JPH0417872U - - Google Patents

Info

Publication number
JPH0417872U
JPH0417872U JP5704190U JP5704190U JPH0417872U JP H0417872 U JPH0417872 U JP H0417872U JP 5704190 U JP5704190 U JP 5704190U JP 5704190 U JP5704190 U JP 5704190U JP H0417872 U JPH0417872 U JP H0417872U
Authority
JP
Japan
Prior art keywords
workpiece
rotary coating
coating jig
jig
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5704190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5704190U priority Critical patent/JPH0417872U/ja
Publication of JPH0417872U publication Critical patent/JPH0417872U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP5704190U 1990-05-30 1990-05-30 Pending JPH0417872U (US08197722-20120612-C00042.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5704190U JPH0417872U (US08197722-20120612-C00042.png) 1990-05-30 1990-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5704190U JPH0417872U (US08197722-20120612-C00042.png) 1990-05-30 1990-05-30

Publications (1)

Publication Number Publication Date
JPH0417872U true JPH0417872U (US08197722-20120612-C00042.png) 1992-02-14

Family

ID=31581398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5704190U Pending JPH0417872U (US08197722-20120612-C00042.png) 1990-05-30 1990-05-30

Country Status (1)

Country Link
JP (1) JPH0417872U (US08197722-20120612-C00042.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273541A (ja) * 2006-03-30 2007-10-18 Topcon Corp ウェハ保持装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273541A (ja) * 2006-03-30 2007-10-18 Topcon Corp ウェハ保持装置
JP4694400B2 (ja) * 2006-03-30 2011-06-08 株式会社トプコン ウェハ保持装置

Similar Documents

Publication Publication Date Title
JPH0417872U (US08197722-20120612-C00042.png)
JPS6353653U (US08197722-20120612-C00042.png)
JPS63152271U (US08197722-20120612-C00042.png)
JPS6171360U (US08197722-20120612-C00042.png)
JPH02104984U (US08197722-20120612-C00042.png)
JPH0212485U (US08197722-20120612-C00042.png)
JPS6196601U (US08197722-20120612-C00042.png)
JPS60133629U (ja) 半導体材料の水切乾燥用回転装置
JPS6081297U (ja) 回転電機冷却用軸流フアン
JPS62101359U (US08197722-20120612-C00042.png)
JPS649054U (US08197722-20120612-C00042.png)
JPH0442645U (US08197722-20120612-C00042.png)
JPS6330462U (US08197722-20120612-C00042.png)
JPS61163207U (US08197722-20120612-C00042.png)
JPH0438037U (US08197722-20120612-C00042.png)
JPS6394568U (US08197722-20120612-C00042.png)
JPH02146139U (US08197722-20120612-C00042.png)
JPH0432849U (US08197722-20120612-C00042.png)
JPH0424054U (US08197722-20120612-C00042.png)
JPS605433U (ja) 撹拌機
JPH01142452U (US08197722-20120612-C00042.png)
JPS5993853U (ja) デイスクサンダ−用長柄
JPS61163152U (US08197722-20120612-C00042.png)
JPS58184811U (ja) マグネツトロ−ラ−
JPS62140109U (US08197722-20120612-C00042.png)