JPH04113057U - contact angle measuring device - Google Patents
contact angle measuring deviceInfo
- Publication number
- JPH04113057U JPH04113057U JP1571991U JP1571991U JPH04113057U JP H04113057 U JPH04113057 U JP H04113057U JP 1571991 U JP1571991 U JP 1571991U JP 1571991 U JP1571991 U JP 1571991U JP H04113057 U JPH04113057 U JP H04113057U
- Authority
- JP
- Japan
- Prior art keywords
- microscope
- stage
- contact angle
- sample
- droplet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 239000000523 sample Substances 0.000 description 25
- 238000010586 diagram Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- DLKQHBOKULLWDQ-UHFFFAOYSA-N 1-bromonaphthalene Chemical compound C1=CC=C2C(Br)=CC=CC2=C1 DLKQHBOKULLWDQ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000012488 sample solution Substances 0.000 description 2
- 239000012085 test solution Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
(57)【要約】
【目的】ステージ面より大きい試料11のどの場所に滴
下された液滴12でも、接触角の測定出来る。
【構成】顕微鏡2の対物レンズ外の光路中に反射鏡10
aを固定する顕微鏡台と基台との間に互いに摺動し合う
案内面を設け、この顕微鏡台を光軸を同一し、光路内を
移動するように反射鏡移動機構7を設け、対物レンズと
液滴12との間を広げたものである。
(57) [Summary] [Purpose] It is possible to measure the contact angle of a droplet 12 dropped anywhere on a sample 11 that is larger than the stage surface. [Configuration] A reflector 10 is placed in the optical path outside the objective lens of the microscope 2.
A guide surface that slides on each other is provided between the microscope table and the base for fixing the microscope table, and a reflecting mirror moving mechanism 7 is provided so that the microscope table has the same optical axis and moves within the optical path, and the objective lens The distance between the droplet 12 and the droplet 12 is widened.
Description
【0001】0001
本考案は、静止液体の自由表面が固定壁に接する場所で液面と固体面となす接 触角を測定する接触角測定装置に関する。 The present invention is based on the contact between the liquid surface and the solid surface at the location where the free surface of the stationary liquid touches the fixed wall. The present invention relates to a contact angle measuring device that measures antennae.
【0002】0002
図2は従来の一例を示す接触角測定装置の部分破断側面図、図3は図2の直読 ゴニオメータ付接触レンズの視野内を示す図である。従来、この種の接触角測定 装置は図2に示すように、液体が滴下されてなる液滴12を乗せる試料1を載置 するステージ3と、このステージ3を上下・左右・前後移動させる移動機構4, 5,6と、液滴12を含む試料11及びステージを包む箱型形状の試料台9と、 試料11に光を投光する光源部8と、試料11面及び液滴12より透過する光を 反射鏡10aを介して入光し、試料11及び液滴12を観察する直読ゴニオメー タ付接眼レンズ1をもつ顕微鏡2とを有している。 Figure 2 is a partially cutaway side view of a contact angle measuring device showing a conventional example, and Figure 3 is a direct reading of Figure 2. FIG. 3 is a diagram showing the inside of the field of view of a contact lens with a goniometer. Traditionally, this type of contact angle measurement As shown in Figure 2, the device places a sample 1 on which a droplet 12 of liquid is placed. a stage 3, a moving mechanism 4 that moves the stage 3 up and down, left and right, and back and forth; 5, 6, a box-shaped sample stage 9 that encloses the sample 11 containing the droplet 12 and the stage; A light source unit 8 that emits light onto the sample 11, and a light source unit 8 that emits light onto the sample 11 and the light that passes through the sample 11 surface and the droplet 12. A direct reading goniometer that receives light through a reflecting mirror 10a and observes the sample 11 and droplets 12. The microscope 2 has an eyepiece lens 1 with a tab.
【0003】 この接触角測定装置を用いて試料に対する薬液の接触角の測定に際しては以下 のように行なっていた。まず、ウェーハ等の試料を規定内の大きさに切断し、試 料台9のステージ3に充填する。次に、例えば、α−ブロムナフタレン等の試料 液を試料台9の液滴下口よりマイクロピペットを用いて滴下する。試料液を滴下 し、液滴12を作成する。次に、ステージ3上下及び左右移動装置5,6および 顕微鏡2の微動機構で液滴12に焦点を合わせる。0003 When measuring the contact angle of a chemical solution on a sample using this contact angle measuring device, please follow the steps below. It was done like this. First, cut a sample such as a wafer into a specified size and test it. Fill stage 3 of feed tray 9. Next, for example, a sample such as α-bromnaphthalene The liquid is dropped from the droplet opening of the sample stage 9 using a micropipette. Drop the sample solution Then, a droplet 12 is created. Next, stage 3 vertical and horizontal moving devices 5, 6 and The fine movement mechanism of the microscope 2 focuses on the droplet 12.
【0004】 次に、図3に示すように、直読ゴニオメータの下線部を液滴12と試料11と の界面に合わせ、矢印に示すように、可動スケールダイヤルを動かして、液滴1 2と試料11の接触点における可動スケールにより引くことができる接線と液滴 12と試料11との界面とでなす接触角を読み取る。0004 Next, as shown in FIG. Move the movable scale dial as shown by the arrow to align with the interface of droplet 1. The tangent line and droplet that can be drawn by the movable scale at the point of contact between 2 and sample 11 12 and the interface between sample 11 is read.
【0005】 このように試液と試料における接触角を求めて、試料に対する試液の表面張力 を算出ていた。[0005] In this way, by determining the contact angle between the test solution and the sample, the surface tension of the test solution with respect to the sample can be calculated. was calculated.
【0006】[0006]
図4は図2の接触角測定装置の光路を示す図である。上述した従来の接触角測 定装置では、その光路は、図4に示すように液滴の観察時の被写体から対物レン ズまでの光路長はl1+l2である。従って、ステージ3の外形寸法の大きい試 料に液滴12を滴下した場合、ステージを移動し、液滴12が液滴12aに近づ けて、焦点を合せる必要がある。しかしながら、ステージの移動に伴い、試料1 1も2点鎖線に示すように移動し、反射鏡10aに衝突し、液滴12に焦点を合 すことが出来ない問題がある。また、この対策として、ステージの移動範囲を大 きくすれば解決するが、装置自体が大きくなるという欠点がある。 FIG. 4 is a diagram showing the optical path of the contact angle measuring device of FIG. 2. Conventional contact angle measurement mentioned above In the fixed device, the optical path is from the object when observing the droplet to the objective lens, as shown in Figure 4. The optical path length to the lens is l1+l2. Therefore, stage 3 samples with large external dimensions When the droplet 12 is dropped onto the material, the stage is moved so that the droplet 12 approaches the droplet 12a. You need to focus. However, as the stage moves, sample 1 1 also moves as shown by the two-dot chain line, collides with the reflecting mirror 10a, and focuses on the droplet 12. There is a problem that cannot be solved. In addition, as a countermeasure to this, the range of movement of the stage has been increased. This can be solved by listening, but the problem is that the device itself becomes larger.
【0007】 本考案の目的は、かかる欠点を解消すべく、汎用性のある接触角測定装置を提 供することである。[0007] The purpose of this invention is to provide a versatile contact angle measuring device in order to eliminate such drawbacks. It is to provide.
【0008】[0008]
本考案の接触角測定装置は、試料を載置するステージと、ステージに滴下され る液滴を観察する直読ゴニオメータ付き顕微鏡と、ステージを左右・前後移動さ せる移動機構と、前記顕微鏡の対物レンズ外の光路中にあって固定配置される反 射鏡とを有する接触角測定装置において、前記反射鏡を光軸を変えずに光路方向 に移動させる反射鏡移動機構を備えている。 The contact angle measuring device of this invention has a stage on which the sample is placed, and a stage where a drop is placed on the stage. A microscope with a direct-reading goniometer is used to observe droplets, and a stage that can be moved from side to side and back and forth. a moving mechanism that moves the microscope, and a reflection mechanism that is fixedly placed in the optical path outside the objective lens of the microscope. In a contact angle measuring device having a reflecting mirror, the reflecting mirror is moved in the optical path direction without changing the optical axis. It is equipped with a reflector moving mechanism that moves the reflector.
【0009】[0009]
次に、本考案について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
【0010】 図1は本考案の一実施例を示す接触角測定装置の部分破断側面図である。この 接触角測定装置は、同図に示すように、反射鏡10aが固定される顕微鏡台を移 動させる反射鏡移動機構7を設けたことである。0010 FIG. 1 is a partially cutaway side view of a contact angle measuring device showing an embodiment of the present invention. this As shown in the figure, the contact angle measuring device is constructed by moving the microscope table on which the reflecting mirror 10a is fixed. This is because a reflecting mirror moving mechanism 7 is provided to move the reflecting mirror.
【0011】 この反射鏡移動機構7は基台側にあり溝を形成し、顕微鏡台の下面にあり溝に 摺動する突出部を設け、この突出部にナット14を取付け、このナット14に歯 合う送りねじ13の一端に調整ノブを取付け、基台より露光させたことである。[0011] This reflector moving mechanism 7 is located on the base side and forms a groove, and is located on the underside of the microscope stage and forms a groove. A sliding protrusion is provided, a nut 14 is attached to this protrusion, and teeth are attached to this nut 14. An adjustment knob was attached to one end of the matching feed screw 13 and exposed from the base.
【0012】 次に、この接触角測定装置の動作を説明する。まず、ステージ3に試料11を 乗せる。次に、マイクロピヘットにより試料液であるα−ブロモナフタレンを試 料台9の穴より滴下する。次に、左右移動機構5により、試料11の端面が顕微 鏡台に接する位置に移動する。次に、顕微鏡2を覗きながら、反面鏡10aが取 り付けられる顕微鏡台を移動し、焦点を合せる。このとき、反射鏡10aは10 bの位置に来るので、試料11が顕微鏡台に衝突することはない。0012 Next, the operation of this contact angle measuring device will be explained. First, sample 11 is placed on stage 3. I'll ride it. Next, test the sample solution α-bromonaphthalene using a micropichet. It drips from the hole in the tray 9. Next, the end face of the sample 11 is moved under the microscope by the left-right moving mechanism 5. Move it to a position where it touches the mirror stand. Next, while looking through the microscope 2, remove the reverse mirror 10a. Move the microscope table attached to the camera and adjust the focus. At this time, the reflecting mirror 10a is 10 Since it comes to the position b, the sample 11 will not collide with the microscope table.
【0013】 また、図面には示さないが、この顕微鏡台を反射鏡取付部と分離し、この分離 された部分に互いに上下方向に案内する案内機構と、分離された顕微鏡部を上下 駆動出来る機構を設ければ、顕微鏡の対物レンズと液滴間の距離を広げることが 出来るので、大形の試料に滴下された液滴に焦点を合すことができる。[0013] Although not shown in the drawing, this microscope table can be separated from the reflector mounting section, and this separation A guide mechanism that guides the separated parts vertically and a guide mechanism that guides the separated microscope parts vertically. If you provide a mechanism that can drive it, you can increase the distance between the microscope objective lens and the droplet. Therefore, it is possible to focus on a droplet dropped on a large sample.
【0014】[0014]
以上説明したように本考案は、対物レンズと同一光路中にある反射鏡を光路方 向に移動させる移動機構を設けることによって、ステージ面より大きい試料のい ずれの場所に滴下された液滴でも対物レンズの焦点範囲内に液滴を移動すること が出来るので、ステージ面より大きい試料と液滴との接触角の測定が出来る接触 角測定装置が得られるという効果がある。 As explained above, the present invention uses a reflector located in the same optical path as the objective lens in the optical path. By providing a movement mechanism that moves the sample in the direction, it is possible to Even if the droplet is dropped at a misaligned location, the droplet can be moved within the focal range of the objective lens. This makes it possible to measure the contact angle between a sample larger than the stage surface and a droplet. This has the effect of providing an angle measuring device.
【図1】本考案の一実施例を示す接触角測定装置の部分
破断面図である。FIG. 1 is a partially cutaway sectional view of a contact angle measuring device showing an embodiment of the present invention.
【図2】従来の一例を示す接触角測定装置の部分破断側
面図である。FIG. 2 is a partially cutaway side view of a contact angle measuring device showing a conventional example.
【図3】図2の直読ゴニオメータ付接触レンズの視野内
を示す図である。FIG. 3 is a diagram showing the inside of the field of view of the contact lens with direct reading goniometer shown in FIG. 2;
【図4】図2の接触角測定装置の光路を示す図である。FIG. 4 is a diagram showing an optical path of the contact angle measuring device of FIG. 2;
1 直読ゴニオメータ付接触レンズ 2 顕微鏡 3 ステージ 4 前後移動機構 5 左右移動機構 6 上下移動機構 7 反射鏡移動機構 8 光源部 9 試料台 10a,10b 反射鏡 11 試料 12,12a 液滴 13 送りねじ 14 ナット 1 Contact lens with direct reading goniometer 2 Microscope 3 stage 4 Back and forth movement mechanism 5 Left and right movement mechanism 6 Vertical movement mechanism 7 Reflector moving mechanism 8 Light source section 9 Sample stand 10a, 10b reflecting mirror 11 Sample 12, 12a droplet 13 Feed screw 14 Nut
Claims (1)
滴下される液滴を観察する直読ゴニオメータ付き顕微鏡
と、ステージを左右・前後移動させる移動機構と、前記
顕微鏡の対物レンズ外の光路中にあって固定配置される
反射鏡とを有する接触角測定装置において、前記反射鏡
を光軸を変えずに光路方向に移動させる反射鏡移動機構
を備えることを特徴とする接触角測定装置。Claim 1: A stage on which a sample is placed, a microscope with a direct-reading goniometer for observing droplets dropped onto the stage, a movement mechanism for moving the stage left and right and back and forth, and a microscope equipped with a microscope equipped with a microscope equipped with a direct-reading goniometer for observing droplets dropped on the stage, a moving mechanism for moving the stage left and right and back and forth, and a microscope in the optical path outside the objective lens of the microscope. What is claimed is: 1. A contact angle measuring device having a reflecting mirror fixedly arranged therein, the contact angle measuring device comprising a reflecting mirror moving mechanism for moving the reflecting mirror in the optical path direction without changing the optical axis.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1571991U JPH04113057U (en) | 1991-03-19 | 1991-03-19 | contact angle measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1571991U JPH04113057U (en) | 1991-03-19 | 1991-03-19 | contact angle measuring device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04113057U true JPH04113057U (en) | 1992-10-01 |
Family
ID=31902859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1571991U Pending JPH04113057U (en) | 1991-03-19 | 1991-03-19 | contact angle measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04113057U (en) |
-
1991
- 1991-03-19 JP JP1571991U patent/JPH04113057U/en active Pending
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