JPH04138204A - Press molding equipment for ceramic - Google Patents

Abstract

PURPOSE:To detect the abnormality of size and raw density regarding all molded forms by adjusting the fill of a raw material when the height of the bottom dead point of an upper punch detected by a proximity sensor for detecting the height of the upper punch to a die is displaced outside a normal range. CONSTITUTION:A metal plate 3 is installed to an upper drum 1 while a proximity sensor 4 is mounted at a position oppositely faced to the metal plate 3 to a die set 2, a detector 5 and a sequencer 6 are connected to the proximity sensor 4, and a plurality of press molding equipment are collected and centralized-controlled by a computer. When press molding is conducted, an upper punch is located at the position of a bottom dead point when height (h) reaches a minimum value hmin, the height hmin of the bottom dead point is detected by the detector 5, and whether or not the height hmin of the bottom dead point is kept with a previously stored normal range or a feedback range set outside the normal range is discriminated by the sequencer 6. When the height hmin of the bottom dead point is not kept within the normal range, a feedback signal 7 is emitted from the sequencer 6, thus adjusting the fill of a raw material.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a press molding apparatus for molding ceramic products.

[Prior Art] Ceramics are widely used in substrates for semiconductor packages, other electronic components, parts for industrial machinery, and the like.

Press molding has been a common method for molding such ceramics. For example, as shown in FIG.
3, the ceramic raw material 14 was filled in the space formed by the ceramic raw material 14, and press molding was performed by pressing the ceramic raw material 14 with the upper punch 12.

At this time, the press molding pressure is always constant, or if there are variations in the ceramic raw material, the dimensions and green density of the obtained molded body will change. Therefore, the green density was determined by sampling the molded product at regular intervals and measuring its weight and thickness to check whether it was within a predetermined range.

[Problems with the prior art] However, in the conventional press forming method as described above, only a part of the obtained molded body is sampled, so it is difficult to detect abnormalities in green density that occur between samplings. I couldn't do it.

In addition, the work of sampling and measuring fresh density was done manually and was time-consuming.

[Means for Solving the Problems] In view of the above, the present invention provides a press forming apparatus that includes a proximity sensor for detecting the height of the upper punch with respect to the die, and a lower dead end of the upper punch detected by the proximity sensor. It has means for determining whether the point height is within the normal range, and if the bottom dead center height is outside the normal range, a feedback signal is output to adjust the filling amount of the raw material. It is.

[Example] The present invention will be explained in detail below.

As shown in FIG. 1, the press forming apparatus of the present invention consists of an upper ram 1 equipped with an upper punch and a die set 2 equipped with a die. It is supposed to be done. Further, a metal plate 3 is attached to the upper ram 1, and a proximity sensor 4 is attached to the die set 2 at a position facing the metal plate 3. Furthermore, a detector 5 and a sequencer 6 are connected to the proximity sensor 4, and a plurality of press molding devices are collectively managed by a computer (not shown).

The proximity sensor 4 is a magnetic sensor that detects the distance to the metal plate 3 by changes in the magnetic field, and has an extremely excellent distance detection accuracy of about 0.5 μm. In addition,
The proximity sensor 4 only needs to be non-contact and highly accurate, and is not limited to the magnetic sensor described above, but may also be a laser sensor that uses laser light. However, magnetic sensors are superior in terms of detection accuracy.

Next, a press molding method using this device will be explained.

First, the press molding equipment and the ceramic raw material are controlled so that the temperature and humidity are within certain ranges.

Then, when press forming is performed, the height h of the metal plate 3 relative to the proximity sensor 4 changes according to the vertical movement of the upper ram 1, or when the height h reaches the minimum value hml, the upper punch is the bottom dead center position, and this bottom dead center height 1 is detected by the detector 5. Next, the sequencer 6 determines whether the bottom dead center height h is within a pre-stored normal range or a feedback range set outside the normal range.

If the result is within the normal range, the obtained molded product is considered to have normal dimensions and green density, and press molding is continued.

In addition, if the bottom dead center height hl is not within the normal range but within the feedback range, the sequencer 6 outputs the feedback signal 7 while the press molding device is being driven, and the die set 2 is automatically The amount of raw materials to be filled is now delicately adjusted. Furthermore, if the bottom dead center height hY1 is not within the feedback range, it is regarded as a sudden abnormality, the drive of the press molding device is stopped, and manual adjustment is performed.

The above steps are summarized in a flowchart as shown in FIG.

As described above, according to the press molding apparatus of the present invention, the temperature,
By controlling the humidity within a certain range, the moisture content and crushability of the ceramic raw material can be kept constant, so all molded products obtained can be checked by simply detecting the height of the bottom dead center during press forming. Regarding the dimensions, the green density or more can be easily detected.

Additionally, if an abnormality occurs, it is possible to automatically make adjustments by filtering back the information.

In addition, in the above-mentioned press molding method, the temperature and humidity are controlled under certain conditions, but the method is not limited to this, and other methods may be used. For example, data on the moisture content and crushability of ceramic raw materials to be press-formed due to changes in temperature and humidity are input into a computer in advance, and the temperature and humidity during press-forming are measured using sensors and then processed by the sequencer 6. When determining the dead center height 1, it may be corrected according to the conditions at that time.

Here, a substrate for a semiconductor package was press-molded using the above-described press-molding apparatus of the present invention. The material is A.
The main component is 12O5, and Sl029Mg is used as a sintering aid.
0. CaO as a coloring agent, Tie□, MnO2,
A black alumina ceramic containing CrO2°Fe2es was used, and the size of the molded body was 36.8X 14.
7X 2. It was set to Omm.

Temperature of press molding equipment and ceramic raw materials is ±2°C
1 Humidity was controlled to be within the range of ±10%, and press molding was performed so that the bottom dead center height was within the range of 7 or ±20 μm. As a result, the dimensional accuracy of the obtained molded body was ±
It was found that a molded article with extremely excellent dimensional accuracy could be obtained with a content of 0.3% or less.

[Effects of the Invention] According to the present invention, a press forming apparatus is provided with a proximity sensor for detecting the height of the upper punch with respect to the die, and the bottom dead center of the upper punch detected by the proximity sensor is By having means for determining whether the height is within the normal range, and if the bottom dead center height is outside the normal range, a feedback signal is output to adjust the filling amount of the raw material. It is possible to detect abnormalities in dimensions and green density of molded products, and there is no need for manual checking. Furthermore, if there is an abnormality, it can be automatically adjusted using a feedback signal.
Many effects can be achieved, such as the ability to obtain molded bodies with extremely excellent dimensional accuracy.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram showing an embodiment of the press molding apparatus of the present invention. FIG. 2 is a flowchart showing a molding method using the press molding apparatus of the present invention. FIG. 3 is a cross-sectional view showing a schematic structure of a press molding apparatus for ceramics.

Claims (1)

[Claims] A press forming device for forming ceramic raw materials into a predetermined shape is equipped with a proximity sensor to detect the height of the upper punch relative to the die, and the bottom dead center height of the upper punch detected by the proximity sensor is within the normal range. The ceramic is characterized by having a means for determining whether the height of the bottom dead center is within the normal range, and outputting a feedback signal to adjust the filling amount of the raw material when the bottom dead center height is outside the normal range. Press molding equipment.