JPH0412650U - - Google Patents
Info
- Publication number
- JPH0412650U JPH0412650U JP5345490U JP5345490U JPH0412650U JP H0412650 U JPH0412650 U JP H0412650U JP 5345490 U JP5345490 U JP 5345490U JP 5345490 U JP5345490 U JP 5345490U JP H0412650 U JPH0412650 U JP H0412650U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- grooves
- case
- swinging
- vibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000013013 elastic material Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5345490U JPH0412650U (no) | 1990-05-22 | 1990-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5345490U JPH0412650U (no) | 1990-05-22 | 1990-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0412650U true JPH0412650U (no) | 1992-01-31 |
Family
ID=31574652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5345490U Pending JPH0412650U (no) | 1990-05-22 | 1990-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0412650U (no) |
-
1990
- 1990-05-22 JP JP5345490U patent/JPH0412650U/ja active Pending