JPH0414351U - - Google Patents
Info
- Publication number
- JPH0414351U JPH0414351U JP5429690U JP5429690U JPH0414351U JP H0414351 U JPH0414351 U JP H0414351U JP 5429690 U JP5429690 U JP 5429690U JP 5429690 U JP5429690 U JP 5429690U JP H0414351 U JPH0414351 U JP H0414351U
- Authority
- JP
- Japan
- Prior art keywords
- slit
- ion source
- avoiding
- extracting
- plasma generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5429690U JPH0414351U (en:Method) | 1990-05-24 | 1990-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5429690U JPH0414351U (en:Method) | 1990-05-24 | 1990-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0414351U true JPH0414351U (en:Method) | 1992-02-05 |
Family
ID=31576234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5429690U Pending JPH0414351U (en:Method) | 1990-05-24 | 1990-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0414351U (en:Method) |
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1990
- 1990-05-24 JP JP5429690U patent/JPH0414351U/ja active Pending