JPH04130905U - optical feed through - Google Patents

Abstract

(57) [Summary] [Structure] A glass plate 4 hermetically sealed by an O-ring sealing material 5 is attached to a base flange 2 by a glass presser 8.
the glass plate assembly attached to the atmosphere side light guide base holder 9 and the vacuum side light guide base holder 1.
0 is attached to the base flange 2, and the above equipment is integrally assembled as a feedthrough for vacuum equipment. [Effect] Compared to the conventional example, setting up the fiber light guide has become easier. Because it is assembled as a single element independently of the vacuum container, it has become possible to respond flexibly to the manufacturing process. Furthermore, since the fiber light guide and each optical feedthrough can be easily replaced, maintenance work can now be completed in a shorter time.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention focuses on sensor technology for logistics inside vacuum containers, especially technology using optical fibers. It is about technique.

0002

[Conventional technology]

A conventional optical feedthrough is a gas-tight seal on the vacuum vessel wall 1 as shown in FIGS. 3 and 4. The O-ring sealing material 5 for the glass plate 4 and the glass presser 8 are loaded. , a light propagation port was formed directly on the vacuum vessel wall 1. In addition, the atmospheric side light gas The side light guide cap holder 9 and the vacuum side light guide cap holder 10 are They were installed on the gas side A and the vacuum side B, respectively, and were integrally formed on the vacuum vessel wall 1.

0003

[Problem that the idea aims to solve]

For this reason, it had the following two drawbacks. First, the atmosphere side light guide base holder and the vacuum side light guide base holder are directly connected. Since it is installed on the wall of the contact container, the position of each cap holder must be adjusted correctly. Because of this, it was extremely difficult to align the axes of the installed light guides.

0004 The second is an optical feedthrough, which cannot be assembled into a single unit, so it can be manufactured easily. Parallel work is not possible during assembly during manufacturing. Also, due to fiber light guide It has the disadvantage that maintenance work takes time and it is difficult to recover quickly during maintenance. there was.

[0005]

[Means to solve the problem]

In order to solve the above problems, the present invention has developed an O-ring seal as shown in Figures 1 and 2. A glass plate assembly hermetically sealed with a seal material 5 is constructed independently of the vacuum container, Make sure that the axes of the atmosphere-side fiber and the vacuum-side fiber, which are installed in multiple numbers, are aligned. Atmospheric side light guide base holder and vacuum side light guide base holder that can be aligned. The above tasks can be accomplished by incorporating the It is an attempt to overcome the problem.

[0006]

[Effect]

By constructing an integrated structure of the above functional parts, the axis alignment of the light guide can be achieved. Because it is easy to install and can be configured independently from the vacuum container, parallel work with external setup is possible. In addition, it is possible to carry out advance work, and also to use fiber light guide light for maintenance work. Enables easy bulk replacement of feedthroughs and replacement of fiber light guides. It was.

[0007]

【Example】

Next, an embodiment of the present invention will be described using FIGS. 1 and 2. 2 is a vacuum container 1, an O-ring sealing material 3 for ensuring airtightness, and a glass plate 4 This is a base flange with an O-ring sealing material 5 installed to ensure airtightness. . The glass plate 4 has the outer periphery of both sides as fixed surfaces, and a base flange is provided between it and the base flange 2. A glass presser side protective sheet 7 is installed between the glass side protective sheet 6 and the glass presser foot 8. and is fixed to the base flange 2 by a glass presser 8. In other words, Gala A glass plate 4 is mounted on the base flange 2 to form a glass plate assembly. child Six fiber light guide bases 16 and 17 are installed on each glass plate assembly. The atmosphere side light guide base holder 9 is attached to the glass holder 8 on the atmosphere side A, and also on the vacuum side. The light guide cap holder 10 is fixed to the base flange 2 on the vacuum side B, and each function Parts are integrated.

[0008] Next, regarding the axis alignment of the light guides installed on the atmosphere side A and the vacuum side B. I will explain. As is clear from Figures 1 and 2, axis alignment is performed using the glass plate assembly. Make sure that the axes of the cap holders on the atmosphere side A and vacuum side B installed on both sides of the This can be achieved by matching the positions of the respective members in the circumferential direction. sand In other words, according to the above diagram, each member of the shaft core is composed of a pilot. Therefore, matching is easily possible, and circumferential alignment is done by aligning each member. This is made possible by the grooves 11, 12, 13, 14, and 15.

[0009] This allows alignment of the axes of the light guides installed on the atmosphere side A and the vacuum side B. This makes it possible to provide an optical feedthrough with an integrated structure that facilitates this.

0010

[Effect of the idea]

As explained above, the optical fiber has an integrated structure that makes it easy to align the axis of the light guide. By making the wire through, there is no need to align the shaft alignment, and the fiber light guide Setting the mode has become easier. In addition, since it is assembled as a single element independently of the vacuum container, parallel work during assembly and It has become possible to respond flexibly in manufacturing, such as by making it possible to perform line work.

[0011] Furthermore, it is easy to replace the fiber light guide and each optical feedthrough. This has the advantage that maintenance work associated with fiber light guides can be done in a short time. Two.

[Brief explanation of drawings]

FIG. 1 is a plan view showing an embodiment of the present invention.

FIG. 2 is a front sectional view showing an embodiment of the present invention.

FIG. 3 is a plan view showing a conventional example.

FIG. 4 is a front sectional view showing a conventional example.

[Explanation of symbols] 1 Vacuum container 2 Base flange 3 O-ring seal material 4 Glass plate 5 O-ring seal material 6 Base flange side protection sheet 7 Glass presser side protection sheet 8 Glass presser foot 9 Atmospheric side light guide base holder 10 Vacuum side light guide base holder 11 Positioning groove of vacuum side light guide cap holder 12 Base flange alignment groove 13 Base flange alignment groove 14 Glass presser positioning groove 15 Atmospheric side light guide cap holder alignment groove

──────────────────────────────────────────────── ─── Continuation of front page (72) Creator Yukiya Watanabe Seiko 6-31-1 Kameido, Koto-ku, Tokyo -Within Electronics Industry Co., Ltd. (72) Creator Tadashi Nakamura Seiko 6-31-1 Kameido, Koto-ku, Tokyo -Within Electronics Industry Co., Ltd.

Claims (1)

[Scope of utility model registration request] Claim 1: In an optical feedthrough in which signals are exchanged between the atmosphere side and the vacuum side of a vacuum container using an optical fiber, a glass plate is attached to a flange with a through hole formed in the center to cover the through hole. and a light guide base holder having an optical fiber light guide base provided with the glass plate sandwiched therebetween is arranged facing each other and attached to the flange, and this flange is attached to the window of the vacuum container. Feed through.