JPH04122360U - moisture sensing element - Google Patents
moisture sensing elementInfo
- Publication number
- JPH04122360U JPH04122360U JP3513191U JP3513191U JPH04122360U JP H04122360 U JPH04122360 U JP H04122360U JP 3513191 U JP3513191 U JP 3513191U JP 3513191 U JP3513191 U JP 3513191U JP H04122360 U JPH04122360 U JP H04122360U
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- comb
- metal oxide
- humidity
- sensitive material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000463 material Substances 0.000 claims abstract description 24
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 24
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000000919 ceramic Substances 0.000 claims abstract description 13
- 239000011540 sensing material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920005596 polymer binder Polymers 0.000 description 1
- 239000002491 polymer binding agent Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
(57)【要約】
【目的】 湿度変化に対する抵抗値の変化が直線的で高
感度な感湿素子を提供するものである。
【構成】 セラミック基板１上に蛇行状に設けられた金
属酸化物系感湿材３に対し、棒状部分及び切欠部分を互
い違いに入り込ませることにより所定間隔が蛇行状に形
成される櫛形電極２を対向させて設けている。これによ
り、櫛形電極２及び金属酸化物系感湿材３の縁部が重な
って殆ど同一平面として形成され、櫛形電極２の電極間
抵抗が金属酸化物系感湿材３の抵抗値のみで定まり、湿
度−インピーダンス特性が向上する結果となる。
(57) [Summary] [Purpose] The present invention provides a highly sensitive moisture sensing element whose resistance value changes linearly with respect to humidity changes. [Structure] Comb-shaped electrodes 2 are formed in a meandering manner at predetermined intervals by inserting rod-shaped portions and cutout portions alternately into a metal oxide moisture-sensitive material 3 provided in a meandering manner on a ceramic substrate 1. They are placed facing each other. As a result, the edges of the comb-shaped electrode 2 and the metal oxide moisture-sensitive material 3 overlap to form almost the same plane, and the inter-electrode resistance of the comb-shaped electrode 2 is determined only by the resistance value of the metal oxide moisture-sensitive material 3. , resulting in improved humidity-impedance characteristics.
Description
【０００１】0001
本考案は、主として空調器や除湿器に具備され、室内の湿度をインピーダンス の変化により検出する抵抗式感湿素子に関する。 This invention is mainly installed in air conditioners and dehumidifiers, and is used to control indoor humidity using impedance. The present invention relates to a resistance type moisture sensing element that detects a change in temperature.
【０００２】0002
従来、栽培ハウス用の空調器や除湿器には、湿度の検出制御を高精度に行い得 る技術が要求されている。そこで、最近はこうした要求に応えるべく、これらの 機器に具備される種々の感湿素子が提案されている。その中でも、金属酸化物系 感湿材として、金属酸化物焼結体を感湿材料とする感湿素子の開発は数多い。こ うした感湿素子は、湿度（相対湿度）に対する抵抗（インピーダンス）値の変化 を感度として得るものである。 Conventionally, air conditioners and dehumidifiers for cultivation houses have been unable to detect and control humidity with high precision. technology is required. Therefore, in order to meet these demands, these Various moisture sensing elements for equipment have been proposed. Among them, metal oxides Many moisture-sensitive elements have been developed using metal oxide sintered bodies as moisture-sensitive materials. child The humidity sensing element detects changes in resistance (impedance) due to humidity (relative humidity). is obtained as the sensitivity.
【０００３】 図３は、このような感湿素子の構成を、その一部を破断して斜視により示すも のである。図示の如く、感湿素子は、アルミナ基板などのセラミック基板１の上 に、ＡｇＰｄ等で形成された櫛形電極２を例えばスクリーン印刷法によって印刷 ・焼成した後、櫛形電極２上にＡｌ2 Ｏ3 系，ＺｎＯ−Ｌｉ2 Ｏ−Ｖ2 Ｏ5 −Ｃ ｒ2 Ｏ3 系，ＭｇＣｒ2 Ｏ4 −ＴｉＯ2 系，ＭｎＯ−ＺｎＯ−ＣｕＯ−Ｆｅ2 Ｏ 3 系等の金属酸化物系感湿材３を更にスクリーン印刷法により印刷・焼成するこ とにより形成されている。0003 FIG. 3 shows the structure of such a moisture-sensitive element in a partially cutaway perspective view. It is. As shown in the figure, the moisture sensing element is mounted on a ceramic substrate 1 such as an alumina substrate. Then, a comb-shaped electrode 2 made of AgPd or the like is printed by, for example, a screen printing method. ・After firing, Al is placed on the comb-shaped electrode 2.2O3system, ZnO-Li2O-V2OFive-C r2O3system, MgCr2OFour-TiO2system, MnO-ZnO-CuO-Fe2O 3 Further, the metal oxide moisture sensitive material 3 such as It is formed by
【０００４】 ところで、櫛形電極２は、一対の櫛形電極片をそれらの櫛形部分とその切欠部 分とを互いに入り込ませ、各櫛形電極片が対向して所定間隔が置かれるようにセ ラミック基板１上に具備されている。その上で、セラミック基板１及び金属酸化 物系感湿材３が結合されている。即ち、感湿素子は、金属酸化物系感湿材の表面 抵抗値若しくはその湿度変化に伴う抵抗値の変化を各櫛形電極片の各電極端子間 から取り出すことで、室内の湿度を検出できるようになっている。0004 By the way, the comb-shaped electrode 2 consists of a pair of comb-shaped electrode pieces, their comb-shaped parts and their notches. and insert the comb-shaped electrode pieces into each other, and set them so that each comb-shaped electrode piece faces each other and is spaced at a predetermined distance. It is provided on a lamic substrate 1. On top of that, ceramic substrate 1 and metal oxide A physical moisture sensitive material 3 is combined. In other words, the moisture-sensitive element is a metal oxide moisture-sensitive material. The resistance value or the change in resistance value due to humidity change is measured between each electrode terminal of each comb-shaped electrode piece. By taking it out, it is possible to detect indoor humidity.
【０００５】[0005]
従来の感湿素子においては、感湿材料の表面抵抗が各櫛形電極片の間の抵抗（ 電極間抵抗）よりも大きいことから、湿度により感湿素子の抵抗値の変化率に差 が生じ、例えば低湿度側ではその抵抗値の変化率が小さくなっているのに対し、 高湿度側になるにつれて大きくカーブを描いて次第に変化率が大きくなるという 傾向がある。この為、湿度に対する抵抗値の変化が直線的にならず、抵抗値に基 づく湿度検出を要する各種機器の検出制御が行い難くなっている。 In conventional moisture-sensitive elements, the surface resistance of the moisture-sensitive material is equal to the resistance between each comb-shaped electrode piece ( (interelectrode resistance), the rate of change in the resistance value of the humidity sensing element differs depending on the humidity. occurs, and for example, the rate of change in resistance value is smaller on the low humidity side, The rate of change gradually increases as the humidity increases, forming a larger curve. Tend. For this reason, the change in resistance value with respect to humidity is not linear and is based on the resistance value. It is becoming difficult to control the detection of various types of equipment that require humidity detection.
【０００６】 本考案はかかる事情を鑑みなされたもので、その目的は、低湿度側と高湿度側 での抵抗値の変化率に差がなく、湿度変化に対する抵抗値の変化が直線的で高感 度な感湿素子を提供することにある。[0006] This invention was devised in view of the above circumstances, and its purpose is to There is no difference in the rate of change in resistance value, and the change in resistance value with respect to humidity changes is linear and highly sensitive. The purpose of the present invention is to provide a moisture-sensitive element with a high degree of humidity.
【０００７】[0007]
本考案によれば、棒状部分と切欠部分とをそれぞれ有する一対の櫛形電極片か ら成る櫛形電極に対し、棒状部分及び切欠部分を互い違いに入り込ませることに より、蛇行状の所定間隔が形成されるように各櫛形電極片を対向させて設けたセ ラミック基板と、湿度の変化によりインピーダンスが変化する感湿材料としての 金属酸化物系感湿材とを備えた感湿素子において、金属酸化物系感湿材を、所定 間隔に適合するようにセラミック基板上に設けた感湿素子が得られる。 According to the present invention, a pair of comb-shaped electrode pieces each having a rod-shaped portion and a notch portion are provided. By inserting the rod-shaped parts and the notched parts alternately into the comb-shaped electrode consisting of In this case, the comb-shaped electrode pieces are arranged facing each other so that a meandering predetermined interval is formed. Lamic substrate and moisture-sensitive material whose impedance changes with changes in humidity. In a moisture-sensing element equipped with a metal oxide-based moisture-sensitive material, the metal oxide-based moisture-sensitive material is A moisture sensitive element is obtained which is mounted on a ceramic substrate to match the spacing.
【０００８】[0008]
セラミック基板上に、互いに縁部が重なって殆ど同一平面として形成されるよ うに櫛形電極及び金属酸化物系感湿材を設けて感湿素子を構成している。これに より、櫛形電極の電極間抵抗が金属酸化物系感湿材の抵抗値のみで定まるように なる。 They are formed on a ceramic substrate so that their edges overlap each other and form almost the same plane. A comb-shaped electrode and a metal oxide moisture-sensitive material are provided to constitute a moisture-sensing element. to this Therefore, the interelectrode resistance of the comb-shaped electrode is determined only by the resistance value of the metal oxide moisture-sensitive material. Become.
【０００９】[0009]
以下に実施例を挙げ、本考案の感湿素子について詳細に説明する。図１（Ａ） 及び（Ｂ）は、本考案の感湿素子の構成を示すもので、同図（Ａ）は感湿素子の 分解図を示し、同図（Ｂ）は組み合わせ後の斜視図を示している。尚、感湿素子 の構成は、以下の生成過程を経て形成されるものである。 The moisture sensitive element of the present invention will be described in detail with reference to Examples below. Figure 1(A) and (B) show the structure of the humidity sensing element of the present invention, and (A) of the same figure shows the structure of the humidity sensing element of the present invention. An exploded view is shown, and the same figure (B) shows a perspective view after combination. In addition, the moisture sensing element The configuration is formed through the following generation process.
【００１０】 先ず、ＭｎＯ，ＺｎＯ，ＣｕＯ、Ｆｅ2 Ｏ3 等を混合し、仮焼粉砕して粒径１ μｍ以下のＭｎＯ−ＺｎＯ−ＣｕＯ−Ｆｅ2 Ｏ3 系の金属酸化物粉末を生成する 。 そして、この金属酸化物粉末に高分子結合剤や分散剤などを混入・分散して、金 属酸化物ペーストとする。First, MnO, ZnO, CuO, Fe 2 O 3 and the like are mixed and calcined and pulverized to produce MnO-ZnO-CuO-Fe 2 O 3 based metal oxide powder with a particle size of 1 μm or less. . Then, a polymer binder, a dispersant, etc. are mixed and dispersed in this metal oxide powder to form a metal oxide paste.
【００１１】 引き続き、アルミナからなるセラミック基板１の上に、ここで得られた金属酸 化物ペーストをスクリーン印刷法により図１（Ａ）に示すように、蛇行状に印刷 して、セラミック基板１上に金属酸化物系感湿材３を形成する。この金属酸化物 系感湿材３は、後述する棒状部分と切欠部分とをそれぞれ有する一対の櫛形電極 片から成る櫛形電極２において、棒状部分及び切欠部分を互い違いに入り込ませ ることにより形成される蛇行状の所定間隔に適合されるものである。[0011] Subsequently, the metal acid obtained here is placed on the ceramic substrate 1 made of alumina. The compound paste is printed in a serpentine shape as shown in Figure 1(A) using the screen printing method. Then, a metal oxide moisture sensitive material 3 is formed on the ceramic substrate 1. This metal oxide The humidity-sensitive material 3 includes a pair of comb-shaped electrodes each having a rod-shaped portion and a cutout portion, which will be described later. In the comb-shaped electrode 2 consisting of a piece, the rod-shaped portion and the notch portion are inserted alternately. It is adapted to a meandering predetermined interval formed by
【００１２】 更に、セラミック基板１上に、ＡｇＰｄペーストをスクリーン印刷法によって 一対の対向する櫛形に印刷して櫛形電極２を設ける。この場合、櫛形電極２は、 蛇行状の金属酸化物系感湿材３に適合されるように、上述した蛇行状の所定間隔 が形成されるように、セラミック基板１上に設けられる。結果として、櫛形電極 ２及び金属酸化物系感湿材料３は、互いに縁部が重なり、殆ど同一平面として形 成される。この上で、乾燥処理を行った後、温度８５０〜１０００℃にて２〜４ 時間焼成して、図１（Ｂ）に示すよう実施例の感湿素子を得る。0012 Furthermore, AgPd paste is applied on the ceramic substrate 1 by screen printing method. The comb-shaped electrodes 2 are provided by printing in a pair of opposing comb shapes. In this case, the comb-shaped electrode 2 is The above-mentioned meandering predetermined intervals are adapted to the meandering metal oxide moisture sensitive material 3. is provided on the ceramic substrate 1 so that it is formed. As a result, the comb-shaped electrode 2 and the metal oxide moisture-sensitive material 3 are shaped as almost the same plane with their edges overlapping each other. will be accomplished. After drying on this, 2 to 4 hours at a temperature of 850 to 1000°C. By baking for a period of time, a moisture sensitive element of the example as shown in FIG. 1(B) is obtained.
【００１３】 このようにして形成された感湿素子は、櫛形電極２及び金属酸化物系感湿材３ の縁部が重なって殆ど同一平面として形成され、櫛形電極２の電極間抵抗が金属 酸化物系感湿材３の抵抗値のみで定まるので、湿度−インピーダンス特性が向上 し、インピーダンス変化率が大きくなる。図２は、周波数１ｋＨｚ，室温２０℃ の条件下により本考案の感湿素子の湿度（％ＲＨ）−インピーダンス（Ω）特性 を測定し、従来のものに比較して示したものである。[0013] The moisture-sensitive element thus formed includes a comb-shaped electrode 2 and a metal oxide-based moisture-sensitive material 3. The edges of the comb-shaped electrodes 2 overlap to form almost the same plane, and the inter-electrode resistance of the comb-shaped electrode 2 is Since it is determined only by the resistance value of the oxide moisture sensitive material 3, the humidity-impedance characteristics are improved. However, the impedance change rate increases. Figure 2 shows a frequency of 1 kHz and a room temperature of 20°C. The humidity (%RH)-impedance (Ω) characteristics of the moisture-sensitive element of the present invention under the conditions of were measured and compared with the conventional one.
【００１４】 使用範囲Ｘでの比較から明らかなように、本考案の感湿素子Ａの場合、湿度変 化に伴うインピーダンス変化率が直線状にサイクルしているのに対し、従来の感 湿素子Ｂでは湿度上昇に対するインピーダンス変化率の低下が低湿度側では小さ く、高湿度側では大きくなってサイクルしている。このことは、本考案の感湿素 子Ａの方が従来の感湿素子Ｂよりもインピーダンス変化率が平均的に大きく、湿 度変化に対して安定的に高感度になることを意味している。[0014] As is clear from the comparison in the usage range X, in the case of the humidity sensing element A of the present invention, The rate of change in impedance due to In humidity element B, the decrease in impedance change rate due to increase in humidity is small on the low humidity side. On the high humidity side, it becomes larger and cycles. This means that the moisture sensitive material of the present invention The impedance change rate of element A is larger on average than that of conventional moisture sensing element B, and This means that it is stable and highly sensitive to changes in temperature.
【００１５】[0015]
以上のように、本考案によれば、湿度変化に対するインピーダンス変化率が直 線的に改善され、結果的に湿度変化に対して安定して高感度な感湿素子が提供さ れる。又、本考案の感湿素子は、セラミック基板上に互いの縁部が重なって殆ど 同一平面として形成される櫛形電極及び金属酸化物系感湿材を設けているので、 各部の結合力も充分に維持され、廉価に構成できるという長所がある。 As described above, according to the present invention, the impedance change rate with respect to humidity changes is The result is a moisture-sensitive element that is stable and highly sensitive to changes in humidity. It will be done. In addition, the moisture sensing element of the present invention is placed on a ceramic substrate with the edges almost overlapping each other. Since the comb-shaped electrode and the metal oxide moisture-sensitive material are formed on the same plane, It has the advantage that the bonding strength of each part is sufficiently maintained and can be constructed at a low cost.
【図面の簡単な説明】[Brief explanation of drawings]
【図１】本考案の感湿素子の構成を分解図及び組み合わ
せ後の斜視図により示したものである。FIG. 1 is an exploded view and an assembled perspective view of the structure of a moisture sensing device according to the present invention.
【図２】本考案の感湿素子の湿度−インピーダンス特性
を従来のものに比較して示したものである。FIG. 2 shows the humidity-impedance characteristics of the humidity sensing element of the present invention in comparison with a conventional one.
【図３】従来の感湿素子の構成を、その一部を破断して
示したものである。FIG. 3 is a partially cutaway view showing the configuration of a conventional moisture-sensitive element.
１ セラミック基板 ２ 櫛形電極 ３ 金属酸化物系感湿材 1 Ceramic substrate 2 Comb-shaped electrode 3 Metal oxide moisture sensitive material
Claims (1)
一対の櫛形電極片から成る櫛形電極に対し、前記棒状部
分及び切欠部分を互い違いに入り込ませることにより、
蛇行状の所定間隔が形成されるように前記各櫛形電極片
を対向させて設けたセラミック基板と、湿度の変化によ
りインピーダンスが変化する感湿材料としての金属酸化
物系感湿材とを備えた感湿素子において、前記金属酸化
物系感湿材は、前記所定間隔に適合するように前記セラ
ミック基板上に設けられたことを特徴とする感湿素子。1. By inserting the rod-like portions and the notch portions alternately into a comb-shaped electrode consisting of a pair of comb-shaped electrode pieces each having a rod-like portion and a notch portion,
A ceramic substrate in which each of the comb-shaped electrode pieces is provided facing each other so as to form a meandering predetermined interval, and a metal oxide moisture-sensitive material as a moisture-sensitive material whose impedance changes with changes in humidity. A moisture sensing element, wherein the metal oxide moisture sensing material is provided on the ceramic substrate so as to fit the predetermined spacing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3513191U JPH04122360U (en) | 1991-04-19 | 1991-04-19 | moisture sensing element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3513191U JPH04122360U (en) | 1991-04-19 | 1991-04-19 | moisture sensing element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04122360U true JPH04122360U (en) | 1992-11-02 |
Family
ID=31917371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3513191U Withdrawn JPH04122360U (en) | 1991-04-19 | 1991-04-19 | moisture sensing element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04122360U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0886752A (en) * | 1994-09-16 | 1996-04-02 | Res Dev Corp Of Japan | Humidity detecting material and method for detecting humidity |
| JPH1172438A (en) * | 1997-08-29 | 1999-03-16 | Agency Of Ind Science & Technol | Material for humidity detection and its production |
-
1991
- 1991-04-19 JP JP3513191U patent/JPH04122360U/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0886752A (en) * | 1994-09-16 | 1996-04-02 | Res Dev Corp Of Japan | Humidity detecting material and method for detecting humidity |
| JPH1172438A (en) * | 1997-08-29 | 1999-03-16 | Agency Of Ind Science & Technol | Material for humidity detection and its production |
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| JPH04238260A (en) | Humidity-sensitive element |
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| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19950713 |