JPH04165087A - Surface coated metallic product and production thereof - Google Patents

Surface coated metallic product and production thereof

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Publication number
JPH04165087A
JPH04165087A JP28695490A JP28695490A JPH04165087A JP H04165087 A JPH04165087 A JP H04165087A JP 28695490 A JP28695490 A JP 28695490A JP 28695490 A JP28695490 A JP 28695490A JP H04165087 A JPH04165087 A JP H04165087A
Authority
JP
Japan
Prior art keywords
layer
base material
ceramic layers
coating
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28695490A
Other languages
Japanese (ja)
Other versions
JPH0765192B2 (en
Inventor
Toshihiko Yanai
谷内 俊彦
Kazunori Sugawara
菅原 和憲
Toshio Omura
敏夫 大村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LIMES KK
Original Assignee
LIMES KK
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Filing date
Publication date
Application filed by LIMES KK filed Critical LIMES KK
Priority to JP2286954A priority Critical patent/JPH0765192B2/en
Publication of JPH04165087A publication Critical patent/JPH04165087A/en
Publication of JPH0765192B2 publication Critical patent/JPH0765192B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Other Surface Treatments For Metallic Materials (AREA)
  • Chemically Coating (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To produce the surface coated metallic product having excellent corrosion resistance in severe environment by coating the surface of a metallic base material with ceramic layers, such as silicon nitride layer, and further, providing a glassy coating layer thereon. CONSTITUTION:At least >=1 layers of the ceramic layers selected from the silicon nitride layer, silicon carbide layer and silicon carbonitride are applied on the surface of the metallic base material (steel for structural purposes, spring steel, etc.). The surface coated metallic base material is then brought into contact with a compd. (chloride, sulfate, etc.) contg. >=1 kinds of Li, Na, K, Rb, etc., and is then heat treated at >=500 deg.C to form the coating layer consisting of the glass layer further on the ceramic layers. The pinholes of the ceramic layers are embedded by the film of the glass layer in this way and the ceramic layers are shut off from the atmosphere where the product is used. The surface coated metallic product which can be used in the severe oxidative atmosphere is easily obtd.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、表面被覆金属製品及びその製造方法に関する
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a surface-coated metal product and a method for manufacturing the same.

[従来の技術及び課題] 一般の金属材料では、約1000℃以上で軟化を生じ、
かつ大気中では600℃以上から表面からの酸化が進行
する。かかる金属材料の高温での劣化を改善するために
インコネル、モネル、ニモニック、ジルカロイ、ハステ
ロイ等の種々の耐熱合金が開発されている。しかしなが
ら、前記耐熱合金でも塩素及びイオウ等を含む腐食生成
物の存在下では酸化腐食限界温度が低下し、腐食反応が
著しく促進されるという問題があった。
[Prior art and problems] General metal materials soften at temperatures above about 1000°C,
In addition, oxidation from the surface progresses from 600° C. or higher in the atmosphere. In order to improve the deterioration of such metal materials at high temperatures, various heat-resistant alloys such as Inconel, Monel, Nimonic, Zircaloy, and Hastelloy have been developed. However, even in the heat-resistant alloy, there is a problem in that the oxidation corrosion limit temperature is lowered in the presence of corrosion products containing chlorine, sulfur, etc., and the corrosion reaction is significantly accelerated.

このようなことから、金属材料の高温での耐食性等を改
善するために、耐熱鋼やその他の金属母材の表面に耐蝕
性の高い被膜を形成することが試みられている。前記金
属材料の表面に形成する被膜物質としては、アルミナ、
炭化珪素、窒化珪素等のセラミックス材料が知られてい
る。かかる被膜の形成技術としては、PVD法又はCV
D法等があるが、成膜速度の高いCVD法が採用されて
いる。
For this reason, in order to improve the corrosion resistance of metal materials at high temperatures, attempts have been made to form highly corrosion-resistant coatings on the surfaces of heat-resistant steel and other metal base materials. The coating substance formed on the surface of the metal material includes alumina,
Ceramic materials such as silicon carbide and silicon nitride are known. As a technique for forming such a film, PVD method or CV
Although there are methods such as D method, the CVD method, which has a high film formation rate, is used.

しかしながら、前記金属母材に被覆されるセラミックス
の被膜には微小なピンホールなどが存在し、高温の環境
下では前記ピンホールを通しての腐食の進行が起こる、
また、炭化珪素や窒化珪素等の非酸化物系セラミックス
の被膜は高温の状態で酸化が生じるため、多孔質の酸化
物に変質するという問題があった。
However, there are minute pinholes etc. in the ceramic coating coated on the metal base material, and corrosion progresses through the pinholes in a high temperature environment.
Furthermore, since coatings made of non-oxide ceramics such as silicon carbide and silicon nitride are oxidized at high temperatures, there is a problem in that they transform into porous oxides.

本発明は、上記従来の問題点を解決するためになされた
もので、過酷な環境下で優れた耐蝕性を有する表面被覆
金属製品、並びにかかる表面被覆金属製品を簡単に製造
し得る方法を提供しようとするものである。
The present invention was made to solve the above-mentioned conventional problems, and provides a surface-coated metal product that has excellent corrosion resistance in harsh environments, and a method for easily manufacturing such surface-coated metal products. This is what I am trying to do.

[課題を解決するための手段] 本発明に係わる表面被覆金属母材料は、金属母材の表面
に窒化珪素層、炭化珪素層及び炭窒化珪素層から選ばれ
る少なくとも1層以上のセラミックス層を被覆し、更に
該セラミックス層上にガラス質からなる被覆層を設けて
なるものである。
[Means for Solving the Problems] The surface-coated metal base material according to the present invention coats the surface of the metal base material with at least one ceramic layer selected from a silicon nitride layer, a silicon carbide layer, and a silicon carbonitride layer. Furthermore, a coating layer made of glass is provided on the ceramic layer.

前記金属母材としては、例えば構造用鋼、ばね鋼、軸受
鋼、工具鋼等の鋼材、ステンレス鋼、インコネル、モネ
ル、ニモニック、ジルカロイ、ノ\ステロイ等の耐熱合
金、又は純金属等を挙げることができる。
Examples of the metal base material include steel materials such as structural steel, spring steel, bearing steel, and tool steel, stainless steel, heat-resistant alloys such as Inconel, Monel, Nimonic, Zircaloy, Nosteroy, and pure metals. I can do it.

前記金属母材と窒化珪素層、炭化珪素層及び炭窒化珪素
層から選ばれる少なくとも1層以上のセラミックス層と
の密着性を高めるために、それらの界面にTiN、Ti
cなどの他の被膜を形成してもよい。
In order to improve the adhesion between the metal base material and at least one ceramic layer selected from a silicon nitride layer, a silicon carbide layer, and a silicon carbonitride layer, TiN, Ti, etc. are added to the interface thereof.
Other coatings such as c may also be formed.

また、本発明に係わる表面被覆金属製品の製造方法は金
属母材の表面に窒化珪素層、炭化珪素層及び炭窒化珪素
層から選ばれる少なくとも1層以上のセラミックス層を
被覆する工程と、前記表面被覆金属母材をL i、Na
5K、Rb、CS % M g % Ca s S r
 SB a SS c s Y SL a sTh、Z
n、Cd、Hg% 8% AI 、Ga、I n%Ge
、Sn及びPbから選ばれる少なくとも1種以上の金属
を含む化合物に接触させた後、500℃以上で熱処理し
て前記金属母材のセラミックス層上にガラス質からなる
被覆層を形成する工程とを具備したことを特徴とするも
のである。
Further, the method for producing a surface-coated metal product according to the present invention includes the steps of coating the surface of a metal base material with at least one ceramic layer selected from a silicon nitride layer, a silicon carbide layer, and a silicon carbonitride layer; The coated metal base material is Li, Na
5K, Rb, CS % M g % Ca s S r
SB a SS c s Y SL a sTh,Z
n, Cd, Hg% 8% AI, Ga, In% Ge
, Sn and Pb, and then heat-treated at 500° C. or higher to form a glassy coating layer on the ceramic layer of the metal base material. It is characterized by the following:

前記窒化珪素層、炭化珪素層及び炭窒化珪素層から選ば
れる少なくとも1層以上のセラミックス層を被覆する手
段としては、公知の薄膜形成技術を採用し得る。例えば
、CVD法では原料ガスである珪素源として810g4
、SiH4、窒素源としてNH3、炭素源としてCH4
を用い、水素又は不活性ガスを混合したガス雰囲気下、
約1000℃で加熱することにより金属母材に前記セラ
ミックス層が形成される。
A known thin film forming technique may be employed as a means for coating at least one ceramic layer selected from the silicon nitride layer, silicon carbide layer, and silicon carbonitride layer. For example, in the CVD method, 810g4 of silicon is used as the raw material gas.
, SiH4, NH3 as nitrogen source, CH4 as carbon source
under a gas atmosphere mixed with hydrogen or inert gas, using
The ceramic layer is formed on the metal base material by heating at about 1000°C.

前記金属の化合物としては、例えば塩化物、硫酸塩、硝
酸塩又は酸化物等を挙げることができる。
Examples of the metal compounds include chlorides, sulfates, nitrates, and oxides.

前記被覆金属母材と前記化合物とを接触させる方法とし
ては、例えば前記化合物の水溶液、非水溶媒溶液、もし
くは前記化合物の溶融塩に前記被覆金属母材を浸漬する
方法等を採用し得る。浸漬する時間は、特に制限されな
いが、数秒間から数時間、通常1分間〜1時間浸漬すれ
ば本発明の目的を達成できる。かかる浸漬工程後におい
て、溶媒を乾燥させる工程を行ってもよいが、前記熱処
理工程で溶媒も除去されるため、乾燥工程を省略しても
よい。
As a method for bringing the coated metal base material into contact with the compound, for example, a method of immersing the coated metal base material in an aqueous solution, a non-aqueous solution of the compound, or a molten salt of the compound can be adopted. The immersion time is not particularly limited, but the object of the present invention can be achieved by immersion for a few seconds to several hours, usually 1 minute to 1 hour. After the immersion step, a step of drying the solvent may be performed, but since the solvent is also removed in the heat treatment step, the drying step may be omitted.

前記熱処理工程での温度を限定した理由は、その温度を
500℃未満にするとセラミックス層上に良好なガラス
質の被膜を形成できなくなるからである。熱処理の上限
温度は、使用する金属母材の変形温度以下とすればよい
。また前記熱処理工程は、大気中もしくは酸素などの酸
化性ガスを含む不活性ガス雰囲気で行われる。熱処理時
間については、10分間から10時間程度とすればよい
The reason why the temperature in the heat treatment step is limited is that if the temperature is less than 500° C., a good glassy film cannot be formed on the ceramic layer. The upper limit temperature of the heat treatment may be lower than or equal to the deformation temperature of the metal base material used. Further, the heat treatment step is performed in the air or in an inert gas atmosphere containing an oxidizing gas such as oxygen. The heat treatment time may be about 10 minutes to 10 hours.

[作用コ 本発明によれば、金属母材表面のセラミックス層上にガ
ラス質からなる被覆層を設けることによって、該セラミ
ックス層のピーホールをガラス質の被膜で埋め込むこと
ができると共に、該ガラス質の被膜によりセラミックス
層の内部被膜を使用雰囲気から遮断できるため、酸化進
行を著しく抑制できる。したがって、過酷な環境下で優
れた耐蝕性を有する表面被覆金属製品を得ることができ
る。
[Function] According to the present invention, by providing a coating layer made of vitreous material on the ceramic layer on the surface of the metal base material, the peeholes in the ceramic layer can be filled with the vitreous coating, and Since the inner coating of the ceramic layer can be shielded from the use atmosphere by the coating, the progress of oxidation can be significantly suppressed. Therefore, a surface-coated metal product having excellent corrosion resistance under harsh environments can be obtained.

また、本発明方法によれば窒化珪素層、炭化珪素層及び
炭窒化珪素層から選ばれる少なくとも1層以上のセラミ
ックス層で覆われた表面被覆金属母材をL I SN 
a SK −、Rb SCs SM g s Ca %
5rSBa%5cSYSLaSTh、ZnSCd。
Further, according to the method of the present invention, a surface-coated metal base material covered with at least one ceramic layer selected from a silicon nitride layer, a silicon carbide layer, and a silicon carbonitride layer is L I SN.
a SK −, Rb SCs SM g s Ca %
5rSBa%5cSYSLaSTh, ZnSCd.

Hg5B、AI 、Gas I n5Ge%Sn及びP
bから選ばれる少なくとも1種以上の金属を含む化合物
に接触させた後、500℃以上で熱処理することによっ
て、前記セラミックス層に均一なガラス質の被膜を形成
できる。かかる熱処理により均一なガラス質の被膜が形
成されるのは、前記セラミックス層の表面近傍部分が熱
処理により酸化される際、その表面に接触させたガラス
成分となり得る化合物中の前記金属元素が取り込まれ、
より溶融温度の低いガラス相が形成されるためであると
考えられる。このように表面被覆金属母材にガラス質の
被膜が一旦形成されると、内部のセラミックス層等が使
用雰囲気から遮断され、酸化反応が著しく抑制されるた
め、既述したように過酷な環境下で優れた耐蝕性を有す
る表面被覆金属製品を製造できる。
Hg5B, AI, Gas I n5Ge%Sn and P
A uniform glassy coating can be formed on the ceramic layer by contacting it with a compound containing at least one metal selected from b and then heat-treating it at 500° C. or higher. The reason why a uniform glassy film is formed by such heat treatment is that when the portion near the surface of the ceramic layer is oxidized by heat treatment, the metal element in the compound that is in contact with the surface and can become a glass component is incorporated. ,
This is thought to be due to the formation of a glass phase with a lower melting temperature. Once a glassy film is formed on the surface-coated metal base material, the internal ceramic layer is shielded from the operating atmosphere and oxidation reactions are significantly suppressed. surface-coated metal products with excellent corrosion resistance can be produced.

[実施例コ 以下、本発明の実施例を詳細に説明する。[Example code] Examples of the present invention will be described in detail below.

実施例 まず、5tJS43Qステンレス鋼のテストピース(寸
法25X 25X  2mm)上にCVD法により厚さ
10μmのTiN膜を形成した後、同CVD法により厚
さ20μmの窒化珪素(Si3N4)膜を形成した。
Example First, a 10 μm thick TiN film was formed on a 5t JS43Q stainless steel test piece (dimensions 25×25×2 mm) by CVD, and then a 20 μm thick silicon nitride (Si3N4) film was formed by the same CVD method.

つづいて、窒化珪素膜被覆テストピースを20℃の飽和
食塩(N a C1l )水溶液に浸漬、乾燥した後、
縦型環状炉中で800℃の温度にて3時間熱処理を行な
った。
Subsequently, the silicon nitride film-coated test piece was immersed in a 20°C saturated salt (NaCl) aqueous solution and dried.
Heat treatment was carried out at a temperature of 800° C. for 3 hours in a vertical annular furnace.

縦型環状炉を冷却した後、炉から取り出したテストピー
スは、表面がガラス状の光沢を呈していた。また、前記
テストピースを切断し、光学顕微鏡で断面を観察したと
ころ、第1図に示す写真が得られ、窒化ケイ素層の表面
に約10μmのガラス質の被膜が形成されていることが
確認された。
After cooling the vertical annular furnace, the test piece taken out from the furnace had a glass-like gloss on its surface. Furthermore, when the test piece was cut and the cross section was observed with an optical microscope, the photograph shown in Figure 1 was obtained, and it was confirmed that a glassy film of about 10 μm was formed on the surface of the silicon nitride layer. Ta.

また、前記5US430のテストピースの表面に厚さ2
0μmのTiN膜を被覆したもの(比較例1)、未被覆
の5US480のテストピース(比較例2)、未被覆の
耐熱鋼である5tlS310のテストピース(比較例3
) 、NCP800のテストピース(比較例4)及び前
記実施例のガラス化テストピースについて、800℃の
電気炉で30分間加熱した後、10分間の空冷を行なう
操作を1サイクルとし、50サイクル毎に飽和食塩水を
塗布する繰り返し酸化試験を行なった。150サイクル
繰り返した後のテストピースの断面観察による腐食の浸
透深さの測定結果を第2図に示す。
In addition, the surface of the 5US430 test piece had a thickness of 2
A test piece coated with a 0 μm TiN film (Comparative Example 1), an uncoated 5US480 test piece (Comparative Example 2), an uncoated 5TLS310 test piece made of heat-resistant steel (Comparative Example 3)
), the NCP800 test piece (Comparative Example 4) and the vitrified test piece of the above example were heated in an electric furnace at 800°C for 30 minutes, and then cooled in air for 10 minutes, one cycle, and every 50 cycles. A repeated oxidation test was conducted by applying saturated saline. Figure 2 shows the measurement results of the corrosion penetration depth by observing the cross section of the test piece after 150 cycles.

第2図から明らかなように比較例1〜4(第2図中のB
−E)のテストピースでは、いずれも著しい母材内部へ
の腐食進行が起こることがわかる。
As is clear from Fig. 2, Comparative Examples 1 to 4 (B in Fig. 2)
-E) It can be seen that significant corrosion progressed inside the base metal in all of the test pieces.

これに対し、実施例のガラス化テストピース(第2図中
のA)ではガラス質の被膜に割れもなく、母材内部への
腐食進行が全く認められないことがわかる。
On the other hand, in the vitrified test piece of Example (A in FIG. 2), there was no crack in the glassy coating, and no progress of corrosion into the inside of the base material was observed.

[発明の効果コ 以上詳述した如く、本発明によれば金属母材の耐高温腐
食性が向上し、耐熱温度が高く、かつ高温状態での腐食
がなく、過酷な酸化性雰囲気で使用し得る耐熱構造材、
耐高温腐食構造材等に有用な表面被覆金属製品、並びに
かかる表面被覆金属製品を簡単に製造し得る方法を提供
できる。
[Effects of the Invention] As detailed above, according to the present invention, the high temperature corrosion resistance of the metal base material is improved, the heat resistance is high, there is no corrosion at high temperatures, and it can be used in harsh oxidizing atmospheres. heat-resistant structural materials,
It is possible to provide surface-coated metal products useful for high-temperature corrosion-resistant structural materials and the like, as well as a method for easily producing such surface-coated metal products.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の実施例におけるガラス化サンプルの
層組織を示す断面光学顕微鏡で撮った写真、第2図は実
施例及び比較例のテストピースの高温腐食試験後の腐食
の浸透深さを示す線図である。 出願人代理人 弁理士 鈴江武彦 ・  q     −Ti N層 第1図 第2tXI 手続補正書坊式) %式% 1、事件の表示 特願平2−286954号 2、発明の名称 表面被覆金属製品及びその製造方法 3、補正をする者 事件との関係  特許出願人 株式会社 ラ イ ム ズ 4、代理人 東京都千代田区霞が関3丁目7番2号 7、補正の内容 明細書中箱10頁9〜11行目において「第1図・・・
写真」とあるを「第1図は、本発明の実施例におけるガ
ラス化サンプルを断面光学顕微鏡で撮った結晶の構造の
写真」と訂正する。
Figure 1 is a photograph taken with a cross-sectional optical microscope showing the layered structure of the vitrified sample in the example of the present invention, and Figure 2 is the penetration depth of corrosion after the high-temperature corrosion test of the test pieces of the example and comparative example. FIG. Applicant's representative Patent attorney Takehiko Suzue q -Ti N layer Figure 1 Figure 2t Manufacturing method 3, relationship with the case of the person making the amendment Patent applicant Lime Co., Ltd. 4, agent 3-7-2-7 Kasumigaseki, Chiyoda-ku, Tokyo, detailed description of the amendment, box 10, pages 9-11 In the line ``Figure 1...
``Photograph'' should be corrected to ``Figure 1 is a photograph of the crystal structure of a vitrified sample in an example of the present invention taken with a cross-sectional optical microscope.''

Claims (2)

【特許請求の範囲】[Claims] (1)金属母材の表面に窒化珪素層、炭化珪素層及び炭
窒化珪素層から選ばれる少なくとも1層以上のセラミッ
クス層を被覆し、更に該セラミックス層上にガラス質か
らなる被覆層を設けてなる表面被覆金属製品。
(1) The surface of the metal base material is coated with at least one ceramic layer selected from a silicon nitride layer, a silicon carbide layer, and a silicon carbonitride layer, and a coating layer made of glass is further provided on the ceramic layer. surface-coated metal products.
(2)金属母材の表面に窒化珪素層、炭化珪素層及び炭
窒化珪素層から選ばれる少なくとも1層以上のセラミッ
クス層を被覆する工程と、 前記表面被覆金属母材をLi、Na、K、Rb、Cs、
Mg、Ca、Sr、Ba、Sc、Y、La、Th、Zn
、Cd、Hg、B、Al、Ga、In、Ge、Sn及び
Pbから選ばれる少なくとも1種以上の金属を含む化合
物に接触させた後、500℃以上で熱処理して前記金属
母材のセラミックス層上にガラス質からなる被覆層を形
成する工程とを具備したことを特徴とする表面被覆金属
製品の製造方法。
(2) coating the surface of the metal base material with at least one ceramic layer selected from a silicon nitride layer, a silicon carbide layer, and a silicon carbonitride layer; Rb, Cs,
Mg, Ca, Sr, Ba, Sc, Y, La, Th, Zn
, Cd, Hg, B, Al, Ga, In, Ge, Sn, and Pb, and then heat-treated at 500° C. or higher to form the ceramic layer of the metal base material. 1. A method for manufacturing a surface-coated metal product, comprising the step of forming a coating layer made of glass thereon.
JP2286954A 1990-10-26 1990-10-26 Method for manufacturing surface-coated metal products Expired - Lifetime JPH0765192B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2286954A JPH0765192B2 (en) 1990-10-26 1990-10-26 Method for manufacturing surface-coated metal products

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2286954A JPH0765192B2 (en) 1990-10-26 1990-10-26 Method for manufacturing surface-coated metal products

Publications (2)

Publication Number Publication Date
JPH04165087A true JPH04165087A (en) 1992-06-10
JPH0765192B2 JPH0765192B2 (en) 1995-07-12

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001277251A (en) * 2000-03-29 2001-10-09 Bridgestone Corp Thin film for molding mold, and mold
JP5091667B2 (en) * 2005-03-31 2012-12-05 国立大学法人九州工業大学 Surface-treated metal products

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618018A (en) * 1984-06-21 1986-01-14 早川 哲夫 Fryer by long wavelength infrared rays
JPS6376886A (en) * 1986-09-18 1988-04-07 Chiyoda Chem Eng & Constr Co Ltd Airtight ceramic coated film and its production

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618018A (en) * 1984-06-21 1986-01-14 早川 哲夫 Fryer by long wavelength infrared rays
JPS6376886A (en) * 1986-09-18 1988-04-07 Chiyoda Chem Eng & Constr Co Ltd Airtight ceramic coated film and its production

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001277251A (en) * 2000-03-29 2001-10-09 Bridgestone Corp Thin film for molding mold, and mold
JP5091667B2 (en) * 2005-03-31 2012-12-05 国立大学法人九州工業大学 Surface-treated metal products

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