JPH04131751U - Analysis equipment - Google Patents

Abstract

(57) [Summary] [Purpose] To enable initial settings to reliably determine the reference position of the sample tilt angle in an analyzer with a relatively simple structure and without being affected by backlash of the sample tilt mechanism. Do it like this. [Configuration] Three axes (R,
A disk-shaped sample pallet 10 is removably attached to the vertical support shaft 8 of the sample stage 2 controlled by A sample mounting section 12 is formed in each sample mounting section 12.
A sample fixture 14 is attached to sandwich the sample S between the two.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is mainly used for analyzing the surface condition of a sample. The present invention relates to an apparatus, and particularly to an improvement in its sample holding mechanism.

0002

[Conventional technology]

Generally, in this type of analyzer, the sample to be analyzed is placed inside a vacuum chamber. Therefore, in order to move the sample to the desired analysis position, it is necessary to It is necessary to manipulate the sample from

0003 Therefore, conventionally, a 3-axis (R, θ, Z) controlled sample stage was installed inside the vacuum chamber. There is something placed. This sample stage can be moved horizontally and vertically. This sample stage is movable and rotatable around the vertical axis. is now driven by a drive means such as a pulse motor from outside the vacuum chamber. ing.

0004

[Problem that the idea aims to solve]

However, this 3-axis (R, θ, Z) controlled sample stage does not move the sample horizontally. Alternatively, although the sample can be moved to any position in the vertical direction, cannot be tilted to an angle of

[0005] Therefore, for example, in an X-ray photoelectron spectrometer (XPS), etc., the sample surface Experiments were carried out by changing the incident depth of the X-rays by changing the incident angle of the X-rays on the surface. It is impossible to measure so-called angle-resolved spectra, which collect information in the depth direction of the material. be.

[0006] Furthermore, in the conventional technology, a sample stage controlled by 4 axes (X, Y, Z, θ) is provided. There is. This 4-axis (X, Y, Z, θ) controlled sample stage is It can be moved horizontally in the direction, vertically movable in the Z-axis direction, and tilted around the horizontal axis If you use this sample stage, you can move the sample horizontally. The sample can be moved to any vertical position, and the sample can be moved to any desired position in the vertical direction. It is also possible to tilt it at an angle.

[0007] However, in this 4-axis controlled sample stage, the mechanism for 4-axis control is extremely The process is complicated and the equipment is expensive. Moreover, this sample stage is designed to accommodate a single sample. Since only the material can be attached, when irradiating X-rays like the XPS mentioned above It is not possible to accurately measure angle-resolved spectra for samples that have been altered. Not only that, but there are other problems, such as the fact that it takes time and effort to exchange the sample.

[0008]

[Means to solve the problem]

This invention was devised to solve these problems, and is a relatively simple method. With a simple structure, multiple samples with different inclination angles can be placed on the sample stage simultaneously. so that samples can be analyzed continuously at each predetermined angle. At the same time, the effort of sample exchange can be saved as much as possible.

[0009] Therefore, in the analyzer of this invention, a sample stage is installed inside the vacuum chamber. , this sample stage is movable in the horizontal and vertical directions, and It is rotatable around the axis and has a vertical support shaft protruding concentrically with the vertical axis. A disk-shaped sample pallet is removably attached to this vertical support shaft. There are multiple cutouts on the outer periphery of this sample pallet, each with a different angle of inclination. sample holders are formed, and each of these sample holders has a sample holder connected to each sample holder. A sample fixture is attached to clamp the sample.

0010

[Effect]

According to the above configuration, the control mode is the same three-axis control as before, but the sample pallet Samples can be placed on each of the upper sample holders at different angles of inclination. Therefore, each time the analysis of one sample is completed, the sample pallet is rotated and the next sample is prepared. By analyzing the sample, you can obtain angle-resolved spectra without having to change the sample each time. can be measured.

[0011]

【Example】

Figure 1 is a configuration diagram showing an example in which the present invention is applied to an X-ray photoelectron spectrometer. It is.

0012 In the same figure, reference numeral 1 is a vacuum chamber, and a sample is placed inside this vacuum chamber 1. Stage 2 is located.

[0013] This sample stage 2 moves in the horizontal direction (R direction) and the vertical direction (Z direction). So-called 3 axes (R, θ, Z) that can be rotated (θ rotation) around the vertical axis For control, pulse motors 4r, 4θ, 4z installed outside the vacuum chamber 1 are interlocked and connected via link mechanisms 6r, 6θ, and 6z, respectively. and , this sample stage 2 is moved in the left-right direction (R direction) by a pulse motor 4r. It is also moved in the vertical direction (Z direction) by the pulse motor 4z, and is further moved by the pulse motor 4z. The vertical support shaft 8 protruding from the upper part rotates around the vertical axis P by the Luss motor 4θ. (θ rotation). A disk-shaped sample pallet 10 is detachably attached to this vertical support shaft 8. is attached to.

[0014] As shown in FIGS. 2 and 3, this sample pallet 10 has a vertical support shaft in its center. 8 insertion holes 11 are formed, and at multiple locations on the outer periphery, different insertion holes 11 are formed. A sample mounting portion 12 is formed by notching at an inclined angle ψ. And each of these The sample holder 12 has an L-shaped cross section for sandwiching the sample S between it and the sample holder 12. A sample fixture 14 is attached with screws 16.

[0015] In Fig. 1, 20 is an X-ray gun, and 22 is an X-ray gun that separates photoelectrons from the sample S into energy components. 24 is a detector, 26 is an energy analyzer to be separated from the An energy scanning power supply 28 controls the energy scanning power supply 26 and detects 30 is a computer that processes measurement data based on the output of the device 24; A controller that controls each pulse motor 4r, 4θ, 4z based on instructions from the controller 28. It is.

[0016] In the above configuration, when measuring the angle-resolved spectrum of a sample, First, each sample S is placed on each sample mounting section 12 of the sample pallet 10, and the sample is fixed. Clamp with tools 14. Then, this sample pallet 10 is introduced into the vacuum chamber 1. , is inserted into the vertical support shaft 8 of the sample stage 2.

[0017] Next, the controller 30 is operated according to a procedure stored in the computer 28 in advance. and drive the pulse motors 4r, 4θ, 4z, for example, to test one inclination angle ψ. Move the sample stage 2 to a position where the sample S can be irradiated with X-rays, and This sample S is irradiated with Then, the energy scanning voltage is set by the energy scanning power supply 26. The photoelectrons passing through the energy analyzer 22 while changing are detected by the detector 24, The detection output is input into the computer 28 and the spectrum is measured.

[0018] When the measurement of one sample S is completed, next, drive the pulse motor 4θ to move the sample S. Rotate page 2 and perform the same measurement as above on sample S with another tilt angle ψ. .

[0019] In this way, each time the analysis of one sample S is completed, the sample pallet 10 is sequentially updated. By rotating the sample S and analyzing the next sample, the angle can be adjusted without having to change the sample S each time. Decomposition spectra, etc. can be measured.

[0020]

[Effect of the idea]

According to the present invention, the structure is relatively simple and the backlash of the sample tilting mechanism can be reduced. The reference position of the sample inclination angle can be determined reliably without being affected by This provides an excellent practical effect in that it becomes more effective.

[Brief explanation of drawings]

FIG. 1 is a schematic configuration diagram showing an embodiment in which the present invention is applied to an X-ray photoelectron spectrometer.

FIG. 2 is a perspective view showing how a sample is held by a sample pallet.

FIG. 3 is an enlarged perspective view of a part of FIG. 2;

[Explanation of symbols]

1...Vacuum chamber, 2...Sample stage, 8...Vertical support shaft, 1
0...sample pallet, 12...sample mounting section, 14...sample fixture, S...sample.

Claims (1)

[Scope of utility model registration request] [Claim 1] A sample stage (2) in the vacuum chamber (1).
The sample stage (2) is movable in the left-right direction and the vertical direction, and is rotatable around the vertical axis. A disk-shaped sample pallet (10) is removably attached to this vertical support shaft (8), and at multiple locations on the outer periphery of this sample pallet (10),
Sample mounting parts (12) are cut out at different angles of inclination.
are formed, and each of these sample placement parts (12) has a sample fixing device that clamps the sample (S) between each sample placement part (12).
An analysis device characterized in that (14) is attached.