JPH0413229U - - Google Patents

Info

Publication number
JPH0413229U
JPH0413229U JP5170290U JP5170290U JPH0413229U JP H0413229 U JPH0413229 U JP H0413229U JP 5170290 U JP5170290 U JP 5170290U JP 5170290 U JP5170290 U JP 5170290U JP H0413229 U JPH0413229 U JP H0413229U
Authority
JP
Japan
Prior art keywords
platen
movable
flange member
fixed
fixed platen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5170290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5170290U priority Critical patent/JPH0413229U/ja
Priority to DE4107881A priority patent/DE4107881C2/de
Priority to US07/667,893 priority patent/US5163651A/en
Priority to GB9105256A priority patent/GB2243075B/en
Priority to FR9103036A priority patent/FR2659537A1/fr
Publication of JPH0413229U publication Critical patent/JPH0413229U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Machine Tool Units (AREA)
JP5170290U 1990-03-13 1990-05-17 Pending JPH0413229U (enrdf_load_stackoverflow)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP5170290U JPH0413229U (enrdf_load_stackoverflow) 1990-05-17 1990-05-17
DE4107881A DE4107881C2 (de) 1990-03-13 1991-03-12 Verstellbarer Tisch
US07/667,893 US5163651A (en) 1990-03-13 1991-03-12 Movable table
GB9105256A GB2243075B (en) 1990-03-13 1991-03-13 Movable table
FR9103036A FR2659537A1 (fr) 1990-03-13 1991-03-13 Table mobile a plateaux respectivement fixe et mobile.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5170290U JPH0413229U (enrdf_load_stackoverflow) 1990-05-17 1990-05-17

Publications (1)

Publication Number Publication Date
JPH0413229U true JPH0413229U (enrdf_load_stackoverflow) 1992-02-03

Family

ID=31571369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5170290U Pending JPH0413229U (enrdf_load_stackoverflow) 1990-03-13 1990-05-17

Country Status (1)

Country Link
JP (1) JPH0413229U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001356187A (ja) * 2000-06-14 2001-12-26 Sumitomo Heavy Ind Ltd ＸＹθステージ装置及びその制御方法
JP2007142292A (ja) * 2005-11-22 2007-06-07 Advanced Mask Inspection Technology Kk 基板検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001356187A (ja) * 2000-06-14 2001-12-26 Sumitomo Heavy Ind Ltd ＸＹθステージ装置及びその制御方法
JP2007142292A (ja) * 2005-11-22 2007-06-07 Advanced Mask Inspection Technology Kk 基板検査装置

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