JPH04157340A - Very small frictional force measuring instrument - Google Patents

Abstract

PURPOSE:To measure a frictional force and an attracting force with high accuracy by forming a spring for measuring the frictional force and a pressing load acting on a probe from ceramics, making the spring an integral type parallel leaf spring system and building a two-staged parallel leaf spring. CONSTITUTION:A probe 32 is fixed to the upper surface of two-staged parallel leaf springs 33 and 34 and the quantity of the deformations of the leaf springs 33 and 34 are measured by displacement gages 35 and 36, respectively. An object 31 to be measured is fixedly mounted on a tripod 37 movable in three- dimensional directions X49, Y50 and Z51. Piezoelectric elements 38, 39 and 40 are provided on the tripod 37 in the directions X49, Y50 and Z51, respectively. In a measurement, a pressing force due to contact between the object 31 to be measured and the probe 32 is controlled by the spring 34, the quantity of its displacement is measured by the displacement gage 35 and the pressing force is obtained by multiplying the spring rigidity by the quantity of deformation. Then, when a given pressing force is obtained, the element 39 in the Y direction is driven and the surface of the object 31 to be measured is scratched by the probe 32. A force generated at this time is detected by the spring 34 and a frictional force is measured.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a friction force measuring device for measuring the friction force distribution between stylus probes and a minute area of a measuring object, and the present invention relates to a friction force measuring device that measures the friction force distribution between stylus probes and a minute region of a measuring object. A means for keeping the pressing load constant suitable for improving measurement accuracy, a means for displaying a feedback control signal amount to keep the pressing load constant, a means for correcting non-linearity of the piezoelectric element, and a means for measuring frictional force. X-axis seat a due to the deflection of the X-axis spring! The present invention relates to a means for correcting errors and a micro-frictional force measuring device having both functions of measuring frictional force and measuring adsorption force.

[Conventional technology]

External memories for computers, such as magnetic disks, floppy disks, and magnetic tapes, are read and written by a head passing over the recording medium. In recent years, as the recording density has increased, the distance between the head and the recording medium has become smaller to submicron, and a phenomenon has occurred where the two come into solid contact and become damaged. To elucidate this phenomenon, it is necessary to measure and evaluate the frictional force in a microscopic area. A friction force microscope is used for this purpose.

In a friction force microscope, a catalyst with a sharp tip is pressed against an object to be measured, and the object is moved in a direction perpendicular to the pressing direction to measure the pressing force and the frictional force in the moving direction. By performing this measurement over a minute range, the frictional force distribution within that range is measured. This measurement result is output on a display, making it possible to visualize and display the frictional force within the measurement range. The force value is determined by measuring the deformation of the spring, and the sensed amount is on the order of milligrams. Therefore, the rigidity of the spring used must be small in order to make the amount of deformation to be measured a measurable value. Furthermore, in order to perform measurements along the surface shape of an object to be measured when the surface has irregularities, the natural frequency of the measurement system consisting of a spring and a stylus must be high. Furthermore, in order to prevent vibrations in the environment in which this measuring instrument is placed from having an adverse effect on measurements, it is necessary to similarly increase the natural frequency.

A known example of this friction force microscope is the ``friction force microscope (
Measurement of magnetic disk surface by FFM): Proceedings of the 33rd National Conference of the Japanese Society of Lubrication (1988) P, 377-38
As shown in FIG. 2, this microscope has a structure in which a stylus 58 is attached to the tip of a parallel plate spring 52, and the displacement of this part is measured by a displacement measuring device 53. 54 is similarly attached to the tip of a parallel plate spring 52, and one spring end of the spring end is placed on a tripot 56 driven by a piezoelectric element 55 that can move in three dimensions of x, y, and z. .

The structure is such that the pressing force between the measuring object 54 and the stylus 58 is applied using trypots 56 in two directions 51. Further, the frictional force is measured by moving the object 54 in the X direction 49 and the Y direction 50, which are perpendicular to the pressing direction. The frictional force is determined by measuring the displacement of the end of the leaf spring where the stylus is attached, and multiplying this value by the spring stiffness of the spring.

In this friction force microscope, since the natural frequency of the parallel plate spring 52 is small, a magnet 59 is placed on the plate spring part where the stylus 58 is attached, thereby forming a damper.
The structure is such that the stylus can easily follow the irregularities on the surface of the object 54 during measurement.

[Problem to be solved by the invention]

The conventional invention described above has a low natural frequency of the measurement system and is not suitable for high-speed measurement. However, in order to compensate for this low natural frequency, the following considerations are taken during measurement. A magnetic damper is added to dampen vibrations when the stylus cannot follow the unevenness of the object to be measured and begins to vibrate. It also isolates vibrations to the equipment,
This prevents the harmful effects of external vibrations from entering the measurement system.

Furthermore, this conventional invention measures only the frictional force and does not measure the pressing force2, that is,
The structure is such that the position of the stylus changes in the pressing direction due to irregularities on the surface of the object to be measured, and even if the pressing force changes, control measurement cannot be performed.

In addition, in the above conventional technology, the surface shape of the sample piece is measured, which is considered to be one of the factors that cause the frictional force to change in a minute area.
There was no display capability and other measurement techniques had to be used to obtain the surface profile.

However, the range in which the frictional force is measured on a sample piece is extremely small, and it is technically difficult to measure the same range using another device after measuring the frictional force.

In addition, in the above-mentioned conventional technology, correction of non-linearity with respect to piezoelectric element control signals in three directions and correction of mutual interference in three axes due to the structure of a sample moving mechanism that combines piezoelectric elements so as to be able to drive in three axes directions. However, there was a problem in that the measurement coordinates in the three axial directions were misaligned.

Furthermore, the above-mentioned conventional technology does not take into account the function of measuring the lubricant coating distribution on the surface of the sample piece, which is considered to be one of the factors that causes the frictional force to change in a minute area.

The present invention was devised to solve these conventional problems. The purpose of the present invention will be described below.

A first object of the present invention is to increase the rigidity of the measurement system to increase the natural frequency and to use a spring with high rigidity in order to perform friction force distribution measurement that is resistant to external disturbances and can be measured at high speed. Another object of the present invention is to provide an apparatus that continuously measures the frictional force distribution with high precision by adding a function of always keeping the pressing load between the sample piece and the probe constant.

A second object of the present invention is to enable simultaneous measurement of frictional force and pressing force using parallel plate springs.

Furthermore, the frictional force to be measured is expected to be closely related to the surface shape of the magnetic disk specimen, and knowing the shape of the specimen is an important clue for elucidating the sliding characteristics. Therefore, a third object of the present invention is to provide a function that can measure the surface shape of a sample piece at the same time as measuring the frictional force.

The fourth object of the present invention is to solve the problem of nonlinearity of piezoelectric elements and mutual interaction of three axes. It is an object of the present invention to provide a means for correcting a positional deviation between a specified measurement point on a sample piece and an actual measurement point due to a quantity of 5.

A fifth object of the present invention is to provide a means for correcting a positional shift in the X-axis coordinate due to the deflection of the X-axis spring itself when measuring frictional force.

Furthermore, a lubricant is applied to the surface of the magnetic disk, and it is thought that there is a close relationship with the frictional force generated between the disk and the head. Therefore, a sixth object of the present invention is to provide a suction force measurement function that measures the lubricant application distribution state as well as the friction force measurement.

[Means to solve the problem]

The following measures were adopted to achieve the above objectives.

1. In order to increase the natural frequency of the measurement system, the parallel plate springs are made of ceramics and are integrated into an integrated structure.

This production uses CVD (a technology for growing chemically stable substances from the gas phase). In addition, as another technique for manufacturing this spring as an integral structure, the material is metal, and electroplating technique of plating is used.

2. By stacking these parallel leaf springs in two or three stages, it is possible to measure forces in two directions, X and Y, and in three directions, x, y, and z.

3. Z to detect the amount of spring displacement in the Z-axis direction during friction force measurement
A shaft displacement amount detector is provided, and the detected displacement amount is converted into an electrical signal so that the spring displacement amount in the Z-axis direction is always at a constant position, that is, the pressing load is always constant. Feedback was provided to

4. During two-dimensional scanning, the feedback control signal amount to the Z-axis pressure type element for constant pressing load control, which is output according to the surface shape of the sample piece, is output to the display device to display the surface shape of the sample. I decided to do so.

5. In order to correct the nonlinearity of the piezoelectric element and the mutual interference of the three axes, we investigated the displacement characteristics of each axis with respect to the voltage control of the axle.
An axis interference correction circuit that cancels the axis interference amount component from the axis control voltage and corrects nonlinearity to linearity is provided in the piezoelectric element disturbance circuit.

6. The positional deviation of the X-axis coordinate due to the deflection of the X-axis spring when measuring the frictional force is determined by calculating the coordinate correction amount from the frictional force at that point for each sampled measurement point, and correcting the X-axis coordinate of the measurement point. Frictional force distribution display is now available.

7. A suction force measurement function was provided to measure the lubricant coating distribution on the surface of the sample piece. In this measurement method, the sample piece is once pressed against the probe until the target load is reached, and then the sample piece is gradually separated from the probe. The adsorption is measured by the amount of displacement of the Z-axis spring. Thereafter, the same procedure was used to measure the adsorption force distribution in a minute two-dimensional range.

[Effect]

The effects of the above technical means will be described below.

1. By using ceramic as the material of the parallel leaf spring and making it an integral structure, it is possible to increase the natural frequency. Calculating the natural frequency using the physical properties of SiC, a type of ceramic, reveals that the density of SiC is 3.2 g/al and the Young's modulus is 43,000 kg/mn.
It is 2. Compared to metals (for example, stainless steel), the Young's modulus is about twice, and the density is about 1/2.5.

The natural frequency is expressed by five i. Here M is mass and K
represents the spring constant. Since the spring constant is proportional to Young's modulus, when a parallel plate spring is made of a metal material, and for comparison, assuming its mass to be 1 and Young's modulus to be 1, the natural frequency will be l.

On the other hand, when determining the natural frequency of ceramics, the mass is 0.
4, the spring stiffness is 2. As a result, the natural frequency is 2
．． It becomes 2. If the parallel plate springs made of ceramic and metal have the same shape, a natural frequency 2.2 times higher can be obtained.

2.C is an integrated parallel plate spring made of ceramics.
When manufacturing using the VD method, compared to manufacturing using the joining method, there is no need for extra meat at the joint, and the weight can be reduced, which is further advantageous in increasing the natural frequency.

Electroforming technology that utilizes plating of metal materials makes it possible to manufacture a similar lightweight parallel plate spring with an integral structure.

3. The upper spring of the integrated parallel plate spring can be bent only in the X-axis direction, and the lower spring can be bent only in the Z-axis direction. Additionally, X-axis and Z-axis displacement detectors are installed to detect the amount of displacement of each spring. This makes it possible to simultaneously measure the amount of spring displacement in the X-axis direction and the amount of displacement of the Z-axis spring. Furthermore, even if a spring with relatively high rigidity is used, by continuously controlling the Z-axis piezoelectric element so that the amount of spring displacement in the Z-axis direction is constant, the pressing load in the Z-axis direction can always be kept constant. This makes it possible to accurately measure minute frictional forces in a minute range.

4. When continuously measuring frictional force as mentioned above, in order to keep the pressing load on the probe constant, a technology is required to control the Z-axis piezoelectric element according to the surface shape of the sample piece. becomes. The amount of feedback control signal for controlling the Z-axis pressure type element at this time reflects the size of the unevenness on the surface of the sample piece. Therefore, by displaying this feedback control signal amount on a display device, it has become possible to measure the frictional force and simultaneously obtain the surface shape of the same range on the sample piece.

5. In order to correct the non-linearity of piezoelectric element voltage control and the positional deviation between the specified measurement point on the sample and the actual measurement point due to three-axis mutual interference, we The amount of displacement error with respect to the applied voltage and the amount of interference between the three axes were measured in advance and used as preliminary data for correction. Furthermore, when applying control voltages to each of the three-axis piezoelectric elements,
An axis interference correction circuit that operates to subtract a voltage corresponding to the displacement error amount and the axis interference amount from the control voltage of each axis based on preliminary data was provided in the piezoelectric element opening circuit. This makes it possible to correct the nonlinearity of the piezoelectric element and the amount of three-axis mutual interference in real time.

6. The amount of positional deviation of a measurement point due to the deflection of the spring in the X-axis direction when measuring the frictional force can be determined from the magnitude of the frictional force at each measurement point and the spring constant of the X-axis spring. Therefore, when displaying the frictional force distribution, we have provided a function that displays the amount of positional deviation of the measurement point while correcting it. This has made it possible to improve the measurement position accuracy in the X-axis direction in frictional force measurement.

7. In order to measure the amount of Z-axis spring displacement, this device is equipped with a displacement detector in the X-axis direction in addition to the X-axis displacement detector. Therefore, in addition to detecting the amount of load pressing the sample piece against the probe in two directions, it is possible to measure the adsorption force of the probe on the sample piece in the Z direction. As a result, this device can measure two types of force distributions: the frictional force distribution and the adsorption force distribution on the sample piece.

[Example] An example of the present invention will be described with reference to FIG. This diagram is
Frictional force R This shows the frictional force measured by the microscope.Measurement object 3
1 and the stylus 32 are in contact with each other. The stylus 32 is fixed to parallel plate springs 33 and 34 stacked in two stages. A displacement meter 35 is used to measure the amount of deformation of the parallel plate springs 33 and 34.
．． 36 are arranged. On the other hand, the object 1 to be measured is mounted on a tripod 37 whose position can be moved in the three-dimensional direction of X49°Y2O, 251. Tripot 37
X49. Piezoelectric elements 38, 39, and 40 are attached to Y51, 251 (7) in respective directions.

To explain the movement during measurement, when the object to be measured 31 and the stylus 32 are close to each other, the piezoelectric element 3 of the trypot 37 moves in the Z direction 51.
Note 8 to bring them into contact.

Here, the pressing force due to the contact is controlled by a parallel leaf spring 34 that detects the force in two directions 51.

When the object 31 and the stylus 32 begin to come into contact with each other, the parallel leaf spring 34 begins to deform. This amount of deformation is measured by the displacement meter 35, and the pressing force is determined by multiplying this amount of deformation by the spring rigidity of the parallel plate spring 34. Next, when a predetermined pressing force is obtained, the piezoelectric element 39 in the Y direction 50 is moved to scratch the surface of the object 31 with the stylus 32. The force generated at this time is detected by the parallel plate spring 34, and the force generated at this time is detected by the parallel plate spring 34. Force is frictional force.

Here, parallel plate springs 33 with a shell structure stacked in two stages
．． 34 detects the force in each direction. The parallel leaf springs 33 and 34 have a thickness of several tens of microns and a height of several millimeters. If the material is ceramic with these dimensions, the spring stiffness in the measurement direction can be approximately IK/200 nm, and the low-order natural frequency can be approximately 500 Hz.

Next, a method of manufacturing this ceramic ring parallel plate spring using CVD technology will be explained with reference to FIG. First, a rectangular parallelepiped block 41 is made (a), and S i C 42 is grown around it by a predetermined dimension corresponding to the plate thickness 43 of the parallel leaf spring (b).

And 5iC on two opposite sides of the rectangular parallelepiped block 41
42 is removed by machining or the like (C), and then the block inside it is extracted, and what remains becomes a parallel leaf spring (d).

It is also possible to manufacture similar parallel plate springs using metal plating technology. Instead of attaching SiC by the above-mentioned CVD, it is attached to the surface of the rectangular parallelepiped block by metal plating, and then a parallel plate spring is made using the same method as for SiC.

If you stack the parallel plate springs made in this way into two layers, it will become X49.
．． A force detector capable of detecting force in the Y direction 5o can be created.

Another embodiment according to the invention is shown in FIG. This structure has parallel leaf springs 43, 44, and 45 stacked in three stages, each with three
It has a structure that detects the direction. The stylus 32 is connected to a parallel plate spring 43 in two directions 51 arranged at the top of the ji-
mounted on top.

Displacement detectors 46, 47, and 48 are attached to each of the parallel plate springs 43, 44, and 45, respectively. With this structure, the friction force in the X49° and Y directions 50 can be measured simultaneously.

At this time, the pressing direction is the Z direction 51.

FIG. 5 is an overall configuration diagram of a microfrictional force measuring device to which the present invention is applied, and shows a control personal computer 1. D/A converter 2. Digitizer 3, piezoelectric element drive circuit 4. A sample moving mechanism section 5 to which a sample piece 16 (for example, a magnetic disk piece) is attached. X-axis spring 7 and Z-axis spring 8
A spring mechanism section 6 includes a probe 9, and displacement detectors 10 and 11 for an X-axis spring and a biaxial spring. The piezoelectric element drive circuit 4 also includes an X-axis and a Y-axis pressure type element drive section 12 (two-dimensional scanning section), and a Z-axis pressure type element drive section 13 that controls the Z-axis pressure type element. X-axis, Y-axis piezoelectric element drive section 12 and Z
An axial mutual interference correction circuit 17 that corrects positional deviation in two-dimensional scanning based on the control voltage of the axial pressure type element disturbance section 13, and a feedback circuit section 1 that keeps the pressing load constant at a target value.
Consists of 4.

After setting the sample moving mechanism section 5 manually to a position immediately before contacting the probe, the D/
Through the A converter 2, the drive range of the X and Y axis pressure type elements,
The pressing load target value and the scanning speed in the X-axis direction of the Z-axis pressure type element are respectively set. The piezoelectric element drive circuit 4 sends a drive signal to the sample moving mechanism section 5 from the time when the X-axis scanning speed is set, and starts measuring the two-dimensional distribution of frictional force.

At the same time, the detection signals of the X-axis and Z-axis conversion detectors 10 and 11 are converted into digital values by the digitizer 3 along with the control signals of the piezoelectric elements, and after being stored in the digital value, they are taken into the control personal computer 1. The above operations enable two-dimensional measurement of frictional force.

FIG. 6 is a diagram showing a circuit configuration employed in the above apparatus for keeping the pushing load between the probe 9 and the sample piece 16 constant during two-dimensional scanning. In this circuit, the Z-axis displacement detector 11 continuously measures the amount of displacement of the Z-axis spring 8, and the feedback circuit 14 of the piezoelectric element drive circuit 4 and the Z-axis piezoelectric element wear section 1
3 and the sample moving mechanism section 5 via the axis interference correction circuit 17.
It operates to correct the displacement amount of the Z-axis spring 8 of the two-axis piezoelectric element.

FIG. 7 shows the amount of feedback control signal V given to the Z-axis pressure type element drive section 13 of the piezoelectric element drive circuit 4 when performing constant pressing load control between the probe 9 and the sample piece 16.
FIG. 3 is a diagram showing a function of displaying z. Feedback control signal amount 1 for one scan in the X-axis direction during two-dimensional scanning
8 on one display device 19, it is possible to obtain a display shape distribution map of the sample piece 16.

FIG. 8 is a circuit diagram of an axial interference correction circuit 17 that corrects the three-axis mutual drying amount of the sample moving mechanism section 5.

This circuit uses a three-axis control signal Vx output from an X- and Y-axis piezoelectric element drive unit and a two-axis piezoelectric element drive unit.

Control signal conversion is performed from Vy and Vz so that axis interference correction signals Vx' + Vy' and Vz' are derived by the following correction formula.

Vx' =aVx+bVy+cVz -=(1)
Vy'==dVx+eVy+fVz=42)
Vx' = gVx + hVy + iVz - (3) Here, the correction constant a-1 is a value that is uniquely determined for each structure of the sample moving mechanism section 5 used, and the sum of the displacement error amount and the axis interference amount is positive. If so, the correction constant will be a negative value, and if the sum is negative, it will be a positive value. Variable resistance VRI~VR
9 and fixed resistors R1 to R11 are connected to control signals V x , V
The value obtained by multiplying y, Vz by the above correction constant a = i is the correction signal Vx'.

The circuit is configured so that Vy' and Vz'.

FIG. 9 shows that since the X-axis spring 7 of the spring mechanism 6 is deflected in the X-axis direction due to frictional force during two-dimensional scanning, it is necessary to correct the X-axis coordinate position shift when displaying the frictional force distribution on the screen. FIG. Same figure (a).

In (b), P is a fixed point before X-axis coordinate correction, P o
L is the measurement point P. The measurement point after the X-axis coordinate correction, X is the X-axis coordinate of the measurement point P, and Xo' is the measurement point P. ’ X-axis coordinate,
Fo indicates the magnitude of the frictional force at measurement points P0 and P0', respectively.

FIG. 5(a) shows an example of a friction force distribution diagram before X-axis coordinate correction, and measurement point P is shown in FIG. X coordinate of includes the X-coordinate error due to the amount of X-axis spring deflection due to friction. Similarly, the other measurement points include an X-coordinate error proportional to the magnitude of the frictional force, and for example, the amount of deflection of the X-axis spring at the measurement point P0 can be expressed as follows. Here, k is the spring constant of the X-axis spring. The amount of deflection of this X-axis spring is the X-coordinate error, and the X-coordinate error of the measurement point P [m]=X, [m]-X. '
[m]...(5) From the relational expression, the corrected X coordinate X. ′ can be found by

FIG. 10 is a diagram showing that the present device has a function of measuring minute frictional force and adsorption force in a minute two-dimensional area of a sample piece and displaying a distribution map. The adsorption force measurement is performed by driving the two-axis piezoelectric element, pressing the sample piece 16 against the probe 9 with a constant pressing load, and then controlling the Z-axis piezoelectric element to gradually return to its original position. The amount of displacement of the Z-axis spring 8 is measured by the Z-axis displacement detector 8 to determine how far the sample piece 16 is attracted by the attraction force.

〔Effect of the invention〕

Since the present invention is configured as described above, it is possible to obtain the effects described below.

According to the present invention, the natural frequency can be increased by using a ceramic parallel plate spring. Also C
By manufacturing parallel plate springs using VD and electroforming techniques, it is possible to make the parallel plate springs lightweight, and the natural frequency can be increased. For this reason, the shadow of disturbance 1! ! It becomes a spring mechanism that is not easily affected, and the pushing load between the sample piece and the probe can be kept constant with high precision. By stacking two parallel plate springs, it is possible to detect forces in two directions, X and Y. By stacking three more, it becomes possible to detect forces in three directions: x, y, and z.

Furthermore, it is possible to measure the surface shape at the same time as measuring the minute frictional force on the sample surface. Furthermore, it is possible to correct three-axis mutual interference of the sample moving mechanism and to correct positional deviation in the X-axis direction during frictional force measurement. It is also possible to measure frictional force and adsorption force. As a result, highly accurate measurement of frictional force and adsorption force can be realized.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a friction force microscope according to an embodiment of the present invention;
FIG. 2 is a perspective view showing a friction force microscope according to the prior art, FIG. 3 is a perspective view showing a method for manufacturing a parallel plate spring made of ceramics according to the present invention, and FIG. FIG. 5 is a perspective view of a friction force microscope according to an embodiment, and FIG. 6 is a diagram showing the overall configuration of a minute friction force measurement device using the present invention.
FIG. 7 is a diagram showing a circuit configuration for keeping the pressing load between the probe and the sample constant, and FIG. 7 shows the biaxial piezoelectric element rotation of the piezoelectric element drive circuit when performing the pressing load constant control FIG. 8 is a diagram showing a function of displaying the amount of feedback signal given to the sample moving mechanism, and FIG.
Figures ('a) and (b) respectively show how to correct the X-axis coordinate position shift when displaying the frictional force distribution on the screen, and Figure 10 shows the function of this device to measure the frictional force. It is a figure showing that it is equipped with a function of measuring adsorption force. 1... Control computer, 2... D/A converter, 3
... Digitizer, 4... Piezoelectric element drive circuit, 5...
Sample moving mechanism section, 6... Spring mechanism section, 7... X-axis spring, 8... Z-axis spring, 9... Probe, 10... X-axis displacement detector, 11... 2-axis displacement detector, 12...X
, Y-axis piezoelectric element moving part, 13... Two-axis piezoelectric element moving part, 14... Feedback circuit, 15... Control signal bus, 16... Sample piece, 17... Axis mutual interference correction Circuit, 18...Example of feedback signal amount for one scan, 1
9...Display device, 31...Measurement object, 32...Stylus, 33...Parallel plate spring, 35...Displacement meter, 37...
-Tripot, 38...Piezoelectric element, 41...Block, 42...SiC, Vx...Control voltage of the X-axis pressure type element, Vy...Control voltage of the y-axis pressure type element, Vz...
・Control voltage of Z-axis pressure type element, Vx'... Correction voltage of X-axis pressure type element, vy'... Correction voltage of Y-axis pressure type element, V
z'...Correction voltage of Z-axis pressure type element, VRI~VR9・
・・Variable resistance, R1-R35 ・・Fixed resistance, OP 1
~OP 5...Oheamp, a-i-9 correction constant, Po...Measuring point before X-axis coordinate correction, pH'...X
Measurement point after axis coordinate correction, xo... X-axis coordinate of measurement point P0, X, l... Measurement point P. ’ X-axis coordinate, Fo・
・Measurement 1st mouth, 4th hit friend l de 50 Y direction 35
Fig. 7/I 'l shaft' (IIff fork S Nshi 19 (α)

Claims (1)

[Claims] 1. A sample moving mechanism composed of piezoelectric elements that can be driven in three axes of X, Y, and Z, and each piezoelectric element is moved by a drive circuit to press a stylus onto the surface of a sample piece, A microfrictional force measuring device that performs relative movement between the surface of a sample piece and a stylus, measures the pressing force and the frictional force in the direction perpendicular to it by the deformation of a spring, and displays the results on a display. The material of the spring that measures the frictional force and pressing load acting on the stylus at the time is ceramic, and the shape is an integrated parallel plate spring type with a shell structure, and the parallel plate springs are stacked in two stages. Microfrictional force measuring device. 2. The micro-frictional force measuring device according to claim 1, wherein the ceramic spring is manufactured using a CVD method. 3. The micro-frictional force measuring device according to claim 1, wherein the spring is made of a metal material and is manufactured using plating. 4. The minute frictional force measuring device according to claim 1, wherein forces in three directions are detected by stacking parallel plate springs in three stages. 5. The minute frictional force measuring device according to claim 1, further comprising means for continuously feeding back the amount of spring displacement in the direction of the pressing force to the amount of drive of the piezoelectric element in that direction to keep the amount of spring displacement constant. Micro friction force measuring device. 6. The microfrictional force measuring device according to claim 1, further comprising means for displaying the feedback control signal amount of the piezoelectric element in that direction in order to keep the pressing load constant in order to display the surface shape of the sample piece. Microfrictional force measurement device. 7. The micro-frictional force measuring device according to claim 1, characterized in that the micro-frictional force measuring device is provided with means for correcting positional deviation of the measurement point due to indirectness of the piezoelectric element and mutual interference in three axial directions. . 8. The minute frictional force measuring device according to claim 1, further comprising means for correcting positional deviation of the measuring point due to deflection of a spring during measurement. 9. The micro-frictional force measuring device according to claim 1, characterized in that the micro-frictional force measuring device has a means for measuring both the frictional force distribution between the magnetic disk sample piece and the probe and the adsorption force distribution.