JPH04144047A - Rotating anode type x-ray tube - Google Patents
Rotating anode type x-ray tubeInfo
- Publication number
- JPH04144047A JPH04144047A JP26627190A JP26627190A JPH04144047A JP H04144047 A JPH04144047 A JP H04144047A JP 26627190 A JP26627190 A JP 26627190A JP 26627190 A JP26627190 A JP 26627190A JP H04144047 A JPH04144047 A JP H04144047A
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- anode
- liquid metal
- thin film
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000314 lubricant Substances 0.000 claims abstract description 21
- 229910001338 liquidmetal Inorganic materials 0.000 claims abstract description 16
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 7
- 239000010937 tungsten Substances 0.000 claims abstract description 7
- 239000010409 thin film Substances 0.000 abstract description 14
- 229910000807 Ga alloy Inorganic materials 0.000 abstract description 3
- 238000010894 electron beam technology Methods 0.000 abstract description 3
- 230000005611 electricity Effects 0.000 abstract 1
- 230000003628 erosive effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 description 11
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 4
- 239000002826 coolant Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 230000005291 magnetic effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000691 Re alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 235000012907 honey Nutrition 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/10—Drive means for anode (target) substrate
- H01J2235/1046—Bearings and bearing contact surfaces
- H01J2235/106—Dynamic pressure bearings, e.g. helical groove type
Abstract
Description
【発明の詳細な説明】
1、発明の目的]
(産業上の利用分野)
この発明は、回転陽極型X線管に係わり、とくに軸受構
体の改良に関する。DETAILED DESCRIPTION OF THE INVENTION 1. OBJECTS OF THE INVENTION (Industrial Application Field) The present invention relates to a rotating anode X-ray tube, and particularly relates to an improvement of a bearing structure.
(従来の技術)
回転陽極型X線管は、周知のように、円板状の陽極ター
ゲットを相互間に軸受部を有する回転体および固定体で
支え、真空容器外に配置した電磁コイルを付勢し高速回
転させながら陰極から電子ビームを放出して陽極ターゲ
ットに当て、X線を放射する。軸受部は、ボールベアリ
ングのようなころがり軸受や、軸受面にらせん溝を形成
するとともにガリウム(Ga)、又はGa、インジウム
(In)、錫(Sn)、その他の金属から選択された合
金のような液体金属を潤滑剤として用いた動圧式すべり
軸受で構成される。後者のすべり軸受を用いた例は、た
とえば特公昭60−21463号、特開昭60−975
36号、特開昭60−117531号、あるいは特開昭
62−287555号等の各公報に開示されている。(Prior art) As is well known, a rotating anode X-ray tube supports a disk-shaped anode target between a rotating body and a fixed body that have bearings between them, and is equipped with an electromagnetic coil placed outside a vacuum vessel. While rotating at high speed, an electron beam is emitted from the cathode and hits the anode target, emitting X-rays. The bearing part is a rolling bearing such as a ball bearing, a spiral groove is formed on the bearing surface, and the bearing part is made of gallium (Ga) or an alloy selected from Ga, indium (In), tin (Sn), or other metals. It consists of a hydrodynamic sliding bearing that uses liquid metal as a lubricant. Examples using the latter sliding bearing are, for example, Japanese Patent Publication No. 60-21463 and Japanese Patent Application Laid-open No. 60-975.
No. 36, JP-A-60-117531, and JP-A-62-287555.
(発明が解決しようとする課題)
上記各公報に開示されている回転陽極型X線管では、そ
のすべり軸受を構成する回転体および固定体として、モ
リブデン(Mo)又はMO合金、あるいはタングステン
(W)とレニウム(Re)の合金が使用されている。し
かしながら、軸受面をこのような金属で構成し、相互間
にGa、又はGa合金の液体金属潤滑剤を介在させると
、とくにMoで構成した場合は高温での熱処理、あるい
はX線管の動作で到達する高温で、これら軸受面とGa
又はGa合金との相互浸透が生じて軸受面に荒れが発生
しやすい。それによってまた、軸受面の高温強度が劣化
し、安定な軸受動作が維持できなくなるおそれがある。(Problems to be Solved by the Invention) In the rotating anode X-ray tubes disclosed in the above publications, molybdenum (Mo), an MO alloy, or tungsten (W) is used as the rotating body and fixed body that constitute the sliding bearing. ) and rhenium (Re) are used. However, if the bearing surface is made of such a metal and a liquid metal lubricant of Ga or Ga alloy is interposed between the bearing surfaces, especially if the bearing surface is made of Mo, heat treatment at high temperatures or operation of an X-ray tube may cause problems. At the high temperatures reached, these bearing surfaces and Ga
Alternatively, interpenetration with the Ga alloy may occur, which may easily cause roughness on the bearing surface. As a result, the high-temperature strength of the bearing surface may deteriorate, and stable bearing operation may not be maintained.
また、空気中での組立て工程で表面酸化しやすく、液体
金属潤滑剤との濡れ性のよい直接接触が得にくいという
不都合がある。また、W−Re合金で構成すると、材料
が高価であるとともに、複雑な形状への加工が困難であ
るという不都合がある。In addition, the surface is easily oxidized during the assembly process in air, and it is difficult to obtain direct contact with a liquid metal lubricant with good wettability. Furthermore, if it is made of W-Re alloy, there are disadvantages in that the material is expensive and it is difficult to process it into a complicated shape.
この発明は、以上のような不都合を解消し、軸受面の高
温強度を十分維持でき、且つ液体金属潤滑剤との濡れ性
がすぐれるとともにこの潤滑剤による浸蝕を抑制して、
安定な軸受動作を維持することができる比較的低価格の
回転陽極型X線管を提供することを目的とする。The present invention eliminates the above-mentioned disadvantages, maintains sufficient high-temperature strength of the bearing surface, has excellent wettability with a liquid metal lubricant, and suppresses corrosion caused by this lubricant.
It is an object of the present invention to provide a relatively low-cost rotating anode type X-ray tube that can maintain stable bearing operation.
[発明の構成]
(課題を解決するための手段)
この発明は、陽極ターゲットを回転自在に支えるととも
にすべり軸受部を一部に構成する回転体および固定体の
少なくとも一方が、そのすべり軸受面となる表面にタン
グステンの薄膜が付着されてなる回転陽極型X線管であ
る。[Structure of the Invention] (Means for Solving the Problems) In the present invention, at least one of a rotating body and a fixed body that rotatably supports an anode target and constitutes a part of a sliding bearing portion is configured such that at least one of the rotating body and the fixed body that rotatably supports an anode target and that the sliding bearing surface thereof This is a rotating anode type X-ray tube with a thin tungsten film attached to its surface.
(作用)
この発明によれば、すべり軸受面となる表面にタングス
テンの薄膜が付着されてなるため、高温での軸受面の機
械的強度が高く、且つ液体金属潤滑剤の濡れ性にすぐれ
ているとともにこの潤滑剤で浸蝕されることがほとんど
なく、高温で長時間の安定な軸受動作を維持することが
できる。また、軸受の母材は比較的安価な材料を使用で
きるとともに、この母材の加工も容易なものが使用でき
、低価格で製作容易な回転陽極型X線管を得ることがで
きる。(Function) According to the present invention, since a thin tungsten film is attached to the surface that becomes the sliding bearing surface, the mechanical strength of the bearing surface at high temperatures is high and the wettability of the liquid metal lubricant is excellent. At the same time, this lubricant hardly causes corrosion and can maintain stable bearing operation for long periods of time at high temperatures. Moreover, a relatively inexpensive material can be used as the base material of the bearing, and this base material can also be easily processed, making it possible to obtain a rotary anode type X-ray tube that is inexpensive and easy to manufacture.
(実施例)
以下その実施例を図面を参照して説明する。なお同一部
分は同一符号であられす。(Example) The example will be described below with reference to the drawings. Identical parts are designated by the same reference numerals.
第1図および第2図に示す実施例は、重金属からなる円
盤状陽極ターゲット11が、円筒状回転体12の一端に
突設された回転軸部13に固定ねじ14により一体的に
固定されている。円筒状回転体12の内側には、固定体
15が嵌合されており、回転体の下端開口部には円板状
のフランジ16が固着されている。固定体15の下端の
陽極支持部17は、ガラス製の真空容器18に気密接合
されている。また、この固定体15は、中心部分がくり
ぬかれた冷却媒体通路22を有し、これにパイプ23が
挿入されていて、矢印Cで示すように冷却媒体を循環で
きるようになっている。円筒状回転体12と固定体15
との嵌合部分は、前述の各公報に示されるような動圧す
べり軸受部19を構成している。そのため、固定体15
のすべり軸受面となる外周壁及び両端壁には、前述の各
公報に記載されているようならせん溝20.21が形成
されている。これと対面する回転体12すベリ軸受面は
、単なる平滑な面でもよく、あるいは必要に応じてらせ
ん溝を形成したものでもよい。In the embodiment shown in FIGS. 1 and 2, a disc-shaped anode target 11 made of heavy metal is integrally fixed to a rotating shaft portion 13 protruding from one end of a cylindrical rotating body 12 with a fixing screw 14. There is. A fixed body 15 is fitted inside the cylindrical rotating body 12, and a disk-shaped flange 16 is fixed to the lower end opening of the rotating body. The anode support portion 17 at the lower end of the fixed body 15 is hermetically sealed to a vacuum container 18 made of glass. The fixed body 15 also has a cooling medium passage 22 with a hollowed out center portion, into which a pipe 23 is inserted, so that the cooling medium can be circulated as shown by arrow C. Cylindrical rotating body 12 and fixed body 15
The fitting portion thereof constitutes a dynamic pressure slide bearing portion 19 as shown in each of the above-mentioned publications. Therefore, the fixed body 15
Spiral grooves 20 and 21, as described in the above-mentioned publications, are formed in the outer circumferential wall and both end walls, which serve as sliding bearing surfaces. The sliding bearing surface of the rotating body 12 facing this may be a simple smooth surface, or may have a helical groove formed thereon as required.
そこで、回転体12及び固定体15は、その母材が例え
ばコバール(商品名)のような熱膨張率がタングステン
(W)に同等又は近い材料で構成されている。そして、
軸受面となる表面に、Wの薄膜26.27が、例えばC
VD法により5〜500μmの厚さに付着されている。Therefore, the base material of the rotating body 12 and the fixed body 15 is made of a material such as Kovar (trade name) whose coefficient of thermal expansion is equal to or close to that of tungsten (W). and,
On the surface that will become the bearing surface, a thin film 26,27 of W is coated, for example, with C.
It is attached to a thickness of 5 to 500 μm using the VD method.
なお、固定体15に予めらせん溝20.2+を形成しで
ある場合は、Wの薄膜26.27を5〜15μmの厚さ
に被覆すれば十分な軸受面強度が得られ、CVDにより
らせん溝の内面にもほぼ均等な厚さで被覆できる。この
W薄膜は、母材への付着強度が高く、高温強度及び耐磨
耗性にすぐれており、且つ液体金属潤滑剤の濡れ性にも
すぐれている。In addition, if the helical groove 20.2+ is formed in the fixed body 15 in advance, sufficient bearing surface strength can be obtained by coating the thin film 26.27 of W to a thickness of 5 to 15 μm, and the helical groove is formed by CVD. It can be coated on the inner surface of the body with almost uniform thickness. This W thin film has high adhesion strength to the base material, excellent high-temperature strength and abrasion resistance, and also has excellent wettability with liquid metal lubricants.
さて、回転体及び固定体の両軸受面は、およそ20μm
の間隙gをもって対面するようになっており、この間隙
gおよびらせん溝内に動作中に液状となる液体金属潤滑
剤(図示せず)を充填し介在させる。そして、回転体1
2に対応する位置の真空容器外に、図示しないステータ
即ち電磁コイルを配置して回転磁界を生じさせ、回転陽
極を矢印Pの如く高速回転させる。図示しない陰極から
放出された電子ビームが陽極ターゲット11に射突して
X線が発生させられるとともに、このターゲットに生じ
た熱はその多くが輻射により放散されるとともに、その
一部は回転体から軸受部の液体金属潤滑剤を通り固定体
を経て直接又は冷却媒体を介して外部に放散させられる
。軸受面を構成しているW薄膜は、回転陽極型X線管と
して必要十分な電気伝導性および熱伝導性を有している
ので、陽極電流および熱の通路として支障なく機能する
。Now, the bearing surfaces of both the rotating body and the fixed body are approximately 20 μm.
They face each other with a gap g, and a liquid metal lubricant (not shown) that becomes liquid during operation is filled and interposed in this gap g and the spiral groove. And rotating body 1
A stator (not shown), ie, an electromagnetic coil, is placed outside the vacuum vessel at a position corresponding to 2 to generate a rotating magnetic field, causing the rotating anode to rotate at high speed as indicated by arrow P. An electron beam emitted from a cathode (not shown) impinges on an anode target 11 to generate X-rays, and most of the heat generated in this target is dissipated by radiation, and some of it is emitted from the rotating body. The liquid metal lubricant in the bearing is radiated to the outside through the fixed body directly or via a cooling medium. The W thin film constituting the bearing surface has electrical conductivity and thermal conductivity necessary and sufficient for a rotating anode type X-ray tube, so it functions without any problem as a path for anode current and heat.
その上、高温での機械的強度が高く、且つGa又はGa
合金のような液体金属潤滑剤で浸蝕されることがない。Moreover, it has high mechanical strength at high temperatures, and Ga or Ga
Will not be attacked by liquid metal lubricants such as alloys.
しかも、軸受面が酸化しにくいので、組立て及び取扱い
が容易であり、液体金属潤滑剤との必要十分な濡れ性を
得るのに格別余分の工程を要しない利点もある。こうし
て、容易に安定な軸受動作性能を備える回転陽極型X線
管が得られる。Furthermore, since the bearing surface is resistant to oxidation, it is easy to assemble and handle, and has the advantage that no extra steps are required to obtain sufficient wettability with the liquid metal lubricant. In this way, a rotating anode type X-ray tube with stable bearing performance can be easily obtained.
第3図に示す実施例は、予め軸受の母材15bを平坦な
ままとし、その表面にW薄膜27を例えば50〜500
μmというように比較的厚く付着し、その後このW薄膜
27をエツチングすることにより10〜20μmの深さ
のらせん溝20.21を形成したものである。この実施
例によれば、らせん溝を高精度に形成することができる
。In the embodiment shown in FIG. 3, the base material 15b of the bearing is kept flat in advance, and a W thin film 27 is coated on the surface with a thickness of, for example, 50 to 500.
A spiral groove 20.21 having a depth of 10 to 20 .mu.m is formed by depositing a relatively thick W film 27 of 10 to 20 .mu.m in depth and then etching the W thin film 27. According to this embodiment, the spiral groove can be formed with high precision.
第4図乃至第6図に示す実施例は、回転体12を予め円
筒部12m1上部の平板部12m 、回転軸部13、及
びフランジ16に分けた部品として用意し、各部品の軸
受面となる部分にそれぞれ単独にW薄膜26.26・・
・を、例えばCVD法により付着させたものである。ま
た固定体15の軸受面にもW薄膜27を付着しである。In the embodiment shown in FIGS. 4 to 6, the rotating body 12 is prepared in advance as parts divided into a flat plate part 12m at the top of the cylindrical part 12m1, a rotating shaft part 13, and a flange 16, and the bearing surface of each part is prepared. Individually W thin film 26.26...
* is attached by, for example, the CVD method. A W thin film 27 is also attached to the bearing surface of the fixed body 15.
なお、回転体12の円筒部12mの外周に銅円筒12c
を蜜に嵌合固定しである。Note that a copper cylinder 12c is provided on the outer periphery of the cylindrical portion 12m of the rotating body 12.
It is fixed by fitting into the honey.
この実施例によれば、とくに円筒状の回転体を単純な円
筒および円板の状態でW薄膜を付着できるので、全体に
わたって均等な厚さで、容易に製作できる。According to this embodiment, since the W thin film can be attached to the cylindrical rotating body in the form of a simple cylinder and disk, it can be easily manufactured to have a uniform thickness over the entire body.
なお、軸受面の母材は、熱膨張率が前述のようにWに近
い材料が好ましい。しかも、とくに、鉄ニッケルを主体
とする合金のような強磁性体を使用すれば、回転磁界と
の磁気的結合の効率が高いので好適である。なおまた、
使用する液体金属潤滑剤は、Ga5Ga−InN又はG
a−In−3nのようなGaを主体とするものに限らず
、例えば、ビスマス(Bi)を相対的に多く含むB1−
In−Pb−8n合金、あるいはInを相対的に多く含
むIn−B1合金、又はIn−B1−3n合金を使用し
得る。これらは融点が室温以上であるので、陽極ターゲ
ットを回転させる前に潤滑剤をこの温度以上に予熱した
うえで回転させることが望ましい。Note that the base material of the bearing surface is preferably a material whose coefficient of thermal expansion is close to W as described above. Moreover, it is particularly preferable to use a ferromagnetic material such as an alloy mainly composed of iron and nickel because the efficiency of magnetic coupling with the rotating magnetic field is high. Furthermore,
The liquid metal lubricant used is Ga5Ga-InN or G
Not limited to those mainly composed of Ga such as a-In-3n, but also B1-, which contains a relatively large amount of bismuth (Bi).
An In-Pb-8n alloy, an In-B1 alloy containing a relatively large amount of In, or an In-B1-3n alloy can be used. Since these have melting points above room temperature, it is desirable to preheat the lubricant to above this temperature before rotating the anode target.
[発明の効果コ
以上説明したように、この発明によればすべり軸受部の
軸受面が母材の表面にWの薄膜が付着されて構成されて
いるので、高温での機械的強度が高く、且つ液体金属潤
滑剤の濡れ性にすぐれているとともにこの潤滑剤で浸蝕
されることがほとんどなく、高温で長時間の安定な軸受
動作性能をもつ回転陽極型X線管を得ることができる。[Effects of the Invention] As explained above, according to the present invention, the bearing surface of the sliding bearing portion is constructed by attaching a thin film of W to the surface of the base material, so it has high mechanical strength at high temperatures; Furthermore, it is possible to obtain a rotating anode type X-ray tube that has excellent wettability with a liquid metal lubricant, is hardly corroded by this lubricant, and has stable bearing operation performance for long periods of time at high temperatures.
第1図はこの発明の実施例を示す要部縦断面図、第2図
はその一部拡大図、第3図はこの発明の他の実施例を示
す要部縦断面図、第4PI!Jはさらにこの発明の他の
実施例を示す要部縦断面図、第5図および第6図はそれ
ぞれその分解半断面図である。
11・・・陽極ターゲット、
12・・・回転体、
18・・・真空容器、
15・・・固定体、
19すベリ軸受部、
20、21・・・らせん溝、
g・・・間隙、
26.27・・・タングステンの薄膜。FIG. 1 is a longitudinal cross-sectional view of a main part showing an embodiment of the present invention, FIG. 2 is a partially enlarged view thereof, and FIG. 3 is a longitudinal cross-sectional view of a main part showing another embodiment of the invention. Further, J is a vertical cross-sectional view of a main part showing another embodiment of the present invention, and FIGS. 5 and 6 are exploded half-sectional views thereof, respectively. DESCRIPTION OF SYMBOLS 11...Anode target, 12...Rotating body, 18...Vacuum container, 15...Fixed body, 19...Slip bearing part, 20, 21...Spiral groove, g...Gap, 26 .27... Tungsten thin film.
Claims (1)
転可能に保持する固定体と、前記回転体および固定体の
一部に設けられた軸受面の相互間に動作中液状である金
属潤滑剤が介在されてなるすべり軸受部とを具備する回
転陽極型X線管において、 上記回転体及び固定体の少なくとも一方は、そのすべり
軸受面となる表面に、タングステンの薄膜が付着されて
なることを特徴とする回転陽極型X線管。[Claims] A rotating body to which an anode target is fixed, a fixed body that rotatably holds this rotating body, and a bearing surface provided on a part of the rotating body and the fixed body. In a rotating anode X-ray tube equipped with a sliding bearing portion having a liquid metal lubricant interposed therebetween, at least one of the rotating body and the fixed body has a thin tungsten film on the surface that becomes the sliding bearing surface. A rotating anode type X-ray tube characterized in that:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP02266271A JP3124023B2 (en) | 1990-10-05 | 1990-10-05 | Method for producing rotary anode type X-ray tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP02266271A JP3124023B2 (en) | 1990-10-05 | 1990-10-05 | Method for producing rotary anode type X-ray tube |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04144047A true JPH04144047A (en) | 1992-05-18 |
JP3124023B2 JP3124023B2 (en) | 2001-01-15 |
Family
ID=17428650
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP02266271A Expired - Fee Related JP3124023B2 (en) | 1990-10-05 | 1990-10-05 | Method for producing rotary anode type X-ray tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3124023B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002175769A (en) * | 2000-12-07 | 2002-06-21 | Toshiba Corp | Rotary anode type x-ray tube and its manufacturing method |
-
1990
- 1990-10-05 JP JP02266271A patent/JP3124023B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002175769A (en) * | 2000-12-07 | 2002-06-21 | Toshiba Corp | Rotary anode type x-ray tube and its manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
JP3124023B2 (en) | 2001-01-15 |
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