JPH0415142U - - Google Patents
Info
- Publication number
- JPH0415142U JPH0415142U JP5584690U JP5584690U JPH0415142U JP H0415142 U JPH0415142 U JP H0415142U JP 5584690 U JP5584690 U JP 5584690U JP 5584690 U JP5584690 U JP 5584690U JP H0415142 U JPH0415142 U JP H0415142U
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- ion source
- control
- voltage
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 3
- 230000015556 catabolic process Effects 0.000 claims 1
- 230000002459 sustained effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Control Of Voltage And Current In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990055846U JP2506766Y2 (ja) | 1990-05-28 | 1990-05-28 | イオン源の制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990055846U JP2506766Y2 (ja) | 1990-05-28 | 1990-05-28 | イオン源の制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0415142U true JPH0415142U (US07709020-20100504-C00041.png) | 1992-02-06 |
| JP2506766Y2 JP2506766Y2 (ja) | 1996-08-14 |
Family
ID=31579160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990055846U Expired - Fee Related JP2506766Y2 (ja) | 1990-05-28 | 1990-05-28 | イオン源の制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2506766Y2 (US07709020-20100504-C00041.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108695128A (zh) * | 2017-04-11 | 2018-10-23 | 上海伟钊光学科技股份有限公司 | 具有束流自动反馈控制的考夫曼离子源 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6074299A (ja) * | 1983-09-30 | 1985-04-26 | 株式会社東芝 | イオン源電源装置 |
| JPS60182639A (ja) * | 1984-03-01 | 1985-09-18 | Toshiba Corp | イオン源放電電源装置 |
| JPH01265438A (ja) * | 1988-04-18 | 1989-10-23 | Nippon Telegr & Teleph Corp <Ntt> | イオン発生器 |
| JPH0254850A (ja) * | 1988-08-18 | 1990-02-23 | Nissin Electric Co Ltd | イオン処理装置の制御方法 |
-
1990
- 1990-05-28 JP JP1990055846U patent/JP2506766Y2/ja not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6074299A (ja) * | 1983-09-30 | 1985-04-26 | 株式会社東芝 | イオン源電源装置 |
| JPS60182639A (ja) * | 1984-03-01 | 1985-09-18 | Toshiba Corp | イオン源放電電源装置 |
| JPH01265438A (ja) * | 1988-04-18 | 1989-10-23 | Nippon Telegr & Teleph Corp <Ntt> | イオン発生器 |
| JPH0254850A (ja) * | 1988-08-18 | 1990-02-23 | Nissin Electric Co Ltd | イオン処理装置の制御方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108695128A (zh) * | 2017-04-11 | 2018-10-23 | 上海伟钊光学科技股份有限公司 | 具有束流自动反馈控制的考夫曼离子源 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2506766Y2 (ja) | 1996-08-14 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |