JPH0416275A - Cleaning apparatus - Google Patents
Cleaning apparatusInfo
- Publication number
- JPH0416275A JPH0416275A JP11910390A JP11910390A JPH0416275A JP H0416275 A JPH0416275 A JP H0416275A JP 11910390 A JP11910390 A JP 11910390A JP 11910390 A JP11910390 A JP 11910390A JP H0416275 A JPH0416275 A JP H0416275A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning tank
- inert gas
- oxygen
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 90
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 31
- 239000001301 oxygen Substances 0.000 claims abstract description 31
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 31
- 239000011261 inert gas Substances 0.000 claims abstract description 21
- 239000007788 liquid Substances 0.000 claims description 17
- 239000002360 explosive Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 abstract description 9
- 238000004880 explosion Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 238000005192 partition Methods 0.000 abstract 2
- 238000005406 washing Methods 0.000 description 5
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、半導体や精密部品などを洗浄する洗？１１装
置に関するものである。[Detailed Description of the Invention] [Industrial Field of Application] The present invention is applicable to washing for cleaning semiconductors, precision parts, etc. 11 devices.
従来、この種の洗Ｓ装置においては、洗浄性能にすぐれ
たフロンを洗浄液として使用したものが多い。そして前
記フロンが人体に対して無毒であるなどの点から、被洗
浄物（半導体や精密機器など）を送る搬送ラインなどで
、比較的空気の出入りが生じ易い開放された状態で洗浄
工程が構成されており、この洗浄工程において、前記被
洗浄物に前記フロンを吹き付けたり或は被洗浄物をこの
フロン中にドブ漬は状態にして洗浄が行われていた。Conventionally, in many of this type of washing S apparatuses, Freon, which has excellent cleaning performance, is used as a cleaning liquid. Since the fluorocarbons mentioned above are non-toxic to the human body, the cleaning process is conducted in an open state where it is relatively easy for air to enter and exit, such as on a conveyor line that transports the objects to be cleaned (semiconductors, precision instruments, etc.). In this cleaning process, the object to be cleaned is sprayed with the fluorocarbon or the object is immersed in the fluorocarbon.
また昨今においては、上記フロンによるオゾン層破壊な
どの環境破壊が問題となってきたことから、このフロン
の代替として洗浄性能にすぐれている炭化水素系の洗浄
液が注目されるようになった。In addition, in recent years, environmental damage such as ozone layer destruction caused by the above-mentioned fluorocarbons has become a problem, so hydrocarbon-based cleaning liquids with excellent cleaning performance have been attracting attention as an alternative to fluorocarbons.
しかしながら、炭化水素系の洗浄液は揮発性、可燃性が
高いことから、上述したような空気の出入りが生じ易い
洗浄工程は構成することができない。また一方、密閉形
式の洗浄槽を構成し、洗浄液の気化ガスの漏出を防ぎな
がら、被洗浄物の洗浄を行うようにすることが考えられ
るが、前記被洗浄物の出し入れに際して外部から酸素が
この洗浄槽内に入り易く、前記の出し入れを繰り返すう
ちに洗浄槽内の酸素濃度が爆発下限界を越してしまうと
いう問題がある。However, since hydrocarbon-based cleaning liquids are highly volatile and flammable, it is impossible to construct a cleaning process in which air tends to enter and exit as described above. On the other hand, it is conceivable to construct a closed type cleaning tank and clean the objects to be cleaned while preventing the leakage of vaporized gas from the cleaning liquid. There is a problem in that the oxygen concentration inside the cleaning tank easily exceeds the lower explosive limit as it is easy to enter the cleaning tank and as the above-mentioned removal and removal is repeated.
そこで本発明は、フロンの代替として使用される可燃性
洗浄液の高い洗浄性能を生かしつつ、この洗浄液を使用
し、被洗浄物が出入りする洗浄槽の酸素濃度を爆発下限
界以下に保つようにすることを課題とし、前記可燃性洗
浄液を使用する洗浄装置の安全性を高めることを目的と
する。Therefore, the present invention makes use of the high cleaning performance of a flammable cleaning liquid used as a substitute for fluorocarbons, and uses this cleaning liquid to maintain the oxygen concentration in the cleaning tank where the objects to be cleaned enter and exit the tank below the lower explosive limit. The present invention aims to improve the safety of cleaning equipment that uses the flammable cleaning liquid.
本発明は、上記したＩＰ、Ｍを考慮してなされたもので
、洗浄槽で被洗浄物を可燃性洗浄液により洗浄する装置
であって、前記洗浄槽内の酸素濃度に基づいて不活性ガ
スを洗浄槽に供給し、前記酸素濃度を可燃性洗浄液存在
下での爆発下限界以下に維持する不活性ガス供給手段を
有することを特徴とする洗Ｓ装置を提供して、上記課題
を解消するものである。The present invention has been made in consideration of the above-mentioned IP and M, and is an apparatus for cleaning objects to be cleaned with a flammable cleaning liquid in a cleaning tank, wherein an inert gas is removed based on the oxygen concentration in the cleaning tank. The above-mentioned problem is solved by providing a cleaning S device characterized by having an inert gas supply means for supplying oxygen to a cleaning tank and maintaining the oxygen concentration below the lower limit of explosion in the presence of a flammable cleaning liquid. It is.
本発明においては、被洗浄物の出し入れによりこの洗浄
槽の酸素濃度が設定された酸素濃度より上昇すると、こ
れを不活性ガス供給手段が検出してこの不活性ガス供給
手段より不活性ガスが送り込まれ、或は常時の供給量よ
り多くの不活性ガスが送り込まれて洗浄槽の酸素濃度を
下げ、可燃性洗浄液がある洗浄槽内での爆発下限界以下
に維持する。In the present invention, when the oxygen concentration in the cleaning tank rises above the set oxygen concentration due to the loading and unloading of objects to be cleaned, the inert gas supply means detects this and inert gas is sent from the inert gas supply means. Alternatively, a larger amount of inert gas than normally supplied is pumped in to lower the oxygen concentration in the cleaning tank and maintain it below the lower explosive limit in the cleaning tank with flammable cleaning liquid.
また洗浄槽に中間扉を介在させて出し入れ用の隔室を連
設すると、この隔室が洗浄槽へ被洗浄物を出し入れする
際の洗浄槽と外部とを分ける予備室となり、この隔室に
被洗浄物を一旦配置した後に洗浄槽に送り込んだり、外
部に取り出したりする。In addition, if a compartment for loading and unloading is installed in the cleaning tank with an intermediate door interposed between them, this compartment becomes a spare room that separates the cleaning tank from the outside when loading and unloading objects into the cleaning tank. Once the object to be cleaned is placed, it is sent into the cleaning tank or taken out to the outside.
すなわち被洗浄物を洗浄槽に入れる場合、まず中間扉を
閉じた後、隔室の出し入れ口を開閉可能に覆う前扉を開
いてこの隔室に被洗浄物を入れる。そして前記前扉を閉
じた後、中間扉を開いて被洗浄物を洗浄槽に送り込み、
再び中間層を閉じて洗ゆが行われる。That is, when putting the object to be cleaned into the washing tank, first close the intermediate door, then open the front door that covers the compartment opening so that it can be opened and closed, and put the object to be cleaned into this compartment. After closing the front door, open the middle door and send the object to be cleaned into the cleaning tank.
The intermediate layer is closed again and washing is performed.
洗浄槽からの取り出しは、まず中間扉を開いて洗浄槽か
ら隔室に被洗浄物を送り、再び中間扉を閉しる。そして
前扉を開いて外部に被洗浄物が取り出せるようになり、
前記被洗浄物の出し入れに際し、前扉、中間扉のいずれ
かが閉じて洗浄槽内と外部との間で空気が流れないよう
になる。To remove the object from the cleaning tank, first open the intermediate door, send the object to be cleaned from the cleaning tank to the compartment, and then close the intermediate door again. Then, you can open the front door and take out the items to be cleaned outside.
When the object to be cleaned is taken in or taken out, either the front door or the intermediate door is closed to prevent air from flowing between the inside of the cleaning tank and the outside.
つぎに、本発明を第１図と第２図に示す実施例に基づい
て詳細に説明する。Next, the present invention will be explained in detail based on the embodiments shown in FIGS. 1 and 2.
図中１は洗浄装置で、該洗？ｌｌ装置１は、第１図に示
すように、洗浄槽２とこの洗浄槽２に連設された隔室３
とからなるものである。1 in the figure is a cleaning device; As shown in FIG. 1, the apparatus 1 includes a cleaning tank 2 and a compartment 3 connected to the cleaning tank 2.
It consists of.
上記洗浄層２は、溜め置かれた可燃性洗浄液４中にこれ
を所定温度に暖めて維持するヒータ５が取り付けられて
いるとともに、この洗浄液４中に、被洗浄物をドブ漬は
洗浄できるように上部側に振動箱６が配置され、この振
動箱６がエアシリンダー７に吊支され上下方向に移動可
能に設けられていて、前記振動箱６に被洗浄物８を配置
し前記エアシリンダー７の動作によって上げ下げされる
。The cleaning layer 2 is equipped with a heater 5 that heats and maintains the combustible cleaning liquid 4 at a predetermined temperature in a reservoir. A vibrating box 6 is disposed on the upper side, and this vibrating box 6 is suspended by an air cylinder 7 and is provided so as to be movable in the vertical direction. It is raised and lowered by the movement of.
そして上記洗浄槽２の気韻側の側面に上記隔室３が中間
扉９を介して連設されていて、この中間扉９を開けるこ
とによりこの隔室３と洗浄槽２とが連通ずるように設け
られている。また隔室３は他端が前扉ｌＯによって開閉
可能に閉じられている。The compartment 3 is connected to the side surface of the cleaning tank 2 on the air side via an intermediate door 9, and by opening the intermediate door 9, the compartment 3 and the cleaning tank 2 are communicated with each other. It is provided. Further, the other end of the compartment 3 is openably closed by a front door IO.
図中１１は不活性ガス供給手段で、この供給手段１１は
、洗浄槽２内の酸素濃度を検出する酸素濃度計１２と、
洗浄槽２および隔室３に不活性ガスを送り込むガス供給
部１３と、そして前記酸素濃度計１２の検出値により前
記ガス供給部１３の動作（不活性ガスの供給量）をコン
トロールする制御部１４とからなり、前記酸素濃度計１
２からの酸素濃度値が所定濃度値より高くなった場合に
、前記ガス供給部１３から不活性ガスを洗浄槽２と隔室
３に送り込んで洗浄槽２内における可燃性洗浄液存在下
での爆発下限界以上に酸素濃度が達しないように設けら
れている。In the figure, 11 is an inert gas supply means, and this supply means 11 includes an oxygen concentration meter 12 that detects the oxygen concentration in the cleaning tank 2,
A gas supply section 13 that feeds inert gas into the cleaning tank 2 and the compartment 3, and a control section 14 that controls the operation of the gas supply section 13 (the amount of inert gas supplied) based on the detected value of the oxygen concentration meter 12. The oxygen concentration meter 1
When the oxygen concentration value from 2 becomes higher than a predetermined concentration value, an inert gas is sent from the gas supply section 13 to the cleaning tank 2 and the compartment 3 to cause an explosion in the presence of the flammable cleaning liquid in the cleaning tank 2. It is provided to prevent the oxygen concentration from reaching the lower limit.
この装置の使用に際しては、隔室３の前扉１０を開けて
被洗浄物８を、隔室３内のチェーンコンベアなどからな
る搬送手段１５に配置し、前記前扉１０を閉じる。この
のち中間扉９を開け、前記被洗浄物８を搬送手段１５の
動作により、洗浄槽２の振動箱６に設けられた搬送手段
１６上に送り出され前記中間扉９が閉じられる。When using this device, the front door 10 of the compartment 3 is opened, the object to be cleaned 8 is placed on the conveying means 15, which is a chain conveyor or the like, inside the compartment 3, and the front door 10 is closed. Thereafter, the intermediate door 9 is opened, the object to be cleaned 8 is sent onto the conveying means 16 provided in the vibrating box 6 of the cleaning tank 2 by the operation of the conveying means 15, and the intermediate door 9 is closed.
振動箱６に被洗浄物８が配置されると、エアシリンダー
７の動作によって振動箱６が降下し、洗浄液４にドブ漬
けして洗浄を行う。この洗浄の後は、搬送−手段１５．
１６が揃うように振動箱６が上昇し、中間扉９を開けて
被洗浄物８を隔室３側に移動させ、中間扉９を閉したの
ち前扉１０を開けて前記被洗浄物８を取り出す。When the object 8 to be cleaned is placed in the vibrating box 6, the vibrating box 6 is lowered by the operation of the air cylinder 7, and is immersed in the cleaning liquid 4 for cleaning. After this cleaning, the conveying means 15.
The vibrating box 6 is raised so that the objects 16 are aligned, the intermediate door 9 is opened, the object 8 to be cleaned is moved to the compartment 3 side, the intermediate door 9 is closed, the front door 10 is opened, and the object 8 to be cleaned is moved to the compartment 3 side. Take it out.
この構造の装置１により、洗浄槽２内が被洗浄物８の出
し入れに際しても外部から遮断されていて、外部空気の
酸素が進入しにくくなる。また第一に洗浄槽２に不活性
ガスが送り込まれることから、洗浄槽２内での爆発下限
界以上に酸素濃度が上昇することがなく、図に示される
ように隔室３にも不活性ガスが送り込まれ酸素濃度の上
昇を防ぐようにしている。With the device 1 having this structure, the inside of the cleaning tank 2 is isolated from the outside even when the object to be cleaned 8 is taken in and taken out, and oxygen from the outside air is difficult to enter. First of all, since inert gas is sent into the cleaning tank 2, the oxygen concentration in the cleaning tank 2 will not rise above the lower explosive limit, and as shown in the figure, the oxygen concentration in the compartment 3 will also be inert. Gas is pumped in to prevent the oxygen concentration from rising.
上記実施例では洗浄槽２に隔室３が連設されている例を
示すが、この洗浄槽２が単独で設けられている構成とす
ることも可能である。またさらに第２図に示すように洗
浄槽２を間にして隔室３を両側に連設し、一方を入口と
し他方を出口として被洗浄物８が一方向に移動するよう
に構成することも可能である。Although the above embodiment shows an example in which the cleaning tank 2 is provided with the compartment 3, it is also possible to have a configuration in which the cleaning tank 2 is provided alone. Furthermore, as shown in FIG. 2, compartments 3 may be arranged on both sides with a cleaning tank 2 in between, and the object to be cleaned may be configured to move in one direction with one being an inlet and the other being an outlet. It is possible.
以上説明したように、本発明によれば、洗浄装置は、洗
浄槽で被洗浄物を可燃性洗浄液により洗浄するものであ
って、前記洗浄槽内の酸素濃度に基づいて不活性ガスを
洗浄槽に供給し、前記酸素濃度を可燃性洗浄液存在下で
の爆発下限界以下に維持する不活性ガス供給手段を有す
るので、洗浄槽での酸素濃度が所定の濃度以下に抑えら
れるようになり、フロンの代替とした可燃性洗浄液を安
全に使用することができるなど、実用性にすぐれた効果
を奏するものである。As explained above, according to the present invention, the cleaning device cleans the object to be cleaned with a flammable cleaning liquid in a cleaning tank, and the inert gas is transferred to the cleaning tank based on the oxygen concentration in the cleaning tank. The oxygen concentration in the cleaning tank is suppressed to a predetermined concentration or less, and the fluorocarbon This has excellent practical effects, such as the ability to safely use flammable cleaning fluids as a substitute for flammable cleaning fluids.
第１図は本発明に係る洗ｆｑＩ装置の一実施例を示す説
明図、第２図は他の実施例を示す説明図である。
１・・・洗浄装置
２・・・洗浄槽
３・・・隔室
４・・・可燃性洗浄液
８・・・被洗浄物
９・・・中間扉
１０・・・前扉
１１・・・不活性ガス供給手段
１２・・・酸素濃度計
１３・・・ガス供給部
１４・・・制御部FIG. 1 is an explanatory diagram showing one embodiment of the washing fqI apparatus according to the present invention, and FIG. 2 is an explanatory diagram showing another embodiment. 1... Cleaning device 2... Cleaning tank 3... Compartment 4... Flammable cleaning liquid 8... Object to be cleaned 9... Intermediate door 10... Front door 11... Inert Gas supply means 12...Oxygen concentration meter 13...Gas supply section 14...Control section
Claims (2)
装置であって、前記洗浄槽内の酸素濃度に基づいて不活
性ガスを洗浄槽に供給し、前記酸素濃度を可燃性洗浄液
存在下での爆発下限界以下に維持する不活性ガス供給手
段を有することを特徴とする洗浄装置。(1) A device for cleaning objects to be cleaned with a flammable cleaning liquid in a cleaning tank, wherein an inert gas is supplied to the cleaning tank based on the oxygen concentration in the cleaning tank, and the oxygen concentration is adjusted in the presence of the flammable cleaning liquid. 1. A cleaning device characterized by having an inert gas supply means for maintaining the temperature below the lower explosive limit.
洗浄物の出し入れ用隔室を連設した請求項１に記載の洗
浄装置。(2) The cleaning device according to claim 1, wherein the cleaning tank is provided with a compartment for loading and unloading objects to be cleaned, which has an opening and closing opening that can be opened and closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11910390A JPH0416275A (en) | 1990-05-09 | 1990-05-09 | Cleaning apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11910390A JPH0416275A (en) | 1990-05-09 | 1990-05-09 | Cleaning apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0416275A true JPH0416275A (en) | 1992-01-21 |
Family
ID=14752983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11910390A Pending JPH0416275A (en) | 1990-05-09 | 1990-05-09 | Cleaning apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416275A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0718479A (en) * | 1993-06-29 | 1995-01-20 | Kimura Chem Plants Co Ltd | Rotary type washing device |
| US5454177A (en) * | 1993-02-23 | 1995-10-03 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for the treatment of objects with an inflammable volatile liquid |
-
1990
- 1990-05-09 JP JP11910390A patent/JPH0416275A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5454177A (en) * | 1993-02-23 | 1995-10-03 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for the treatment of objects with an inflammable volatile liquid |
| JPH0718479A (en) * | 1993-06-29 | 1995-01-20 | Kimura Chem Plants Co Ltd | Rotary type washing device |
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