JPH04146083A - Vacuum pincette - Google Patents

Abstract

PURPOSE:To make the vacuum-attractedly holding of a wafer possible even in a place having no vacuum piping facilities by operating a vacuum operation section to turn an attracting section into a vacuum state. CONSTITUTION:When an attraction operating section 2 is grasped to reduce its volume, air in the attraction operating section 2 and the inside of a holder 4 is discharged. When an attracting section 1 is put on the back of a wafer in this state, and the grasp of the attraction operating section 2 is loosened, the returning force of an air drawing rubber turns the inside of the attraction operating section 2 and the holder 4 into a vacuum state, and the wafer is thereby attracted to the attracting section 1. In order to release the attraction of the wafer, the attraction operating section 2 is grasped again to turn the internal pressure of the attracting rubber into positive pressure.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a vacuum bin set used for holding wafers in wafer manufacturing processes.

[Conventional technology]

FIG. 2 is an external view showing a conventional vacuum bottle set,
In the figure, (1) is a suction unit for suctioning a wafer, which suctions the back surface C of the wafer (not shown). (5) is a suction switch that turns on and off the vacuum of the suction part (1); +
61 is a vacuum pipe, which is a curled cord made of a nylon tube.

Next, operation I will be explained.

By turning on the suction switch 15), the vacuum from the vacuum pipe 131 is activated, and the suction part (1) becomes ready for suction. When the suction part (1) is attached to the back side of the wafer, the wafer is attached to the suction part (1). Be absorbed by. The wafer suction is released by turning off the suction switch basket 2).

[Problem to be solved by the invention]

Since the conventional vacuum bottle set is configured as described above, it can only be used within the reach of the vacuum piping, and there are problems such as low usability.

This invention was made to solve the above-mentioned problems, and an object thereof is to obtain a vacuum bottle set that is easily portable.

[Means to solve the problem]

In the vacuum bottle set according to the present invention, the suction section is brought into a vacuum state by operating the vacuum operation section.

[Effect]

In the vacuum bin set according to the present invention, the suction section is brought into a vacuum state by operating the vacuum operation section, and the wafer is suctioned by the suction section.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. 1st
In the figure, (1) is the suction part with the suction surface I and the stopper @
It is configured to be able to adsorb the back side of the wafer.

(2) is a suction operation part made of suction rubber, and is configured to be able to compress manually.

+4) is a holder that connects the suction section (1) and the suction operation section (2).

Next, I will explain about the 6 works. Fig. 1 (In the ml state, when the suction operation part (2) is squeezed and retracted, the air inside the suction operation part (2) and the holder (4) is exhausted. In this state, the suction part (1) is attached to the wafer. Attached to the back side, the suction operation part (2
) When the grip of the suction rubber is loosened, a negative pressure is created inside due to the return force of the suction rubber, and the evaporator is suctioned by the suction part (1).

The suction of the wafer is released by gripping the suction operation part (2) again and making the internal pressure of the suction rubber positive.

The suction operation part (2) has a "gourd" shape with ribs (3) provided inside and has a structure lζ that has a strong return force and does not collapse.

〔Effect of the invention〕

As described above, according to the present invention, the wafer can be sucked or released by the suction section by operating the suction operation section, so that the wafer can be held by vacuum suction even in places without vacuum piping equipment. .

[Brief explanation of drawings]

Figure m1 (11 is a sectional view showing a vacuum bottle set according to an embodiment of this invention, Figure 1 (bl is a front view of the suction part, and Figure 2 is an external view of a conventional vacuum bottle set. 1) is the suction part, the tap is the suction surface, the mackerel is the stopper, [2) is the suction operation part-+3) is the rib, and (4) is the holder. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

[Claims] A suction unit having a suction surface capable of suctioning a wafer and a wafer stopper, a suction operation unit configured to supply suction force or ejection force to the suction unit by operation and having ribs inside, the suction unit and the suction operation unit. Vacuum tweezers consisting of a holder connected to.