JPH0413665U - - Google Patents
Info
- Publication number
- JPH0413665U JPH0413665U JP5221990U JP5221990U JPH0413665U JP H0413665 U JPH0413665 U JP H0413665U JP 5221990 U JP5221990 U JP 5221990U JP 5221990 U JP5221990 U JP 5221990U JP H0413665 U JPH0413665 U JP H0413665U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- molecular beam
- beam epitaxy
- epitaxy apparatus
- high temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5221990U JPH0413665U (es) | 1990-05-21 | 1990-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5221990U JPH0413665U (es) | 1990-05-21 | 1990-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0413665U true JPH0413665U (es) | 1992-02-04 |
Family
ID=31572342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5221990U Pending JPH0413665U (es) | 1990-05-21 | 1990-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413665U (es) |
-
1990
- 1990-05-21 JP JP5221990U patent/JPH0413665U/ja active Pending
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