JPH0412632U - - Google Patents

Info

Publication number
JPH0412632U
JPH0412632U JP5228190U JP5228190U JPH0412632U JP H0412632 U JPH0412632 U JP H0412632U JP 5228190 U JP5228190 U JP 5228190U JP 5228190 U JP5228190 U JP 5228190U JP H0412632 U JPH0412632 U JP H0412632U
Authority
JP
Japan
Prior art keywords
substrate
rotating shaft
terminal
holder
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5228190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH085548Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5228190U priority Critical patent/JPH085548Y2/ja
Publication of JPH0412632U publication Critical patent/JPH0412632U/ja
Application granted granted Critical
Publication of JPH085548Y2 publication Critical patent/JPH085548Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP5228190U 1990-05-18 1990-05-18 薄膜形成装置 Expired - Fee Related JPH085548Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5228190U JPH085548Y2 (ja) 1990-05-18 1990-05-18 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5228190U JPH085548Y2 (ja) 1990-05-18 1990-05-18 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPH0412632U true JPH0412632U (OSRAM) 1992-01-31
JPH085548Y2 JPH085548Y2 (ja) 1996-02-14

Family

ID=31572454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5228190U Expired - Fee Related JPH085548Y2 (ja) 1990-05-18 1990-05-18 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH085548Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH085548Y2 (ja) 1996-02-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees