JPH0414399U - - Google Patents
Info
- Publication number
- JPH0414399U JPH0414399U JP5488990U JP5488990U JPH0414399U JP H0414399 U JPH0414399 U JP H0414399U JP 5488990 U JP5488990 U JP 5488990U JP 5488990 U JP5488990 U JP 5488990U JP H0414399 U JPH0414399 U JP H0414399U
- Authority
- JP
- Japan
- Prior art keywords
- display element
- deposited
- film
- substrate
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
- 238000001020 plasma etching Methods 0.000 claims 2
- 150000002736 metal compounds Chemical class 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5488990U JPH0414399U (enExample) | 1990-05-25 | 1990-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5488990U JPH0414399U (enExample) | 1990-05-25 | 1990-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0414399U true JPH0414399U (enExample) | 1992-02-05 |
Family
ID=31577353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5488990U Pending JPH0414399U (enExample) | 1990-05-25 | 1990-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0414399U (enExample) |
-
1990
- 1990-05-25 JP JP5488990U patent/JPH0414399U/ja active Pending