JPH0413229U - - Google Patents
Info
- Publication number
- JPH0413229U JPH0413229U JP5170290U JP5170290U JPH0413229U JP H0413229 U JPH0413229 U JP H0413229U JP 5170290 U JP5170290 U JP 5170290U JP 5170290 U JP5170290 U JP 5170290U JP H0413229 U JPH0413229 U JP H0413229U
- Authority
- JP
- Japan
- Prior art keywords
- platen
- movable
- flange member
- fixed
- fixed platen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims 1
Landscapes
- Liquid Crystal (AREA)
- Machine Tool Units (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5170290U JPH0413229U (cs) | 1990-05-17 | 1990-05-17 | |
| US07/667,893 US5163651A (en) | 1990-03-13 | 1991-03-12 | Movable table |
| DE4107881A DE4107881C2 (de) | 1990-03-13 | 1991-03-12 | Verstellbarer Tisch |
| GB9105256A GB2243075B (en) | 1990-03-13 | 1991-03-13 | Movable table |
| FR9103036A FR2659537A1 (fr) | 1990-03-13 | 1991-03-13 | Table mobile a plateaux respectivement fixe et mobile. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5170290U JPH0413229U (cs) | 1990-05-17 | 1990-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0413229U true JPH0413229U (cs) | 1992-02-03 |
Family
ID=31571369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5170290U Pending JPH0413229U (cs) | 1990-03-13 | 1990-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413229U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001356187A (ja) * | 2000-06-14 | 2001-12-26 | Sumitomo Heavy Ind Ltd | ＸＹθステージ装置及びその制御方法 |
| JP2007142292A (ja) * | 2005-11-22 | 2007-06-07 | Advanced Mask Inspection Technology Kk | 基板検査装置 |
-
1990
- 1990-05-17 JP JP5170290U patent/JPH0413229U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001356187A (ja) * | 2000-06-14 | 2001-12-26 | Sumitomo Heavy Ind Ltd | ＸＹθステージ装置及びその制御方法 |
| JP2007142292A (ja) * | 2005-11-22 | 2007-06-07 | Advanced Mask Inspection Technology Kk | 基板検査装置 |