JPH04118241A - Amplitude conversion actuator for ink jet printer head - Google Patents
Amplitude conversion actuator for ink jet printer headInfo
- Publication number
- JPH04118241A JPH04118241A JP23925890A JP23925890A JPH04118241A JP H04118241 A JPH04118241 A JP H04118241A JP 23925890 A JP23925890 A JP 23925890A JP 23925890 A JP23925890 A JP 23925890A JP H04118241 A JPH04118241 A JP H04118241A
- Authority
- JP
- Japan
- Prior art keywords
- weight part
- nozzle orifice
- piezoelectric element
- ink
- leaf spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 abstract description 5
- 238000013459 approach Methods 0.000 abstract description 2
- 230000010355 oscillation Effects 0.000 abstract 3
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 238000005323 electroforming Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明はインクジェット記録装置に係わるもので、特に
インク中に於て振動素子を駆動し、振幅変換アクチュエ
ーターでその振幅を伝達拡大させ、発生する圧力でノズ
ルオリフィスよりインクを吐出させて印字を行うインク
ジェットプリンタヘッド用の振幅変換アクチュエーター
に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an inkjet recording device, and in particular drives a vibrating element in ink, transmits and expands the amplitude using an amplitude conversion actuator, and generates an image. The present invention relates to an amplitude conversion actuator for an inkjet printer head that prints by ejecting ink from a nozzle orifice using pressure.
[従来の技術]
従来のインクジェットプリンタヘッドは、例えば特開平
1−186329号公報にみられるように、振動素子の
振動によって直接得られるインクの圧力変動により、ノ
ズルオリフィスからのインクを吐出するようになってい
た。[Prior Art] A conventional inkjet printer head ejects ink from a nozzle orifice using ink pressure fluctuations directly obtained by vibration of a vibration element, as seen in, for example, Japanese Unexamined Patent Publication No. 1-186329. It had become.
[発明が解決しようとする課題]
上述した従来のインクジェットプリンタヘッドは、振動
素子の振動によって直接的に得られるインクの圧力変動
によりインクを吐出するのに必要な圧力変動を得るため
には、振動素子の振幅を大きくする必要があった。[Problems to be Solved by the Invention] In the conventional inkjet printer head described above, in order to obtain the pressure fluctuations necessary to eject ink by the pressure fluctuations of the ink directly obtained by the vibration of the vibration element, it is necessary to use vibrations. It was necessary to increase the amplitude of the element.
このため、振動素子には大きな電圧を印加しなければな
らず、その駆動回路や電気絶縁対策が複雑化するという
問題があった。For this reason, a large voltage must be applied to the vibrating element, posing the problem of complicating its drive circuit and electrical insulation measures.
本発明の目的は、このような従来技術の問題点を解決し
、振動素子の振幅を伝達拡大する事により、小さな駆動
電圧でインク吐出させる事のできるインクジェットプリ
ンタヘッド用振幅変換アクチュエーターを提供すること
にある。An object of the present invention is to solve the problems of the prior art and provide an amplitude conversion actuator for an inkjet printer head that can eject ink with a small drive voltage by transmitting and expanding the amplitude of the vibration element. It is in.
[課題を解決するための手段]
本発明のインクジェットプリンタヘッド用振幅変換アク
チュエーターは、ヘッドに固定される基部と、この基部
と一体的に形成された板バネ部と、この板バネの先端部
分に形成され、前記振動素子とノズルオリフィスとの間
にあって振動素子に当接する重り部とを有する事を特徴
とする。[Means for Solving the Problems] The amplitude conversion actuator for an inkjet printer head of the present invention includes a base portion fixed to the head, a leaf spring portion integrally formed with the base portion, and a tip portion of the leaf spring. A weight portion is formed between the vibrating element and the nozzle orifice and abuts the vibrating element.
[作用コ
本発明の上記の構成によれば振動素子の変位速度を活用
し振動の伝達を行う原理から、振動素子の微少な変位(
衝撃力)が振幅変換アクチュエーターの大きな変位(衝
撃力を受けての移動)に変換される。したがって振動素
子に印加される電圧が小さくても、振幅変換アクチュエ
ーターの重り部は大きく振動することとなる。そして、
重り部は振動素子とノズルオリフィスとの間で振動する
ので、この振動によるインク圧力変動で、インクがノズ
ルオリフィスから吐出する。すなわち、本発明によれば
、小さな駆動電圧でインクが吐出することになる。[Operation] According to the above structure of the present invention, due to the principle of transmitting vibration by utilizing the displacement speed of the vibrating element, minute displacement of the vibrating element (
impact force) is converted into a large displacement (movement in response to impact force) of the amplitude conversion actuator. Therefore, even if the voltage applied to the vibration element is small, the weight portion of the amplitude conversion actuator will vibrate greatly. and,
Since the weight part vibrates between the vibrating element and the nozzle orifice, the ink pressure changes due to this vibration, and ink is ejected from the nozzle orifice. That is, according to the present invention, ink is ejected with a small driving voltage.
[実施例]
以下本発明のインクジェットプリンタヘッド用振幅変換
アクチュエーターの構造及び特徴を図面に従って説明す
る。[Example] The structure and features of the amplitude conversion actuator for an inkjet printer head of the present invention will be described below with reference to the drawings.
第1図は本発明によるインクジェットプリンタヘッド用
振幅変換アクチュエーターの一実施例を示す平面図であ
る。振幅変換アクチュエーター1は第5図にも示すよう
にヘッドHに固定されている基部1dと、この基部1d
と一体的に形成された板バネ部1aと、この板バネ部の
先端部分に形成され、振動素子2とノズルオリフィス3
aとの間にあって振動素子2に当接する重り部1bとを
有している。重り部1bは、インク加圧面としての役割
を果たし、基部1dは複数本ある板バネ部1aの共通支
持部としての役割を果たす。1e及び1fは基部1dを
ヘッドのケーシング材として5に固定する際の位置決め
用の孔である。FIG. 1 is a plan view showing an embodiment of an amplitude conversion actuator for an inkjet printer head according to the present invention. As shown in FIG. 5, the amplitude conversion actuator 1 includes a base 1d fixed to the head H, and a base 1d
A leaf spring part 1a is integrally formed with the vibration element 2 and the nozzle orifice 3 formed at the tip of the leaf spring part.
a, and a weight portion 1b that is in contact with the vibrating element 2. The weight portion 1b serves as an ink pressurizing surface, and the base portion 1d serves as a common support portion for the plurality of leaf spring portions 1a. 1e and 1f are holes for positioning when fixing the base 1d to 5 as a casing material of the head.
第2図(ア)(イ)(つ)は振幅変換アクチュエーター
の板バネ部1a及び重り部1bの詳細平面図で、それぞ
れ振動時のインク抵抗を低減する為の形状の例を示した
ものである。Figures 2 (A), (B), and (2) are detailed plan views of the leaf spring portion 1a and weight portion 1b of the amplitude conversion actuator, each showing an example of the shape to reduce ink resistance during vibration. be.
(ア)に示したものは、板バネ部1aにスリット6を設
けてインク抵抗の低減を図ったものである。The one shown in (A) is designed to reduce ink resistance by providing a slit 6 in the plate spring portion 1a.
(イ)に示すものは、板バネ部1aの幅をできるだけ小
さくして、インク抵抗の低減を図ったものである。In the case shown in (a), the width of the leaf spring portion 1a is made as small as possible to reduce the ink resistance.
(つ)に示すものは、板バネ部1aに複数の孔7を開け
ることにより、インク抵抗の低減を図ったものである。The one shown in (1) is designed to reduce ink resistance by forming a plurality of holes 7 in the plate spring portion 1a.
第3図は第2図に示した振幅変換アクチュエーターの重
り部1bを示す詳細断面図であり、振動素子2と振幅変
換アクチュエーター1との接触に於て、インクの介在に
よる振動伝達不良を抑制する為に、重り部1bの、振動
素子との接触面を突起させた例を示すものである。(ア
)、(イ)に示すものは、それぞれ電鋳法によって形成
した例であり、(ア)に示すものは、突起部1cがRに
なっており、(イ)に示すものは、突起部1cが(ア)
と逆Rになっている。FIG. 3 is a detailed sectional view showing the weight part 1b of the amplitude conversion actuator shown in FIG. Therefore, an example is shown in which the contact surface of the weight portion 1b with the vibration element is protruded. The ones shown in (A) and (B) are examples formed by electroforming, respectively. In the one shown in (A), the protrusion 1c is rounded, and in the one shown in (B), the protrusion Part 1c is (a)
It is a reverse R.
なお第2図に示した板バネ部1aの形状と第3図に示し
た重り部1bの形状の組合せは自由に選択できる。Note that the combination of the shape of the leaf spring portion 1a shown in FIG. 2 and the shape of the weight portion 1b shown in FIG. 3 can be freely selected.
第4図(i ) 〜(iii )及び(I)〜(ILI
)ハ第3図に示した形状の重り部1bを作成する製造工
程例を示すもので、電鋳法で示す。電鋳法は等方的に成
長する事を前提に説明する。(i)図において、aは導
電部材で、レジスト材すにより選択的に導電層が露出し
ている。そこでメツキ処理するとCの析出層ができる。Figure 4 (i) - (iii) and (I) - (ILI
) This shows an example of the manufacturing process for creating the weight portion 1b having the shape shown in FIG. 3, and is shown using an electroforming method. The electroforming method will be explained on the assumption that it grows isotropically. (i) In the figure, a is a conductive member, and the conductive layer is selectively exposed by the resist material. Therefore, when plating is performed, a precipitated layer of C is formed.
次に(ii )図に示すように、前記(i)図に示した
析出層Cの表面にレジスト材dを用いて選択的に導電層
(析出層C)を露出させる。そこで再度メツキ処理する
と斜線部eの部材が形成できる。その4F−(iii
)図に示すように、前記(11)図に示した斜線部eを
各々剥離することにより、第3図(イ)に示した形状の
重り部1bが得られる。同様に(I)121において、
aは導電部材で、レジスト材すにより選択的に導電層が
露出している。そこでメツキ処理するとCの析出層がで
きる。次いで(II)図に示すように、前記(I)図に
示したレジスト材すを除去し、再度レジスト材dを用い
て選択的に導電層を露出させる。そこで再度メツキ処理
すると斜線部eの部材が形成できる。その7!(III
)図に示すように、前記(II )図に示した斜線部e
を各々剥離することにより、第3図(ア)に示した形状
の重り部1bが得られる。Next, as shown in Figure (ii), a resist material d is used to selectively expose the conductive layer (deposited layer C) on the surface of the deposited layer C shown in Figure (i). Then, by performing the plating process again, the member shown in the shaded area e can be formed. That 4F-(iii
) As shown in the figure, the weight part 1b having the shape shown in FIG. 3(a) is obtained by peeling off the shaded parts e shown in the above-mentioned figure (11). Similarly, in (I) 121,
A is a conductive member, and a conductive layer is selectively exposed by a resist material. Therefore, when plating is performed, a precipitated layer of C is formed. Next, as shown in Figure (II), the resist material shown in Figure (I) is removed, and the conductive layer is selectively exposed using resist material d again. Then, by performing the plating process again, the member shown in the shaded area e can be formed. Part 7! (III
) As shown in the figure, the shaded area e shown in the above (II) figure
By peeling off each of them, a weight portion 1b having the shape shown in FIG. 3(A) is obtained.
第5図は第1図に示した振幅変換アクチュエーターを用
いたインクジェットヘッドの一例を示した部分断面図で
ある。振幅変換アクチュエーター1は、その基部1dが
ヘッドケーシング5に固定され、重り部1bの突起1c
が、振動素子である圧電素子2の端面2aに接している
。3はノズルプレートでノズルオリフィス3aを有して
いる。FIG. 5 is a partial sectional view showing an example of an inkjet head using the amplitude conversion actuator shown in FIG. The amplitude conversion actuator 1 has a base portion 1d fixed to the head casing 5, and a protrusion 1c of the weight portion 1b.
is in contact with the end surface 2a of the piezoelectric element 2, which is a vibrating element. 3 is a nozzle plate having a nozzle orifice 3a.
4はインクである。4 is ink.
第5図の構成に於て圧電素子2にパルスが印加されると
、立ち上がりパルスで圧電素子2が伸びる圧電素子だと
すると、圧電素子2が急峻に伸び、その端面2aによっ
て、振幅変換アクチュエーターの重り部1bが押されて
ノズルオリフィス3aに接近する。ここで立ち下がりパ
ルスが印加されると圧電素子2の伸びが縮みへと反転す
る、しかし重り部1bは、ノズルオリフィス方向への動
きが圧電素子2によって拘束されていない為、板バネ部
1aのバネ性と、重り部1bのウェイトとの関係から成
る周期によって、ノズルオリフィス3aに更に接近し、
ノズルプレート3に接した所で速度が0になる。次に重
り部1bは、板バネ部1aのバネ性によって復帰行程へ
移り、圧電素子2の端面2aと接して初期状態となる。When a pulse is applied to the piezoelectric element 2 in the configuration shown in FIG. 5, if the piezoelectric element 2 is a piezoelectric element that expands at the rising pulse, the piezoelectric element 2 will expand steeply, and its end surface 2a will cause the weight part of the amplitude conversion actuator to 1b is pushed and approaches the nozzle orifice 3a. When a falling pulse is applied here, the expansion of the piezoelectric element 2 is reversed to contraction.However, since the movement of the weight part 1b toward the nozzle orifice is not restrained by the piezoelectric element 2, the plate spring part 1a Due to the cycle formed by the relationship between the springiness and the weight of the weight portion 1b, the nozzle orifice 3a is further approached.
The speed becomes 0 at the point where it touches the nozzle plate 3. Next, the weight portion 1b moves to a return stroke due to the springiness of the leaf spring portion 1a, and comes into contact with the end surface 2a of the piezoelectric element 2 to be in the initial state.
これらの動きの振動によって圧力が発生し、ノズルオリ
フィス3aよりインク4がインク滴として吐出する。The vibrations of these movements generate pressure, and the ink 4 is ejected as ink droplets from the nozzle orifice 3a.
これらの運動の中で重り部1bがノズルプレート3より
復帰し、圧電素子2に接する際に、圧電素子2の端面2
aとの間にインク4が介在すると、良好な接触にとって
障害となる。そこで第3図に示したように、重り部1b
の、圧電素子2の端面2aとの接触面に、突起部1cを
設ける事により、接触面積を少なくし、押し付は力を増
加させる事で介在するインクを排除する事ができる。During these movements, the weight portion 1b returns from the nozzle plate 3 and when it comes into contact with the piezoelectric element 2, the end surface 2 of the piezoelectric element 2
If the ink 4 is present between the contact point and the contact point a, it becomes an obstacle to good contact. Therefore, as shown in FIG.
By providing the protrusion 1c on the contact surface with the end surface 2a of the piezoelectric element 2, the contact area can be reduced and the intervening ink can be removed by increasing the pressing force.
また、振幅変換アクチュエーターlがインク中で振動す
る為、インクの抵抗が大きいと、振動の減衰が生じて、
所定の振幅を得る事に障害となる。Also, since the amplitude conversion actuator l vibrates in the ink, if the resistance of the ink is large, the vibration will be attenuated.
This becomes an obstacle to obtaining a predetermined amplitude.
そこで、第2図に示したように振幅変換アクチュエータ
ー1のインク加圧面(すなわち重り部1b)の表面積よ
りも板バネ部1aの表面積を小さくする事で、振幅変換
アクチュエーターの振動減衰を最小限にとどめ、安定し
た振動特性を実現し、良好な印字品質を得る事ができる
。Therefore, as shown in FIG. 2, by making the surface area of the leaf spring part 1a smaller than the surface area of the ink pressurizing surface (i.e., the weight part 1b) of the amplitude conversion actuator 1, the vibration damping of the amplitude conversion actuator can be minimized. It is possible to achieve stable vibration characteristics and obtain good printing quality.
[発明の効果]
本発明によれば、振幅変換アクチュエーターによって振
動素子の変位速度を活用し、振動素子の振幅を伝達拡大
することにより、小さな駆動電圧でインク吐出させるこ
とができる。[Effects of the Invention] According to the present invention, ink can be ejected with a small drive voltage by utilizing the displacement speed of the vibrating element using the amplitude conversion actuator and transmitting and expanding the amplitude of the vibrating element.
第1図は本発明に係わるインクジェットプリンタヘッド
用振幅変換アクチュエーターの一実施例を示す平面図、
第2図(ア)(イ)(つ)はそれぞれ変形例を示す部分
平面図、第3図(ア)(イ)はそれぞれ変形例を示す部
分側断面図、第4図(i)〜(iii )及び(I)〜
(III)は第3図(ア)(イ)に示したものの製造工
程図、第5図は本発明に係わる振幅変換アクチュエータ
ーを用いたヘッドの要部断面図である。
1−振幅変換アクチュエーター
1a−板バネ部
1b−重り部
IC−突起部
1d−基部
1e、1f−アクチュエーターの位置決め孔2−振動素
子
3−ノズルプレート
3a−ノズルオリフィス
4−インク
以上
出願人 セイコーエプソン株式会社
代理人 弁理士 鈴木喜三部 他−名
(ア)
(イ)
(つ)
第2吋
b
第5図FIG. 1 is a plan view showing an embodiment of an amplitude conversion actuator for an inkjet printer head according to the present invention;
2(A), 2(B), and 2 are partial plan views showing modified examples, FIGS. 3(A) and 3(B) are partial side sectional views showing modified examples, and FIGS. 4(i) to 4(i). iii) and (I)~
(III) is a manufacturing process diagram of the components shown in FIGS. 3(A) and 3(B), and FIG. 5 is a sectional view of a main part of a head using the amplitude conversion actuator according to the present invention. 1 - Amplitude conversion actuator 1a - Leaf spring part 1b - Weight part IC - Protrusion part 1d - Base parts 1e, 1f - Actuator positioning hole 2 - Vibration element 3 - Nozzle plate 3a - Nozzle orifice 4 - Ink and above Applicant Seiko Epson Co., Ltd. Company agent Patent attorney Kizobe Suzuki and others (A) (B) (T) 2nd B Figure 5
Claims (1)
プリンタヘッドに用いられる振動素子の振幅を拡大する
ための振幅変換アクチュエーターであって、ヘッドに固
定される基部と、この基部と一体的に形成された板バネ
部と、この板バネの先端部分に形成され、前記振動素子
とノズルオリフィスとの間にあって振動素子に当接する
重り部とを有する事を特徴とする、インクジェットプリ
ンタヘッド用振幅変換アクチュエーター。An amplitude conversion actuator for enlarging the amplitude of a vibration element used in an inkjet printer head that ejects ink from a nozzle orifice, the actuator comprising a base fixed to the head, a leaf spring part integrally formed with the base. An amplitude conversion actuator for an inkjet printer head, comprising: a weight portion formed at the tip of the leaf spring, located between the vibrating element and the nozzle orifice, and abutting the vibrating element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23925890A JPH04118241A (en) | 1990-09-10 | 1990-09-10 | Amplitude conversion actuator for ink jet printer head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23925890A JPH04118241A (en) | 1990-09-10 | 1990-09-10 | Amplitude conversion actuator for ink jet printer head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04118241A true JPH04118241A (en) | 1992-04-20 |
Family
ID=17042089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23925890A Pending JPH04118241A (en) | 1990-09-10 | 1990-09-10 | Amplitude conversion actuator for ink jet printer head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04118241A (en) |
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US6776476B2 (en) | 1997-07-15 | 2004-08-17 | Silverbrook Research Pty Ltd. | Ink jet printhead chip with active and passive nozzle chamber structures |
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US6834939B2 (en) | 2002-11-23 | 2004-12-28 | Silverbrook Research Pty Ltd | Micro-electromechanical device that incorporates covering formations for actuators of the device |
US6880918B2 (en) | 1997-07-15 | 2005-04-19 | Silverbrook Research Pty Ltd | Micro-electromechanical device that incorporates a motion-transmitting structure |
US6880914B2 (en) | 1997-07-15 | 2005-04-19 | Silverbrook Research Pty Ltd | Inkjet pagewidth printer for high volume pagewidth printing |
US6886917B2 (en) | 1998-06-09 | 2005-05-03 | Silverbrook Research Pty Ltd | Inkjet printhead nozzle with ribbed wall actuator |
US6886918B2 (en) | 1998-06-09 | 2005-05-03 | Silverbrook Research Pty Ltd | Ink jet printhead with moveable ejection nozzles |
US6916082B2 (en) | 1997-07-15 | 2005-07-12 | Silverbrook Research Pty Ltd | Printing mechanism for a wide format pagewidth inkjet printer |
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