JPH0415845U - - Google Patents

Info

Publication number

JPH0415845U

JPH0415845U JP5783190U JP5783190U JPH0415845U JP H0415845 U JPH0415845 U JP H0415845U JP 5783190 U JP5783190 U JP 5783190U JP 5783190 U JP5783190 U JP 5783190U JP H0415845 U JPH0415845 U JP H0415845U

Authority

JP

Japan

Prior art keywords

wafer

fork

zirconia ceramic

transports

utility

Prior art date

1990-05-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical group O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
• 239000000919 ceramic Substances 0.000 claims description 2
• 230000007723 transport mechanism Effects 0.000 claims description 2
• 230000032258 transport Effects 0.000 claims 2
• 239000000463 material Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 239000000428 dust Substances 0.000 description 1
• 230000004048 modification Effects 0.000 description 1
• 238000012986 modification Methods 0.000 description 1

Cited By (1)