JPH0417920Y2 - - Google Patents
Info
- Publication number
- JPH0417920Y2 JPH0417920Y2 JP19834787U JP19834787U JPH0417920Y2 JP H0417920 Y2 JPH0417920 Y2 JP H0417920Y2 JP 19834787 U JP19834787 U JP 19834787U JP 19834787 U JP19834787 U JP 19834787U JP H0417920 Y2 JPH0417920 Y2 JP H0417920Y2
- Authority
- JP
- Japan
- Prior art keywords
- connection port
- cabinet body
- port
- gas cylinder
- duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 42
- 231100001261 hazardous Toxicity 0.000 claims 1
- 230000005484 gravity Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19834787U JPH0417920Y2 (US20020051482A1-20020502-M00012.png) | 1987-12-25 | 1987-12-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19834787U JPH0417920Y2 (US20020051482A1-20020502-M00012.png) | 1987-12-25 | 1987-12-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01101000U JPH01101000U (US20020051482A1-20020502-M00012.png) | 1989-07-06 |
JPH0417920Y2 true JPH0417920Y2 (US20020051482A1-20020502-M00012.png) | 1992-04-21 |
Family
ID=31488863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19834787U Expired JPH0417920Y2 (US20020051482A1-20020502-M00012.png) | 1987-12-25 | 1987-12-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0417920Y2 (US20020051482A1-20020502-M00012.png) |
-
1987
- 1987-12-25 JP JP19834787U patent/JPH0417920Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH01101000U (US20020051482A1-20020502-M00012.png) | 1989-07-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6198043B2 (ja) | ロードポートユニット及びefemシステム | |
US8796010B2 (en) | Isolator for cell culture | |
US9857124B2 (en) | Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus | |
EP0139128B1 (en) | Clean bench | |
JPS6485668A (en) | Ventilator | |
US7416998B2 (en) | Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system | |
KR20170000790A (ko) | 격납 유닛, 반송 장치, 및 기판 처리 시스템 | |
TWI749184B (zh) | 具有串接處理區域的電漿腔室 | |
JPH0417920Y2 (US20020051482A1-20020502-M00012.png) | ||
KR20190108234A (ko) | 이에프이엠 | |
JP4377469B2 (ja) | エアーカーテン付き低露点作業装置及びエアーカーテン付き低露点作業設備 | |
CN102309285A (zh) | 一种静音吸尘器 | |
CN211070161U (zh) | 一种下排风一体化实验台 | |
JP2538315Y2 (ja) | 集塵機等に於けるフイルタの取付部 | |
JP2001129414A (ja) | 安全キャビネット | |
TWI817828B (zh) | 內建負壓氣室之基板容器 | |
CN217860171U (zh) | 真空吸盘及自动夹具 | |
JPWO2020086710A5 (US20020051482A1-20020502-M00012.png) | ||
CN216302214U (zh) | 底座及垃圾桶 | |
CN211913263U (zh) | 用于粘合剂的废气处理装置 | |
WO2004012229A3 (en) | Reduced volume, high conductance process chamber | |
WO2023221295A1 (zh) | 一种清洁装置 | |
CN208555458U (zh) | 一种便携式净化吸风罩 | |
DE69811354D1 (de) | Ventilationslufteinlass | |
JPH0717336U (ja) | 実験台 |