JPH0413491A - Laser beam machining method for ceramics - Google Patents

Abstract

PURPOSE:To prevent the stick of dross and to improve the yield by bringing the dross generated at the time of laser beam machining of ceramics into contact with a melt of a metallic plate for supporting ceramics and dispersing it spatteringly. CONSTITUTION:A ceramics plate 1 being a work is placed on a metallic plate 5, and a laser light 6 which is set so as to melt partially the metallic plate 5 by transmitting through the ceramics plate 1 and without transmitting through the metallic plate 5 is radiated from the front surface side of the ceramics plate 1. Subsequently, dross generated from the ceramics plate 1 is brought into contact with a molten metal and dispersed spatteringly. Accordingly, stick of the dross does not occur, the post-work for eliminating the dross becomes unnecessary, the working cycle time is improved, and the yield of a product can be improved.

Description

Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a laser processing method for ceramics, in particular, a method for cutting and drilling ceramics using a laser that can prevent dross from adhering to the back surface of ceramics. Regarding processing methods.

(Prior Art) As a processing method for ceramics, which is a difficult-to-cut material, grinding and cutting using a diamond grindstone or thermal processing using high-density laser energy has been established as an effective processing method. For example, in laser processing of a ceramic material such as a thin plate, as shown in FIG. Laser light 6 (e.g. carbon dioxide laser) focused by
is irradiated and cut. In this case, molten ceramic material adheres to the back surface of the ceramic plate 1 as dross 3, as shown by reference numeral 3 in the figure. Conventionally, this dross 3 is removed manually using a ceramic file or the like after laser cutting.

(Problems to be Solved by the Invention) In conventional laser processing of ceramics, the ceramic plate is suspended and supported by a needle-shaped or knife-shaped support member and irradiated with the laser, so a large amount of strong dross is processed. It adheres to the back side of objects, and it takes time and effort to remove it.

In addition, the workpiece may be damaged during the dross removal operation, causing a decrease in product yield and an increase in processing costs.

(Means for solving problems) Therefore, the present invention aims to reduce the generation of dross during laser processing.

The purpose of the present invention is to provide a laser processing method for ceramics that prevents adhesion, does not require post-work such as sanding, and improves the processing cycle. A laser beam set to partially melt the metal plate through the metal plate without passing through the metal plate is irradiated from the surface side of the ceramic, and dross generated from the ceramic is brought into contact with the molten metal. The material is dispersed in the form of spatter.

(Example) Next, an example of the present invention will be described with reference to the drawings.

FIG. 1 is a diagram showing a state in which a ceramic plate is being laser cut by the laser processing method of the present invention. First, a ceramic plate 1 to be processed is placed and fixed on a flat metal plate 5 such as a steel plate. Thereafter, a laser beam 6 is condensed and irradiated onto the portion to be cut using a laser processing machine from above the ceramic plate 1, and the cutting process is performed using the thermal energy thereof. At this time, the energy of the laser beam is made to penetrate through the ceramic plate 1 and not through the metal plate 5 placed below.

For the second purpose, select the number of laser outputs of the laser processing machine or the thickness of the metal plate.

When the ceramic plate 1 is irradiated with a laser beam 6 for cutting, the laser beam 6 penetrates the ceramic plate 1 and hits the upper surface of the metal plate 5, melting the surface of the metal plate. At this time, the dross generated from the ceramic plate 1 contacts and mixes with the molten metal 8 of the metal plate 1, and this is scattered in the form of sputters as shown by reference numeral 7, so that no dross adheres.

(Effects of the Invention) As explained above, according to the present invention, the dross generated during laser processing of ceramics is brought into contact with the molten material of the metal plate supporting the ceramics and scattered in the form of sputtering, so that the dross generated during laser processing of ceramics is scattered in a sputtering manner. Adhesion does not occur, and post-work such as sanding to remove dross is not required, which has the effect of improving processing cycle time and product yield.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing a state during laser processing of a ceramic plate according to an embodiment of the present invention, and FIG. 2 is a diagram showing a state of conventional laser processing. 1... Ceramic plate, 2... Supporting member, 3...
Dross, 5... Metal plate, 6... Laser light, 7... Scattered spatter, 8...
・Molten metal. Figure 1 Figure 2 Sub-Agent Patent Attorney Toshiyoshi Somekawa Toros

Claims (1)

[Claims] A ceramic is placed on a metal plate, and a laser beam set to pass through the ceramic but partially melt the metal plate without passing through the metal plate is irradiated from the surface side of the ceramic, and the ceramic is heated. A method for laser processing ceramics, which is characterized in that the dross generated from the molten metal is brought into contact with the molten metal and scattered in a sputtering manner, thereby preventing the dross from adhering to the molten metal.