horizontal with the base 410, each top plate holder jig 450. ~4504, the first auto hand 200
Keep each top plate lO8°102 in the delivery state. Also,
The upper receiving part 414 is connected to the second abutting bin 415 when the reversing arm 420 is in the inverted state, which is shown by the dashed line in FIG.
By keeping the arm part 4202 of the reversing arm 420 horizontal with the base 41 (l), each top plate holder jig 45
0 to 4504 to the pitch/tilt conversion device 50 described later.
0 and each top plate 10+, 10□ is maintained in the delivery state.

As shown in FIG.
Two top plate holders 4501 to 4504 are fixedly installed.

Here, the two top plate receiving jigs 4501 and 4502, which are a pair of first workpiece receiving jigs, are connected to the first automatic hand 20.
It is for receiving each top plate 101.10□ before processing from 0, and is also a pair of second work receiving jigs,
The remaining two top plate holders 4503.450. 10. Each top plate after processing. ．． 102 to the first automatic hand 200. Note that the distance between the top plate holder jig 4501 and the top plate holder jig 450□, and the top plate holder jig 450.
The distance between the top plate support jig 4504 and the first pitch distance P is the same as the first pitch distance P.

As shown in FIG. 5 (DJ), the top plate holder 45o1 has a stepped portion 456., a holding shaft 455., and a protrusion 454. Section 456
, and the ink supply hole 13. is fitted to the holding shaft 455□, and the plate-like member 14. of the top member 12+ is fitted to the holding shaft 455□. By abutting the surface opposite to the protrusion 454I, the machined surface is held with the processed surface facing downward.

In addition, a suction pipe 452I that communicates the suction surface of the top plate holder 4501 (the surface that contacts the processed surface of the top plate 10) with a vacuum generation source (not shown) is provided inside the top plate holder 45o1. The top plate 10+ is held by vacuum suction of the machined surface of the top plate 10°. The same applies to the remaining three top plate holders 450□ to 4504.

As shown in FIG. 5(A), a motor mounting member 442 is fixed to the lower surface of the base 410, and a motor 440 is mounted to the motor mounting member 442. As shown in FIG. Further, in order to convert the rotational movement of the motor 440 into the reversal movement of the reversing arm 420, a driving pulley 441 is connected to the rotating shaft of the motor 440, and a belt 443 is stretched between the driving pulley 441 and the pulley 430. There is. Although not shown, the base 410 is provided with a through hole through which the belt 443 passes.

Here, motor 440. Drive boo IJ441. belt 4
43 and the pulley 430 function as driving means for causing the reversing arm 420 to rotate in the forward or reverse state.

(e) Pitch/tilt converting device 500 The pitch/tilting converting device 500 converts from the reversing device 400 to
At the first pitch interval P+, with each processing surface facing upward and horizontal, each top plate IL before processing,
After receiving lOi at the same time, each person's board 10. ．． 10□
while converting the interval into the second pitch interval P2, and the respective person board 10+.

102 is tilted by a predetermined angle, and a second transfer robot 200 (described later) moves each top plate 1 before processing.
01.10□, from the second transfer robot 200, each processed top plate 10+, After receiving 10a at the same time, make it horizontal so that each processing surface is level, and each person's board 101
．． 102 to the first pitch interval P1. Therefore, the pitch/tilt converting device 500 has a pitch converting function and a tilt converting function.

(I) Pitch conversion function The pitch conversion function performs the pitch conversion function on the two unprocessed top plates 10. , tow from the first pitch interval P+ to the second pitch interval P2, and converts the two processed top plates 101. This is a function of converting the interval to2 from the second pitch interval P2 to the first pitch interval P.

As shown in FIG. 6(A), the pitch/tilt conversion device 50
The pitch conversion function unit 0 is fixed to a base 510 and to both ends of the base 510 in the longitudinal direction (horizontal direction in the drawing), respectively.
The second stopper member 5111 extends downward in the figure.
5112, a fixing part 520 fixed to the center in the longitudinal direction of the base 510, and a first part 5112 provided on the base 510 so as to be slidable in the left direction and the right direction in the figure, respectively, along the upper surface of the base 510. Second slide members 5251, 5252 and fixed portions 520 of each slide member 525, 525□
Each stopper member 5111.
The first one facing □. Second leg 532. ．． 532□ and
The pitch converting cylinder 530 has one end of the main body fixed to the first leg 5321 and a tip of the piston 531 fixed to the second leg 532□.

The fixing portion 520 also includes a receiving member 5211 for receiving the unprocessed top plate 11L from the reversing device 400, and a receiving member 5211 for receiving the unprocessed top plate 11L from the reversing device 400, and a receiving member 5211 for receiving the unprocessed top plate 11L from the reversing device 400. A member 5214 is provided as a receiver for receiving the second automatic hand 710.

First slide member 525. , the top plate 10a before processing
A member 5212 is provided as a receiver for receiving the processing from the reversing device 400, and a member 52I is provided on the second slide member 525□ as a receiver for receiving the processed top plate IO1 from the second auto hand 710. There is. That is, the two receivers are members 525. , 525 degrees constitutes a set of receivers (the first workpiece receiver is a member), and the remaining two receivers are members 525
3°5254 constitutes another set of receivers (the pair of second workpiece receivers are members).

Here, the four receivers are members 525. ~5214, the installation interval between each slide member 525 is as shown in FIG.
□, 525□ are in contact with the fixed part 520, and the distance between the receiver member 5251 and the receiver member 525□ and the receiver member 525. The interval between the member 5254 and the receiver is set to be the first pitch interval P1. In addition, the length of each slide member 525, 525□ is shown in FIG. 6(c).
As shown in the figure, with each foot portion 5321.532□ of each slide member 5251.525□ in contact with the first and second stopper members 5111 and 5112, respectively, the receiver is connected to the member 5251 and the receiver is connected to the member 5252. The spacing and support of member 525. The interval between the member 5254 and the receiver is set to be the second pitch interval P2. That is, the first and second stopper members 5111.5+1. is each slide member 525. .

It functions as a slide amount regulating means for regulating the slide amount of 5252 to the difference amount between the second pitch interval P2 and the first pitch interval P.

As shown in FIG. 6(E), the receiver is placed on the upper surface of the member 5251 (
Top plate before processing 10. 10. is attached to the top plate 10.
[Top plate when holding by suction] Protruding member of opening 1 + 5. a hole into which is fitted, and a top plate 10. Ink supply hole 13. A holding shaft 5811 into which the holding shaft 5811 is inserted is provided. In addition, in order to vacuum suction the suction surface of the top plate 10+, the suction tube 5801 opened at the top surface of the member 5251 is used as the receiver,
is located inside. The remaining three receivers are member 525
The same applies to □ to 5254.

The pitch conversion operation in this pitch conversion function section is performed as follows.

2 unprocessed top plates 10. , 10□ from the reversing device 400, the receiver is the member 5211 and the receiver is the member 521.
The distance between □ and the receiver is member 5213 and the receiver is member 5214.
The distance between each top plate 10. is the first pitch interval P1 as shown in FIG. 6(A). , 10□ is completed, a drive signal is output from a controller 800 (described later) to the pitch conversion cylinder 530, and the piston 531 extends toward the second stopper member 5112. At this time, the second slide member 525□, on which the second foot portion 532□ is integrally provided, moves toward the second stopper member 5.
Slide to the 112 side. As shown in FIG. 5(B), when the second foot portion 532□ hits the second stopper member 5112, the main body of the pitch conversion cylinder 530 moves against the piston 531 and the second stopper member 511□. The first stopper member 511. Move to the side. At this time,
First leg 532. until it hits the first stopper member 511 (see (C) in the same figure), the first slide member 525, on which the first foot portion 532I is integrally provided, moves toward the first stopper member 511.
slides toward the stopper member 5111 side. the result,
The two spacings are converted into the second pitch spacing P2.

On the other hand, when receiving the two processed top plates 101.10□ from the second auto hand 710, the interval between the two is the second pitch interval P2 as shown in fc) in the same figure. , each top plate 10. , 10□, a drive signal is output from the controller 800 (described later) to the pitch conversion cylinder 530, and the piston 531 is driven to retract, and the second slide member 5252
slides toward the fixed part 520 side. When the second slide member 525□ hits the fixed part 520, the main body of the pitch conversion cylinder 530 receives the reaction force of the second slide member 525□ and the fixed part 520 and moves toward the second stopper member 5Ih. While moving, the first slide member 525I slides toward the fixed part 520 until it hits the fixed part 520. As a result, the two spacings are equal to the first pitch spacing P
Converted to 1.

(II) Tilt Conversion Function The tilt conversion function converts the inclination of the two unprocessed top plates 101. (the tilt angle of the workstation 805), and the second
Two processed top plates received from Auto Hand 710 10. .

This function converts the slope of lO□ from the predetermined angle to horizontal.

As shown in FIG. 6(D), the tilt conversion function unit includes a horizontal substrate 550, a support member 551 provided on the left side of the horizontal substrate 550 in the illustration, and a vertical substrate 552 provided on the right side of the horizontal substrate 550 in the illustration. , a shaft 555 rotatably supported by a bearing (not shown) above the support member 551;
A tilting arm 55 having a free end on the vertical substrate 552 side, which is fixed to the support member 551 and is provided perpendicularly to the support member 551.
3, and a claw 554 fixed to the free end of the tilting arm 553.
and a tilting arm 553 attached to a vertical board 552.
a lower stopper 561 that keeps the board horizontal, and a vertical board 55
2, an upper stopper 560 that regulates the tilt angle of the tilt arm 553; and a tilt conversion cylinder provided on the horizontal substrate 550 so that the piston 571 abuts against the receiving part 556 attached to the tilt arm 553. 570.

Here, the upper stopper 560 and the lower stopper 561 function as rotation angle regulating means for regulating the rotation angle of the tilt arm 553.

Further, the base 510 of the pitch conversion function section is held at a position between the receiving section 556 of the tilting arm 553 and the free end.

The slope conversion operation 7 in this slope conversion function section is performed as follows.

After receiving the two unprocessed top plates 10+ and 10□ from the reversing device 400, when the pitch conversion operation described above is being performed, the tilting arm 553 is kept in the horizontal state shown in FIG. 6 (DJ). When the pitch conversion operation is completed, the controller 800 releases the tilt conversion cylinder 57.
When the drive signal is output to 0 and the piston 571 extends, the tilting arm 553 rotates until the claw 554 hits the upper stopper 560.

As a result, each receiver of the pitch conversion function section has a member 52I,
5214 is tilted by the predetermined angle with respect to the horizontal board 550, and in this state, the second auto hand 7
The top plates 101 and 10□ are delivered to the top plate 10.

On the other hand, each top plate 1 after processing from the second auto hand 710
0. ．． When receiving 10□, the tilting arm 553 is pushed up (that is, each receiver is
14 is tilted by the predetermined angle with respect to the horizontal substrate 550, after processing, each of the top plates 101, 10□
When the reception of the piston 5 is completed, a drive signal is output from the controller 800 to the cylinder 570 for tilt conversion, and the piston 5
71 is driven to retract, the tilting arm 553 rotates until the claw 554 hits the lower stopper 561. As a result, the members 5211 to 5214 of each receiver are in a horizontal state, and in this state, each top plate 10 after processing into the reversing device 400. , 10□ are transferred.

(to) Second transport robot 700 The second transport robot 700 has a pitch/tilt conversion device 5
00, each unprocessed top plate 10. ．． After receiving 10□, it is transported to a laser processing machine 600, which will be described later, and from the workstation 606 of the laser processing machine 600, it is processed at the second pitch interval P2.
Each top plate 10 after processing, with each processed surface facing upward and tilted. ．． 102 and transports it.

As shown in FIG. 2, the second transfer robot 700 includes a second X-axis arm 701 fixed to a base (not shown),
A second Y-axis arm 702 is movably supported by a second X-axis arm 701 and reciprocated in the illustrated X-axis direction by a second X-axis driving means (not shown);
A second two-axis arm 703 is movably supported by the second two-axis arm 703 and is reciprocated in the illustrated Y-axis direction by a second Y-axis driving means (not shown); It consists of an auto hand 710.

As shown in FIG. 7(B), the second auto hand 710
The suction holding part is for two unprocessed top plates 10, tow
The first adsorption holding unit receives the two processed top plates 10+ and IO2 from the laser processing machine 600 and then transfers them to the laser processing machine 600, and then converts the pitch and inclination. The second
It is divided into two groups: a suction holding section and a suction holding section.

The first suction holding section includes a main body block 720, and 2
Book finger 723. ．． 723□ and each finger 7
23. , 723□ is attached to the moving block 7221
．． 722□ and each moving block 722. .

722□ has two sliding shafts 721 with their lower ends fixed to each other. ~721. (The sliding shaft 7212 is the sliding shaft 7
2] On the back side of the paper, the sliding shaft 7214 is connected to the sliding shaft 721.
(provided on the back of the page). In addition,
Two fingers 723. ．． At the tip of 7232, each top plate 10. ．． Two finger insertion portions 72L are inserted into the ink supply holes 131 and 132 of each top plate 101 and 10□ when suctioning and holding 10□.

724□ are provided respectively. The same applies to the second suction holding section.

Here, the distance between fingers 723 and fingers 723 □ and fingers 723 . The interval between the finger 7234 and the finger 7234 is set to the second pitch interval P2.

Further, as shown in FIG. 7(A), the main body block 720
．． A space is provided inside the moving block 72.
2. Two sliding shafts 7213.721 whose lower ends are fixed to
．． Springs 725s and 7254, which constantly bias the fingers 723□, respectively, are attached to each sliding shaft 7213.7.
2L is passed inside and held between the upper and lower surfaces of the front space as shown in the drawing. Moreover, each sliding shaft 721. ．． A through hole is bored through each of the sliding shafts 721.72L, and each of the sliding shafts 721. ．． 7214
Second bearings 726 and 726a are provided to support the second bearings. Further, a stopper 7273.7274 is provided at the upper end of each sliding shaft 7213.7214, and each spring 725m, 725. Each sliding shaft 7213.
721. The amount of movement toward the finger 7232 side is regulated. Although not shown, the main body block 720
．． In the space, there are two sliding shafts 721,, 721! whose lower ends are fixed to the moving block 722□. the finger 723
．． A spring 725 that constantly biases each side. ．． 72
5 □ is sandwiched between the upper and lower surfaces of the space shown in the figure, with each sliding shaft 721+, 721a passed inside. In addition, each sliding shaft 721+, 72 is provided on the upper and lower surfaces of the main body block 720I.
A through hole is drilled through the award hole 12, and second bearings 726I to 7264 that pivotally support the respective sliding shafts 7211 and 7212 are provided in each of the award through holes. Furthermore, a stopper 727+ is provided at the upper end of each sliding shaft 721+, 72h.
, 727z are provided, and each spring 725 .
．． The same applies to the main body block 720□ (see FIG. 7(B)) which restricts the amount of movement of each sliding shaft 7211.72b toward the finger 724+ side by 725□.

As shown in FIG. 7(C), a suction tube 7 for holding the top plate 101 by suction is provided inside the finger 7231.
291 is provided, and the suction tube 729 is connected to the top plate 10. In order to vacuum the machined surface of
23. After being branched inside, the finger 723 is opened at the tip surface thereof, which contacts the processed surface of the top plate 11L. Remaining three fingers 723□~723
The same applies to 4.

As shown in FIG. 7(A), the second auto hand 710
is attached to the second Z-axis arm 703 (see FIG. 2) at the predetermined angle using a mounting member (not shown).

Further, the center portion of the upper surface of the main body block 720 is connected to the first cylinder 740□ held by the cylinder holding member 742.
rod 741. The vertically moving members 730, , 730□, which are supported by the holding members 751. and two sliding guide shafts 750', . The suction holding part is the first cylinder 740
The rod 741 can be moved in the direction of □ according to the drive of □. Note that both ends of the cylinder holding member 742 are fixed to two holding members 751+ and 751g. In addition, the second suction holding section includes a second cylinder 740 (not shown) attached to the main body block 7202 in the same manner.
．． It is movable in the same direction as the first suction holding part according to the drive of the first suction holding part.

(g) Laser processing machine 600 As shown in FIG. 8, the laser processing machine 600 is composed of an illumination optical system, a processing system, a measurement system, and a control system.

The illumination optical system is an excimer laser 601 that emits ultraviolet light.
, a beam shaping optical device 602 and a projection lens 605 mounted on a device frame 607 provided on the optical axis a of the ultraviolet light emitted from the excimer laser 601.

Here, the excimer laser 601 is a laser that can oscillate ultraviolet light, and has the following advantages.

(I) High intensity energy can be output.

(II) Excellent monochromaticity.

(III) Good directivity.

(IV) Short pulse optical vibrations are possible.

(V) Energy density can be increased by condensing light with a lens.

That is, the excimer laser 601 generates short pulses (15 to 35
ns) can oscillate ultraviolet light, and the oscillation energy is several tens of nanometers.
0 mJ/pulse and pulse repetition frequency 30~
It consists of a 1000H2 Kr-F laser, a Xe-CI2 laser, an Ar-F laser, or the like.

The beam shaping optical device 602 includes a beam shaping optical system,
It is composed of a fly's eye lens for Keller illumination and a field lens, and the ultraviolet light emitted from the excimer laser 601 is transmitted through a mask 603 (beam shaping optical device 602 on the optical axis a and a projection lens 605, which will be described later). The light beam is uniformly irradiated onto a plurality of fine holes formed in the lens (arranged between the two), and an image is formed on the lens entrance pupil of the projection lens 605.

The entrance pupil of the projection lens 605 is set so that it is at a position conjugate with the image of the secondary light source formed by the fly's eye lens of the beam shaping optical device 602 and at the focal point on the processing side. , the ultraviolet light emitted from the beam shaping optical device 602 is transmitted to a workstation 606 to be described later.
The optical axis a is telecentrically formed on the processing surface of each top plate 101 and 102 attached to the
A plurality of slots parallel to each other are drilled. Note that, in consideration of the durability of the mask 603, it is preferable to use a reduction projection lens as the projection lens 605.

The processing system consists of a mask holding table 604 placed on an apparatus frame 607 and a workstation 606.

A mask holding stand 604 is provided between the beam shaping optical device 602 and the projection lens 605, and the mask 603
is held perpendicular to the optical axis a.

A workstation 606 is provided on the opposite side of the projection lens 605 from the mask holding table 604 so as to be horizontally movable in a direction perpendicular to the optical axis a. On the workstation 606, two top plates 1G, 10□ are arranged at a second pitch interval P2 in the direction perpendicular to the optical axis a, and the processing surface of each top plate 101.10□ is It is mounted so as to be perpendicular to the optical axis a. In addition,
Excimer laser 6 is applied to the processing surface of each top plate 10+ and 10z.
A plurality of slots are simultaneously drilled by the ultraviolet light emitted from 01.

The measurement system includes an output measurement system that measures the output of the excimer laser 601, an optical axis measurement system that measures the deviation of the optical axis a of the ultraviolet light emitted from the excimer laser 601, and a hole in each of the top plates 10+ and 10a. It consists of three measurement systems: a position measurement system that measures the positional deviation of the slots that have been removed;

The output measurement system includes a beam splitter 651 that is inserted between the excimer laser 601 and the beam shaping optical device 602 during measurement, and that reflects the ultraviolet light emitted from the excimer laser 601 at right angles upward in the figure; a sensor 653 having a ° mask 652 that receives ultraviolet light;
It consists of

The optical axis measurement system includes a light source 631 that emits measurement light in a direction perpendicular to the optical axis a during measurement, and an air cylinder 633 that is inserted between the projection lens 605 and the workstation 606 during measurement. It consists of a mirror 632 that reflects the light at right angles to the workstation 606 side and places it on the optical axis a. The deviation of the optical axis a is measured by attaching a dummy work made of translucent resin to the workstation 606 in the same manner as the top plates 10+ and IDx, and emitting ultraviolet light from the excimer laser 601. This is carried out by drilling a slot in a dummy workpiece, irradiating the dummy workpiece with the measurement light, and measuring the position of the slot using a position measurement system, which will be described later.

The position measurement system includes a first position measurement device provided at a direction of 45 degrees in the drawing with respect to the optical axis a, a second position measurement device provided in a direction of 45 degrees downward in the drawing, and the two position measurement devices. A two-sided mirror 625 is provided between the position measuring devices and on the optical axis a. Here, the first position measuring device includes a television camera 6211 used as a sensor.
and lens barrel 622. and autofocusing means 623
, an objective lens 6241, and an illumination optical device 626I. The same applies to the second position measuring device. In addition, the two-sided mirror 625 has the optical axis a
Reflecting light incident from above (measuring light emitted from the light source 631) in the direction of each position measuring device,
The illumination light emitted from each of the illumination optical devices 626+ and 626□ is reflected in a direction parallel to the optical axis a, and the top plate l
The range up to the upper and lower ends of O□ in the figure is irradiated in half.

In this position measuring system, the two position measuring devices measure the light emitted from the light source 631 and transmitted through the top plate 1O□ to each television camera 621. ．． By receiving the light at 621□, the position of the nozzle on the top plate lO□ can be measured, and each of the illumination optical devices 626, . The illumination light emitted from 626□ and reflected by the top plate 10a is transmitted to each television camera 62.
By receiving light at 11, 621a, it is possible to measure the size and position of the slot after drilling in the top plate 102.

The control system includes a control device 642, an image processing device 641,
It consists of a movement control means 643 and an interface 644.

The control device 642 performs the following control based on the measurement results in the output measurement system, the optical axis measurement system, and the position measurement system.

CI) From the output signal of the sensor 653, the excimer laser 60
The output of the excimer laser 601 is monitored and the output of the excimer laser 601 is controlled via the interface 644 so as to keep the output constant.

(tr) When the image processing device 641 detects the amount of deviation of the nozzle position of the top plate 10□ from the processing position from the output signals of the respective television cameras 621+ and 62h that received the measurement light emitted from the light source 631. , the position of the workstation 606 is controlled via the movement control means 643 so that the amount of deviation becomes zero.

(m) Each of the illumination optical devices 626. , 6262 and reflected on the perforated top plate 10z from the output signals of the television cameras 121+ and +2h,
By measuring the position of the slot in the image processing device 641, the processing position of the slot is determined.

Next, the features of this laser processing machine 600 will be explained.

(I) This laser processing machine 600 has an excimer laser 60
By irradiating the surface of a polymer resin with high-intensity, short-pulsed ultraviolet light emitted from the 1st source, the irradiated portion of the polymer resin instantaneously decomposes and scatters with plasma emission and an impact sound. APD (Ablative Photo-'decmpsit
Since this method utilizes the occurrence of the ion process to create slots in the polymer resin, the accuracy of drilling can be improved compared to when, for example, an infrared CO□ laser is used. That is, for example, when a PI (polyimide) film is irradiated with ultraviolet light using an excimer laser (Kr-F laser), the light absorption wavelength of the PI film is in the ultraviolet region, so it is possible to drill holes with high precision. However, if a YAG laser whose light absorption wavelength is not in the ultraviolet region is used, the edges of the slot will be rough, and if a CO□ laser is used, a crater will be formed around the slot. Unable to drill slots.

(II) By combining the fly-eye lens used in the beam shaping optical device 602 and the mask 603, ultraviolet light with an equal amount of light divided into a plurality of parts can be used to illuminate a plurality of top plates 101.10□. Since slots can be drilled in multiple locations at the same time, the efficiency of drilling operations can be dramatically improved.

(I) By shaping the ultraviolet light emitted from the excimer laser 601 with the beam shaping optical device 602, the ultraviolet light is Since the luminous flux of the ultraviolet light can be reduced in the direction perpendicular to the mask 603, an effect can be obtained in that the energy density of the ultraviolet light passing through the micropores formed in the mask 603 can be increased.

Next, the results of an experiment in which the laser processing machine 600 was used to make slots in a top plate used in a recording head of an inkjet recording apparatus will be described.

In this experiment, the pitch was 70.5 μm, the width was 43 μm, and the height was 4.
A top member with a 5 μm nozzle formed and a thickness of 40 to 45
μm, using a top plate made of a plate-like member made of polysulfon, 64 discharge ports with a diameter of 31
A slot hole of LLmφ is drilled. The excimer laser used in this experiment was INDEX manufactured by Lumonics.
200, and the laser output was 250 mJ/pulse, the repetition frequency was 200 Hz, and the oscillation time was 2 sec.

Table 1 shows this laser processing machine 60 using an excimer laser.
We compared the difference in processing accuracy between 0 and a conventional laser processing machine using a CO2 laser by evaluating the average area of the slots and the shape of the slots when 10 slots were drilled in the top plate. This shows the experimental results.

As is clear from the experimental results in Table 1, this laser processing machine 600 using an excimer laser is improved over the laser processing machine using a CO2 laser in both the area variation of slots and the shape evaluation. There is. therefore,
In an inkjet recording device using a recording head consisting of a top plate processed by this laser processing machine 600, the amount and direction of ejection of ink droplets are uniform, and the printed characters and figures are clear and do not lose their shape. This has the effect of improving printing accuracy.

Table 1 Experimental Results Note that in order to faithfully reproduce the shape of the micropores formed in the mask 603 on each top plate 101 and 102, it is necessary to
3 is desirably made of a thin metal plate (for example, SUS material). However, the mask 603 can also be formed using opaque ceramics, silicon, or the like, which is not affected even if the ultraviolet light emitted from the excimer laser 601 is irradiated in the atmosphere.

Further, the workstation 606 includes an excimer laser 6
Each top plate 10 with respect to the optical axis a of the ultraviolet light emitted from 01
．． ．． It is preferable to provide suitable adjustment means for adjusting the direction of the 10□. For example, as in this embodiment, each top plate 101 used in a recording head of an inkjet recording device
．． When making slots in 10□, each top plate 10. ．． t
ow top member 12.

It is preferable to configure the stage with a degree of freedom in five axes except for the direction of rotation about the direction in which the slots formed in 12□ are arranged. However, the direction of the optical axis a and each top plate I
Regarding the direction of rotation around the direction perpendicular to the arrangement direction of the slots along the machined surface of L, 10i, each top plate I
If you can accurately position L and 10□ on the workstation 606, there is no need to adjust it.Also, if the center for rotation adjustment is aligned with the processing center of each top plate 1G, 102, the control will be easier. It can be simplified.

(H) Controller 800 As shown in FIGS. 9A and 9B, the controller 800 includes an initial state confirmation circuit 801, a tray unloading confirmation circuit 802, a first suction confirmation circuit 803, and a first suction confirmation circuit 803.
lowering confirmation circuit 804 , second suction confirmation circuit 805 , first reversal confirmation circuit 806 , and third suction confirmation circuit 8
07, a first pitch conversion confirmation circuit 808, a first slope conversion confirmation circuit 809, a second descent confirmation circuit 810, a fourth suction confirmation circuit 811, and a third descent confirmation circuit 8.
10, a machining completion confirmation circuit 820, a fifth suction confirmation circuit 821, a top plate replacement confirmation circuit 822, a sixth suction confirmation circuit 823, a second tilt conversion confirmation circuit 824, and a second pitch confirmation circuit 824. It has a conversion confirmation circuit 825, a seventh suction confirmation circuit 826, a second reversal confirmation circuit 807, an eighth suction confirmation circuit 828, and a fourth drop confirmation circuit 829,
Various controls of this workpiece conveyance device are performed according to output signals from each sensor, which will be described later.

(Hereinafter, blank space) (W) Each sensor This workpiece conveyance device
01. In order to detect abnormalities that occur during transport of +02, each sensor shown in FIG. 9(A) is provided.

(I) 1st (7) X, Y, Z axis sensor CXI, CYl
, detects the position of the CZI first autohand 200 in the X-axis, Y-axis, and Z-axis directions shown in FIG.

(■) Tray detection sensor Tc Detects when the tray 300 is conveyed on the belt conveyor 140 and stops when it hits the two stopper pins 1501 and 150□.

(m) Second X, Y, Z axis sensor cX2. CT4.
CZ2 Second auto hand 710 shown in FIG. 1 X-axis, Y
Detects the position in the axis and Z-axis directions.

(rV) Reversing motor encoder E Connected to the motor 440 (see FIG. 5(A)) of the reversing device 400, and detects whether the reversing arm 420 is in a normal rotation state or a reversed state.

(V) 1st. Second suction sensor CA low, Cs + two suction tubes 21L of first auto hand 200, 21
9□ (see FIG. 4(C)), and detects the degree of vacuum when each top plate 101, 102 is held by suction with the first automatic hand 200.

(Vl) 1st. Second. Third. Fourth inverted suction sensor CA
1. Csa, Ccz, Cow reversing device 400
Each of the top plates 10+ before processing is
, 10z from the first autohand 200 and held by suction, and each top plate 10+ after processing,
10□ is received from the pitch/inclination conversion device 500 and the degree of vacuum is detected when it is sucked and held.

(■) 1st. Second cylinder position sensor pc.

P.C.

Pitch conversion cylinder 5 of pitch/tilt conversion device 500
The position of the piston 531 (see FIG. 6FA) of No. 30 is detected.

(■) Horizontal sensor PC, , tilt sensor PC4 pitch,
The position of the piston 571 (see FIG. 6 (DJ)) of the tilt conversion cylinder 570 of the tilt conversion device 500 is detected.

(IX) 1st. Second. Third stopper sensor SCI.

SC2, SC3 1st. The second stopper sensors SC+ and SCi are the first stopper sensors SC+ and SCi of the pitch/tilt conversion device 500. Second stopper member 51
11.511 (see Figure 6 (A)), respectively. The second leg portions 53L, 532* are the first leg portions 53L, 532*.
It is detected whether or not the second stopper members 511+ and 51h are in contact with each other. Third stopper sensor SC3
is the upper stopper 560 of the pitch/tilt converting device 500
(See FIG. 6 (see DJ)), and detects whether the claw 554 of the tilting arm 553 is in contact with the upper stopper 560.

(X) 1st. Each top plate 101, 10 before processing of the second supply suction sensor Cs+, Csa pitch/inclination conversion device 500
Each of the suction tubes 580 . ．． 580□(
(see Fig. 6(E)), and each top plate 10 before processing. .

Detecting the degree of vacuum when 10g is received from the reversing device 400 and held by suction 60a) 1st. Second discharge suction sensor CT1. Each top plate IL after processing by the C'r2 pitch/tilt conversion device 500, 10
Each receiver to which a is attracted and held is a member 5213, 521 . Two suction tubes 580. , 5804, and each top plate 101, 1 after processing.
02 is received from the second auto hand 710 and held by suction, the degree of vacuum is detected.

(X[+) 1st. Second supply side suction sensor CC1, CC
! Each top plate before processing of C2O4-to hand 710,,
Two suction tubes 72L, 729a (
(see Fig. 7(C)), and each top plate 10I before processing.

102 is received from the pitch/inclination conversion device 500 and the degree of vacuum is detected when it is sucked and held.

(XI) 1st. Second discharge side suction sensor co+, coa
Second auto hand 71 (each top plate IL, I after processing of l)
Two suction tubes 729 . , 729.
Each top plate 10. is attached after processing. ，
10□ is received from the laser processing machine 600 and the degree of vacuum is detected when it is sucked and held.

(Xff) Processing end signal F This signal is output from the control device 642 (see FIG. 8) of the laser processing machine 600 when the processing of each top plate 101.10□ is completed.

Next, the operation of this workpiece conveyance device will be explained in Fig. 9 (A
), the block diagram shown in (B) and Figure 1O (
This will be explained with reference to the flowcharts shown in A) to (E), respectively.

(a) Checking the initial state of each device Before starting laser processing, the initial state of each device is checked. That is, the controller 800 calculates the following: first X-axis sensor CX I *first Y-axis sensor CY l + first 2
The first X-axis arm 110 indicated by each axis sensor Cz+
．． First Y-axis arm 120. Each initial position information of the first Z-axis arm 130, initial state information of the reversing arm 420 indicated by the reversing motor encoder E, and horizontal sensor pc3. The initial state confirmation circuit 80 is based on the initial position information of the piston 571 of the tilt conversion cylinder 570 indicated by the tilt sensor Pc4.
After checking the initial state of each device in Step 1 (Step S1)
, outputs a first belt conveyor drive signal to start the belt conveyor 140 (step S2).

(B) First conveyance step When the belt conveyor 140 starts, the trays 300 containing the respective unprocessed top plates IL and 10i are placed on the belt conveyor 14θ and conveyed by a supply means (not shown). When the tray conveyance confirmation circuit 802 confirms that the tray 300 has hit the two stopper bins 150t and 150□ based on the output signal of the tray detection sensor Tc (step S3), the controller 800 stops the belt conveyor 140 and stops the belt conveyor 140. 1 conveyance system 100
A first transport drive signal is output to activate the transport drive signal (step S4).

When the first transport system 100 operates, the first Y-axis arm 1
20 and the first two-axis arm 130 are moved by a predetermined amount of movement, and the first automatic hand 200 is placed on the tray 3.
It is positioned above each top plate 101°10 stored in the first and second storage blocks 330 in 00. After that, the suction operation of the first automatic hand 200 is started, and the cylinder 230 of the first automatic hand 200 is activated to each finger insertion part 214+, 214i.
is lowered and the ink supply holes 13 of each top plate lO□, 10□ are lowered.
+, 13z, each top plate 10. ．．
102 is sucked and held by the first automatic hand 200.

The controller 800 has the first. Second suction sensor CAl
The suction state of each top plate 101 and 102 is monitored by the first suction confirmation circuit 803 from each output signal of +CI+.Step 5
5) When it is confirmed that suction failure has occurred due to causes such as poor posture of each top plate 101° 10a in L-sea 300, bad posture of first auto hand 200, and poor suction of the vacuum source, A first warning signal is output to stop the operation of the workpiece conveyance device (step 550). On the other hand, each top plate 10. ．． When it is confirmed that the adsorption state of 10□ is normal, a second transport drive signal is outputted to drive the first transport system 100 and move the first automatic hand 200 to the reversing device 400 (step S6). .

When the first autohand 200 is moved to the reversing device 400, each finger insertion portion 2141.214□ of the first autohand 200 has its tip connected to the reversing device 400.
Each holding shaft 455.0 provided on the two top plate holders 4501, 450□. ．． It is lowered by the cylinder 230 until it hits the tip of the cylinder 4552.

(c) First reversal step The controller 800 is a first X-axis sensor CXI.

First Y-axis sensor CY1. Each finger insertion portion 214 . , 214□ is monitored (step S7), and when it is confirmed that the lowered position is incorrect,
A second warning signal is output to stop the operation of the workpiece conveyance device (step 551). On the other hand, when it is confirmed that the lowered position is normal, the suction operation of the first automatic hand 200 is stopped and each top A first suction alternating signal for starting the suction operation of the plate receiving jig 4501° 450□ is output (step S8).

When the suction operation of the first automatic hand 200 is stopped, each top plate 101.10□
4. , 2142 and each holding shaft 455. ．． 4552, each top plate holder jig 450□, 4 due to its own weight.
After moving to 50□, it is held by suction.

The controller 800 has the first. Second inverted suction sensor c
The second adsorption confirmation circuit 80 uses each output signal of Aa and CSI.
In Step S9), the suction state of each top plate 10+ and 10□ is monitored in step S9). When it is confirmed that suction failure has occurred due to a suction failure of the vacuum source, etc., a third step is performed to stop the operation of the workpiece conveyance device. Output a warning signal (step 5)
52), while each top plate 10. ．． After confirming that the suction state of 10□ is normal, the motor 44 of the reversing device 400
0 and outputs a first motor drive signal that causes the reversing arm 420 to change from the forward rotation state to the inversion state (step 5IO).

When the reversing arm 420 is turned into the reversing state, each top plate receiving jig 450 . , 450□ each holding shaft 4551.45-5
2 and the two supports of the pitch/inclination converting device 500 are the members 521. ．． 5212 each holding shaft 581. ．． 5812
are in contact with the tip.

(d) The first pitch/tilt conversion process controller 800 determines the state of the reversing arm 420 and the basis of the pitch/tilt converting device 500 using the first reversal confirmation circuit 806 based on the output signals of the reversing motor encoder E and the horizontal sensor PCs. Step 5: Monitor the status of the stand 510
13) When it is confirmed that the state of the reversing arm 420 or the state of the base 510 is abnormal, a fourth warning signal is output to stop the operation of the workpiece transfer device (step 5).
53), on the other hand, when it is confirmed that the above two conditions are normal, each top plate holder jig 450. , 450□, and each receiver is a member 521+.

A second suction alternating signal is output to start the suction operation of step 5212 (step 512).

Each top plate support jig 450. ．． When the suction operation of 450□ is stopped, each top plate 10+, IL moves each holding shaft 4551° 4552 and each holding shaft 581. , 581□, each receiver is moved by its own weight to the members 521+, 521z, and then held by suction.

The controller 800 has the first. Second supply suction sensor C
The third adsorption confirmation circuit 80 uses the output signals of s+ and Csz.
In step 7, the suction state of each top plate 10+, 102 is monitored (step 513), and if it is confirmed that suction failure has occurred due to a cause such as suction failure of the vacuum source, a fifth warning is issued to stop the operation of the workpiece conveyance device. A signal is output (step 554). On the other hand, after confirming that the suction state of each top plate 10+ and 10a is normal, the pitch conversion cylinder 5
30 and each top plate 10. ．． A first cylinder drive signal is output to start an operation (pitch conversion operation) for converting the interval of 10 m from the first pitch interval P to the second pitch interval P2 (step 514).

Each top plate 10. ．． The description of the pitch conversion operation in 10□ has already been described in the description of the configuration of the pitch/tilt conversion device 500, so it will be omitted here.

When the pitch conversion operation is completed, the controller 800 controls the first pitch conversion operation. Second stopper sensor SC+.

The first pitch conversion confirmation circuit 80 uses each output signal of SC2.
1st with 8. Second leg 532. , 5322 1st ° 2nd
Stopper member 511. ．． 5112 is monitored (Step 515), and if it is confirmed that an abnormality has occurred in the collision, a sixth warning signal is output to stop the operation of the workpiece conveyance device (Step 555); on the other hand, if the collision is normal When it is confirmed that this is the case, a second cylinder drive signal is outputted to operate the tilt conversion cylinder 570 and change the tilt arm 553 from the horizontal state to the tilted state (step 516).

(E) Second conveyance process When the tilt arm 553 is brought into a tilted state, the controller 800 uses the output signal of the third stopper sensor SC3 to cause the claw 554 to hit the upper stopper 560 using the first tilt conversion confirmation circuit 809. If it is confirmed that an abnormality has occurred in the abutment, a seventh warning signal is output to stop the operation of the workpiece conveyance device (step S+7), while the abutment is confirmed to be normal. If confirmed, a third transport drive signal is output to stop the drive of the tilt conversion cylinder 570 and to operate the second transport system 700 (step 518).

When the second transport system 700 operates, the second Y-axis arm 7
02 and the second two-axis arm 703 are moved by a predetermined amount, and the first suction holding section of the second auto hand 710 is moved to the member 521. ．． It is located above 521□. After that, each finger insertion part of the second auto hand 710?
2L, 724□ has its tip end connected to the member 521. ．． It is lowered by the first cylinder 7401 until it hits the tip of each of the holding shafts 5811° and 581□ provided on the shaft 5212.

The controller 800 includes a second X-axis sensor Cx□.

The second lowering confirmation circuit 810 monitors the lowering position of each finger insertion portion 7241, 7242 based on the output signals of the second Y-axis sensor C12 and the second two-axis sensor C2□. If it is confirmed that it is incorrect, an eighth warning signal is output to stop the operation of the workpiece conveyance device (step S5?).On the other hand, if it is confirmed that the lowered position is normal, the pitch/inclination conversion device 50 is outputted.
A third suction alternating signal is output to stop the suction operation of the automatic hand 710 and to start the suction operation of the second auto hand 710 (step 520).

When the suction operation of the pitch/tilt converting device 500 is stopped, each top plate IL, 10
111□ and each finger insertion portion 724+.

724□, moves to the second automatic hand 710 by the suction force of the second automatic hand 710, and is held by suction.

The controller 800 has the first. The fourth suction confirmation circuit 8 uses the output signals of the second supply side suction sensors Cc+ and Ccz.
Step 11 monitors the adsorption state of each top plate 101.10□ (step 521), and if it is confirmed that suction failure has occurred due to a cause such as suction failure of the vacuum source, the ninth step stops the operation of the workpiece conveyance device. A warning signal is output (step 358). After confirming that the suction state of each top plate 102 is normal, the second conveyance system 700 is activated to move the second auto hand 710 to the laser processing machine 60.
A fourth transport drive signal is output to move the work station 606 to work station 0 (step 522).

When the second transport system 700 operates, the second Y-axis arm 7
02 and the second two-axis arm 703 are moved by a predetermined amount, and the first suction holding section of the second automatic hand 710 is positioned above the workstation 606. Thereafter, each finger insertion section 724 of the second autohand 710, . 724□ is the first cylinder 7401
lowered by

The controller 800 is a second X-axis sensor C+t□.

Each finger insertion portion 724. , 724□ is monitored (Step 523), and when it is confirmed that the lowered position is incorrect,
A tenth warning signal is output to stop the operation of the work transfer device (step 559). On the other hand, when it is confirmed that the lowered position is normal, the second auto hand 710
At the same time as stopping the suction operation, a processing start signal is output to the laser processing machine 600 to start processing (step 5).
24).

(f) Third conveyance process When the laser beam machine 600 makes a slot in each of the top plates 10+ and 10z, the laser beam machine 600 outputs a machining end signal F.

The controller 800 monitors the completion of machining using the machining completion confirmation circuit 820 based on the machining completion signal F (step 525);
When the completion of processing is confirmed, the suction operation of the second automatic hand 710 is started, and the second conveyance system 700 is activated to transfer the second automatic hand 710 to the laser processing machine 600.
A fifth transport drive signal is output to move the robot to the workstation 606 (step 526).

When the second transport system 700 operates, the second Y-axis arm 7
02 and the second Z-axis arm 703 are moved by a predetermined amount, and the second suction holding section of the second autohand 710 is positioned above the workstation 606. After that, each finger insertion part 7243, 7244 of the second auto hand 710 is inserted into the second cylinder 740.
．． ．． Each top plate 101.102 is lowered by 740□
By inserting the ink supply holes 13+ and 13g into the ink supply holes 13+ and 13g, each top plate lO4°10 is
234 and is held by suction.

The controller 800 has the first. Second discharge side suction sensor cot, co! The fifth suction confirmation circuit 8
21 for each top plate 10. ．． The suction state of the work piece 10□ is monitored (step 527), and when it is confirmed that suction failure has occurred due to a suction failure of the vacuum source or the like, an eleventh warning signal is output to stop the operation of the workpiece conveyance device (step 527). 560). - side, each top plate 10. ．． When it is confirmed that the adsorption state of 10□ is normal, the second transport system 700 is activated to output a sixth transport drive signal that moves the second auto hunt 710 to the pitch/tilt converting device 500 ( Step 528).

When the second transport system 700 operates, the second Y-axis arm 7
02 and the second two-axis arm 703 are moved by a predetermined amount of movement, and the first two-axis arm 703 of the second autohand 710 is moved by a predetermined amount. The second suction holding section is located above the members 5211 to 5214 of the pitch/inclination converting device 500. At this time, the two receivers are the members 521+, and the two top plates 521i are the two top plates 10s, which will be processed next by the laser processing machine 600.
104 is each of the above-mentioned top plates 10. ．． In the same manner as in the case of 10□, it is transported from the tray 300 and held by suction.

(g) Second pitch/inclination conversion process The controller 800 includes a second X-axis sensor Cx□.

Second Y-axis sensor C1□, second Z-axis sensor C2□, first, second . Third stopper sensor SCI, SC2, SC
3° horizontal sensor PC3, tilt sensor PC4 and the first.
The second auto hand 71 is activated by the top plate replacement confirmation circuit 822 based on the output signals of the second supply suction sensors Csl and Cs□.
0 position, tilt arm 5 of pitch/tilt conversion device 500
53 states and each top plate 10. ．． 10. (Step 529), each top plate 101, 102 and each top plate 1
If it is confirmed that the workpiece cannot be exchanged with 03 or 104, a twelfth warning signal is output to stop the operation of the workpiece conveyance device (step 561). After activating the system 700 and lowering the second automatic hand 710, the suction operation is stopped and a fourth suction alternating signal is outputted to start the suction operation of the pitch/tilt converting device 500 (step 530).

The controller 800 has the first. The second supply side suction sensors CC1+CC2 and the first. Second discharge suction sensor CT
1. The sixth adsorption confirmation circuit 823 uses each output signal of CT□.
Each top plate 103.1 in the second auto hand 710
0. In step 531), monitor the suction state of the workpiece and the suction state of each top plate 10+, 10g in the pitch/inclination conversion device 500. When it is confirmed that suction failure has occurred due to a suction failure of the vacuum source, etc., the workpiece transfer device A thirteenth warning signal is output to stop the operation of each top plate 10. (step 562). After confirming that the suction state of ~104 is normal, the tilt conversion cylinder 570
is activated to output a third cylinder drive signal that changes the tilting arm 553 from the tilted state to the horizontal state (step 532).

Each unprocessed top plate 101.10□ held by the second auto hand 710 is then attached to the laser processing machine
Processed with 00.

When the tilt arm 553 is brought into the horizontal state, the controller 800 monitors the state of the tilt arm 553 using the second tilt conversion confirmation circuit 824 based on the output signals of the horizontal sensor PCs and the tilt sensor PC4 (step 533). When it is confirmed that the workpiece is not in a horizontal state, a fourteenth warning signal is output to stop the operation of the workpiece conveyance device (step 563). On the other hand, the tilting arm 55
After confirming that the top plates 10+ and 10 are in a horizontal state, the pitch conversion cylinder 530 is activated to move each top plate 10+, 10
A fourth cylinder drive signal is output to start an operation (pitch conversion operation) for converting the interval □ from the second pitch interval P2 to the first pitch interval P1 (step 5).
34).

At this time, each top plate receiving jig 45-11 of the reversing device 400.
454a, the two top plates 10s and 10g to be processed thirdly by the laser processing machine 600 are each of the above-mentioned top plates 10.
+ and 102, it is transported from the tray 300 and held by suction.

(h) When the pitch conversion operation is completed, the second reversal process controller 800 performs the first reversal process controller 800. The second pitch conversion confirmation circuit 825 monitors the position of the piston 531 of the pitch conversion cylinder 530 based on the output signals of the second cylinder position sensors Pct and PC2 (step 535), and the position of the piston 531 is not at the predetermined position. When this is confirmed, a fifteenth warning signal is output to stop the operation of the workpiece conveyance device (step 5).
64).

On the other hand, when it is confirmed that the piston 531 is at a predetermined position, each receiver of the pitch converting device 500 is moved to the member 5.
213.52L and each top plate holder jig 4 of the reversing device 400
54. ．． 454□ is stopped, and each receiver of the pitch converting device 500 is connected to the members 521, . 521 □ and a fifth suction alternating signal that starts the suction operation of each top plate holder jigs 4543 and 4544 of the reversing device 400 (
step 536).

Each receiver of the pitch conversion device 500 is a member 521+, 521
Each of the unprocessed top plates 10s and log held by * is subsequently processed by the laser processing machine 600 in the same manner.

The controller 800 has the first. Second supply suction sensor C
f11. Cf12 and 3rd. Fourth inverted suction sensor C
Seventh adsorption confirmation circuit 8 from each output signal of CV and cot
26, each top plate 10s in the pitch conversion device 500,
10a and each top plate 10 in the reversing device 400. ．． Step 537: Monitor the adsorption state of In□.
), when it is confirmed that suction failure has occurred due to a suction failure of the vacuum source, etc., a 16th warning signal is output to stop the operation of the workpiece conveyance device (step 565).
. On the other hand, each top plate 101°IO□, 10. , 10fi is confirmed to be normal, the reversing device 40
A second motor drive signal is output that operates the motor 440 of No. 0 and changes the reversing arm 420 from the reversed state to the normal rotation state (step 538).

(Step 539) When the reversing arm 420 is brought into the forward rotation state, the controller 800 monitors the state of the reversing arm 420 from the output signal of the reversing motor encoder E.
When it is confirmed that the state of the reversing arm 420 is abnormal, a seventeenth warning signal is output to stop the operation of the work transfer device (step 366). On the other hand, the reversing arm 42
After confirming that the state of 0 is normal, the reversing device 40
0 to the first auto hand 200 on each top plate 10. ．． 10
A sixth suction alternation signal that starts the operation of transferring □ is output (step 540).

When the sixth suction alternation signal is output, each finger insertion section 2+4+ of the first autohand 200.

2142 is each top plate holder jig 4543 of the reversing device 400
.

4544 to a position where it comes into contact with the holding shafts 4553 and 4554. Thereafter, the suction operation by the reversing device 400 is stopped, and the first auto hand 20
The suction operation by 0 is started.

The controller 800 has the first. Second suction sensor CAI
The eighth suction confirmation circuit 828 uses each output signal of ICIII.
In Step 541), monitor the suction status of each top plate lot, 10□, and if it is confirmed that suction failure has occurred due to a suction failure of the vacuum source, etc., the 18th warning will be issued to stop the operation of the workpiece conveyance device. A signal is output (step 567). When it is confirmed that the suction state of each top plate 101.10□ is normal, a seventh conveyance drive signal is outputted to activate the first conveyance system (step 542).

When the first conveyance system is activated, the first automatic hand 200
is moved by a predetermined amount, thereby each top plate 10. which is suctioned and held by each finger 213+, 213*.
．． 10□ are stored in the tray 300.

At this time, the controller 800 controls the first X-axis sensor C
x++ first Y-axis sensor CY1. First two-axis sensor CZ
The lowering position of each finger insertion part 214□, 214□ is monitored by the fourth lowering confirmation circuit 829 based on each output signal of + (step 543), and when it is confirmed that the lowering position is incorrect, the workpiece conveyance device is operated. On the other hand, when it is confirmed that the lowered position is normal, the suction operation by the first auto hand 200 is stopped and the first machining operation is completed. An operation end signal indicating that the operation has been completed is output (step 544).

Thereafter, similar operations are repeated until all the top plates stored in the tray 300 are processed.

In addition, in the workpiece conveyance device shown in FIG. 1, each top plate 10
．． ．． 10□ is machined with each machined surface tilted in the laser processing machine 600, so the pitch and pitch shown in FIG.
Each of the top plates 10+ and 10□ was tilted using the tilt conversion device 500. However, in the laser processing machine 600, each top plate 101.1
0□ may be machined while keeping each machined surface horizontal. In this case, instead of the pitch/inclination converting device 500, a pitch converting device that does not have the above-mentioned inclination converting mechanism of the pitch/inclination converting device 500 is used. Can be used.

That is, a base 510 that constitutes the pitch conversion function section of the pitch/tilt conversion device 500 shown in FIG. 6(A);
The first base plate 510 is fixedly attached to both ends of the base 510 in the longitudinal direction and extends downward in the drawing. Second stopper member 511. ．． 5
11□, a fixing part 520 fixed to the center in the longitudinal direction of the base 510, and a first part provided on the base 510 so as to be slidable in the left direction and the right direction in the figure, respectively, along the upper surface of the base 510. ．． Second slide member 525. , 525. and,
Each slide member 525. , 525□, which is integrally provided at the end opposite to the fixing part 520, passes through a through hole (not shown) in the base 51O and faces each stopper member 5111, 5112. Second leg portion 532, .

532 □ and a pitch conversion cylinder 530 in which one end of the main body is fixed to the first leg part 5321 and the tip of the piston 531 is fixed to the second leg part 5322. can.

Further, in this case, since the pitch converting device does not have a tilt converting function, the controller 800
The first slope conversion confirmation circuit 809 shown in FIG. 9(A) and the second slope conversion confirmation circuit 824 shown in FIG. 9(B) may not be provided.

Regarding the operation of the workpiece conveyance device equipped with this pitch conversion device, among the operations of the workpiece conveyance device shown in FIG. A pitch conversion step is performed. That is, in the first pitch conversion step, as shown in FIG.
The operation shown in the flowchart shown in FIG. 10(D) with steps S16 and S17 omitted is performed, and in the second pitch conversion step, the operation shown in the flowchart shown in FIG. 10(D) with steps S32 and S33 omitted is performed. .

In the above embodiment, two top plates 10. , 10 □ at the same time, but for example, when four top plates 9101 to 9104 are to be transported simultaneously between the tray and the laser processing machine, each device of the workpiece transport device shown in FIG. , just change it as shown below.

(a) The first transfer robot is provided with four fingers (see FIG. 4) having workpiece suction and holding means at a first pitch interval P1, and each finger is connected to the top plate 91O0 to 9104 is suctioned and held one by one and transported.

(b) The reversing arm of the reversing device, which is an embodiment of the work reversing device of the present invention, includes four unprocessed top plates 91O0 to 9.
104 are held by suction one by one.Four first top plate holders (the structure is the same as the one in Fig. 5) are fixedly installed in a line at a first pitch interval P, and The four second top plate holders (the structure is the same as the one in FIG. 5) that suction and hold the four processed top plates 910I to 9104 one by one are also
They are fixedly installed in a line with a pitch interval of P.

(C) The pitch/tilt converting device includes a fixed part whose inclination is tilted by a predetermined angle by a tilt converting cylinder, and a fixed part whose inclination is tilted by a predetermined angle by a tilt converting cylinder. a first slide member group that is inclined by the predetermined angle and whose spacing is changed from a first pitch interval P to a second pitch interval P by the four pitch conversion cylinders, respectively; They are provided one by one.

Further, the four second top plate supports have members whose inclinations are tilted by the predetermined angle by the fixed portion and the tilt conversion cylinders, and whose intervals are the first by the four pitch conversion cylinders. from the pitch interval P+ to the second pitch interval P2
One slide member group is provided in each of the second slide member groups to be converted into the second slide member group.

(d) The second transfer robot is equipped with four fingers (see Fig. 7) having workpiece suction and holding means at a second pitch interval P2. In addition to sucking and holding the top plates 91O1 to 9104 one by one and transporting them, the other four have workpiece sucking and holding means.
The fingers of the book are also provided at a second pitch interval P2, and the top plate 910+ to 910 after processing is
4 is suctioned and held one by one and transported.

Next, the pitch conversion function section of the pitch/inclination conversion device shown in (c) above will be explained in detail using FIGS. 15(A) to (DJ).

As shown in FIG. 15(A), this pitch conversion function unit is connected to a base 910 and a longitudinal direction (horizontal direction in the drawing) of the base 910.
A fixing part 920 is fixed to the center of the longitudinal direction of the base 910, and a fixing part 920 is fixed to both ends of the base 910.
Three first slide members 9251 to 9 provided in
25. and three second slide members 9254 to 9256 provided on the base 910 so as to be slidable in the right direction in the drawing along the upper surface of the base 910, and the slide members 9251 to 925 degrees of each army 1. The three through holes 940. of the base 91G are located at the end opposite to the fixing part 920. -9403 (see FIG. 15(D)) and are integrally provided, respectively, with first leg portions 9321-932. and a second foot portion integrally provided at the end of each of the second slide members 9254 to 9256 opposite to the fixing portion 920 through three through holes (not shown) of the base 910. 9324 to 9326, and one end of each body is connected to each first foot portion 932. ~932. The tip of each piston 9311-931s is fixed to each second
feet 9324-932. It is provided with three pitch conversion cylinders 9301 to 930 fixed to .

Here, as shown in FIG. 15(C), the pitch conversion cylinders 9301 to 930° are arranged in parallel in the direction perpendicular to the plane of the paper of FIG. 15(A). Also, although not shown in Figure (A), (B), (C), ([1
), on the lower surface of the base 910 are pitch conversion cylinders 930□ to 930. Three first stopper members 9111-911. and,
Three second stopper members 9114-9116 are provided.

Further, in the fixing part 920, a member 921. A member 921s is provided as a receiver for receiving the processed top plate 9104 from the second transfer robot. Each first slide member 92
5I~9253 includes three unprocessed top plates 910z~9
Members 9212 to 9214 are provided as receivers for receiving one each of the top plates 9tO+ to 9103 from the reversing device. Members 9216 to 921g are provided as receivers for receiving one piece from each of the transfer robots. That is, the four receivers are members 9211 to 9.
214 constitutes a set of receivers (first workpiece receiving member group), and the remaining four receivers are members 921. -9218 constitute another set of receivers (second workpiece receiver group).

Here, each receiver is a member 921. The installation interval of ~9218 is
As shown in FIG. 15(A), the fixing part 920 and each first
slide member 925. ~9253 and each of the second slide members 9254 to 9256 are in contact with each other,
The four receivers have the first interval between the members 9211 to 9214, and the four receivers have the first interval between the members 921s to 921m.
The pitch interval PI is set to be . Also,
Each of the slide members 9251 to 925. The length of each of the slide members 925 and the installation location of each of the stopper members 911□ to 9116 are as shown in FIG. 15(B).
With the foot portions 9321-9326 of 9256 in contact with the stopper members 911+-9116, the four receivers are arranged at respective intervals of the members 9211-9214, and the four receivers are spaced apart from the members 921s-921. Each interval is set to be a second pitch interval P2.

The operation of this pitch conversion function section is similar to the operation of the pitch conversion function section shown in FIG. 6, so a description thereof will be omitted here.

Note that in this embodiment, four top plates 910. Although the workpieces 9104 to 9104 were conveyed simultaneously, the number of top plates (workpieces) to be conveyed at the same time may be arbitrary if the workpiece conveyance device is configured in the same way.

In the above explanation, in order to ensure the delivery of each top plate 101.10□, each holding shaft 581. 〜5814 are members 5211 to 521 of the pitch/inclination conversion device 500.
It was set at 4. However, each receiver has member 521. ~521
4, each top plate 101. Each protruding member of IO□+5. ．． 1
5□ is fitted, so each holding shaft 5
811 to 5814 may be omitted.

In addition, as shown in FIG. 4 (DJ), when the top plate 10. The pitch shown in FIG. 6(E) may be such that the air existing in the hole in which the projection member 15+ of the top plate 10 is fitted is sucked and the suction force is used to attract and hold the top plate 10. - The same holds true for the member 5211 of the tilt converting device 500.

Furthermore, although the top plate of a recording head used in a bubble jet type recording device was used as the workpiece, other materials may be used.

(Hereinafter, blank space) [Effects of the Invention] Since the present invention is configured as described above, it produces the effects described below.

In the workpiece reversing device of the present invention, a plurality of workpieces to be processed are simultaneously received and held by the first workpiece receiving jig group at a first pitch interval with each processing surface facing downward. After that, the reversing arm is in an inverted state, and while the reversing arm is in the inverted state, the plurality of processed workpieces are placed at the first pitch interval with each machined surface facing upward, Since the second workpiece receiving jig group simultaneously receives and holds the workpieces by suction, it is possible to transfer the plurality of unprocessed workpieces to the next process device when the reversing arm is in the inverted state. Since it is possible to simultaneously receive the plurality of processed workpieces from the apparatus for the next process, there is an effect that each of the workpieces can be efficiently reversed.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a schematic configuration of a workpiece conveyance device for conveying a top plate of a recording head for an inkjet recording device between a tray and a laser processing machine, which is equipped with an embodiment of the workpiece reversing device of the present invention. 2 is a schematic plan view of the workpiece conveyance device shown in FIG. 1, FIG. 3 is a schematic configuration diagram showing the structure of the tray shown in FIG. 1, and (A) is a perspective view thereof;
(B) is a partial sectional view taken along line A-A in (A), and FIG. 4 is a schematic configuration diagram showing the configuration of the first auto hand shown in FIG. Side view with section cut away, (B
) is a front view of the suction holding part, fcl is (A- of Bl)
5 is a cross-sectional view taken along line A, (D) is an enlarged cross-sectional view of a part of the finger showing the adsorption state of the top plate, and FIG. 5 is a schematic configuration diagram showing the configuration of the reversing device shown in FIG. 1. (A) is (
A cross-sectional view taken along line B-B of B), (B) is A-A of (A)
A cross-sectional view along the line, (C) is a schematic diagram showing the arrangement of the four top plate holders, (DJ is an enlarged sectional view of a part of the top plate holder showing the suction and holding state of the top plate, FIG. 6 is a schematic configuration diagram showing the configuration of the pitch/tilt conversion device, (A1-(C
) is a diagram showing the configuration and operation of the pitch conversion function section,
(D) is a diagram showing the configuration and operation of the tilt converting function part, (E) is a cross-sectional view showing the suction and holding state of the top plate, and is an enlarged cross-sectional view of a part of the member. FIG. 3 is a schematic configuration diagram showing the configuration of a second auto hand, in which (A) is a partially cutaway side view, FB) is a front view of its suction holding part, and (C) is a diagram showing the suction state of the top plate. 8 is a schematic configuration diagram showing the configuration of the laser processing machine shown in FIG. 1, and FIG. 9 is an enlarged cross-sectional view of a part of the finger shown in FIG. (A) is a diagram showing connections when each top plate is transported from a tray to a laser processing machine, and (B) is a diagram showing connections when each top board is transported from a laser processing machine to a tray. , FIG. 10 is a flowchart showing the operation of the controller during operation of the workpiece conveyance device shown in FIG. 1, and FIG. 11 is a schematic configuration showing an example of the configuration of an L head of an inkjet recording device (bubble jet recording device). 12 is a diagram showing an example of the components of the recording head when mounted on the base member of an ink cartridge for an inkjet recording device, and FIG. 13 is a schematic configuration diagram showing the configuration of the top plate shown in FIG. 12. , FIG. 14 is a diagram showing the positional relationship between the machined surface of the top plate and the optical axis of the laser beam when the top plate is installed in the workstation of a laser processing machine, and (A) shows the processed surface of the top plate. (B) is a diagram showing the positional relationship when the processing surface of the top plate and the optical axis of the laser beam are at a predetermined angle, 15th The figure is a schematic configuration diagram showing the configuration of a pitch conversion function section of a pitch/tilt conversion device used in a workpiece conveyance device that conveys four top plates at the same time.
B) is its front view, (C) is its left side view, and (D) is its partial top view. 10,, +0□, 910. ~9104... Top plate,
12,...Top member, LL, +32...Ink supply hole, 141...Plate member, 15,...Protrusion member, 100...First transfer robot, 110...First X-axis arm, 120... First Y-axis arm, 130... First two-axis arm, +40... Belt conveyor, 150,, 150□... Stopper bin, 190...
Tray rack, 200... First auto hand, 210... Main body block, 2111-211. ...Sliding axis, 2121.212□...Moving block, 213+, 2
13□...Finger, 2141.214□...Finger insertion portion, 215, ~2154... Spring, 216, ~2164... Second bearing, 217I
~2174... Stopper, 219+... Suction tube, 2201, 2202... Vertical moving member, 230...
Cylinder, 231... Rod, 232... Cylinder holding member, 2401.240□... Sliding guide shaft, 2411.24
12... Holding member, 242, to 2424... First bearing, 250...
Mounting member, 300... Tray, 310, ~31
05...Vertical frame, 3201-3205...Horizontal frame, 330...Storage block, 340□, 340t...Groove, 350. ．． 350
．． ...Holding shaft, 360, . 360. ... Top plate support member, 400 ... Inversion device, 410 ... Base, 4
111, 4117... Vertical support member, 412... First abutment bin, 413... Lower side receiving part, 414... Upper side receiving part, 4
15... Second abutting bin, 420... Reversing arm, 420. ··· Fixed part,
4202... Arm portion, 430... Pulley, 431... Rotating shaft, 4
40...Motor, 441...Drive pulley, 442...Motor mounting member, 443...Belt, 4501-4504...Top plate holder, 452, -45
24... Suction tube, 4541-4544...
・Protrusion, 4551-4554... Holding shaft, 4
561... Step portion, 500... Pitch/tilt conversion device, 510.910... Base, 511,, 91+, ~9J1. ... First stopper member, 51h, 9114-911. ...Second stopper member, 520, 920...Fixing portion, 521, ~521. ．． 921. ~9218... Receiving member, 525,, 9251~9253... First slide member, 525□, 925. ~9256...
second slide member, 530, 930. ~9303・
... Pitch conversion cylinder, 531, 9311-9
31. ...Piston, 532+, 932+~9
32. ...first leg, 5322, 9324-932
6... Second leg portion, 550... Horizontal board, 551... Support member, 552... Vertical board, 5
53...Tilt arm, 554...Claw, 555...
・Shaft, 556... Receiving part, 560... Upper stopper, 561... Lower stopper, 570...
Inclination conversion cylinder, 571...Piston, 580...Suction tube, 5811...Holding shaft, 600...Laser processing machine, 601...Excimer laser, 602...Beam processing optical device, 603.652...Mask, 604...Mask holding stand, 605... Projection lens,
606...Workstation, 607...Device frame, 621, . 621□・・・TV camera, 622□, 6
22□... lens barrel, 623,. 623□・・・Auto focusing means,
624,. 624□...Objective lens, 625...Double mirror, 626+, 626□...Illumination optical device, 631
... light source, 632 ... mirror, 633
... Air cylinder, 641 ... Image processing device, 642 ... Control device, 6
43... Movement control means, 644... Interface, 651... Beam splitter, 653... Sensor, 700... Second transfer port hot, 701... Second X-axis arm, 702 ...Second Y-axis arm, 703...Second two-axis arm, 710...Second auto hand, 7201.720□...Main block, 7211, 7
213.7214.7215.7217... Sliding axis, 7221-7224... Moving block, 7231
~7234...Finger, 724□~7244
...Finger insertion part, 7253.7254...Spring, 726, ~7268... Second bearing, ?
271.7273.727. ,7275.7277・
... Stopper, 729, ... Suction tube, 730□, 730□ ... Vertical moving member, 7401...
- First cylinder, 741+... Rod, 742... Cylinder holding member, 750,, 750□... Sliding guide shaft, 751,, 75
h... Holding member, 7521-7524... First bearing, 800...
Controller, 801... - Initial state confirmation circuit, 802... Tray unloading confirmation circuit, 803... First suction confirmation circuit, 804... First descent confirmation circuit, 805... Second suction Confirmation circuit, 806... First reversal confirmation circuit, 807... Third suction confirmation circuit, 808... First pitch conversion confirmation circuit, 809...
1st slope conversion confirmation circuit, 810...2nd descent confirmation circuit, all...4th suction confirmation circuit, 812...3rd descent confirmation circuit 820...processing completion confirmation circuit, 821 ...Fifth suction confirmation circuit, 822...Top plate replacement confirmation circuit, 823...Sixth suction confirmation circuit, 824...Second tilt conversion confirmation circuit, 825...Second Pitch conversion confirmation circuit, 826...Seventh suction confirmation circuit, 807...Second reversal confirmation circuit, 828...Eighth suction confirmation circuit, 829...Fourth descent confirmation circuit, 940 , ~9403... Through hole, Cx+... First X-axis sensor, CYI... First Y-axis sensor, CZI... First Z-axis sensor, Tc... Tray detection sensor, C8□...Second X-axis sensor, Cy□...Second Y-axis sensor, C2□...Second two-axis sensor, E...Reverse motor encoder, CAL...First suction sensor, CB+... second suction sensor, CA□... first inverted suction sensor, C112... second inverted suction sensor, CC2... third inverted suction sensor, CD2. ...Fourth inversion suction sensor, PC2...First cylinder position sensor, PC2...
2nd cylinder position sensor, PC3... horizontal sensor, pc4... tilt sensor, SC1... first stopper sensor, SC2... second stopper sensor, SC3... third stopper sensor , C5I...first supply suction sensor, C82...second supply suction sensor, CTI...first discharge suction sensor, CT□...second discharge suction sensor, CCI... First supply side suction sensor, CC2... Second supply side suction sensor, C□... First discharge side suction sensor, CD2... Second discharge side suction sensor, F... Processing End signal, a... optical axis, P,... first pitch interval, P2... second pitch interval. Patent applicant Canon Co., Ltd.

Claims (1)

[Claims] 1. A first workpiece receiving jig group that simultaneously receives and suction-holds a plurality of unprocessed workpieces, and a second workpiece that simultaneously receives and suction-holds a plurality of processed workpieces. a group of receiving jigs; a reversing arm in which each of the first workpiece receiving jig and each of the second workpiece receiving jig is fixed at a first pitch interval; and the reversing arm is in a forward rotation state. or a drive means for turning the workpiece into an inverted state.