JPH0411271U - - Google Patents

Info

Publication number
JPH0411271U
JPH0411271U JP5205190U JP5205190U JPH0411271U JP H0411271 U JPH0411271 U JP H0411271U JP 5205190 U JP5205190 U JP 5205190U JP 5205190 U JP5205190 U JP 5205190U JP H0411271 U JPH0411271 U JP H0411271U
Authority
JP
Japan
Prior art keywords
valve
variable capacity
gate valve
vacuum
processing chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5205190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5205190U priority Critical patent/JPH0411271U/ja
Publication of JPH0411271U publication Critical patent/JPH0411271U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP5205190U 1990-05-18 1990-05-18 Pending JPH0411271U (US07655688-20100202-C00109.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5205190U JPH0411271U (US07655688-20100202-C00109.png) 1990-05-18 1990-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5205190U JPH0411271U (US07655688-20100202-C00109.png) 1990-05-18 1990-05-18

Publications (1)

Publication Number Publication Date
JPH0411271U true JPH0411271U (US07655688-20100202-C00109.png) 1992-01-30

Family

ID=31572028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5205190U Pending JPH0411271U (US07655688-20100202-C00109.png) 1990-05-18 1990-05-18

Country Status (1)

Country Link
JP (1) JPH0411271U (US07655688-20100202-C00109.png)

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