JPH0410999U - - Google Patents

Info

Publication number
JPH0410999U
JPH0410999U JP5200090U JP5200090U JPH0410999U JP H0410999 U JPH0410999 U JP H0410999U JP 5200090 U JP5200090 U JP 5200090U JP 5200090 U JP5200090 U JP 5200090U JP H0410999 U JPH0410999 U JP H0410999U
Authority
JP
Japan
Prior art keywords
vacuum chamber
plate
support structure
base plate
spring plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5200090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5200090U priority Critical patent/JPH0410999U/ja
Publication of JPH0410999U publication Critical patent/JPH0410999U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
JP5200090U 1990-05-18 1990-05-18 Pending JPH0410999U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5200090U JPH0410999U (zh) 1990-05-18 1990-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5200090U JPH0410999U (zh) 1990-05-18 1990-05-18

Publications (1)

Publication Number Publication Date
JPH0410999U true JPH0410999U (zh) 1992-01-29

Family

ID=31571933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5200090U Pending JPH0410999U (zh) 1990-05-18 1990-05-18

Country Status (1)

Country Link
JP (1) JPH0410999U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014075294A (ja) * 2012-10-05 2014-04-24 Toshiba Corp 荷電粒子偏向装置、荷電粒子照射装置、荷電粒子加速器、及び、荷電粒子偏向装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014075294A (ja) * 2012-10-05 2014-04-24 Toshiba Corp 荷電粒子偏向装置、荷電粒子照射装置、荷電粒子加速器、及び、荷電粒子偏向装置の製造方法

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