JPH04176867A - Dust-proof device of multistage type vacuum differential pressure chamber - Google Patents

Abstract

PURPOSE:To prevent the outside air from infiltrating into a vacuum chamber and to stably form a vapor-deposited film having excellent quality on the surface of a band steel by providing a seal roll and a seal cylinder respectively to the insides of multistage differential pressure chambers in which vacuum deposition is continuously performed on a band steel. CONSTITUTION:A band steel 1 is introduced into a third vacuum chamber 12 in the direction A shown in an arrow via a first and second vacuum differential pressure chambers 10, 11 equipped with seal rolls respectively. A vapor-deposited film is formed on the surface thereof. In this case, an inlet side seal cylinder 4 is provided to the seal roll 2 in the first vacuum differential pressure chamber of the inlet side of the band steel 1 Moreover a bypass 15 is provided by connecting it to this seal cylinder 4. A suction fan 6 by which air flows through the bypass 15 is provided to a pipeline 9 provided to the outside of the chamber 10. A bypass pipeline 17 having a filter for removing dust is fitted to the suction side thereof. Further the bypass pipeline 17 is connected to a blow off box 5 provided to the inlet of the chamber 10. Moreover a nozzle 18 is provided to the blow off box 5 to blow out the dust removed air sent from the suction fan 6 toward the band steel 1. Thereby the outside air contg. dust is prevent from infiltrating into the vacuum chambers and a vapor-deposited film having good quality is formed.

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention provides a step-by-step process for moving a strip by disposing a knoll roll and a seal cylinder in each of the multi-stage differential pressure chambers in which the strip is continuously subjected to air vapor deposition, etc. The present invention relates to a dust prevention device for a multi-stage vacuum differential pressure chamber that leads to a high vacuum.

<Prior art> In multistage vacuum differential pressure chambers in which vacuum deposition is performed continuously on strips, a pair of upper and lower sole rolls and seal rolls are used to minimize the intrusion of outside air or the movement of air between adjacent chambers. It is sealed by a seal cylinder connected to and placed in the cylinder. In order to raise the degree of vacuum to about 10-' Torr in this way, the gap between the upper and lower sole rolls and the gap between the seal roll and the knoll tube must be made smaller to reduce the amount of air passing through as much as possible. However, it is not possible to reduce this to zero, which means that outside air is sucked in, and dust is brought into the differential pressure chamber together with the outside air. If this enters the vacuum differential pressure chamber, for example, it will not only adversely affect the vacuum bonding, resulting in defective products, but also is undesirable from the standpoint of maintaining the vacuum pump.

To deal with such problems, Japanese Patent Application Laid-Open No. 1999-21276
In Publication No. 3, a communication chamber is provided between the multi-stage vacuum seal part and the outside under atmospheric pressure, and by supplying clean gas at a pressure higher than atmospheric pressure to this communication chamber, cleaning can be performed without introducing dust into the differential pressure chamber. Disclosed is a device that maintains this condition.

<Problems to be Solved by the Invention> According to the conventional technology disclosed in the above-mentioned publication, the pressure in the communication chamber is made higher than the atmospheric pressure, which prevents dust in the atmosphere from entering the differential pressure chamber. However, it has been difficult to prevent fine dust attached to the strip from entering.

The present invention solves the problems of the prior art and improves the gap between the upper and lower pairs of knoll rolls and the formation between the seal roll and the knoll cylinder, which are respectively arranged in a multi-stage differential pressure chamber that introduces the strip into a high vacuum in stages. It is an object of the present invention to provide a dustproof device for a multi-stage vacuum differential pressure chamber that can prevent air from passing through gaps as much as possible and also prevent dust from entering.

<Means for Solving the Problems> To achieve the above object, the present invention provides a multi-stage system in which seal rolls and seal cylinders are arranged in multi-stage vacuum differential pressure chambers to guide a running strip stepwise to a high vacuum. In the dust prevention device for a vacuum differential pressure chamber, a sole cylinder is provided on the inlet side of a knoll roll disposed in the first vacuum differential pressure chamber at the inlet end of the multistage vacuum differential pressure chamber, and the sole cylinder is connected to this seal cylinder. forming a detour passage that leads into the first vacuum differential pressure chamber and to a piping provided outside the first vacuum differential pressure chamber, and sucks air flowing through the detour passage into the piping provided outside the first vacuum differential pressure chamber. A suction fan is provided, and a bypass pipe for introducing makeup air equipped with a filter is connected to the suction side of the suction fan, and a pipe connected to the discharge side of the suction fan is arranged at the entrance of the first vacuum differential pressure chamber. A dustproof multi-stage vacuum differential pressure chamber, characterized in that the blow-off box is connected to a blow-off box provided therein, and the blow-off box is provided with a plurality of nozzles for discharging the air discharged from the suction fan toward the upstream side of the traveling strip. It is a device.

<Function> The amount of air Q flowing toward the second vacuum differential pressure chamber from the gap between the pair of 7-roll rolls arranged in the first vacuum differential pressure chamber and the gap between the seal roll and the seal cylinder, the larger the amount of air. Q2
By discharging the air from the nozzle of the blow-off box installed at the entrance of the first vacuum differential pressure chamber toward the upstream side of the traveling strip, the amount of air (Q2-Q,) is removed from the dust attached to the surface of the strip. Remove it by blowing it outside.

In addition, even if dust is mixed in the air entering the room from the entrance of the first vacuum differential pressure chamber, a part of the air will pass through the bypass passage to the inlet seal cylinder of the seal roll disposed inside the first vacuum differential pressure chamber. A suction fan is used to actively take out the powder and guide it to the blow-off box via piping, which can significantly reduce the amount of dust entering the vacuum differential pressure chamber.

Since the air WQ2 necessary to supply the blow-off box cannot be secured only with the air t taken out from the detour passage, clean air that has been removed through a filter is supplied from the bypass piping connected to the suction side of the suction fan to meet the necessary requirements. Secure air tQ2.

<Example> An example of the present invention will be described below based on the drawings. In FIG. 1, 13 is a main body casing, and a first vacuum differential pressure chamber 1 is provided inside the main casing 13 by a partition wall 14.
0 (hereinafter referred to as a first differential pressure chamber), a second vacuum differential pressure chamber 11 (hereinafter referred to as a second differential pressure chamber), and a third vacuum differential pressure chamber 12 (hereinafter referred to as a third differential pressure chamber), First differential pressure chamber 10
A pair of upper and lower seal rolls 2 are provided in the second differential pressure chamber II.
and a seal cylinder 3 are provided. The third differential pressure chamber I2 and subsequent ones are similarly arranged to form multistage differential pressure chambers, but are omitted in the drawing. Sole tube 3 in each room
One end is fixed to the partition wall 14, and the other end is attached to the top and bottom.
As in the past, it is set close to the rear surface of the pair of rolls 2 with a slight gap, and as shown in the second example, it surrounds the strip l.

In the present invention, one end of the entry side sole cylinder 4 is fixed to the main body casing 13 also on the upstream side of the pair of upper and lower seal rolls 2 disposed in the first differential pressure chamber 10, and the other end is fixed to the main body casing 13. It is set close to the front with a small gap. An opening 16 is formed in the side wall of the inlet portion of the inlet seal cylinder 4.
is provided, and the opening 16 passes through the detour passage 15 formed by the detour wall 15a. The tip of the detour wall 15a is disposed toward a pipe 9 connected from outside to the lower part of the first differential pressure chamber 10, and the detour passage 15 communicates with the pipe 9.

Note that 15b indicates a detour wall attached from the main casing I3 toward the entrance seal cylinder 4.

A suction fan 6 is installed in the outdoor piping 9 that communicates with the bypass passage 15.
A bypass pipe 17 is connected to the suction side pipe 9 connected to the suction fan 6, and a filter 7 and a valve 8 are attached to the bypass pipe 9 at its artificial part. Further, the piping 9 connected to the outlet side of the suction fan 6 is connected to a blow-off box 5 disposed at the entrance of the first differential pressure chamber 10, and the blow-off box 5, which is connected to the top and bottom, is connected to the discharge side of the suction fan 6. It has a structure in which a plurality of nozzles 18 are provided to discharge air toward the upstream side of the traveling slip 1.

Next, to explain the operation of the present invention, the traveling strip 1 advances from the left side to the right side as shown by the arrow A, and passes from the atmosphere through the blow-off box 5 and the entrance seal cylinder 4 to the first differential pressure chamber lO1. While passing through a pair of knoll rolls 2 and a seal cylinder 3 disposed respectively to the two differential pressure chambers 11, the airflow passes through the gap between the pair of seal rolls 2 and the gap between the seal roll 2 and the sole cylinder 3. A differential pressure is generated between the first differential pressure chamber 10 and the second differential pressure chamber 11 by reducing the flowing pressure.

As shown in FIG. 1, the air flow is controlled by the air ttQ2 discharged from the nozzle 18 of the blow-off box 5, which prevents the outside air from entering.
It is. A portion of the air amount Q2 discharged from the nozzle of the blow-off box 5 per day enters the inlet sole cylinder 4, and a portion
3 is led to the detour passage 15, and the remainder is Q, ending with the first
It passes through the gap between the sole rolls 2 in the differential pressure chamber 10.

A part of the air quantity Q3 that entered the detour passage 15 as air quantity Q3 is guided to the pipe 9B as air quantity Q, and the rest is air I.
Q: It closes and enters the seal cylinder 3 through the gap between the knoll roll 2 and the seal cylinder 3 on the exit side.

Therefore, the amount of air that enters the second differential pressure chamber 11 from the first differential pressure chamber IO is Qa + Qb = Q 1 . This air amount Q can be considered to be a known value determined by the target degree of vacuum and sealing performance. In addition, the amount of air Q4 and Qa that enters through each gap is determined by the machine precision, and its accuracy is approximately 'Q and zQ6.

The amount of air Q5 guided from the detour passage 15 to the piping 9 is supplementary air ff1Q that has passed through the filter 7 and is purified.

At the same time, the air sucked by the suction fan 6 fitQs+Q7=
Q, and is supplied from the outlet pipe 9 to the blow-off box 5 as described above. Thus, if the rate α at which a part of the discharge amount Q2 flows back into the inlet seal cylinder 4 from the blow-off box 5 is 0≦α≦1, then Q3+Q, −αx
There is a relationship of Qt.

In other words, the design is such that an amount of air of (1-α)×Q2 is blown out from the blow-off box 5 into the atmosphere, resulting in an intrusion IQ of outside air of −0.

To summarize the above relationship between air amounts, Ql = cL + Qa -----
−−−(+)Q, =Q, −−
−−・−(2) Qs:Qiζ4:1 (assumed value) −1−
−・−−(3) Qt = Qs +Qt
--(4) Ch + Qa = αQ2 −
1- (5) Q3-Qs + Qa
--1111-(6), and based on equations (1) to (6), the amount of air entering from the first differential pressure chamber 10 to the second differential pressure chamber 11, and the make-up air. The relationship between the quantity Q7 and the amount of intruding air Q, and the air IQ supplied to the blow-off box 5
Find the relationship with 2, Q, = (3/2)Q.

Qy = (3/2 2)Q+ is obtained.

Here, for example, if α=0.5, then Qt
””'6Q1. Since Q7=4QL, it is sufficient to select the capacity of the suction fan 6 and the area of the filter according to this value. Note that the filter 7 and valve 8
The reason why two series of filters 7 are provided is that the filter 7 can be switched during cleaning.

<Effects of the Invention> As explained above, according to the present invention, the outside air is prevented from entering the vacuum differential pressure chamber, and especially dust is not brought in, so that the vacuum processing chamber can be easily cleaned. Ru. Therefore, the cleanliness of products treated by vapor deposition or the like is improved, and there are no defects. Also, problems with the vacuum pump will be resolved.

[Brief explanation of drawings]

FIG. 1 is a longitudinal cross-sectional view showing one embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along the line A--A in FIG. 1...Strip, 2...Seal roll,
3... Seal tube, 4... Inlet side sole tube,
5... Blow-off Bonx, 6... Suction fan, 7... Filter, 8...
... Valve, 9... Piping, 10... First vacuum differential pressure chamber, 11... Second vacuum differential pressure chamber, 12...
・Third vacuum differential pressure chamber, 13... Main body casing, 14
...Partition wall, 15...Detour passage, 16.
...Opening, 17...Bypass piping, 18
···nozzle. Patent applicant: Kawasaki Steel Corporation

Claims (1)

[Claims] In a dust prevention device for a multi-stage vacuum differential pressure chamber in which a seal roll and a seal cylinder are arranged in each of the multi-stage vacuum differential pressure chambers to guide the running strip to a high vacuum in stages, one of the multi-stage vacuum differential pressure chambers is A seal cylinder is provided on the inlet side of the seal roll disposed in the first vacuum differential pressure chamber at the side end, and a seal cylinder is connected to the seal cylinder and communicates with the first vacuum differential pressure chamber, and is provided outside the first vacuum differential pressure chamber. A detour passage leading to the piping is formed, a suction fan is provided in the piping provided outside the first vacuum differential pressure chamber for sucking air flowing through the detour passage, and a supplementary atmosphere equipped with a filter is provided on the suction side of the suction fan. A bypass pipe to be introduced is connected, and a pipe connected to the discharge side of the suction fan is connected to a blow-off box disposed at the entrance of the first vacuum differential pressure chamber, and the blow-off box receives air discharged from the suction fan. A dust prevention device for a multi-stage vacuum differential pressure chamber, characterized in that it is provided with a plurality of nozzles that emit water toward the upstream side of a running strip.