JPH04144117A - Board holder - Google Patents

Abstract

PURPOSE:To prevent a board from dropping and to secure the safety of the device, by providing a drop preventing pin which is pressed down into a board holding surface by one finger of a board holder, and a drop preventing plate which is pressed by the other finger and caused to retreat from the board holding surface, when the board holder is moved on to the board holding surface. CONSTITUTION:When a mask hand 1 is moved on to a mask stage 16 having a drop preventing pin 9 and a drop preventing plate 15, a roller 9a is pressed down by one finger 3b, and the drop preventing pin 9 protruding is also pressed downwards and becomes in a state of being retreated from the stage surface 16a. Besides, with the movement of the other finger 3a the drop preventing plate 15 is pushed upwards, and becomes in a state of being retreated from the stage surface 16a likewise. Accordingly, in the case of the transfer of an X-ray mask 10 from or to a mask stage 16, the mask hand 1 is not hindered from moving. Besides, after the retreat of the mask hand 1 the X-ray mask 10 can be stopped by the drop preventing pin 9 protruding and the drop preventing plate 15 hanging.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a substrate holding device for an X-ray exposure apparatus.

[Conventional technique'#] X&! Unlike an optical exposure device, an exposure device has an optical axis substantially parallel to the ground, so it is necessary to hold the exposure mask and wafer vertically and maintain that relationship.

FIG. 7 shows an example of a mask stage which is a mask hunt and substrate holding device for transporting an X-ray mask used in a conventional X-ray exposure apparatus.

The X-ray mask 65 shown in FIG. 7 has a mask membrane 67 on which a mask pattern is drawn, fixed with a mask frame 66 containing a magnetic material. mask hunt 60
grips the X-ray mask 65 by opening and closing two finger parts 63a and 63b rotatably attached to both sides of the hand body 61, and also grips the X-ray mask 65.
By adsorbing the mask frame 66 with a magnetic adsorption unit 64 attached to the center of the mask stage 69, the X-ray mask 65 is held vertically.
Delivery to 11th.

In the mask stage 69, a magnetic unit with uneven holes for attaching and detaching the X-ray mask 65 is embedded in a stage surface which is a substrate holding surface, and a magnetic unit for positioning the X-ray mask 65 is embedded on the stage surface. It is equipped with a V block 68 that serves as a guide. The magnetic unit embedded in the stage surface is composed of a permanent magnet and a coil that generates magnetic force in a direction that cancels the magnetic field lines of the permanent magnet when energized. This is done by the magnetic force of the magnet, and the removal of the X-ray mask 65 is done by energizing the coil.

[Problems to be Solved by the Invention] However, the above-mentioned conventional techniques have the following problems.

The substrate holding device that holds the substrate for X-ray exposure by suction holds the substrate in the vertical direction, so there is a possibility that the substrate may fall, and the mask stage has a problem with the mask hunt associated with the transfer of the substrate. No means is provided to prevent the board from falling, as it may impede movement and handling of the board. Therefore, in the case of a mask stage equipped with a magnetic unit as described above, if the coil is energized due to a malfunction of the magnetic unit while an X-ray mask is being attracted and held, the substrate will be detached from the mask stage. It will fall downward due to gravity. In this case, not only the X-ray mask is damaged, but also the device located below the mask stage is damaged, and the safety as a substrate holding device is not ensured and reliability is low. Since it is expensive, it also imposes a large economic burden.

The present invention has been made in view of the problems of the above-mentioned conventional technology, and has the purpose of providing a highly reliable substrate holding device that can prevent the substrate from falling and ensure the safety of the device. There is.

[Means for Solving the Problems] The present invention includes a substrate holding surface that vertically adsorbs and holds a substrate conveyed by a substrate holding device having two finger portions for holding a substrate for X-ray exposure. In the substrate holding device, the substrate holding device always protrudes above the substrate holding surface to prevent the substrate from falling, and when the substrate holding device moves to the substrate holding surface -F, one finger portion of the substrate holding device A fall prevention pin that is pushed down into the substrate holding surface, and a drop prevention pin that is always located at a place where it overlaps with the upper part of the substrate held by suction on the substrate holding surface, in order to catch the substrate tilted toward the side opposite to the substrate holding surface, and The device further includes a fall prevention plate that is pushed and moved by the other finger portion of the substrate holding device to be retracted from the substrate holding surface when the holding device moves onto the substrate holding surface.

The fall prevention pin is rotatably supported by one end on the substrate gripping device side or a support shaft within a recess formed in the substrate holding surface, and is always urged toward the substrate holding surface by the spring force of a spring. A roller is erected at the other end of the support plate, and a roller is erected at one end of the support plate, and the roller is moved by the spring force to one side of the substrate gripping device on the substrate holding surface. The fall prevention pin protrudes on the path through which the finger portion of the support plate passes, and the fall prevention pin is located on the opposite side of the support plate, which is always urged toward the board holding surface by the spring force from the back side of the board holding surface. A roller support rod is provided at one end on the side of the substrate gripping device through a pin hole formed in the substrate holding surface, and a roller support rod having a roller attached to the tip is provided at the other end of the support plate. The roller is erected, and the spring force causes the roller to protrude through a roller hole formed in the substrate holding surface onto a path of the substrate holding surface through which one finger portion of the substrate gripping device passes. There are things that exist.

The fall prevention plate is rotatably supported in a suspended state by a support shaft at a position corresponding to the upper part of the substrate held by suction on the substrate holding surface, and is overlapped with a portion of the upper side of the substrate. Further, the fall prevention plate is provided on a base fixed over the substrate held by suction on the substrate holding surface and above the positioning member (37), so as to move in the direction of movement of the substrate gripping device. It is fixed to a base that is slidably engaged with the kite, and the base is always connected to the top of the fall prevention plate or the board by the spring force of a spring stretched between the base and the base. It is biased toward the printed substrate gripping device so as to overlap with the part,
Furthermore, on the end surface of the base on the substrate gripping device side,
Some devices include a drive pin that abuts the tip of one finger portion of the substrate gripping device that moves onto the substrate holding surface.

[Function] In the substrate holding device of the present invention, when the substrate held by suction on the substrate holding surface detaches from the substrate holding surface, the fall prevention pin and the fall prevention plate catch the substrate and prevent it from falling. When the fall prevention pin and the fall prevention plate are moved onto the substrate holding surface by the substrate gripping device to transfer a substrate, they are retracted from the substrate holding surface, so that the substrate gripping device This will not interfere with the board transfer operation.

"Example" Next, embodiments of the present invention will be described with reference to the drawings.

1(a), (b), and (c) are a front view, a side view, and a bottom view, respectively, showing a first embodiment of the substrate holding device of the present invention, in which an X-ray mask 10 is held by suction.
Mask stage 16, which is a substrate holding device, and X-ray mask 1
1 shows a mask hand 1 which is a substrate gripping device for gripping and transporting a substrate.

First, the mask hunt 1 for gripping the X-ray mask 10 will be explained.

The hunt body 2 of the mask hunt 1 is formed into a substantially U-shape in plan view, and the gripped X
Support parts 5a, 5 protruding in a direction parallel to the surface of the line mask 10
b are provided in a protruding manner. Pins 6a and 6b are provided on the support portions 5a and 5b, respectively, and a pair of finger portions 3a and 3b are rotatably supported by the pins 6a and 6b. This finger portion 3a.

Claws 4a and 4b for gripping the X-ray mask 10 are attached to one end of each of the molds 3b, and claws 4a and 4b are attached to the other end of the molds 4a and 4b in the direction of closing the one end to which the molds 4a and 4b are attached. A compression spring (not shown) that is constantly energized and solenoids 7a and 7b that are driven in a direction to open one end side of the finger portions 3a and 3b against the spring force of the compression spring are interposed between the hand body 2 and the hand body 2. and the solenoids 7a, 7
The two finger parts 3a and 3b of the mask hand 1 are opened and closed by driving the mask hand 1. Furthermore, a magnetic attraction unit 8 for magnetically attracting the X-ray mask 10 is attached to the inner space of the hand main body 2.

The magnetic attraction unit 8 is composed of a permanent magnet and a coil that generates magnetic force in a direction that cancels out the magnetic force of the permanent magnet when energized.The X-ray mask 10 is attracted by the magnetic force of the permanent magnet, and the When removing the line mask 10, the coil is energized to cancel the magnetic force of the permanent magnet and remove it.

The X-ray mask 10 has a mask membrane 12 on which a mask turn 13 is drawn, held by a mask frame 11 embedded with a magnetic material, and the magnetic material portion of the mask frame 11 is attracted to the magnetic attraction. It is adsorbed by unit 8.

The above-mentioned mask hunt 1 is connected to a transport device (not shown), and is moved in the direction of arrow X by the transport device while gripping the X-ray mask 10, and is transported to the mask stage 16 by the X-ray mask 10.
The line mask 10 is delivered.

Next, the configuration of the mask stage 16 will be explained.

In the mask stage 16 of this embodiment, a magnetic unit (not shown) having a permanent magnet is embedded in the stage surface 16a, and the X-ray mask 10 is held by attracting the mask frame 11 by the magnetic force of the permanent magnet. do. Further, this magnetic unit includes a coil that, when energized, generates a magnetic force in a direction that cancels out the magnetic force of the permanent magnet, and by energizing the coil, the X-ray mask 10 is separated from the stage surface 16a. Zarani, mask stage 16
On the stage surface 16a are a V block 14 that serves as a guide for positioning when the X-ray mask 10 is delivered by the mask hunt 1, a fall prevention pin 9 and a fall prevention plate 15 for preventing the X-ray mask 10 from falling. is installed.

The fall prevention plate 9, together with a part of the V block 14, prevents the X-ray mask 10 from falling in the direction of gravity, and is placed on the opposite side of the block from the lower end of the X-ray mask 10 on the stage surface 16a. A support plate 9b rotatably supported by a support shaft 9C is erected on the free end side of the side wall of the mask hunt 1 side of the recess 9g formed at a position corresponding to the obliquely upper side of the recess 9g. As shown in detail in FIG. 1(C), this support plate 9b is always urged upward (towards the stage surface 16a) by a spring 9d in the recess 9g,
As a result, the fall prevention plate 9 passes through the pin holes 9e formed in the stage surface 16a and protrudes from the stage surface 16a. Fall prevention plate 9 protruding from the stage surface 16a
is an X-ray mask 10 held by suction on a mask stage 16.
A gap is provided between the periphery of the X-ray mask 10 and the periphery of the X-ray mask 10 so as not to come into contact with the periphery of the X-ray mask IO. Moreover, on the support plate 9b,
Near the spindle 9C, a roller 98 is attached to a portion corresponding to the path through which one finger portion 3b of the mask hunt 1 passes, and similarly to the fall prevention plate 9,
Due to the spring force of the spring 9d, it projects from the stage surface 16a onto the path of the finger portion 3b through the roller hole 9f formed in the stage surface 16a.

Ru.

As shown in FIG. 1(a), the fall prevention plate 15 is formed into a substantially fan shape in plan view, and is suspended by a support shaft 15a from the upper end side of the X-ray mask 10 held on the mask stage 16. It is mounted so that it can rotate freely. The length of the fall prevention plate 15 in the radial direction extends from the support shaft 15a to the center of the width of the mask frame 11, and the wide part of the fall prevention plate 15 overlaps with a part of the upper part of the mask frame 11. This fall prevention plate 15 prevents the X-ray mask 10 from being placed on the side opposite to the stage (Fig. 1(b)
) to prevent it from falling to the center left).

As described above, the case where the mask hand 1 has moved onto the mask stage 16 provided with the fall prevention plate 9 and the fall prevention plate 15 will be described with reference to FIGS. 2(a) and (bl).

FIGS. 2(a) and 2(b) are a front view and a bottom view, respectively, showing a state in which the mask hand 1 grips the X-ray mask 10 on the mask stage 16.

First, when the mask hand 1 or the mask stage 161 is moved, one finger portion 3b is moved to the stage surface 161.
When the mask hunt 1 comes into contact with the roller 9a protruding above the roller 9a and further moves, the finger portion 3b moves to the stage of the finger portion 3b as shown in FIG. 2(b) due to the rotation of the roller 9a. Since the surface on the side of surface 16a moves while being in contact with the upper side of the roller 9a,
The roller 9a is pushed down against the spring force of the surface spring 9d. Due to the stiffness, the support plate 9 along with the roller 9a
The fall prevention plate 9 attached to b and protruding above the stage surface 16a also extends downward from the stage surface 16a (in the direction of arrow Y).
The stage surface 16a is pushed down and retracted from the stage surface 16a. In addition, the tip of the other finger portion 3a touches the side edge of the mask hand side of the fall prevention plate 15 and moves in that state, so as the mask hand 1 moves, the fall prevention plate 15 moves upward ( arrow Z direction),
Similar to the fall prevention plate 9, it is in a state of being evacuated from the stage surface 16a.

The depressed state of the fall prevention plate 9 described above continues until the mask hand 1 is retracted from above the mask stage 16 and the finger portion 3b is separated from the roller 9a, and the entire mask hunt 1 is retracted from above the mask stage 16. , when the finger portion 3b separates from the roller 9a, as shown in FIG.
As shown in c), the spring force of the spring 9d causes the roller 9a and fall prevention plate 9 to protrude from the stage surface 16a. Further, as the mask hunt 1 evacuates, the fall prevention plate 15 gradually descends due to its own weight, and when the mask hunt 1 evacuates from above the mask stage 16, the finger portion 3a or the fall prevention plate 15 When you leave, the first
As shown in Figure (a), it is suspended from the support shaft 15a.

Therefore, when transferring the X-ray mask 10 to and from the mask stage 16, the fall prevention plate 9 and the drop prevention plate 1
5 is a stage surface 16 as the mask hand 1 moves.
Since it is in a state where it is evacuated from a, there is no problem with the movement of the mask hunt 1 when giving and receiving the 5X-ray mask 10. Further, after the X-ray mask 10 is delivered to the mask stage 16 and the mask hunt 1 is evacuated from the mask stage 16, the X-ray mask 10 may be attracted due to a malfunction of the magnetic unit embedded in the stage surface 16a. Even when the X-ray mask 10 is released, the X-ray mask 10
It can be received by the fall prevention pin 9 protruding from the direction a and the fall prevention plate 15 suspended from the support shaft f5a.

The above-mentioned arrangement of the drop prevention plate 9 attached to the support plate 9b7 and the roller 9a is such that when the mask hand 1 holding the X-ray mask 10 moves onto the mask stage 16,
One finger portion 3b of the mask hunt 1 contacts the roller 9a on the surface where the peripheral edge of the X-ray mask 10 contacts the fall prevention plate 9, and presses the roller 9a to push down the fall prevention plate. It is necessary to have a proper positional relationship. Further, the distance between the fall prevention plate 9 and the periphery of the X-ray mask 10 held by suction on the mask stage 16 is determined by considering the radius of the fall prevention plate 15. At least the fall prevention plate 15
The lower end of the mask frame 5 must overlap the mask frame 11, as shown in FIG. 1(b).

The gap between the fall prevention plate 9 and the mask frame 11 is increased when the fall prevention plate 9 moves up and down, or when the mask frame 11
This is provided to prevent the fall prevention plate 9 from coming into contact with the mask frame 11 and causing the X-ray mask 10 to be displaced if there is a dimensional error or the like.

Ru.

Next, FIG. 3(a) shows a second embodiment of the present invention.

This will be explained with reference to (b) and (c).

Figures 3(a), (b), and (c) are, respectively,
FIG. 2 is a front view, a side view, and a bottom view showing a second embodiment of the substrate holding device of the present invention, and shows a state in which an X-ray mask 10 is held by suction by a mask stage 20, which is a substrate holding device. Note that the same components as in the first embodiment described above are given the same reference numerals.

As in the first embodiment, the mask stage 20 of this embodiment attaches and detaches the X-ray mask 10 using a magnetic unit (not shown) embedded in the stage surface 20a. On the stage surface 20a, there is a V block 21 that serves as a guide for positioning the X-ray mask 10, and a fall prevention plate 1.
5 and a fall prevention plate 22.

The fall prevention plate 15 is the same as that in the first embodiment, and is rotatably attached to the upper end side of the X-ray mask 10 held on the mask stage 20 while being suspended by a support shaft 15a. , to prevent the X-ray mask 10 from falling toward the side opposite to the stage surface (leftward in FIG. 3(b)).

As in the case of the first embodiment, the fall prevention plate 22 is
It prevents the X-ray mask 10 from falling in the direction of gravity together with a part of the block 21, and is formed diagonally above the lower end of the X-ray mask 10 on the opposite V block side on the mask stage 20. It protrudes onto the stage surface 20a through the pin hole 22e.

As shown in FIG. 3(c), this fall prevention plate 22 is always kept in the upper direction (stage surface 2
The support plate 22b is erected on the free end side of the support plate 22b, which is supported so as to be pulled in the direction (0a direction), and has a curved shape in side view, and the pin hole 22e is opened as described above by the spring force of the tension spring 22c. It passes through and projects onto the stage surface 20a.

The support plate 22b is supported by the tension spring 22c on a surface corresponding to its short side, and furthermore, the support plate 22b is supported by the tension spring 22c and the fall prevention IF-pin 22.
A roller support rod 22f having a roller 22a attached to its tip is erected between. This roller 22
In a, the finger portion 3b of the mask hand 1 passes through the roller hole 22d formed in the mask stage 20 due to the spring force of the tension spring 22c, as in the first embodiment described above. protrude on the path. The pin hole 22e and the roller support rod 22f are inserted into the roller hole 22d when the fall prevention plate 22 is inserted, respectively.
A linear bearing 23.24 is provided for linearly guiding the
The fall prevention plate 22 and the roller support rod 22f move up and down perpendicularly to the stage surface 20a.

FIG. 4(a) shows a case where the mask hand 1 has moved onto the mask stage 2o as described above.

This will be explained with reference to (b).

FIGS. 4(a) and 4(b) are a front view and a bottom view, respectively, showing a state in which the X-ray mask 10 is gripped by the mask hand 1 on the mask stage 20.

When the mask hand 1 moves onto the mask stage 20, one of the finger parts 3b comes into contact with the roller 22a, and when the mask hand 1 moves further, the finger part 3
Since b moves with its surface on the stage surface 20a side in contact with the roller 22a, the roller 22a is pressed downward, and the support plate 22b is lowered against the spring force of the tension spring 22c. As a result, the roller 22
Fall prevention plate 2 erected on support plate 22b together with a
2 is pushed down from the stage surface 20a as shown in FIG. 4(b). Moreover, regarding the fall prevention plate 15,
As in the case of the first embodiment described above, as shown in FIG. 4(a), the tip of the other finger portion 3a of the mask hand 1 is pushed upward as the mask hand 1 moves. .

The state in which the drop prevention pin 22 is pressed down as described above is when the mask hunt 1 is evacuated from the mask stage 20.
This continues until the finger portion 3b separates from the roller 22a, and when the finger portion 3b separates from the roller 22a,
Due to the tensile force of the tension spring 22c, the above-mentioned figure 3 (C)
As shown in FIG. 2, the fall prevention pin 22 protrudes above the stage surface 20a.

Further, as in the case of the first embodiment described above, the fall prevention plate 15 gradually lowers as the mask hand 1 retreats, and the mask hand 1 retreats from above the mask stage 20 and the finger portion 3a When it is separated from the fall prevention plate 15, it returns to the state where it is suspended from the support shaft 15a, as shown in FIG. 3(a) described above.

In the case of this embodiment as well, the fall prevention plate 15 and the fall prevention pin 22 are moved to the mask stage 2 by the movement of the mask hand 1.
Since the mask hand 1 is evacuated from above the stage surface 20a of the XII mask 10, the movement of the mask hand 1 during the delivery and reception of the XII mask 10 is not hindered, and the same effect as in the first embodiment described in "Ichi" can be obtained.

In the case of this embodiment, the linear bearings 23 and 24 are interposed between the fall prevention pin 22 and the pin hole 22e, and between the roller support rod 22f and the roller hole 22d, so that the Fall prevention plate 22 and roller support rod 22
f will move up and down perpendicular to the stage surface 20a. Further, in this embodiment, the support plate 22b on which the fall prevention pin 22 and the roller support rod 22f are erected is supported by the tension spring 22c at one end thereof. The intermediate portion may be supported.

Next, FIG. 5(a) shows a third embodiment of the present invention.

This will be explained with reference to (b) and FIG.

5(a) and 5(b) respectively show the X-ray mask 10 on the mask stage 50, which is the substrate holding device of the present invention.
6 is a front view and a side view showing a state in which the X-ray mask 10 is held by the mask hand 1 on the mask stage 50. FIG. Note that the same components as in each of the above embodiments are designated by the same reference numerals.

The mask stage 50 of this embodiment, like the mask stage of each of the above-described embodiments, attaches and detaches the XMl mask 10 using a magnetic unit (not shown) embedded in the stage surface 50a. : is equipped with a V block 51 that serves as a guide for positioning the X-ray mask 10. Further, on the stage surface 50a, a drop prevention pin 9 is provided to prevent the X-ray mask 10 from falling, having the same configuration as in the first embodiment described above.
A base 55 is fixed above the V block 51 and the X-ray mask 10 held by suction on the mask stage 50 on which a fall prevention plate 52 is attached.

The base 55 is provided with a V-shaped beam extending from above the X-ray mask 10 parallel to the moving direction of the mask hand 1 (X direction in FIG. 6).
A base 52b (see FIG. 5(b)) to which an inverted trapezoidal fall prevention plate 52 is fixed is movably engaged with a guide 56 provided above the block 51. A drive pin 53 is protrudingly provided on the end face of the base 52b on the mask hand 1 side, with which the tip of one finger portion 3a abuts when the mask hand 1 moves onto the mask stage 50. Further, the base 52b is supported by a tension spring 54 stretched between a spring support 52a protruding from the upper surface thereof and a spring support 55a protruding from the left end side of the base 55, as shown in FIG. As shown in a), the drop prevention plate 52 is always stretched so as to overlap with the upper part of the X-ray mask 10.

A mask hand l is placed on the mask stage 50 as described above.
When considering the case where the finger 3b moves, first, the fall prevention pin 9 is pushed down by touching the roller 9a with one finger 3b and pressing it downward, and the tip of the other finger 3a is moved by the drive. It comes into contact with the pin 53. After that, when the mask hand 1 advances further, the finger portion 3
A moves forward while pushing the drive pin 53 against the spring force of the tension spring 54. When the mask hand 1 finally reaches the position where the X-ray mask 10 is delivered to and received from the mask stage 50, the fall prevention plate 52 moves as shown in FIG. (to the right end of the guide 56 in FIG. 5(a)). Thereafter, as the mask hand 1 retreats from above the mask stage 50, the fall prevention plate 52 gradually returns to the state shown in FIG. 5(a) due to the spring force of the tension spring 54 as the mask hand 1 moves. I'm going back. Therefore, also in this example,
The fall prevention plate 9 and the fall prevention plate 52 do not interfere with the movement of the mask hand 1 as it transfers the X-ray mask 10, and the same effects as those of the embodiments described above can be obtained. Furthermore, although the fall prevention plate of this embodiment has the same structure as that of the first embodiment described above, it may also have the structure shown in FIG. 3(C) used in the second embodiment. In each of the embodiments described above, a substrate holding device that is equipped with a magnetic unit and uses its magnetic force to attract and hold a substrate has been described, but the present invention can also be applied to a vacuum adsorption type substrate holding device, and the same as described above can be applied. effect can be obtained.

[Effects of the Invention] Since the present invention is configured as described above, it produces the following effects.

(1) Since the substrate holding device prevents the substrate from falling, the safety of the device is ensured and reliability is improved.

(2) The fall prevention plate and fall prevention plate are retracted from the substrate holding surface as the substrate gripping device moves onto the substrate holding surface, so they do not interfere with the movement of the substrate gripping device. Therefore, the board transfer operation can be performed smoothly.

[Brief explanation of drawings]

FIGS. 1(a), (b), and (c) are a front view, a side view, and a bottom view showing the first embodiment of the substrate holding device of the present invention, and FIGS. 2(a) and (b) are respectively , FIGS. 3(a), 3(b), and 3(c) are respectively a front view and a bottom view showing a state in which a mask hand holds an X-ray on a mask stage according to the first embodiment of the present invention.
The front view, side view, and bottom view of the second embodiment of the substrate holding device of the present invention, and FIGS. FIGS. 5(a) and 5(b) are a front view and a side view, respectively, showing the third embodiment of the substrate holding device of the present invention. FIG. 6 is a front view showing a state in which a mask hand grips an X-ray mask on a mask stage according to a third embodiment of the present invention, and FIG. 7 is a front view showing a conventional example. 1-Mask hand 2.-Hand body 3-Finger portion 4-.Claw 5-Support portion 6-Pin 7.-Solenoid 8.-Magnetic adsorption unit 9.
22 - Fall prevention pin 9a, 22a - Roller 9b, 22b - Support plate 9c, 15a - Support shaft 9d - Spring 9e, 22e - Pin hole 9f, 22d - Roller hole 9g, 20b - One recess 1 11 ...Mask frame 12--Mask membrane 13--Mask pattern 14.21.51--V block 15.52--Fall prevention plate 16.20.50-Mask stage 16a, 20a, 50a-- Stage surface 22c, 54-
Tension springs 52a, 55a--Spring support portion 52b-Base 53--Drive pin 55-Base
56--Guide 0--X-ray mask patent applicant Canon Co., Ltd. agent Patent attorney Tadashi Wakabu

Claims (1)

[Claims] 1. A substrate conveyed by a substrate gripping device having two finger parts for gripping a substrate for X-ray exposure,
In a substrate holding device equipped with a substrate holding surface that sucks and holds the substrate in a vertical direction, the substrate always protrudes above the substrate holding surface to prevent the substrate from falling, and when the substrate gripping device moves onto the substrate holding surface, A fall prevention pin pushed down into the substrate holding surface by one finger of the substrate holding device, and an upper part of the substrate held by suction on the substrate holding surface in order to catch the substrate tilted toward the side opposite to the substrate holding surface. A drop prevention device that is always located at a location where the substrate gripping device overlaps with the substrate holding surface, and is pushed and moved by the other finger portion of the substrate gripping device to be evacuated from the substrate holding surface when the substrate gripping device moves onto the substrate holding surface. A substrate holding device characterized by having a plate. 2. The fall prevention pin has one end on the substrate gripping device side rotatably supported by a support shaft in a recess formed in the substrate holding surface, and is always urged toward the substrate holding surface by the spring force of a spring. A roller is erected at the other end of the support plate, and a roller is erected at one end of the support plate, and the roller moves the substrate holding surface of the substrate gripping device by the spring force. 2. The substrate holding device according to claim 1, wherein one of the finger portions protrudes onto a passage. 3. The fall prevention pin is formed on the substrate holding surface at one end of the supporting plate on the side opposite to the substrate gripping device, which is always urged toward the substrate holding surface by the spring force of a spring from the back side of the substrate holding surface. Further, a roller support rod having a roller attached to the tip thereof is erected on the other end of the support plate, and the roller is caused to move through the substrate by the spring force. 2. The substrate holding device according to claim 1, wherein the substrate holding surface protrudes onto a path through which one finger portion of the substrate gripping device passes through a roller hole formed in the holding surface. 4. The fall prevention plate is rotatably supported by a support shaft at a position corresponding to the upper part of the substrate held by suction on the substrate holding surface, and is connected to a part of the upper side of the substrate. 4. The substrate holding device according to claim 1, 2 or 3, wherein the substrate holding device is polymerized. 5. The fall prevention plate is fixed to a base that extends above the substrate held by suction on the substrate holding surface and above the positioning member.
It is fixed to a base that is slidably engaged with a guide provided parallel to the moving direction of the substrate gripping device, and the base is fixed by the spring force of a spring tensioned between it and the base. The fall prevention plate is always urged toward the substrate gripping device so as to overlap with a portion of the upper side of the substrate, and further, an end surface of the base on the substrate gripping device side includes:
4. The substrate holding device according to claim 1, further comprising a drive pin that abuts a tip of one finger portion of the substrate holding device that moves onto the substrate holding surface.