JPH0417827U - - Google Patents
Info
- Publication number
- JPH0417827U JPH0417827U JP5742290U JP5742290U JPH0417827U JP H0417827 U JPH0417827 U JP H0417827U JP 5742290 U JP5742290 U JP 5742290U JP 5742290 U JP5742290 U JP 5742290U JP H0417827 U JPH0417827 U JP H0417827U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- bellows
- flange
- inner tube
- vacuum flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 2
Landscapes
- Joints Allowing Movement (AREA)
Description
第１図は本考案の真空保持装置の第１の実施例
を示す縦断面図、第２図は第１図のベローズを縮
めた場合を示す縦断面図、第３図は第２の実施例
を示す縦断面図、第４図は第３図のベローズを縮
めた場合を示す縦断面図、第５図及び第６図は第
３及び第４の実施例を示す縦断面図、第７図は従
来の真空保持装置を備えた真空装置を示す縦断面
図、第８図は第７図のベローズを縮めた場合を示
す縦断面図である。
４……ベローズ、１３……接続ポート側真空フ
ランジ、１４……移動真空フランジ、２３……内
管、２４……真空シール用ガスケツト、２６……
同心内管。
Fig. 1 is a longitudinal sectional view showing a first embodiment of the vacuum holding device of the present invention, Fig. 2 is a longitudinal sectional view showing the case where the bellows of Fig. 1 is contracted, and Fig. 3 is a longitudinal sectional view showing the second embodiment. FIG. 4 is a longitudinal sectional view showing the case where the bellows in FIG. 3 is contracted, FIGS. 5 and 6 are longitudinal sectional views showing the third and fourth embodiments, and FIG. 8 is a vertical cross-sectional view showing a vacuum device equipped with a conventional vacuum holding device, and FIG. 8 is a vertical cross-sectional view showing a case where the bellows of FIG. 7 is retracted. 4... Bellows, 13... Connection port side vacuum flange, 14... Moving vacuum flange, 23... Inner tube, 24... Vacuum sealing gasket, 26...
Concentric inner tubes.
Claims (1)
持装置において、ベローズの両端を取付ける接続
ポート側真空フランジと移動真空フランジのベロ
ーズ内にて接続ポート側真空フランジに取付けた
内管と移動真空フランジとの間、又は、移動真空
フランジから前記内管の周囲へ延出した同心内管
との間に真空シール用ガスケツトを備えたことを
特徴とする真空保持装置。 In a vacuum holding device that uses bellows to vary the vacuum area, the inner tube attached to the connecting port side vacuum flange and the moving vacuum flange are connected in the bellows of the connecting port side vacuum flange to which both ends of the bellows are attached, and the moving vacuum flange. A vacuum holding device characterized in that a vacuum sealing gasket is provided between the movable vacuum flange and a concentric inner tube extending around the inner tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5742290U JPH0417827U (en) | 1990-05-31 | 1990-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5742290U JPH0417827U (en) | 1990-05-31 | 1990-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0417827U true JPH0417827U (en) | 1992-02-14 |
Family
ID=31582112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5742290U Pending JPH0417827U (en) | 1990-05-31 | 1990-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417827U (en) |
-
1990
- 1990-05-31 JP JP5742290U patent/JPH0417827U/ja active Pending