JPH04145989A - Method for degreasing porous material - Google Patents
Method for degreasing porous materialInfo
- Publication number
- JPH04145989A JPH04145989A JP26842890A JP26842890A JPH04145989A JP H04145989 A JPH04145989 A JP H04145989A JP 26842890 A JP26842890 A JP 26842890A JP 26842890 A JP26842890 A JP 26842890A JP H04145989 A JPH04145989 A JP H04145989A
- Authority
- JP
- Japan
- Prior art keywords
- porous material
- oil
- impregnated
- hermetic container
- sealed container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011148 porous material Substances 0.000 title claims abstract description 76
- 238000000034 method Methods 0.000 title claims description 22
- 238000005238 degreasing Methods 0.000 title claims description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 17
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- 238000007599 discharging Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 abstract description 36
- 229910052751 metal Inorganic materials 0.000 abstract description 36
- 150000002739 metals Chemical class 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract description 2
- 230000007797 corrosion Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract description 2
- 238000011109 contamination Methods 0.000 abstract 1
- 230000007613 environmental effect Effects 0.000 abstract 1
- 239000002904 solvent Substances 0.000 abstract 1
- 239000003921 oil Substances 0.000 description 42
- 239000003960 organic solvent Substances 0.000 description 9
- 239000010730 cutting oil Substances 0.000 description 7
- 238000003912 environmental pollution Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- -1 For example Substances 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Powder Metallurgy (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
この発明に係る多孔質材の脱脂方法は、例えば滑り軸受
に使用する焼結金属中に含浸した切削油や、多数枚の金
属薄板を重ね合わせる事で構成された電動モータ用のス
テータやロータに含浸した加工油を除去する場合に利用
する。Detailed Description of the Invention (Field of Industrial Application) The method for degreasing porous materials according to the present invention is applicable, for example, to cutting oil impregnated into sintered metal used in sliding bearings, or by stacking a large number of thin metal plates. It is used to remove machining oil impregnated into the stator and rotor of electric motors.
(従来の技術)
各種回転支持部分に組み込んで使用する滑り軸受を構成
する含油メタルは、多孔質材の一種である焼結金属に潤
滑油を含浸させる事で造られている。(Prior Art) Oil-impregnated metal that constitutes sliding bearings that are incorporated into various rotational support parts is made by impregnating sintered metal, which is a type of porous material, with lubricating oil.
ところで、この様な含油メタルを構成する為の焼結金属
中には、この焼結金属を所定の形状に加工する際に使用
した、切削油等の加工用の油が含まれている。焼結金属
により滑り軸受を構成する場合、焼結金属中に潤滑油を
含浸させる必要上、上記加工用の油を焼結金属中から取
り除く必要がある。Incidentally, the sintered metal for forming such an oil-impregnated metal contains processing oil such as cutting oil used when processing the sintered metal into a predetermined shape. When constructing a sliding bearing from sintered metal, it is necessary to impregnate lubricating oil into the sintered metal, and it is necessary to remove the oil for processing from the sintered metal.
この為従来から、切削等により所定の形状に加工された
焼結金属を、トリクレン等の有機溶剤中に浸漬すると共
に、この有機溶剤に超音波振動を加える事で、焼結金属
中に含浸した加工用の油を除去していた。For this reason, conventionally, sintered metal processed into a predetermined shape by cutting etc. is immersed in an organic solvent such as trichlene, and ultrasonic vibration is applied to this organic solvent to impregnate it into the sintered metal. Processing oil was being removed.
(発明が解決しようとする課題)
ところが、上述の様に有機溶剤を使用して焼結金属中の
油除去を行なう場合、次に述べる様な問題を生じる。(Problems to be Solved by the Invention) However, when removing oil from sintered metal using an organic solvent as described above, the following problems occur.
第一に、焼結金属の奥に迄進入した油と有機溶剤との置
換が行なわれ難い為、油の除去を十分に行なう為には、
除去作業に要する時間が徒に長((数時間乃至1昼夜程
度)なってしまう。First, it is difficult to replace the oil that has penetrated deep into the sintered metal with the organic solvent, so in order to remove the oil sufficiently,
The time required for removal work becomes unnecessarily long (from several hours to one day and night).
第二に、トリクレン等の有機溶剤は、そのまま排出した
場合には環境汚染の原因となる為、使用が制限される傾
向にあり、出来る限り使用しない事が好ましい。Secondly, organic solvents such as trichlene cause environmental pollution if discharged as they are, so their use tends to be restricted, and it is preferable to avoid using them as much as possible.
第三に、塩素系の有機溶剤を使用して、鉄系の焼結金属
中の油除去を行なった場合、油の除去後にこの有機溶剤
を除去し切れないと、焼結金属が腐食する原因となって
しまう。Third, when removing oil from iron-based sintered metal using a chlorine-based organic solvent, if the organic solvent is not completely removed after the oil is removed, the sintered metal will corrode. It becomes.
本発明の多孔質材の脱脂方法は、上述の様な不都合を何
れも解消するものである。The method of degreasing a porous material of the present invention eliminates all of the above-mentioned disadvantages.
(課題を解決する為の手段)
本発明の多孔質材の脱脂方法の内、請求項1に記載され
た多孔質材の脱脂方法は、油が含浸した多孔質材を密閉
容器中に収納する第一行程と、上記密閉容器内の空気を
排出して、この密閉容器内を負圧にする第二行程と、上
記密閉容器内に高温の水蒸気を送り込む第三行程と、上
記密閉容器内の水蒸気を排出して、この密閉容器内を負
圧にする第四行程とを、第一行程から第四行程迄順番に
、1乃至複数回行なう事によって、上記多孔質材中に含
浸した油をこの多孔質材の表面に浮き出させ、この表面
に浮き出た油を除去するものである。(Means for Solving the Problems) Among the methods for degreasing a porous material of the present invention, the method for degreasing a porous material according to claim 1 includes storing the porous material impregnated with oil in a closed container. A first step, a second step of discharging the air in the sealed container to create a negative pressure in the sealed container, a third step of sending high temperature steam into the sealed container, and a third step of pumping high temperature steam into the sealed container. The oil impregnated in the porous material is removed by performing the fourth step of discharging water vapor and creating a negative pressure in the sealed container one or more times in order from the first step to the fourth step. The oil is made to float on the surface of this porous material, and the oil that floats on the surface is removed.
又、請求項2に記載された多孔質材の脱脂方法は、油が
含浸した多孔質材を密閉容器中に、この密閉容器の内側
断面を塞ぐ状態で収納して、上記密閉容器の内部を、上
流側空間と下流側空間とに仕切ると共に、上記上流側空
間の圧力を下流側空間の圧力に比べて高くする事により
、上記多孔質材中に含浸した油をこの多孔質材の表面で
、上記下流側空間に対向する面に浮き出させ、この表面
に浮き出た油を除去する。Further, the method for degreasing a porous material according to claim 2 includes storing the porous material impregnated with oil in a closed container in a state where the inner cross section of the closed container is closed, and cleaning the inside of the closed container. By partitioning the porous material into an upstream space and a downstream space, and making the pressure in the upstream space higher than the pressure in the downstream space, the oil impregnated in the porous material can be absorbed onto the surface of the porous material. , the oil is made to float on the surface facing the downstream space, and the oil that floats on this surface is removed.
(作 用)
上述の様に構成される本発明の多孔質材の脱脂方法の場
合、次の様にして、多孔質材の内部に迄入り込んだ油の
除去が行なわれる。(Function) In the method of degreasing a porous material of the present invention configured as described above, oil that has penetrated into the inside of the porous material is removed in the following manner.
先ず、請求項1に記載された多孔質材の脱脂方法の場合
、第一行程で密閉容器内に収納された多孔質材内部の空
気が、第二行程に於いて排出され、代りに第三行程で密
閉容器内に送り込まれた水蒸気が上記多孔質材の内部に
迄進入し、この多孔質材の内部で凝縮する。この際多孔
質材は、水蒸気の凝縮熱により加温される。多孔質材の
内部で水蒸気が凝縮する事により生じた凝縮水は、第四
行程で密閉容器内が負圧になるのに伴なって蒸発する。First, in the method for degreasing a porous material according to claim 1, the air inside the porous material stored in the closed container in the first step is exhausted in the second step, and the air inside the porous material is removed in the third step instead. The water vapor sent into the closed container during the process enters the inside of the porous material and condenses inside the porous material. At this time, the porous material is heated by the heat of condensation of water vapor. Condensed water generated by condensing water vapor inside the porous material evaporates as the inside of the closed container becomes negative pressure in the fourth step.
この様に、凝縮水が蒸発して水蒸気となる際、体積が約
1600倍に膨張する為、多孔質材の内部の微小空間に
入り込んでいた油が、上記多孔質材の表面に押し出され
て、この多孔質材の表面に浮き出る。そこで、適当な手
段によってこの浮き出た油を除去すれば、多孔質材の脱
脂を行なう事が出来る。In this way, when condensed water evaporates and becomes water vapor, its volume expands approximately 1600 times, so the oil that has entered the microspace inside the porous material is pushed out to the surface of the porous material. , stands out on the surface of this porous material. Therefore, by removing this floating oil by appropriate means, the porous material can be degreased.
又、請求項2に記載された多孔質材の脱脂方法の場合、
密閉容器内の上流側空間と下流側空間との間に存在する
圧力差に基づき、上流側空間から下流側空間に向けて流
体が流れる際、上記多孔質材の内部に入り込んだ油を、
この多孔質材の表面で、上記下流側空間に対向する面に
浮き出させる。そこで、適当な手段によってこの浮き出
た油を除去すれば、多孔質材の脱脂を行なう事が出来る
。Furthermore, in the case of the method for degreasing a porous material according to claim 2,
When fluid flows from the upstream space to the downstream space based on the pressure difference that exists between the upstream space and the downstream space in the sealed container, the oil that has entered the inside of the porous material is
The surface of this porous material is made to stand out on the surface facing the downstream space. Therefore, by removing this floating oil by appropriate means, the porous material can be degreased.
(実施例)
次に、図面を参照しつつ、本発明を更に詳しく説明する
。(Example) Next, the present invention will be described in more detail with reference to the drawings.
第1〜3図は、請求項1に記載された多孔質材の脱脂方
法により、焼結金属に含浸した油を除去する場合に就い
て示しており、第1図は焼結金属内部の拡大図、第2〜
3図は油の除去程度を示す線図である。Figures 1 to 3 show the case where oil impregnated in sintered metal is removed by the porous material degreasing method described in claim 1, and Figure 1 is an enlarged view of the inside of the sintered metal. Figure, 2nd~
Figure 3 is a diagram showing the degree of oil removal.
本発明の多孔質材の脱脂方法により、焼結金属3等の多
孔質材中に含浸した油を除去する場合、先ず第一行程と
して、油が含浸した多孔質材を密閉容器中に収納する。When removing oil impregnated into a porous material such as sintered metal 3 by the porous material degreasing method of the present invention, the first step is to store the oil-impregnated porous material in a closed container. .
次いで第二行程として、真空ポンプにより上記密閉容器
内の空気を排出し、この密閉容器内を負圧に(可及的に
真空に近く)する。この結果、上記多孔質材中に存在す
る多数の微小隙間内の空気が排出され、各微小隙間内か
真空になる。Next, as a second step, the air inside the sealed container is exhausted by a vacuum pump, and the inside of this sealed container is brought to negative pressure (as close to vacuum as possible). As a result, the air in the many minute gaps existing in the porous material is exhausted, and each minute gap becomes a vacuum.
次に第三行程として、上記密閉容器内に高温の水蒸気を
送り込む。この様に密閉容器内に送り込まれた水蒸気は
、多孔質材の内部に存在する多数の微小隙間内に迄進入
し、各微小隙間の内部で凝縮する。この際多孔質材は、
水蒸気の凝縮熱により加温される。この結果、多孔質材
の内部に存在する多数の微小隙間内には、第1図に示す
様に、加工に使用した除去すべき油]と、凝縮水2とが
混在した状態となる。Next, as a third step, high temperature steam is sent into the sealed container. The water vapor sent into the sealed container in this way enters into the many minute gaps existing inside the porous material and condenses inside each minute gap. At this time, the porous material is
It is heated by the heat of condensation of water vapor. As a result, as shown in FIG. 1, oil used in processing and to be removed and condensed water 2 are mixed in the many minute gaps existing inside the porous material.
最後に第四行程として、上記密閉容器内の水蒸気を排出
し、この密閉容器内を負圧にする。この様に、密閉容器
内が負圧になるのに伴なって、多孔質料内部の微小隙間
内に存在する凝縮水が蒸発し、水蒸気となる。この様に
水が液体から気体に相変化する際、体積が約1600倍
に膨張する為、多孔質材の内部の微小空間に入り込んで
いた油1が、上記多孔質材の表面に押し出されて、この
多孔質材の表面に浮き出る。そこで、適当な手段によっ
てこの浮き出た油を除去すれば、多孔質材の脱脂を行な
う事が出来る。Finally, in the fourth step, the water vapor in the sealed container is discharged to create a negative pressure in the sealed container. In this way, as the inside of the closed container becomes negative pressure, the condensed water existing in the minute gaps inside the porous material evaporates and becomes water vapor. When water undergoes a phase change from liquid to gas, its volume expands approximately 1600 times, so the oil 1 that had entered the microspace inside the porous material is pushed out to the surface of the porous material. , stands out on the surface of this porous material. Therefore, by removing this floating oil by appropriate means, the porous material can be degreased.
多孔質材の表面に浮き出た油を除去する手段としては、
例えば多孔質材を吸油性に優れた紙、布等に載置したり
、或はくるんだりする他、板状の多孔質材の場合には鉛
直方向に吊して、表面に浮き出た油を下方に滴下させる
等の方法が考えられる。更に、多孔質材を鉛直方向に吊
すと共に、この多孔質材の上方から空気や水蒸気を噴射
すれば、多孔質材の表面に浮き出た油の除去を、より効
率良く行なう事が出来る。As a means of removing oil floating on the surface of porous materials,
For example, porous materials can be placed or wrapped in highly oil-absorbing paper or cloth, or in the case of plate-shaped porous materials, they can be hung vertically to remove any oil that has risen to the surface. Possible methods include dropping it downward. Furthermore, by suspending the porous material vertically and injecting air or steam from above the porous material, oil floating on the surface of the porous material can be removed more efficiently.
本発明者が、内径が54mm、外径が60mm、厚さが
4mm、重量が34gの円輪状に形成された、鉄系焼結
金属中に含浸した切削油の除去を行なったところ、第2
〜3図に示す様に、焼結金属の内部に含浸した切削油の
除去を効果的に行なえる事を確認出来た。When the present inventor removed cutting oil impregnated into a ferrous sintered metal formed into a ring shape with an inner diameter of 54 mm, an outer diameter of 60 mm, a thickness of 4 mm, and a weight of 34 g, the second
As shown in Figure 3, it was confirmed that the cutting oil impregnated inside the sintered metal could be effectively removed.
尚、第2図は前記第一行程〜第四行程迄を1回繰り返す
ごとに焼結金属中から取り除かれた切削油の量を、第3
図は前記第一行程〜第四行程迄を横軸に示した回数繰り
返す事で除去された切削油の合計量を、それぞれ表して
いる。又、第一行程〜第四行程迄を1回繰り返すのに要
する時間は、凡そ5分間であった。尚、10回目に於け
る切削油の除去量が、9回目に比べて飛躍的に増大して
いる理由は、それ迄水平に支持していた焼結金属を鉛直
方向に支持する様に変えた為である。Furthermore, Figure 2 shows the amount of cutting oil removed from the sintered metal each time the first to fourth strokes are repeated.
The figure shows the total amount of cutting oil removed by repeating the first to fourth strokes the number of times indicated on the horizontal axis. Further, the time required to repeat the first to fourth steps once was approximately 5 minutes. The reason why the amount of cutting oil removed in the 10th test increased dramatically compared to the 9th test was because the sintered metal, which was previously supported horizontally, was now supported vertically. It is for this purpose.
この第2〜3図から明らかな通り、本発明の多孔質材の
脱脂方法によれば、環境汚染の原因となる有機溶剤を使
用する事なく、焼結金属等の多孔質材に含浸した切削油
等の油を短時間で除去する事が出来る。As is clear from FIGS. 2 and 3, according to the method of degreasing porous materials of the present invention, cuttings impregnated into porous materials such as sintered metals can be removed without using organic solvents that cause environmental pollution. Oil and other oils can be removed in a short time.
次に、第4図は請求項2に記載された多孔質材の脱脂方
法により、やはり円輪状に形成された焼結金属中に含浸
した油を除去する状態を示している。Next, FIG. 4 shows a state in which oil impregnated in a sintered metal formed in a ring shape is removed by the porous material degreasing method described in claim 2.
油が含浸した多孔質材である焼結金属3は、つ割れ構造
の密閉容器4中に、この密閉容器4の内側断面を塞ぐ状
態で収納して、上記密閉容器4の内部を、上流側空間5
と下流側空間6とに仕切っている。この為、円輪状に形
成された上記焼結金属3の中央部に形成された通孔部分
は、蓋材7により塞いでいる。The sintered metal 3, which is a porous material impregnated with oil, is housed in a sealed container 4 with a split structure so as to close the inner cross section of the sealed container 4, and the interior of the sealed container 4 is placed on the upstream side. space 5
and a downstream space 6. For this reason, a through hole portion formed in the center of the sintered metal 3 formed in a circular ring shape is closed with a lid member 7.
そして、上記上流側空間5には高温高圧の水蒸気を送り
込み自在とすると共に、下流側空間6は真空ポンプの吸
入口に通じさせて、上記上流側空間5内の圧力を下流側
空間6内の圧力に比べて高くしている。High-temperature, high-pressure water vapor can be fed freely into the upstream space 5, and the downstream space 6 is connected to an inlet of a vacuum pump to reduce the pressure in the upstream space 5 to the downstream space 6. It is higher than the pressure.
これにより、上記焼結金属3中に含浸した油をこの焼結
金属3の表面で、上記下流側空間6に対4゜
向する面に浮き出させる。この様にして表面に浮き出た
油は、やはり紙等で吸い取る等、適当な手段によって除
去する。As a result, the oil impregnated in the sintered metal 3 is made to float on the surface of the sintered metal 3 facing 4 degrees to the downstream space 6. The oil that has risen to the surface in this way is removed by appropriate means, such as by absorbing it with paper or the like.
尚、上述の説明は、多孔質材が焼結金属である場合に就
いて説明したが、多数枚の金属薄板を重ね合わせる事で
構成された電動モータ用のステータや口7夕も、一種の
多孔質材と考えられ、この様なステータやロータに含浸
した加工油も、本発明の脱脂方法により除く事が出来る
。Although the above explanation is based on the case where the porous material is sintered metal, stators for electric motors that are constructed by stacking many thin metal plates are also a type of stator. Processing oil impregnated into such stators and rotors, which are considered to be porous materials, can also be removed by the degreasing method of the present invention.
(発明の効果)
本発明の多孔質材の脱脂方法は、以上に述べた通り構成
され作用する為、焼結金属等の多孔質材中に含浸した油
の除去を、環境汚染の原因となる有機溶剤を使用せずに
、短時間で行なう事が出来、しかも腐食の原因となる物
質が残留する事もない。(Effects of the Invention) The method for degreasing porous materials of the present invention is configured and operates as described above, so that it is difficult to remove oil impregnated into porous materials such as sintered metals, which may cause environmental pollution. It can be done in a short time without using organic solvents, and there is no residue of substances that cause corrosion.
第1〜3図は、請求項1に記載された多孔質材の脱脂方
法により、焼結金属に含浸した油を除去する場合に就い
て示しており、第1図は焼結金属内部の拡大図、第2〜
3図は油の除去程度を示す線図、第4図は請求項2に記
載された多孔質材の脱脂方法を実施する状態を示す断面
図である。
1:油、2:凝縮水、3:焼結金属、4:密閉容器、5
:上流側空間、6:下流側空間、7:蓋材。
特許出願人 株式会社千代田製作所Figures 1 to 3 show the case where oil impregnated in sintered metal is removed by the porous material degreasing method described in claim 1, and Figure 1 is an enlarged view of the inside of the sintered metal. Figure, 2nd~
FIG. 3 is a diagram showing the degree of oil removal, and FIG. 4 is a sectional view showing a state in which the porous material degreasing method according to claim 2 is carried out. 1: Oil, 2: Condensed water, 3: Sintered metal, 4: Sealed container, 5
: Upstream space, 6: Downstream space, 7: Lid material. Patent applicant Chiyoda Manufacturing Co., Ltd.
Claims (2)
一行程と、上記密閉容器内の空気を排出して、この密閉
容器内を負圧にする第二行程と、上記密閉容器内に高温
の水蒸気を送り込む第三行程と、上記密閉容器内の水蒸
気を排出して、この密閉容器内を負圧にする第四行程と
を、第一行程から第四行程迄順番に、1乃至複数回行な
う事によって、上記多孔質材中に含浸した油をこの多孔
質材の表面に浮き出させ、この表面に浮き出た油を除去
する、多孔質材の脱脂方法。(1) A first step of storing the porous material impregnated with oil in a sealed container, a second step of discharging the air in the sealed container to create a negative pressure in the sealed container, and a second step of storing the porous material impregnated with oil in a sealed container; A third step in which high-temperature steam is sent into the airtight container, and a fourth step in which the water vapor in the airtight container is discharged to create a negative pressure inside the airtight container are sequentially performed from the first step to the fourth step. A method of degreasing a porous material, in which the oil impregnated in the porous material is brought to the surface of the porous material by performing the degreasing process multiple times, and the oil that has come to the surface of the porous material is removed.
容器の内側断面を塞ぐ状態で収納して、上記密閉容器の
内部を、上流側空間と下流側空間とに仕切ると共に、上
記上流側空間の圧力を下流側空間の圧力に比べて高くす
る事により、上記多孔質材中に含浸した油をこの多孔質
材の表面で、上記下流側空間に対向する面に浮き出させ
、この表面に浮き出た油を除去する、多孔質材の脱脂方
法。(2) A porous material impregnated with oil is stored in a sealed container in such a manner that the inner cross section of the sealed container is closed, and the inside of the sealed container is partitioned into an upstream space and a downstream space, and the By making the pressure in the upstream space higher than the pressure in the downstream space, the oil impregnated in the porous material is made to float on the surface of the porous material facing the downstream space. A method of degreasing porous materials to remove oil that has risen to the surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26842890A JPH04145989A (en) | 1990-10-08 | 1990-10-08 | Method for degreasing porous material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26842890A JPH04145989A (en) | 1990-10-08 | 1990-10-08 | Method for degreasing porous material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04145989A true JPH04145989A (en) | 1992-05-19 |
Family
ID=17458355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26842890A Pending JPH04145989A (en) | 1990-10-08 | 1990-10-08 | Method for degreasing porous material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04145989A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08164370A (en) * | 1994-12-13 | 1996-06-25 | Ckd Corp | Device and method for washing plate material having many fine holes and device and method for washing chucking plate of vacuum chuck |
-
1990
- 1990-10-08 JP JP26842890A patent/JPH04145989A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08164370A (en) * | 1994-12-13 | 1996-06-25 | Ckd Corp | Device and method for washing plate material having many fine holes and device and method for washing chucking plate of vacuum chuck |
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